Advanced MEMS Resonators and Sensors: Materials, Designs and Applications
A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Intelligent Sensors".
Deadline for manuscript submissions: 31 December 2024 | Viewed by 1770
Special Issue Editor
Special Issue Information
Dear Colleagues,
We are seeing a growing interest in the potential of advanced MEMS resonators and sensors in various fields, including healthcare, communication, environmental monitoring, energy harvesting, automotive, industrial, consumer electronics, aerospace, and defense, thanks to their extraordinary sensing capabilities and advantages in terms of size, power, cost, and reliability.
This Special Issue aims to bring together recent progress regarding advanced MEMS resonators and sensors. It will focus on various aspects of MEMS resonators and sensors, including materials, designs, and applications. Topics of interest include, but are not limited to:
- Novel materials for MEMS resonators and sensors, such as 2D materials, piezoelectric materials, and soft materials;
- Innovative designs and fabrication techniques for MEMS resonators and sensors, such as machine learning, biomimicry, and digital fabrication;
- Advanced applications of MEMS resonators and sensors, such as in communication, healthcare, environmental monitoring, and energy harvesting;
- Theoretical and experimental studies on the dynamics, stability, and reliability of MEMS resonators and sensors;
- Integration of MEMS resonators and sensors with other micro- and nanosystems, such as electronics, photonics, and fluidics.
Dr. Guofeng Chen
Guest Editor
Manuscript Submission Information
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