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Micromachines
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Micro and Nano Machining Processes
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Micro and Nano Machining Processes

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E：Engineering and Technology".

Deadline for manuscript submissions: closed (31 March 2021) | Viewed by 27743

Special Issue Editor

Dr. Muhammad Pervej Jahan

E-Mail Website
Guest Editor
Department of Mechanical and Manufacturing Engineering, Miami University, Oxford, OH 45056, USA
Interests: micromachining; micro-electro-discharge machining (micro-EDM); hybrid micromachining; nanomachining; non-conventional machining; additive manufacturing (AM); post-processing of AM parts; manufacturing processes
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

I would like to invite you to submit your unpublished research work on any areas of micro and nano machining processes to this Special Issue. With the increasing trend of miniaturization and growth of micro-electro-mechanical systems (MEMS) and nano-electro-mechanical systems (NEMS) industries, micro and nano machining processes have become an integral area of advanced manufacturing processes. Micro and nano machining processes have found important applications in the field of sensors, photovoltaics, drug delivery, microfluidics, micro mold fabrication, etc. Being able to machine a wide range of materials and geometry, micro and nano machining are found to play an important role where lithography-based micro and nanofabrication processes face challenges. Micro and nano machining processes can be tool-based or beam-based processes offering both contact and non-contact material removal mechanisms, and have their own advantages and limitations. Some of the tool-based micromachining includes micro-milling, micro-turning, and micro-grinding, whereas tool-based nanomachining processes are mostly based on scanning probe microscopy (SPM). Micro-electro-discharge machining (micro-EDM) and micro-electrochemical machining (micro-ECM) are two non-contact tool-based micromachining processes used for machining difficult-to-cut materials. Laser, electron beam, or ion beam based micro and nano machining processes are used extensively because of being faster processes and their capability of machining a wide range of materials.

The goal of this Special Issue is to encompass recent significant studies and advances in the areas of micro and nano machining processes using both beam and tool-based processes. Experimental investigations, analytical modeling, and numerical simulations in the areas of micro and nano machining processes are of interest. Process development, monitoring, and control of various micro and nano machining processes fall within the scope of this Special Issue. Specific topics of interest include, but are not limited to the following:

  • Conventional micromachining processes, i.e., micro-turning, micro-milling, micro-grinding, etc.
  • Non-conventional micromachining processes, i.e., micro-EDM, micro-ECM, micro-ECDM, micro-AWJM, etc.
  • Hybrid and/or assistive micro-machining processes, i.e., combined laser and micro-EDM, simultaneous micro-EDM and micro-ECM processes, etc.
  • Scanning probe-based nano machining processes, i.e., AFM-based nano-machining, AFM or nano-indentation based patterning, nano-scratching, etc.
  • Beam-based micro and nano machining processes, i.e., fused beam machining, electron beam machining, laser beam machining, etc.

Dr. Muhammad Pervej Jahan
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • Micromachining
  • Nanomachining
  • Tool-based micromachining
  • SPM-based nanomachining
  • Beam-based nanomachining
  • Conventional micromachining
  • Non-conventional micromachining
  • Hybrid micromachining

Related Special Issues

Published Papers (10 papers)

