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Micromachines
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MEMS Accelerometers: Design, Applications and Characterization
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MEMS Accelerometers: Design, Applications and Characterization

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".

Deadline for manuscript submissions: closed (31 December 2023) | Viewed by 10531

Special Issue Editor

Dr. Andrea Prato

E-Mail Website
Guest Editor
INRiM—Applied Metrology and Engineering Division, National Institute of Metrological Research, Str. delle Cacce 91, 10135 Turin, Italy
Interests: MEMS accelerometers; design; vibration; calibration; characterization; metrology; sensor networks
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

In the last decade, the advent of MEMS technology has led to the possibility of using these types of low-cost and low-power consuming sensors in many fields of engineering and measurement science. In the particular case of vibrations and dynamic motions control, MEMS accelerometers have opened the way to an unprecedented number of applications in many industrial processes, such as smart manufacturing, Industry 4.0, and the IoT, as well as in many other currently widespread applications, such as environmental, seismic, and infrastructure surveys, navigation and positioning systems, remote surgery and diagnoses, health feedback surveys, and environmental/natural hazards. MEMS accelerometers can also be designed with ad hoc characteristics depending on the application and allow studying large-scale physical phenomena through their aggregation in sensor networks. In all these applications, data quality is of paramount importance; thus, their characterization and calibration is also fundamental to obtain reliable and, in some cases, traceable measurements.

This Special Issue aims to bring together contributions that could highlight the potential of analogue and digital MEMS accelerometers in measuring science and in improving the measurement reliability in applied sciences and engineering.

This invitation for contributions is addressed to manuscripts in the form of research articles, review articles, and case study investigations that combine theoretical research and experimental applications related to the design, modeling, fabrication, calibration, characterization, and use of MEMS accelerometers. Moreover, submissions on real applications and simulations of MEMS accelerometer-based sensor networks in different environments are also invited to this Special Issue.

Dr. Andrea Prato
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • MEMS accelerometers
  • vibration measurements
  • sensor networks
  • design of MEMS accelerometers
  • MEMS accelerometer calibration and characterization
  • MEMS accelerometer-based applications and case studies

Related Special Issue

Published Papers (6 papers)

