Editorial

2 pages, 174 KiB

Open AccessEditorial

Editorial for the Special Issue on 2D Nanomaterials Processing and Integration in Miniaturized Devices

by Candido Fabrizio Pirri and Matteo Cocuzza

Micromachines 2021, 12(3), 254; https://doi.org/10.3390/mi12030254 - 02 Mar 2021

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Initially considered little more than a scientific curiosity, the family of 2D nanomaterials has become increasingly popular over the last decade [...] Full article

(This article belongs to the Special Issue 2D Nanomaterials Processing and Integration in Miniaturized Devices)

Research

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12 pages, 4129 KiB

Open AccessArticle

Plasmonic Hybrids of MoS₂ and 10-nm Nanogap Arrays for Photoluminescence Enhancement

by Yang Yang, Ruhao Pan, Shibing Tian, Changzhi Gu and Junjie Li

Micromachines 2020, 11(12), 1109; https://doi.org/10.3390/mi11121109 - 15 Dec 2020

Cited by 9 | Viewed by 2779

Abstract

Monolayer MoS₂ has attracted tremendous interest, in recent years, due to its novel physical properties and applications in optoelectronic and photonic devices. However, the nature of the atomic-thin thickness of monolayer MoS₂ limits its optical absorption and emission, thereby hindering its [...] Read more.

Monolayer MoS₂ has attracted tremendous interest, in recent years, due to its novel physical properties and applications in optoelectronic and photonic devices. However, the nature of the atomic-thin thickness of monolayer MoS₂ limits its optical absorption and emission, thereby hindering its optoelectronic applications. Hybridizing MoS₂ by plasmonic nanostructures is a critical route to enhance its photoluminescence. In this work, the hybrid nanostructure has been proposed by transferring the monolayer MoS₂ onto the surface of 10-nm-wide gold nanogap arrays fabricated using the shadow deposition method. By taking advantage of the localized surface plasmon resonance arising in the nanogaps, a photoluminescence enhancement of ~20-fold was achieved through adjusting the length of nanogaps. Our results demonstrate the feasibility of a giant photoluminescence enhancement for this hybrid of MoS₂/10-nm nanogap arrays, promising its further applications in photodetectors, sensors, and emitters. Full article

(This article belongs to the Special Issue 2D Nanomaterials Processing and Integration in Miniaturized Devices)

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11 pages, 4581 KiB

Open AccessArticle

Study of Inkjet-Printed Silver Films Based on Nanoparticles and Metal-Organic Decomposition Inks with Different Curing Methods

by Peng Xiao, Yicong Zhou, Liao Gan, Zhipeng Pan, Jianwen Chen, Dongxiang Luo, Rihui Yao, Jianqiu Chen, Hongfu Liang and Honglong Ning

Micromachines 2020, 11(7), 677; https://doi.org/10.3390/mi11070677 - 12 Jul 2020

Cited by 9 | Viewed by 2648

Abstract

Currently, inkjet printing conductive films have attracted more and more attention in the field of electronic device. Here, the inkjet-printed silver thin films based on nanoparticles (NP) ink and metal-organic decomposition (MOD) ink were cured by the UV curing method and heat curing [...] Read more.

Currently, inkjet printing conductive films have attracted more and more attention in the field of electronic device. Here, the inkjet-printed silver thin films based on nanoparticles (NP) ink and metal-organic decomposition (MOD) ink were cured by the UV curing method and heat curing method. We not only compared the electrical resistivity and adhesion strength of two types of silver films, but also studied the effect of different curing methods on silver films. The silver films based on NP ink had good adhesion strength with a lowest electrical resistivity of 3.7 × 10⁻⁸ Ω·m. However, the silver film based on MOD ink had terrible adhesion strength with a lowest electrical resistivity of 2 × 10⁻⁸ Ω·m. Furthermore, we found a simple way to improve the terrible adhesion strength of silver films based on MOD ink and tried to figure out the mechanisms. This work offers a further understanding of the different performances of two types of silver films with different curing methods. Full article

