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Micromachines
Special Issues
Advanced MEMS and Optical System Assembly and Integration
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Advanced MEMS and Optical System Assembly and Integration

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E：Engineering and Technology".

Deadline for manuscript submissions: closed (31 March 2022) | Viewed by 14429

Special Issue Editors

Prof. Dr. Jianping Chen

E-Mail Website
Guest Editor
The State Key Laboratory on Fiber Optic Local Area Communication Networks and Advanced Optical Communication Systems, Shanghai Jiao Tong University, Shanghai 200240, China
Interests: silicon photonic devices and integration; photonic signal processing and applications; transmission, switching and sensing photonics
Special Issues, Collections and Topics in MDPI journals
Dr. Di Sun

E-Mail Website
Guest Editor
Microsoft, Washington, DC 98052, USA
Interests: MEMS; microfluidics; AR/VR; haptics; self-assembly
Dr. Yu Jin

E-Mail Website
Guest Editor
Department of Electrical & Computer Engineering, University of Washington, Seattle, WA 98105, USA
Interests: Process/Device modeling; Design Technology Co-Optimization (DTCO); TCAD Simulation; CMOS Image Sensor

Special Issue Information

Dear Colleagues,

The research and development of advanced MEMS and optical systems has attracted attention from both academia and industry. They are tremendously valuable for enabling new applications including augmented reality/mixed reliability (AR/MR), autonomous driving systems (ADS), unmanned aerial vehicles (UAV), optical image stabilization (OIS) and robotic vision. The whole system requires the integration of multiple components, such as MEMS scanning mirrors, laser diodes, micro-LED arrays, waveguides, image sensors, and time-of-flight (ToF) sensors. There is a strong need to develop advanced assembly and packaging processes for the individual component or large component arrays. Meanwhile, new ideas of system-level co-design and optical mechanical architecture are necessary to improve performance, miniaturization, yield, and reliability. In this Special Issue, we would like to invite you to contribute research papers, communications, and review articles related to advanced MEMS and optical system assembly and integration architectures, designs, processes, testing approaches and simulations.

Prof. Dr. Jianping Chen
Dr. Di Sun
Dr. Yu Jin
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • Micro-led array assembly
  • Self-assembly/fluidic assembly
  • Pick and place
  • Flip-chip bonding
  • Adhesives/ACF
  • 3D assembly
  • TSV, hybrid bond
  • Multi-chip module/chiplet
  • Optomechanical alignment
  • Encapsulation
  • Reliability
  • Simulation

Published Papers (5 papers)