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Research

18 pages, 7871 KiB  
Article
On-Line Compensation for Micromilling of High-Aspect-Ratio Straight Thin Walls
by Yang Li, Xiang Cheng, Siying Ling and Guangming Zheng
Micromachines 2021, 12(6), 603; https://doi.org/10.3390/mi12060603 - 23 May 2021
Cited by 5 | Viewed by 1774
Abstract
In order to improve the machining quality and reduce the dimensional errors of micro high-aspect-ratio straight thin walls, the on-line cutting parameter compensation device has been introduced and corresponding micromilling processes have been investigated. Layered milling strategies for the micromilling of thin walls [...] Read more.
In order to improve the machining quality and reduce the dimensional errors of micro high-aspect-ratio straight thin walls, the on-line cutting parameter compensation device has been introduced and corresponding micromilling processes have been investigated. Layered milling strategies for the micromilling of thin walls have been modeled and simulated for thin walls with different thicknesses based on the finite element method. The radial cutting parameters compensation method is adopted to compensate the thin wall deformation by raising the radial cutting parameters since the thin wall deformation make the actual radial cutting parameters smaller than nominal ones. The experimental results show that the dimensional errors of the thin wall have been significantly reduced after the radial cutting parameter compensation. The average relative dimensional error is reduced from 6.9% to 2.0%. Moreover, the fabricated thin walls keep good shape formation. The reduction of the thin wall dimensional error shows that the simulation results are reliable, which has important guiding significance for the improvement of thin wall machining quality, especially the improvement of dimensional accuracy. The experimental results show that the developed device and the machining strategy can effectively improve the micromilling quality of thin walls. Full article
(This article belongs to the Special Issue Micro and Nano Machining Processes)
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10 pages, 2709 KiB  
Article
An Investigation on Internal Material Loads and Modifications in Precision Turning of Steel 42CrMo4
by Tjarden Zielinski, Andrey Vovk, Oltmann Riemer and Bernhard Karpuschewski
Micromachines 2021, 12(5), 526; https://doi.org/10.3390/mi12050526 - 06 May 2021
Cited by 6 | Viewed by 1728
Abstract
The functional properties of a workpiece are determined by a modification of the surface and subsurface materials. In this work, the correlation between thermo-mechanical material loads and the modification of the residual stresses is presented. While the resulting residual stresses were measured by [...] Read more.
The functional properties of a workpiece are determined by a modification of the surface and subsurface materials. In this work, the correlation between thermo-mechanical material loads and the modification of the residual stresses is presented. While the resulting residual stresses were measured by X-ray diffraction after machining experiments, the material loads were determined using a process simulation. The experimental data (measured process forces and results from previous experiments) are used to validate the simulation, which is then applied to calculate the internal thermo-mechanical loads of the maximal temperature and the equivalent von-Mises-stresses per volume element during the machining experiments. In conclusion, a higher depth impact of mechanical loads compared to a lower depth impact of thermal loads in precision machining is observed. For the sake of novelty, the thermo-mechanical loads were plotted and interpreted in a three-dimensional fashion. Finally, cross sections of this mutual representation at certain constant material loads—thermal and mechanical—result in a process signature, which can prospectively improve the prediction of functional workpiece properties. Full article
(This article belongs to the Special Issue Micro and Nano Machining Processes)
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14 pages, 3611 KiB  
Article
Positioning Accuracy Determination of the Servo Axes for Grinding Wavy-Tilt-Dam Seals Using a Four-Axis Grinder
by Guang Feng and Xiaobao Ma
Micromachines 2021, 12(4), 388; https://doi.org/10.3390/mi12040388 - 02 Apr 2021
Cited by 2 | Viewed by 1909
Abstract
The wavy-tilt-dam (WTD) seal is considered to be one of the ideal sealing patterns used in nuclear reactor coolant pumps (RCPs). Grinding such seals with a four-axis grinder had been proposed and six grinding implementation strategies were described in our previous studies. However, [...] Read more.
The wavy-tilt-dam (WTD) seal is considered to be one of the ideal sealing patterns used in nuclear reactor coolant pumps (RCPs). Grinding such seals with a four-axis grinder had been proposed and six grinding implementation strategies were described in our previous studies. However, another important issue is to determine the positioning accuracy of each servo axis so that the high-precision moving components can be selected properly. In the present paper, the positioning accuracy analysis is carried out to seek a balance between the manufacturing cost and the accuracy requirements. First, a geometric model is established for investigating the error sensitivity of each axis and setting reasonable accuracy allocation of the four axes. Subsequently, the combined influence of all four axes is assessed based on multi-body system (MBS) theory and homogeneous transformation matrix (HTM). According to the results calculated, positioning errors of the X-axis, Z-axis, B-axis, and C-axis within ±10 μm, ±0.1 μm, ±1 arcsec and ±60 arcsec are acceptable, respectively. Meanwhile, the form error calculated of the ground wavy face is no more than 109.74 nm. It is indicated that the accuracy level of the moving components is achievable by modern manufacturing techniques. The present paper is expected to serve as a theoretical basis for the design and development of the four-axis grinder. Full article
