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Micromachines
Special Issues
MEMS Gyroscopes
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MEMS Gyroscopes

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".

Deadline for manuscript submissions: closed (30 April 2023) | Viewed by 5158

Special Issue Editors

Dr. Yusheng Wang

E-Mail Website
Guest Editor
SiTime Corporation, Santa Clara, CA, USA
Interests: MEMS; resonators; gyroscope design; inertial sensors testing; IMU calibration
Prof. Dr. Ha Duong Ngo

E-Mail Website
Guest Editor
Hochschule für Technik und Wirtschaft Berlin, University of Applied Sciences, Treskowallee 8, 10318 Berlin, Germany
Interests: microsystems; piezoresistive sensor; sensor for harsh environments; SOI and SiC-based sensor; accelerometers; gas sensor; design and simulation of microsystems; graphene; material research; graphene-based sensors; biosensors; printed sensors; 2D sensors; technologies
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

Over the past 30 years, MEMS gyroscope technology has been the subject of more and more research and industrial focus. It provides a cost-effective method for improving directional estimation and overall accuracy in the navigation systems by reducing the cost, size, weight, and power (C-SWaP) of the device compared to traditional mechanical spinning gyroscopes and ring laser gyroscopes, while preserving a similar level of performance in terms of noise and stability. Some of the most successful examples include MEMS tuning fork gyroscopes (TFG) and vibrating ring gyroscopes (VRG). Furthermore, new materials, such as silicon carbide, diamond, and fused quartz, have been explored to achieve better performance. Micro-glassblowing technology has enabled 3D shell gyroscopes and nuclear magnetic resonance (NMR) gyroscopes. All these new developments have greatly pushed the boundaries of the current MEMS gyroscope technology.  Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on: (1) novel gyroscopic phenomena, mechanism, modeling, and MEMS implementation; (2) systems and electronics that control MEMS gyroscopes for better performances; and (3) new developments of applying MEMS gyroscopes in consumer, industrial, medical, military, or space applications.

Dr. Yusheng Wang
Prof. Dr. Ha Duong Ngo
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • MEMS gyroscope
  • tuning fork gyroscopes
  • vibrating ring gyroscopes
  • magnetic resonance (NMR) gyroscopes

Published Papers (3 papers)