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Research

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10 pages, 3240 KiB  
Article
Vari-Focal Light Field Camera for Extended Depth of Field
by Hyun Myung Kim, Min Seok Kim, Sehui Chang, Jiseong Jeong, Hae-Gon Jeon and Young Min Song
Micromachines 2021, 12(12), 1453; https://doi.org/10.3390/mi12121453 - 26 Nov 2021
Cited by 9 | Viewed by 3260
Abstract
The light field camera provides a robust way to capture both spatial and angular information within a single shot. One of its important applications is in 3D depth sensing, which can extract depth information from the acquired scene. However, conventional light field cameras [...] Read more.
The light field camera provides a robust way to capture both spatial and angular information within a single shot. One of its important applications is in 3D depth sensing, which can extract depth information from the acquired scene. However, conventional light field cameras suffer from shallow depth of field (DoF). Here, a vari-focal light field camera (VF-LFC) with an extended DoF is newly proposed for mid-range 3D depth sensing applications. As a main lens of the system, a vari-focal lens with four different focal lengths is adopted to extend the DoF up to ~15 m. The focal length of the micro-lens array (MLA) is optimized by considering the DoF both in the image plane and in the object plane for each focal length. By dividing measurement regions with each focal length, depth estimation with high reliability is available within the entire DoF. The proposed VF-LFC is evaluated by the disparity data extracted from images with different distances. Moreover, the depth measurement in an outdoor environment demonstrates that our VF-LFC could be applied in various fields such as delivery robots, autonomous vehicles, and remote sensing drones. Full article
(This article belongs to the Special Issue Advanced MEMS and Optical System Assembly and Integration)
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8 pages, 2133 KiB  
Article
Reverse Design of On-Chip Terahertz Demultiplexers
by Guofeng Zhu, Feng Huang, Zhenrong Dai, Xuewei Ju, Shuncong Zhong and Xiangfeng Wang
Micromachines 2021, 12(9), 1093; https://doi.org/10.3390/mi12091093 - 10 Sep 2021
Cited by 4 | Viewed by 1651
Abstract
The reverse design method (RDM) is a frontier direction in the optical research field. In this work, RDM is applied to the design of terahertz demultiplexers, including two-port and three-port terahertz demultiplexers, with areas of 3 mm × 3 mm and 5 mm [...] Read more.
The reverse design method (RDM) is a frontier direction in the optical research field. In this work, RDM is applied to the design of terahertz demultiplexers, including two-port and three-port terahertz demultiplexers, with areas of 3 mm × 3 mm and 5 mm × 5 mm, respectively. The Finite-Difference Time-Domain (FDTD) simulation results show that the terahertz waves at frequencies of 0.5 THz and 0.417 THz can be well separated by the two-port demultiplexer, and the transmittances of the two outputs reach as high as 0.75 after bandwidth optimization. Meanwhile, the three-port terahertz demultiplexer can have terahertz waves separated from three Ports, and the crosstalk between adjacent channels is less than −18 dB. Full article
(This article belongs to the Special Issue Advanced MEMS and Optical System Assembly and Integration)
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18 pages, 7494 KiB  
Article
Miniaturized Portable Total Phosphorus Analysis Device Based on Photocatalytic Reaction for the Prevention of Eutrophication
by Dong Geon Jung, Maeum Han, Seung Deok Kim, Soon Yeol Kwon, Jin-Beom Kwon, Junyeop Lee, Seong Ho Kong and Daewoong Jung
Micromachines 2021, 12(9), 1062; https://doi.org/10.3390/mi12091062 - 31 Aug 2021
Cited by 2 | Viewed by 2075
Abstract
Phosphorus (P) is one of the most important elements in the aquatic ecosystem, but its overuse causes eutrophication, which is a serious issue worldwide. In this study, we developed a miniaturized portable total phosphorus (TP) analysis device by integrating a TP sensor with [...] Read more.
Phosphorus (P) is one of the most important elements in the aquatic ecosystem, but its overuse causes eutrophication, which is a serious issue worldwide. In this study, we developed a miniaturized portable total phosphorus (TP) analysis device by integrating a TP sensor with a photocatalyst to pretreat analyte and optical components (LED and photodetector) to measure the absorbance of the blue-colored analyte for real-time TP monitoring and prevention of eutrophication. The size of the miniaturized portable TP analysis device is about 10.5 cm × 9.5 cm × 8 cm. Analyte-containing phosphorus was pretreated and colored blue by colorizing agent as a function of the phosphorus concentration. Absorbance of the blue-colored analyte was estimated by the LED and the photodetector such that the phosphorus concentration was quantitatively measured. This device can obtain a wide linear response range from 0.5 mg/L to 2.0 mg/L (R2 = 0.97381), and its performance can be improved by increasing the intensity of the UV light emitted from the LED array. Consequently, the performance of this miniaturized portable TP analysis device was found to be similar to that of a conventional TP analysis system; thus, it can be used in automated in situ TP analysis. Full article
(This article belongs to the Special Issue Advanced MEMS and Optical System Assembly and Integration)
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9 pages, 2300 KiB  
Communication
Large-Area and Ultrathin MEMS Mirror Using Silicon Micro Rim
by Myeong-Su Ahn, Jaehun Jeon, Kyung-Won Jang and Ki-Hun Jeong
Micromachines 2021, 12(7), 754; https://doi.org/10.3390/mi12070754 - 26 Jun 2021
Cited by 5 | Viewed by 2749
Abstract
A large-area and ultrathin MEMS (microelectromechanical system) mirror can provide efficient light-coupling, a large scanning area, and high energy efficiency for actuation. However, the ultrathin mirror is significantly vulnerable to diverse film deformation due to residual thin film stresses, so that high flatness [...] Read more.
A large-area and ultrathin MEMS (microelectromechanical system) mirror can provide efficient light-coupling, a large scanning area, and high energy efficiency for actuation. However, the ultrathin mirror is significantly vulnerable to diverse film deformation due to residual thin film stresses, so that high flatness of the mirror is hardly achieved. Here, we report a MEMS mirror of large-area and ultrathin membrane with high flatness by using the silicon rim microstructure (SRM). The ultrathin MEMS mirror with SRM (SRM-mirror) consists of aluminum (Al) deposited silicon nitride membrane, bimorph actuator, and the SRM. The SRM is simply fabricated underneath the silicon nitride membrane, and thus effectively inhibits the tensile stress relaxation of the membrane. As a result, the membrane has high flatness of 10.6 m−1 film curvature at minimum without any deformation. The electrothermal actuation of the SRM-mirror shows large tilting angles from 15° to −45° depending on the applied DC voltage of 0~4 VDC, preserving high flatness of the tilting membrane. This stable and statically actuated SRM-mirror spurs diverse micro-optic applications such as optical sensing, beam alignment, or optical switching. Full article
(This article belongs to the Special Issue Advanced MEMS and Optical System Assembly and Integration)
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Review

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21 pages, 6345 KiB  
Review
A Review of Optical Imaging Technologies for Microfluidics
by Pan Zhou, Haipeng He, Hanbin Ma, Shurong Wang and Siyi Hu
Micromachines 2022, 13(2), 274; https://doi.org/10.3390/mi13020274 - 08 Feb 2022
Cited by 13 | Viewed by 3763
Abstract
Microfluidics can precisely control and manipulate micro-scale fluids, and are also known as lab-on-a-chip or micro total analysis systems. Microfluidics have huge application potential in biology, chemistry, and medicine, among other fields. Coupled with a suitable detection system, the detection and analysis of [...] Read more.
Microfluidics can precisely control and manipulate micro-scale fluids, and are also known as lab-on-a-chip or micro total analysis systems. Microfluidics have huge application potential in biology, chemistry, and medicine, among other fields. Coupled with a suitable detection system, the detection and analysis of small-volume and low-concentration samples can be completed. This paper reviews an optical imaging system combined with microfluidics, including bright-field microscopy, chemiluminescence imaging, spectrum-based microscopy imaging, and fluorescence-based microscopy imaging. At the end of the article, we summarize the advantages and disadvantages of each imaging technology. Full article
(This article belongs to the Special Issue Advanced MEMS and Optical System Assembly and Integration)
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