(This article belongs to the Special Issue Micro and Nano Machining Processes)
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12 pages, 4733 KiB  
Article
Cutting Force Prediction Models by FEA and RSM When Machining X56 Steel with Single Diamond Grit
by Lan Zhang, Xianbin Sha, Ming Liu, Liquan Wang and Yongyin Pang
Micromachines 2021, 12(3), 326; https://doi.org/10.3390/mi12030326 - 19 Mar 2021
Cited by 3 | Viewed by 2114
Abstract
In the field of underwater emergency maintenance, submarine pipeline cutting is generally performed by a diamond wire saw. The process, in essence, involves diamond grits distributed on the surface of the beads cutting X56 pipeline steel bit by bit at high speed. To [...] Read more.
In the field of underwater emergency maintenance, submarine pipeline cutting is generally performed by a diamond wire saw. The process, in essence, involves diamond grits distributed on the surface of the beads cutting X56 pipeline steel bit by bit at high speed. To find the effect of the different parameters (cutting speed, coefficient of friction and depth of cut) on cutting force, the finite element (FEA) method and response surface method (RSM) were adopted to obtain cutting force prediction models. The former was based on 64 simulations; the latter was designed according to DoE (Design of Experiments). Confirmation experiments were executed to validate the regression models. The results indicate that most of the prediction errors were within 10%, which were acceptable in engineering. Based on variance analyses of the RSM models, it could be concluded that the depth of the cut played the most important role in determining the cutting force and coefficient the of friction was less influential. Despite making little direct contribution to the cutting force, the cutting speed is not supposed to be high for reducing the coefficient of friction. The cutting force models are instructive in manufacturing the diamond beads by determining the protrusion height of the diamond grits and the future planning of the cutting parameters. Full article
(This article belongs to the Special Issue Micro and Nano Machining Processes)
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10 pages, 2950 KiB  
Article
Research on Precision Blanking Process Design of Micro Gear Based on Piezoelectric Actuator
by Changjun Hu, Yunyang Shi and Fangfang Liu
Micromachines 2021, 12(2), 200; https://doi.org/10.3390/mi12020200 - 15 Feb 2021
Cited by 7 | Viewed by 2156
Abstract
In order to process micro scale parts more conveniently, especially the micro parts with complex shape, a new micro blanking equipment based on piezoelectric ceramic driving is proposed in this paper. Compared with other large precision machining equipment, the equipment cost has been [...] Read more.
In order to process micro scale parts more conveniently, especially the micro parts with complex shape, a new micro blanking equipment based on piezoelectric ceramic driving is proposed in this paper. Compared with other large precision machining equipment, the equipment cost has been greatly reduced. Using displacement sensor to detect the change of output displacement and feedback control piezoelectric actuator to control the change of relevant parameters, the control precision is high. The micro gear parts with diameter less than 2 mm are obtained through the blanking experiment on the experimental equipment. From the relationship between the obtained time and the punch output force, output displacement and die adjustment, it can be seen that the designed equipment has good processing performance and can complete the blanking forming of micro parts well. Full article
(This article belongs to the Special Issue Micro and Nano Machining Processes)
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17 pages, 39774 KiB  
Article
Effect of Strain Rate on the Deformation Characteristic of AlN Ceramics under Scratching
by Shang Gao, Honggang Li, Renke Kang, Yu Zhang and Zhigang Dong
Micromachines 2021, 12(1), 77; https://doi.org/10.3390/mi12010077 - 12 Jan 2021
Cited by 12 | Viewed by 2693
Abstract
To clarify the influence mechanism of strain rate effect on deformation characteristics of aluminum nitride (AlN) ceramics, some varied-velocity nanoscratching tests were carried out using a Berkovich indenter in this paper. The deformation characteristics of the scratched grooves were observed using the scanning [...] Read more.