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Research

17 pages, 3692 KiB  
Article
Highly Reliable Multicomponent MEMS Sensor for Predictive Maintenance Management of Rolling Bearings
by Elia Landi, Andrea Prato, Ada Fort, Marco Mugnaini, Valerio Vignoli, Alessio Facello, Fabrizio Mazzoleni, Michele Murgia and Alessandro Schiavi
Micromachines 2023, 14(2), 376; https://doi.org/10.3390/mi14020376 - 02 Feb 2023
Cited by 4 | Viewed by 1377
Abstract
In the field of vibration monitoring and control, the use of low-cost multicomponent MEMS-based accelerometer sensors is nowadays increasingly widespread. Such sensors allow implementing lightweight monitoring systems with low management costs, low power consumption and a small size. However, for the monitoring systems [...] Read more.
In the field of vibration monitoring and control, the use of low-cost multicomponent MEMS-based accelerometer sensors is nowadays increasingly widespread. Such sensors allow implementing lightweight monitoring systems with low management costs, low power consumption and a small size. However, for the monitoring systems to provide trustworthy and meaningful data, the high accuracy and reliability of sensors are essential requirements. Consequently, a metrological approach to the calibration of multi-component accelerometer sensors, including appropriate uncertainty evaluations, are necessary to guarantee traceability and reliability in the frequency domain of data provided, which nowadays is not fully available. In addition, recently developed metrological characterizations at the microscale level allow to provide detailed and accurate quantification of the enhanced technical performance and the responsiveness of these sensors. In this paper, a dynamic calibration procedure is applied to provide the sensitivity parameters of a low-cost, multicomponent MEMS sensor accelerometer prototype (MDUT), designed, developed and realized at the University of Siena, conceived for rolling bearings vibration monitoring in a broad frequency domain (from 10 Hz up to 25 kHz). The calibration and the metrological characterization of the MDUT are carried out by comparison to a reference standard transducer, at the Primary Vibration Laboratory of the National Institute of Metrological Research (INRiM). Full article
(This article belongs to the Special Issue MEMS Accelerometers: Design, Applications and Characterization)
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13 pages, 4053 KiB  
Article
Long-Term Degradation Evaluation of the Mismatch of Sensitive Capacitance in MEMS Accelerometers
by Xinlong Huang, Xianshan Dong, Guizhen Du and Youwang Hu
Micromachines 2023, 14(1), 190; https://doi.org/10.3390/mi14010190 - 12 Jan 2023
Cited by 1 | Viewed by 1396
Abstract
During long-term use, MEMS accelerometers will experience degradation, such as bias and scale factor changes. Bias of MEMS capacitive accelerometers usually comes from the mismatch of parasitic capacitance and sensitive capacitance. This paper focuses on the mismatch of sensitive capacitance and analyzes the [...] Read more.
During long-term use, MEMS accelerometers will experience degradation, such as bias and scale factor changes. Bias of MEMS capacitive accelerometers usually comes from the mismatch of parasitic capacitance and sensitive capacitance. This paper focuses on the mismatch of sensitive capacitance and analyzes the mechanism of long-term degradation of MEMS accelerometers. Firstly, the effect of sensitive capacitance mismatch on the performance of a MEMS accelerometer was investigated. Secondly, a method of measuring the mismatch of sensitive capacitance was proposed, and the validation experiment shows that the accuracy of this measurement can be less than 1.10×10−5 of the sensitive capacitance. For the samples in this experiment, the measurement error of this method can be less than 0.36 fF. Finally, a high-temperature acceleration experiment was performed. The mismatch of the sensitive capacitance during the experiment was monitored based on the proposed method, and the experimental results are analyzed. The experimental result demonstrates that the mismatch of sensitive capacitance varies linearly with time. The change rates of sensitive capacitance mismatch for the two samples are 2.95×10−7 C0/h and 2.66×10−7 C0/h in the high-temperature acceleration experiment at 145 °C, respectively. The change in sensitive capacitance mismatch seems small, but it is not to be ignored during long-term use. The rate of change is similar for the same batch of samples. This could imply that the adverse effects due to the mismatch of sensitive capacitance changes can be reduced by compensating for this variation. Full article
(This article belongs to the Special Issue MEMS Accelerometers: Design, Applications and Characterization)
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13 pages, 2047 KiB  
Article
Design and Simulation Study of an Optical Mode-Localized MEMS Accelerometer
by Yu Feng, Wuhao Yang and Xudong Zou
Micromachines 2023, 14(1), 39; https://doi.org/10.3390/mi14010039 - 23 Dec 2022
Cited by 2 | Viewed by 1353
Abstract
In this paper, we demonstrate a novel photonic integrated accelerometer based on the optical mode localization sensing mechanism, which is designed on an SOI wafer with a device layer thickness of 220 nm. High sensitivity and large measurement range can be achieved by [...] Read more.
In this paper, we demonstrate a novel photonic integrated accelerometer based on the optical mode localization sensing mechanism, which is designed on an SOI wafer with a device layer thickness of 220 nm. High sensitivity and large measurement range can be achieved by integrating coupled ring resonators with a suspended directional coupler on a proof mass. With the help of FEA simulation and numerical analysis, the proposed optical mode-localized sensor presents a sensitivity of 10/g (modal power ratio/acceleration) and an inertial displacement of from −8 to 10 microns corresponding to a range from −23.5 to 29.4 g. The free spectral range is 4.05 nm around 1.55 microns. The acceleration resolution limited by thermomechanical noise is 4.874 μg. The comprehensive performance of this design is competitive with existing MEMS mode localized accelerometers. It demonstrates the potential of the optical mode-localized inertial sensors as candidates for state-of-the-art sensors in the future. Full article