(This article belongs to the Special Issue 2D Nanomaterials Processing and Integration in Miniaturized Devices)

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12 pages, 3173 KiB

Open AccessFeature PaperArticle

Morphology Evolution of Nanoscale-Thick Au/Pd Bimetallic Films on Silicon Carbide Substrate

by Francesco Ruffino, Maria Censabella, Giovanni Piccitto and Maria Grazia Grimaldi

Micromachines 2020, 11(4), 410; https://doi.org/10.3390/mi11040410 - 14 Apr 2020

Cited by 3 | Viewed by 1926

Abstract

Bimetallic Au/Pd nanoscale-thick films were sputter-deposited at room temperature on a silicon carbide (SiC) surface, and the surface-morphology evolution of the films versus thickness was studied with scanning electron microscopy. This study allowed to elucidate the Au/Pd growth mechanism by identifying characteristic growth [...] Read more.

Bimetallic Au/Pd nanoscale-thick films were sputter-deposited at room temperature on a silicon carbide (SiC) surface, and the surface-morphology evolution of the films versus thickness was studied with scanning electron microscopy. This study allowed to elucidate the Au/Pd growth mechanism by identifying characteristic growth regimes, and to quantify the characteristic parameters of the growth process. In particular, we observed that the Au/Pd film initially grew as three-dimensional clusters; then, increasing Au/Pd film thickness, film morphology evolved from isolated clusters to partially coalesced wormlike structures, followed by percolation morphology, and, finally, into a continuous rough film. The application of the interrupted coalescence model allowed us to evaluate a critical mean cluster diameter for partial coalescence, and the application of Vincent’s model allowed us to quantify the critical Au/Pd coverage for percolation transition. Full article

(This article belongs to the Special Issue 2D Nanomaterials Processing and Integration in Miniaturized Devices)

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8 pages, 1472 KiB

Open AccessArticle

Fano-Resonance in Hybrid Metal-Graphene Metamaterial and Its Application as Mid-Infrared Plasmonic Sensor

by Jianfa Zhang, Qilin Hong, Jinglan Zou, Yuwen He, Xiaodong Yuan, Zhihong Zhu and Shiqiao Qin

Micromachines 2020, 11(3), 268; https://doi.org/10.3390/mi11030268 - 04 Mar 2020

Cited by 19 | Viewed by 2769

Abstract

Fano resonances in nanostructures have attracted widespread research interests in the past few years for their potential applications in sensing, switching and nonlinear optics. In this paper, a mid-infrared Fano resonance in a hybrid metal-graphene metamaterial is studied. The hybrid metamaterial consists of [...] Read more.

Fano resonances in nanostructures have attracted widespread research interests in the past few years for their potential applications in sensing, switching and nonlinear optics. In this paper, a mid-infrared Fano resonance in a hybrid metal-graphene metamaterial is studied. The hybrid metamaterial consists of a metallic grid enclosing with graphene nanodisks. The Fano resonance arises from the coupling of graphene and metallic plasmonic resonances and it is sharper than plasmonic resonances in pure graphene nanostructures. The resonance strength can be enhanced by increasing the number of graphene layers. The proposed metamaterial can be employed as a high-performance mid-infrared plasmonic sensor with an unprecedented sensitivity of about 7.93 μm/RIU and figure of merit (FOM) of about 158.7. Full article

(This article belongs to the Special Issue 2D Nanomaterials Processing and Integration in Miniaturized Devices)

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15 pages, 4311 KiB

Open AccessArticle

Influence of Illumination on Porous Silicon Formed by Photo-Assisted Etching of p-Type Si with a Different Doping Level

by Olga Volovlikova, Sergey Gavrilov and Petr Lazarenko

Micromachines 2020, 11(2), 199; https://doi.org/10.3390/mi11020199 - 14 Feb 2020

Cited by 13 | Viewed by 2858

Abstract

The influence of illumination intensity and p-type silicon doping level on the dissolution rate of Si and total current by photo-assisted etching was studied. The impact of etching duration, illumination intensity, and wafer doping level on the etching process was investigated using scanning [...] Read more.