To clarify the influence mechanism of strain rate effect on deformation characteristics of aluminum nitride (AlN) ceramics, some varied-velocity nanoscratching tests were carried out using a Berkovich indenter in this paper. The deformation characteristics of the scratched grooves were observed using the scanning electron microscope. The experimental results showed higher scratch speed would lead to shallower penetration depth, fewer cracks, and indenter fewer slipping, which was more conducive to the plastic deformation of AlN ceramics. Considering the strain rate effect and the elastic recovery of material, a model for predicting the Berkovich indenter penetration depth under edge-forward mode was established. The prediction results were consistent with the experimental data, and the error was less than 5%, indicating that the model is effective. Based on the Boussinesq field, the Cerruti field, and the Sliding bubble field, a strain rate dependent scratch stress field model was established. The stress field revealed higher scratch speed may significantly reduce the maximum principal stress in the stress field under the indenter, which is the fundamental reason for reducing the crack damage and promoting the plastic deformation. The above study can provide theoretical guidance for reducing the processing damage of AlN ceramics. Full article
(This article belongs to the Special Issue Micro and Nano Machining Processes)
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11 pages, 3539 KiB  
Article
The Wafer-Level Integration of Single-Crystal LiNbO3 on Silicon via Polyimide Material
by Xiangyu Yang, Wenping Geng, Kaixi Bi, Linyu Mei, Yaqing Li, Jian He, Jiliang Mu, Xiaojuan Hou and Xiujian Chou
Micromachines 2021, 12(1), 70; https://doi.org/10.3390/mi12010070 - 09 Jan 2021
Cited by 3 | Viewed by 2960
Abstract
In situ measurements of sensing signals in space platforms requires that the micro-electro-mechanical system (MEMS) sensors be located directly at the point to be measured and in contact with the subject to be measured. Traditional radiation-tolerant silicon-based MEMS sensors cannot acquire spatial signals [...] Read more.
In situ measurements of sensing signals in space platforms requires that the micro-electro-mechanical system (MEMS) sensors be located directly at the point to be measured and in contact with the subject to be measured. Traditional radiation-tolerant silicon-based MEMS sensors cannot acquire spatial signals directly. Compared to silicon-based structures, LiNbO3 single crystalline has wide application prospects in the aerospace field owing to its excellent corrosion resistance, low-temperature resistance and radiation resistance. In our work, 4-inch LiNbO3 and LiNbO3/Cr/Au wafers are fabricated to silicon substrate by means of a polyimide bonding method, respectively. The low-temperature bonding process (≤100 °C) is also useful for heterostructure to avoid wafer fragmentation results from a coefficient of thermal expansion (CTE) mismatch. The hydrophilic polyimide surfaces result from the increasing of -OH groups were acquired based on contact angle and X-ray photoelectron spectroscopy characterizations. A tight and defect-free bonding interface was confirmed by scanning electron microscopy. More importantly, benefiting from low-temperature tolerance and radiation-hardened properties of polyimide material, the bonding strength of the heterostructure based on oxygen plasma activation achieved 6.582 MPa and 3.339 MPa corresponding to room temperature and ultra-low temperature (≈ −263.15 °C), which meets the bonding strength requirements of aerospace applications. Full article
(This article belongs to the Special Issue Micro and Nano Machining Processes)
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21 pages, 8624 KiB  
Article
Understanding Material Removal Mechanism and Effects of Machining Parameters during EDM of Zirconia-Toughened Alumina Ceramic
by Azat Bilal, Asma Perveen, Didier Talamona and Muhammad Pervej Jahan
Micromachines 2021, 12(1), 67; https://doi.org/10.3390/mi12010067 - 09 Jan 2021
Cited by 16 | Viewed by 2504
Abstract
Non-conductive structural ceramics are receiving ever-increasing attention due to their outstanding physical and mechanical properties and their critical applications in aerospace and biomedical industries. However, conventional mechanical machining seems infeasible for the machining of these superior ceramics due to their extreme brittleness and [...] Read more.
Non-conductive structural ceramics are receiving ever-increasing attention due to their outstanding physical and mechanical properties and their critical applications in aerospace and biomedical industries. However, conventional mechanical machining seems infeasible for the machining of these superior ceramics due to their extreme brittleness and higher hardness. Electro discharge machining (EDM), well known for its machining of electrically conductive materials irrespective of materials hardness, has emerged as a potential machining technique due to its noncontact nature when complemented with an assistive electrode technique. This paper investigates the material removal mechanism and effects of machining parameters on machining speed and dimensional and profile accuracies of features machined on zirconia toughened alumina (ZTA) ceramics using assistive electrode EDM. Our experimental results demonstrate that both increasing peak current and pulse on time improves the MRR, however, it also aids in generating thicker layer on machined surface. In addition, pulse interval time is crucial for the machining of nonconductive ceramics, as larger value might cause the complete removal of intrinsic carbon layer which may lead to non/sparking condition. Higher peak current increases circularity whereas short pulse on and pulse off time aid in increasing circularity due to rough machining. In addition, taperness is found to be regulated by the peak current and pulse on time. Overall, thermal cracking and spalling appear to be a dominating material removal mechanism other than melting and evaporation for the EDM of ZTA. Full article
(This article belongs to the Special Issue Micro and Nano Machining Processes)
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13 pages, 4671 KiB  
