Special Issue "MEMS Accelerometers"
Deadline for manuscript submissions: closed (31 July 2018) | Viewed by 67409
A printed edition of this Special Issue is available here.
Interests: photonics; optoelectronics; broadband circuits; sensors; opto-MEMS
Interests: nano-scale integrated circuits and systems; MEMS-CMOS co-design; sensor array processing; micro power sources; photonics CAD
Interests: microsystems; piezoresistive sensor; sensor for harsh environments; SOI and SiC-based sensor; accelerometers; gas sensor; design and simulation of microsystems; graphene; material research; graphene-based sensors; biosensors; printed sensors; 2D sensors; technologies
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Micro-Electro-Mechanical Systems (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirement of compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS Accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS Accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include: capacitive, piezoelectric, thermal, tunneling, and optical. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low-cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize Opto-Mechanical Accelerometers, such as chip-scale integration, scaling, low bandwidth, etc.
This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on:
- Novel designs, fabrication platform, characterization, optimization, and modeling of MEMS accelerometers.
- Alternative transduction techniques with special emphasis on opto-mechanical sensing.
- Novel applications employing MEMS Accelerometers for consumer electronics, industries, medicine, entertainment, and navigation, etc.
- Multi-physics design tools and methodologies, including MEMS-electronics co-design.
- Novel accelerometer technologies and 9DoF IMU integration.
- Multi-accelerometer platforms and their data fusion.
Prof. Mahmoud Rasras
Prof. Ibrahim (Abe) M. Elfadel
Prof. Dr. Ha Duong Ngo
Manuscript Submission Information
Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.
Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.
Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.
- Inertial sensors
- MEMS accelerometers
- Optical accelerometers
- Novel Fabrication Platforms
- Multi-axis Accelerometers
- MEMS accelerometer applications
- MEMS accelerometer multi-physics modeling