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Micromachines
Special Issues
Micro and Smart Devices and Systems, 3rd Edition
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Micro and Smart Devices and Systems, 3rd Edition

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E：Engineering and Technology".

Deadline for manuscript submissions: 31 August 2024 | Viewed by 2806

Special Issue Editors

Dr. Zebing Mao

E-Mail Website
Guest Editor
Department of Mechanical Engineering, School of Engineering, Tokyo Institute of Technology, Tokyo 152-8550, Japan
Interests: functional fluids; soft actuators and sensors; Belousov–Zhabotinsky (BZ) gel; machining and MEMS; microfluidics
Special Issues, Collections and Topics in MDPI journals
Dr. Hong Ding

E-Mail Website
Guest Editor
Department of NanoEngineering, University of California San Diego, La Jolla, CA 92093, USA
Interests: MEMS sensors; ultrasound; soft actuators; flexible electronics
Special Issues, Collections and Topics in MDPI journals
Dr. Dong Han

E-Mail Website
Guest Editor
State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou 310027, China
Interests: electrohydraulic control systems; electromagnetic, piezoelectric and functional fluid drive systems

Special Issue Information

Dear Colleagues,

Micro and smart devices and systems (solid/fluidic actuators and sensors, flexible electronics, functional fluids, MEMS, microfluidics, wearable devices, self-actuation/sensing and self-power systems, self-oscillating and smart hydrogels, intelligent control systems, lenses, origami batteries, fuel cells, etc.) are becoming increasingly popular in various fields of robotics, telecommunications, chemistry, and biology. In addition, these smart devices and systems help us to improve our quality of life and are beneficial for our understanding of insects and animals in nature. The above devices are made of either rigid or soft materials with special mechanical and electrical properties, which have a large influence on their robustness and stability and can present some intelligent and smart characteristics. However, it is not easy to fully understand their working principles and integrate several components into a smart and intelligent system. Accordingly, relevant topics for this Special Issue include, but are not limited to, the following:

  • Novel design, modeling, fabrication, and assembly of micro and smart devices and systems based on various actuation and sensing methods of electric, thermal, light, magnetic, chemical reaction, acoustic, etc.
  • Smart and intelligent soft solid and fluidic robots, actuators and sensors, microfluidics, batteries, etc.
  • Theory and modeling of complex nonlinear phenomena relating to micro and smart devices and systems.
  • New developments and applications of all types of micro and smart devices and systems.

We look forward to receiving your submissions.

Dr. Zebing Mao
Dr. Hong Ding
Dr. Dong Han
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • MEMS/NEMS
  • flexible actuators and sensors
  • self-actuation/sensing and self-power systems
  • fluidic systems
  • self-oscillating and smart hydrogels
  • intelligent control systems
  • smart devices

Related Special Issues

Published Papers (3 papers)