(This article belongs to the Special Issue MEMS Accelerometers: Design, Applications and Characterization)
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12 pages, 3511 KiB  
Article
Characterization of a Dual Nonlinear Helmholtz Resonator
by Maher O. Al-Turk, Sajid Ali and Muhammad A. Hawwa
Micromachines 2022, 13(11), 2032; https://doi.org/10.3390/mi13112032 - 20 Nov 2022
Viewed by 1683
Abstract
Resonant elements can generate small amounts of energy that make them pertinent for feeding miniaturized accelerometers with the energy needed. Suitable oscillator candidates are Helmholtz resonators, which have been, for a long time, analyzed and designed within the context of linear vibration. This [...] Read more.
Resonant elements can generate small amounts of energy that make them pertinent for feeding miniaturized accelerometers with the energy needed. Suitable oscillator candidates are Helmholtz resonators, which have been, for a long time, analyzed and designed within the context of linear vibration. This study focuses on extracting nonlinear characteristics of a dual Helmholtz resonator (HR), with a neck-cavity–neck-cavity configuration, mounted on an acoustic waveguide with harmonically oscillating pressure. The mathematical model used for describing the resonator embraces inherent nonlinear air stiffness and the damping nonlinearity of hydrodynamic origin. Numerical solutions for the resonator’s nonlinear oscillations are obtained. Bifurcation diagrams are produced, indicating that the dual HR behaves in a deterministic fashion within the engineering practical limits. Phase portraits are drawn for the system, showing a quasi-periodic motion. Frequency response curves (FRC) are found to shift to the left at the lower resonant frequency indicating a softening behavior. FRC keep generally symmetric curves at the higher resonant frequency indicating a mostly linear behavior. Full article
(This article belongs to the Special Issue MEMS Accelerometers: Design, Applications and Characterization)
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14 pages, 954 KiB  
Article
A Novel Algorithm for Scenario Recognition Based on MEMS Sensors of Smartphone
by Xianghong Li, Hong Yuan, Guang Yang, Yingkui Gong and Jiajia Xu
Micromachines 2022, 13(11), 1865; https://doi.org/10.3390/mi13111865 - 30 Oct 2022
Cited by 1 | Viewed by 1058
Abstract
The scenario is very important to smartphone-based pedestrian positioning services. The smartphone is equipped with MEMS(Micro Electro Mechanical System) sensors, which have low accuracy. Now, the methods for scenario recognition are mainly machine-learning methods. The recognition rate of a single method is not [...] Read more.
The scenario is very important to smartphone-based pedestrian positioning services. The smartphone is equipped with MEMS(Micro Electro Mechanical System) sensors, which have low accuracy. Now, the methods for scenario recognition are mainly machine-learning methods. The recognition rate of a single method is not high. Multi-model fusion can improve recognition accuracy, but it needs to collect many samples, the computational cost is high, and it is heavily dependent on feature selection. Therefore, we designed the DT-BP(decision tree-Bayesian probability) scenario recognition algorithm by introducing the Bayesian state transition model based on experience design in the decision tree. The decision-tree rules and state transition probability assignment methods were respectively designed for smartphone mode and motion mode. We carried out experiments for each scenario and compared them with the methods in the references. The results showed that the method proposed in this paper has a high recognition accuracy, which is equivalent to the accuracy of multi-model machine learning, but it is simpler, easier to implement, requires less computation, and requires fewer samples. Full article
(This article belongs to the Special Issue MEMS Accelerometers: Design, Applications and Characterization)
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13 pages, 3461 KiB  
Article
A Miniaturized Piezoelectric MEMS Accelerometer with Polygon Topological Cantilever Structure
by Chaoxiang Yang, Bohao Hu, Liangyu Lu, Zekai Wang, Wenjuan Liu and Chengliang Sun
Micromachines 2022, 13(10), 1608; https://doi.org/10.3390/mi13101608 - 27 Sep 2022
Cited by 5 | Viewed by 2006
Abstract
This work proposes a miniaturized piezoelectric MEMS accelerometer based on polygonal topology with an area of only 868 × 833 μm2. The device consists of six trapezoidal cantilever beams with shorter fixed sides. Meanwhile, a device with larger fixed sides is [...] Read more.
This work proposes a miniaturized piezoelectric MEMS accelerometer based on polygonal topology with an area of only 868 × 833 μm2. The device consists of six trapezoidal cantilever beams with shorter fixed sides. Meanwhile, a device with larger fixed sides is also designed for comparison. The theoretical and finite element models are established to analyze the effect of the beam′s effective stiffness on the output voltage and natural frequency. As the stiffness of the device decreases, the natural frequency of the device decreases while the output signal increases. The proposed polygonal topology with shorter fixed sides has higher voltage sensitivity than the larger fixed one based on finite element simulations. The piezoelectric accelerometers are fabricated using Cavity-SOI substrates with a core piezoelectric film of aluminum nitride (AlN) of about 928 nm. The fabricated piezoelectric MEMS accelerometers have good linearity (0.99996) at accelerations less than 2 g. The measured natural frequency of the accelerometer with shorter fixed sides is 98 kHz, and the sensitivity, resolution, and minimum detectable signal at 400 Hz are 1.553 mV/g, 1 mg, and 2 mg, respectively. Compared with the traditional trapezoidal cantilever with the same diaphragm area, its output voltage sensitivity is increased by 22.48%. Full article
(This article belongs to the Special Issue MEMS Accelerometers: Design, Applications and Characterization)
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