MEMS Sensors and Actuators: Design, Fabrication and Applications

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".

Deadline for manuscript submissions: 30 June 2024 | Viewed by 2059

Special Issue Editors

University of Michigan–Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai 200240, China
Interests: micro-electromechanical systems (MEMS); sensors and actuators
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Department of Micro/Nano Electronics, Shanghai Jiao Tong University, Shanghai 200240, China
Interests: flexible piezoeletric microelectromechanical system (flexble piezo-MEMS); piezoelectric dynamics; hydroelectrodynamics; mechanical energy harvesting and sensing; self-powered systems for healthcare monitoring; artificial Intelligence & Internet
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Guest Editor
Hochschule für Technik und Wirtschaft Berlin, University of Applied Sciences, Treskowallee 8, 10318 Berlin, Germany
Interests: microsystems; piezoresistive sensor; sensor for harsh environments; SOI and SiC-based sensor; accelerometers; gas sensor; design and simulation of microsystems; graphene; material research; graphene-based sensors; biosensors; printed sensors; 2D sensors; technologies
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

Micro-electromechanical systems (MEMS) are miniature, multi-functional smart microsystems consisting of sensors, actuators and microelectronics, typically made by micromachining technologies. Sensors are devices that can measure a parameter of interest, typically non-electrical, and generate an electrical signal that can be processed by microprocessors. On the other hand, actuators are devices that convert one signal into some other form of signal that can delivered to an environment of interest. Any application which requires interfacing between an electronic system and the non-electronic external world will require sensors and actuators. Since the last two decades, MEMS sensors and actuators have been finding new applications as most systems are required to become smaller, lower power and portable, and this trend is keeping gaining speed.

A few key application areas include: (1) low-power, hand-held smart electronics, (2) micromachined accelerometers for automobiles, (3) high-definition portable display systems based on micro mirrors, (4) micromechanically manipulated optical systems on a chip, (5) biochip for DNA analysis and cell assay, (6) implantable and wearable bioMEMS, (7) portable, hand-held mass spectrometry, (8) desktop atomic force microscopy, (9) fully-integrated, low-power MEMS-based wireless transceivers, etc.

The objective of this Special Issue is to present the most recent significant progress in the field of MEMS sensors and actuators. All authors from academia and industry are kindly invited to share their research innovations in this field. We particularly welcome review articles and original research papers aiming to the related key issues of basic research, devices and technology development, and practical application of MEMS sensors and actuators.

This Special Issue invites but is not limited to contributions in the following topics:

  • Novel transducer concepts;
  • New design, modeling and simulation techniques of MEMS;
  • New fabrication technology of complex micromechanical structures;
  • Reliability of sensors and actuators in harsh environment;
  • Advanced calibration or control of nonlinear actuators;
  • Flexible and soft microstructured sensors and actuators;
  • Practical application of MEMS sensors and actuators in new scenarios;
  • Review articles on MEMS sensors and actuators.

Dr. Lei Shao
Dr. Zhiran Yi
Prof. Dr. Ha Duong Ngo
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • MEMS;
  • Sensors;
  • Actuators;
  • Transducers;
  • Microsystems;
  • Microfabrication.

Published Papers (2 papers)

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Research

14 pages, 3937 KiB  
Article
Optimized Design of Lithium Niobate Tuning Forks for the Measurement of Fluid Characteristic Parameters
by Man Tang, Dehua Chen, Mi Zhang, Feng Jiang and Yu Wang
Micromachines 2023, 14(12), 2138; https://doi.org/10.3390/mi14122138 - 22 Nov 2023
Viewed by 751
Abstract
The unique double-cantilever beam structure and vibration mode of the tuning fork enable the measuring of fluid density and viscosity synchronously in a decoupling manner. Therefore, it is widely employed in oil and gas development and in petrochemical, food, textile, and other industries. [...] Read more.
The unique double-cantilever beam structure and vibration mode of the tuning fork enable the measuring of fluid density and viscosity synchronously in a decoupling manner. Therefore, it is widely employed in oil and gas development and in petrochemical, food, textile, and other industries. In this paper, quality factors are used to characterize the energy losses of lithium niobate tuning forks when vibrating in a fluid, and the influence parameters, such as length, width, and thickness of the tuning fork arm, etc., of different quality factors are examined with a focus on the viscous quality factor of the fluid. The optimized design of lithium niobate tuning fork dimensions is carried out on this premise, and the analytical solution of the optimal dimension of the lithium niobate tuning fork in the air is obtained. Secondly, the optimal dimension of the lithium niobate tuning fork in fluids is given out by finite element simulation, and the sensitivity of the optimized fork to the viscosity of fluids is investigated. The results show that the optimized tuning fork has a higher quality factor, and thus has a larger parameter measurement range as well as being more sensitive to the change in the fluid density and viscosity. Therefore, the results are of great significance for guiding the preparation and practical application of lithium niobate tuning forks. Full article
(This article belongs to the Special Issue MEMS Sensors and Actuators: Design, Fabrication and Applications)
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12 pages, 4246 KiB  
Communication
A Porous Nanostructured ZnO Layer for Ultraviolet Sensing with Quartz Crystal Microbalance Technique
by Abil S. Asvarov, Arsen E. Muslimov, Soslan S. Makhmudov and Vladimir M. Kanevsky
Micromachines 2023, 14(8), 1584; https://doi.org/10.3390/mi14081584 - 11 Aug 2023
Viewed by 890
Abstract
Porous films of metals and metal oxides have gained growing attention as potential materials for use in applications that require large, specific surface areas, such as sensors, supercapacitors, and batteries. In this study, a “black-metal”-like porous Zn–ZnO composite layer was grown by room [...] Read more.
Porous films of metals and metal oxides have gained growing attention as potential materials for use in applications that require large, specific surface areas, such as sensors, supercapacitors, and batteries. In this study, a “black-metal”-like porous Zn–ZnO composite layer was grown by room temperature co-sputtering of Zn metal and ZnO:Ga (3 at/%) ceramic targets. Following deposition, a porous ZnO layer was obtained by a subsequent thermal annealing process at 400 °C in air. The morphology and structural properties of the obtained porous layered objects were analyzed. The porosity and chemical characteristics of the nanostructured ZnO layer obtained with the method herein described make it suitable to be used as a sensitivity-enhancing active layered element in quartz crystal microbalance (QCM)-based ultraviolet (UV) sensors. The prepared resonant ZnO/QCM sensors under UV radiation exhibited maximum shift up to 35 Hz for several “on-off” UV cycles, excellent response, and recovery times of 11 and 12 s, respectively. Full article
(This article belongs to the Special Issue MEMS Sensors and Actuators: Design, Fabrication and Applications)
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