The influence of illumination intensity and p-type silicon doping level on the dissolution rate of Si and total current by photo-assisted etching was studied. The impact of etching duration, illumination intensity, and wafer doping level on the etching process was investigated using scanning electron microscopy (SEM), atomic force microscopy (AFM), and Ultraviolet-Visible Spectroscopy (UV–Vis–NIR). The silicon dissolution rate was found to be directly proportional to the illumination intensity and inversely proportional to the wafer resistivity. High light intensity during etching treatment led to increased total current on the Si surface. It was shown that porous silicon of different thicknesses, pore diameters, and porosities can be effectively fabricated by photo-assisted etching on a Si surface without external bias or metals. Full article

(This article belongs to the Special Issue 2D Nanomaterials Processing and Integration in Miniaturized Devices)

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8 pages, 3806 KiB

Open AccessArticle

Experimental Study on the Lubrication and Cooling Effect of Graphene in Base Oil for Si₃N₄/Si₃N₄ Sliding Pairs

by Lixiu Zhang, Xiaoyi Wei, Junhai Wang, Yuhou Wu, Dong An and Dongyang Xi

Micromachines 2020, 11(2), 160; https://doi.org/10.3390/mi11020160 - 03 Feb 2020

Cited by 7 | Viewed by 1703

Abstract

Recently, the engineering structural ceramics as friction and wear components in manufacturing technology and devices have attracted much attention due to their high strength and corrosion resistance. In this study, the tribological properties of Si₃N₄/Si₃N₄ sliding [...] Read more.

Recently, the engineering structural ceramics as friction and wear components in manufacturing technology and devices have attracted much attention due to their high strength and corrosion resistance. In this study, the tribological properties of Si₃N₄/Si₃N₄ sliding pairs were investigated by adding few-layer graphene to base lubricating oil on the lubrication and cooling under different experimental conditions. Test results showed that lubrication and cooling performance was obviously improved with the addition of graphene at high rotational speeds and low loads. For oil containing 0.1 wt% graphene at a rotational speed of 3000 r·min⁻¹ and 40 N loads, the average friction coefficient was reduced by 76.33%. The cooling effect on Si₃N₄/Si₃N₄ sliding pairs, however, was optimal at low rotational speeds and high loads. For oil containing 0.05 wt% graphene at a lower rotational speed of 500 r·min⁻¹ and a higher load of 140 N, the temperature rise was reduced by 19.76%. In addition, the wear mark depth would decrease when adding appropriate graphene. The mechanism behind the reduction in friction and anti-wear properties was related to the formation of a lubricating protective film. Full article

(This article belongs to the Special Issue 2D Nanomaterials Processing and Integration in Miniaturized Devices)

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9 pages, 3677 KiB

Open AccessFeature PaperArticle

Design and Fabrication of Flexible Naked-Eye 3D Display Film Element Based on Microstructure

by Axiu Cao, Li Xue, Yingfei Pang, Liwei Liu, Hui Pang, Lifang Shi and Qiling Deng

Micromachines 2019, 10(12), 864; https://doi.org/10.3390/mi10120864 - 09 Dec 2019

Cited by 7 | Viewed by 5497

Abstract

The naked-eye three-dimensional (3D) display technology without wearing equipment is an inevitable future development trend. In this paper, the design and fabrication of a flexible naked-eye 3D display film element based on a microstructure have been proposed to achieve a high-resolution 3D display [...] Read more.