Article
Preparation of Microneedle Array Mold Based on MEMS Lithography Technology
by Jie Wang, Huan Wang, Liyan Lai and Yigui Li
Micromachines 2021, 12(1), 23; https://doi.org/10.3390/mi12010023 - 28 Dec 2020
Cited by 25 | Viewed by 5018
Abstract
As a transdermal drug delivery technology, microneedle array (MNA) has the characteristics of painless, minimally invasive, and precise dosage. This work discusses and compares the new MNA mold prepared by our group using MEMS technology. First, we introduced the planar pattern-to-cross-section technology (PCT) [...] Read more.
As a transdermal drug delivery technology, microneedle array (MNA) has the characteristics of painless, minimally invasive, and precise dosage. This work discusses and compares the new MNA mold prepared by our group using MEMS technology. First, we introduced the planar pattern-to-cross-section technology (PCT) method using LIGA (Photolithography, Galvanogormung, Abformung) technology to obtain a three-dimensional structure similar to an X-ray mask pattern. On this basis, combined with polydimethylsiloxane (PDMS) transfer technology and electroplating process, metal MNA can be prepared. The second method is to use silicon wet etching combined with the SU-8 process to obtain a PDMS quadrangular pyramid MNA using PDMS transfer technology. Third method is to use the tilting rotary lithography process to obtain PDMS conical MNA on SU-8 photoresist through PDMS transfer technology. All three processes utilize parallel subtractive manufacturing methods, and the error range of reproducibility and accuracy is 2–11%. LIGA technology produces hollow MNA with an aspect ratio of up to 30, which is used for blood extraction and drug injection. The height of the MNA prepared by the engraving process is about 600 μm, which can achieve a sustained release effect together with a potential systemic delivery. The height of the MNA prepared by the ultraviolet exposure process is about 150 μm, which is used to stimulate the subcutaneous tissue. Full article
(This article belongs to the Special Issue Micro and Nano Machining Processes)
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14 pages, 7172 KiB  
Article
Evolution of a Superhydrophobic H59 Brass Surface by Using Laser Texturing via Post Thermal Annealing
by Xizhao Lu, Lei Kang, Binggong Yan, Tingping Lei, Gaofeng Zheng, Haihe Xie, Jingjing Sun and Kaiyong Jiang
Micromachines 2020, 11(12), 1057; https://doi.org/10.3390/mi11121057 - 29 Nov 2020
Viewed by 3088
Abstract
To fabricate an industrial and highly efficient super-hydrophobic brass surface, annealed H59 brass samples have here been textured by using a 1064 nm wavelength nanosecond fiber laser. The effects of different laser parameters (such as laser fluence, scanning speed, and repetition frequency), on [...] Read more.
To fabricate an industrial and highly efficient super-hydrophobic brass surface, annealed H59 brass samples have here been textured by using a 1064 nm wavelength nanosecond fiber laser. The effects of different laser parameters (such as laser fluence, scanning speed, and repetition frequency), on the translation to super-hydrophobic surfaces, have been of special interest to study. As a result of these studies, hydrophobic properties, with larger water contact angles (WCA), were observed to appear faster than for samples that had not been heat-treated (after an evolution time of 4 days). This wettability transition, as well as the evolution of surface texture and nanograins, were caused by thermal annealing treatments, in combination with laser texturing. At first, the H59 brass samples were annealed in a Muffle furnace at temperatures of 350 °C, 600 °C, and 800 °C. As a result of these treatments, there were rapid formations of coarse surface morphologies, containing particles of both micro/nano-level dimensions, as well as enlarged distances between the laser-induced grooves. A large number of nanograins were formed on the brass metal surfaces, onto which an increased number of exceedingly small nanoparticles were attached. This combination of fine nanoparticles, with a scattered distribution of nanograins, created a hierarchic Lotus leaf-like morphology containing both micro-and nanostructured material (i.e., micro/nanostructured material). Furthermore, the distances between the nano-clusters and the size of nano-grains were observed, analyzed, and strongly coupled to the wettability transition time. Hence, the formation and evolution of functional groups on the brass surfaces were influenced by the micro/nanostructure formations on the surfaces. As a direct consequence, the surface energies became reduced, which affected the speed of the wettability transition—which became enhanced. The micro/nanostructures on the H59 brass surfaces were analyzed by using Field Emission Scanning Electron Microscopy (FESEM). The chemical compositions of these surfaces were characterized by using an Energy Dispersive Analysis System (EDS). In addition to the wettability, the surface energy was thereby analyzed with respect to the different surface micro/nanostructures as well as to the roughness characteristics. This study has provided a facile method (with an experimental proof thereof) by which it is possible to construct textured H59 brass surfaces with tunable wetting behaviors. It is also expected that these results will effectively extend the industrial applications of brass material. Full article
(This article belongs to the Special Issue Micro and Nano Machining Processes)
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