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Research

18 pages, 10838 KiB  
Article
Batch Fine Magnetic Pattern Transfer Method on Permanent Magnets Using Coercivity Change during Heating for Magnetic MEMS
by Keita Nagai, Naohiro Sugita and Tadahiko Shinshi
Micromachines 2024, 15(2), 248; https://doi.org/10.3390/mi15020248 - 07 Feb 2024
Viewed by 704
Abstract
In magnetic microelectromechanical systems (MEMSs), permanent magnets in the form of a thick film or thin plate are used for structural and manufacturing purposes. However, the geometric shape induces a strong self-demagnetization field during thickness–direction magnetization, limiting the surface magnetic flux density and [...] Read more.
In magnetic microelectromechanical systems (MEMSs), permanent magnets in the form of a thick film or thin plate are used for structural and manufacturing purposes. However, the geometric shape induces a strong self-demagnetization field during thickness–direction magnetization, limiting the surface magnetic flux density and output power. The magnets must be segmented or magnetized in a fine and multi-pole manner to weaken the self-demagnetization field. Few studies have been performed on fine multi-pole magnetization techniques that can generate a higher surface magnetic flux density than segmented magnets and are suitable for mass production. This paper proposes a batch fine multi-pole magnetic pattern transfer (MPT) method for the magnets of MEMS devices. The proposed method uses two master magnets with identical magnetic patterns to sandwich a target magnet. Subsequently, the coercivity of the target magnet is reduced via heating, and the master magnet’s magnetic pattern is transferred to the target magnet. Stripe, checkerboard, and concentric circle patterns with a pole pitch of 0.3 mm are magnetized on the NdFeB master magnets N38EH with high intrinsic coercivity via laser-assisted heating magnetization. The MPT yields the highest surface magnetic flux density at 160 °C, reaching 39.7–66.1% of the ideal magnetization pattern on the NdFeB target magnet N35. Full article
(This article belongs to the Special Issue Micro and Smart Devices and Systems, 3rd Edition)
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14 pages, 3999 KiB  
Article
Characterization of Sensitivity of Time Domain MEMS Accelerometer
by Enfu Li, Jiaying Jian, Fan Yang, Zhiyong Ma, Yongcun Hao and Honglong Chang
Micromachines 2024, 15(2), 227; https://doi.org/10.3390/mi15020227 - 31 Jan 2024
Cited by 1 | Viewed by 801
Abstract
This paper characterizes the sensitivity of a time domain MEMS accelerometer. The sensitivity is defined by the increment in the measured time interval per gravitational acceleration. Two sensitivities exist, and they can be enhanced by decreasing the amplitude and frequency. The sensitivity with [...] Read more.
This paper characterizes the sensitivity of a time domain MEMS accelerometer. The sensitivity is defined by the increment in the measured time interval per gravitational acceleration. Two sensitivities exist, and they can be enhanced by decreasing the amplitude and frequency. The sensitivity with minor nonlinearity is chosen to evaluate the time domain sensor. The experimental results of the developed accelerometer demonstrate that the sensitivities span from −68.91 μs/g to −124.96 μs/g and the 1σ noises span from 8.59 mg to 6.2 mg (amplitude of 626 nm: −68.91 μs/g and 10.21 mg; amplitude of 455 nm: −94.51 μs/g and 7.76 mg; amplitude of 342 nm: −124.96 μs/g and 6.23 mg), which indicates the bigger the amplitude, the smaller the sensitivity and the bigger the 1σ noise. The adjustable sensitivity provides a theoretical foundation for range self-adaption, and all the results can be extended to other time domain inertial sensors, e.g., a gyroscope or an inclinometer. Full article
(This article belongs to the Special Issue Micro and Smart Devices and Systems, 3rd Edition)
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21 pages, 9984 KiB  
Article
Design and Implementation of a Power Semiconductor-Based Switching Mode Laser Diode Driver
by Chao-Tsung Ma and Fang-Yu Zhang
Micromachines 2024, 15(1), 31; https://doi.org/10.3390/mi15010031 - 22 Dec 2023
Viewed by 837
Abstract
Fiber lasers are commonly used in many industrial applications, such as cutting, welding, marking, and additive manufacturing. In a fiber laser system, the driver of a pumping source using a laser diode (LD) module and its dynamic control capability directly affect the performance [...] Read more.
Fiber lasers are commonly used in many industrial applications, such as cutting, welding, marking, and additive manufacturing. In a fiber laser system, the driver of a pumping source using a laser diode (LD) module and its dynamic control capability directly affect the performance of the fiber laser system. The commercial design of pumping source drivers for high-power fiber lasers is mainly based on a linear-type DC power supply, which has two major drawbacks, i.e., lower efficiency and bulk. In this regard, this paper proposes for the first time a new design approach with a programmable switching mode laser diode driver using a power semiconductor device (PSD)-based full-bridge phase-shifted (FB-PS) DC-DC converter for driving a 200 W optical power laser diode module. In this paper, the characteristics of a laser diode module and the system configuration of the proposed laser diode driver are first introduced. Then, a current control scheme using the concept of phase angle shifting to achieve a fast dynamic current tracking feature is explained. The proposed current control technique with a fully digital control scheme is then addressed. Next, dynamic mathematical models of the laser diode driver system and controllers are derived, and the quantitative design detail of the controller is presented. To confirm the correctness of the proposed control scheme, a simulation study on a typical control case is performed in PSIM 9.1 software environment. To verify the effectiveness of the proposed LD driver, a digital signal processor is then used as the control core to construct a hardware prototype implementation for performing experimental tests. Results obtained from simulation and hardware tests show highly satisfactory driving performances in the laser diode’s output current command tracking control. Full article
(This article belongs to the Special Issue Micro and Smart Devices and Systems, 3rd Edition)
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