The naked-eye three-dimensional (3D) display technology without wearing equipment is an inevitable future development trend. In this paper, the design and fabrication of a flexible naked-eye 3D display film element based on a microstructure have been proposed to achieve a high-resolution 3D display effect. The film element consists of two sets of key microstructures, namely, a microimage array (MIA) and microlens array (MLA). By establishing the basic structural model, the matching relationship between the two groups of microstructures has been studied. Based on 3D graphics software, a 3D object information acquisition model has been proposed to achieve a high-resolution MIA from different viewpoints, recording without crosstalk. In addition, lithography technology has been used to realize the fabrications of the MLA and MIA. Based on nanoimprint technology, a complete integration technology on a flexible film substrate has been formed. Finally, a flexible 3D display film element has been fabricated, which has a light weight and can be curled. Full article

(This article belongs to the Special Issue 2D Nanomaterials Processing and Integration in Miniaturized Devices)

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11 pages, 3662 KiB

Open AccessArticle

Lift-Off Assisted Patterning of Few Layers Graphene

by Alessio Verna, Simone Luigi Marasso, Paola Rivolo, Matteo Parmeggiani, Marco Laurenti and Matteo Cocuzza

Micromachines 2019, 10(6), 426; https://doi.org/10.3390/mi10060426 - 25 Jun 2019

Cited by 7 | Viewed by 4554

Abstract

Graphene and 2D materials have been exploited in a growing number of applications and the quality of the deposited layer has been found to be a critical issue for the functionality of the developed devices. Particularly, Chemical Vapor Deposition (CVD) of high quality [...] Read more.

Graphene and 2D materials have been exploited in a growing number of applications and the quality of the deposited layer has been found to be a critical issue for the functionality of the developed devices. Particularly, Chemical Vapor Deposition (CVD) of high quality graphene should be preserved without defects also in the subsequent processes of transferring and patterning. In this work, a lift-off assisted patterning process of Few Layer Graphene (FLG) has been developed to obtain a significant simplification of the whole transferring method and a conformal growth on micrometre size features. The process is based on the lift-off of the catalyst seed layer prior to the FLG deposition. Starting from a SiO₂ finished Silicon substrate, a photolithographic step has been carried out to define the micro patterns, then an evaporation of Pt thin film on Al₂O₃ adhesion layer has been performed. Subsequently, the Pt/Al₂O₃ lift-off step has been attained using a dimethyl sulfoxide (DMSO) bath. The FLG was grown directly on the patterned Pt seed layer by Chemical Vapor Deposition (CVD). Raman spectroscopy was applied on the patterned area in order to investigate the quality of the obtained graphene. Following the novel lift-off assisted patterning technique a minimization of the de-wetting phenomenon for temperatures up to 1000 °C was achieved and micropatterns, down to 10 µm, were easily covered with a high quality FLG. Full article

(This article belongs to the Special Issue 2D Nanomaterials Processing and Integration in Miniaturized Devices)

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Review

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21 pages, 2658 KiB

Open AccessReview

Emerging Designs of Electronic Devices in Biomedicine

by Maria Laura Coluccio, Salvatore A. Pullano, Marco Flavio Michele Vismara, Nicola Coppedè, Gerardo Perozziello, Patrizio Candeloro, Francesco Gentile and Natalia Malara

Micromachines 2020, 11(2), 123; https://doi.org/10.3390/mi11020123 - 22 Jan 2020

Cited by 13 | Viewed by 3913

Abstract

A long-standing goal of nanoelectronics is the development of integrated systems to be used in medicine as sensor, therapeutic, or theranostic devices. In this review, we examine the phenomena of transport and the interaction between electro-active charges and the material at the nanoscale. [...] Read more.

A long-standing goal of nanoelectronics is the development of integrated systems to be used in medicine as sensor, therapeutic, or theranostic devices. In this review, we examine the phenomena of transport and the interaction between electro-active charges and the material at the nanoscale. We then demonstrate how these mechanisms can be exploited to design and fabricate devices for applications in biomedicine and bioengineering. Specifically, we present and discuss electrochemical devices based on the interaction between ions and conductive polymers, such as organic electrochemical transistors (OFETs), electrolyte gated field-effect transistors (FETs), fin field-effect transistor (FinFETs), tunnelling field-effect transistors (TFETs), electrochemical lab-on-chips (LOCs). For these systems, we comment on their use in medicine. Full article

(This article belongs to the Special Issue 2D Nanomaterials Processing and Integration in Miniaturized Devices)

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