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Research

28 pages, 8900 KiB  
Article
Influence of Electrostatic Force Nonlinearity on the Sensitivity Performance of a Tapered Beam Micro-Gyroscope Based on Frequency Modulation
by Kunpeng Zhang, Jianwei Xie, Shuying Hao, Qichang Zhang and Jingjing Feng
Micromachines 2023, 14(1), 211; https://doi.org/10.3390/mi14010211 - 14 Jan 2023
Cited by 5 | Viewed by 1195
Abstract
Electrostatic force nonlinearity is widely present in MEMS systems, which could impact the system sensitivity performance. The Frequency modulation (FM) method is proposed as an ideal solution to solve the problem of environmental fluctuation stability. The effect of electrostatic force nonlinearity on the [...] Read more.
Electrostatic force nonlinearity is widely present in MEMS systems, which could impact the system sensitivity performance. The Frequency modulation (FM) method is proposed as an ideal solution to solve the problem of environmental fluctuation stability. The effect of electrostatic force nonlinearity on the sensitivity performance of a class of FM micro-gyroscope is investigated. The micro-gyroscope consists of a tapered cantilever beam with a tip mass attached to the end. Considering the case of unequal width and thickness, the motion equations of the system are derived by applying Hamilton’s principle. The differential quadrature method (DQM) was used to analyze the micro-gyroscope’s static deflection, pull-in voltage, and natural frequency characteristics. We observed that from the onset of rotation, the natural frequencies of the drive and sense modes gradually split into a pair of natural frequencies that were far from each other. The FM method directly measures the angular velocity by tracking the frequency of the drive and sense modes. Then, based on the linear system, the reduced-order model was used to analyze the influence of the shape factor and DC voltage on the sensitivity performance. Most importantly, the nonlinear frequency of system was obtained using the invariant manifold method (IMM). The influence of electrostatic force nonlinearity on the performance of the FM micro-gyroscope was investigated. The results show that the different shape factors of width and thickness, as well as the different DC voltages along the drive and sense directions, break the symmetry of the micro-gyroscope and reduce the sensitivity of the system. The sensitivity has a non-linear trend with the rotation speed. The DC voltage is proportional to the electrostatic force nonlinearity coefficient. As the DC voltage gradually increases, the nonlinearity is enhanced, resulting in a significant decrease in the sensitivity of the micro-gyroscope. It is found that the negative shape factor (width and thickness gradually increase along the beam) can effectively restrain the influence of electrostatic force nonlinearity, and a larger dynamic detection range can be obtained. Full article
(This article belongs to the Special Issue MEMS Gyroscopes)
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8 pages, 11188 KiB  
Article
Design of a Multiple Folded-Beam Disk Resonator with High Quality Factor
by Xiaopeng Sun, Xin Zhou, Lei Yu, Kaixuan He, Dingbang Xiao and Xuezhong Wu
Micromachines 2022, 13(9), 1468; https://doi.org/10.3390/mi13091468 - 04 Sep 2022
Cited by 3 | Viewed by 1856
Abstract
This paper proposes a new multiple folded-beam disk resonator whose thermoelastic quality factor is significantly improved by appropriately reducing the beam width and introducing integral-designed lumped masses. The quality factor of the fabricated resonator with (100) single crystal silicon reaches 710 k, proving [...] Read more.
This paper proposes a new multiple folded-beam disk resonator whose thermoelastic quality factor is significantly improved by appropriately reducing the beam width and introducing integral-designed lumped masses. The quality factor of the fabricated resonator with (100) single crystal silicon reaches 710 k, proving to be a record in silicon disk resonators. Meanwhile, a small initial frequency split of the order-3 working modes endows the resonator with great potential for microelectromechanical systems (MEMS) gyroscopes application. Moreover, the experimental quality factor of resonators with different beam widths and relevant temperature experiment indicate that the dominating damping mechanism of the multiple folded-beam disk resonator is no longer thermoelastic damping. Full article
(This article belongs to the Special Issue MEMS Gyroscopes)
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13 pages, 4124 KiB  
Article
A Novel Mechanical Frequency Tuning Method Based on Mass-Stiffness Decoupling for MEMS Gyroscopes
by Chuanfu Chen, Kai Wu, Kuo Lu, Qingsong Li, Chengxiang Wang, Xuezhong Wu, Beizhen Wang and Dingbang Xiao
Micromachines 2022, 13(7), 1052; https://doi.org/10.3390/mi13071052 - 30 Jun 2022
Cited by 7 | Viewed by 1481
Abstract
MEMS gyroscopes play an important role in inertial navigation measurements, which mainly works in n = 2 mode. However, mode matching is the basis for high-precision detection, which can improve the sensitivity, resolution, and signal-to-noise ratio of the gyroscopes. An initial frequency split [...] Read more.
MEMS gyroscopes play an important role in inertial navigation measurements, which mainly works in n = 2 mode. However, mode matching is the basis for high-precision detection, which can improve the sensitivity, resolution, and signal-to-noise ratio of the gyroscopes. An initial frequency split is inevitably generated during the manufacturing process. There are two methods to eliminate the frequency split and to achieve mode matching for the gyroscopes, which are electrostatic tuning and mechanical trimming, respectively. In this paper, we report a novel ring MEMS resonator and a novel method of mechanical frequency tuning. The most prominent characteristic of the resonator is that 16 raised mass blocks are increased in the circumferential positions of the ring uniformly. This structural design can achieve mass-stiffness decoupling, which means that punching holes on the mass blocks only affects the mass distribution but the stiffness is almost unchanged for the resonator. We verify the mass-stiffness decoupling by way of comparing the simulation with the conventional resonator. In addition, we put up an online tuning platform based on a femtosecond laser and reduce a resonator’s frequency split from 23.3 Hz to 0.4 Hz, which reveals that the frequency split is linearly related to the removed mass. These findings will have a referential significance for other transducers. Full article
(This article belongs to the Special Issue MEMS Gyroscopes)
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