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Nanomaterials
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Nanomaterials Fabricated by Electron-Beam-Induced Deposition and Related Processes
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Nanomaterials Fabricated by Electron-Beam-Induced Deposition and Related Processes

A special issue of Nanomaterials (ISSN 2079-4991). This special issue belongs to the section "Nanofabrication and Nanomanufacturing".

Deadline for manuscript submissions: closed (7 April 2023) | Viewed by 17963

Special Issue Editors

Prof. Dr. Petra Swiderek

E-Mail Website
Guest Editor
Institute for Applied and Physical Chemistry, University of Bremen, Leobener Straße 5, 28359 Bremen, Germany
Interests: electron-induced chemistry; surface science studies; nanofabrication processes
Dr. Ivo Utke

E-Mail Website
Guest Editor
Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
Interests: thin films; nanopatterning; materials; multilayers science; thermodynamics; mechanics; film growth kinetics
Prof. Dr. Oddur Ingólfsson

E-Mail Website
Guest Editor
School of Engineering and Natural Sciences, University of Iceland, Reykjavik, Iceland
Interests: focus electron beam induced deposition (FEBID)

Special Issue Information

Dear Colleagues,

Nanoscale materials and devices with precisely defined shape and size down to the sub-10-nm regime can nowadays be fabricated by electron beam induced processes. This includes not only planar structures but also precisely defined and complex freestanding 3D architectures, an area that has recently witnessed major progress. In such focused electron beam induced deposition (FEBID) processes, solid deposits are obtained by electron-induced decomposition of volatile precursor molecules that contain the elements of the targeted material and are dosed onto a surface. However, precise control over the composition of the deposited material is required to tune the physical properties of the nanodevices. Also, novel precursor molecules are needed to extend the range of materials that is accessible by FEBID.

Lately, progress towards an optimal control of FEBID has been achieved by in-depth studies of the underlying physical and chemical processes. Detailed studies of the electron-induced and thermal chemistry inherent in FEBID are the basis for a targeted design and synthesis of novel precursor molecules. They also guide the development of optimized processes for in situ or post-deposition purification of the deposits or contribute to the development of even more advanced approaches based on electron-enhanced atomic layer deposition (EE-ALD), allowing for thickness control with utmost precision.

The relevance of this insight, however, extends beyond FEBID. As highlighted by the recent Marie Skłodowska-Curie Innovative Training Network ELENA, similar reactions, this time triggered by electrons released upon photoabsorption, contribute to the conversion of novel resist materials for extreme ultraviolet lithography (EUVL), a state-of-the-art tool at the forefront of nanofabrication.

This Special Issue invites the leading experts in the fields of electron-induced nanofabrication to submit their novel and original research. It thus aims at highlighting recent progress in fundamental understanding and performance of these highly topical processes.

Prof. Dr. Petra Swiderek
Dr. Ivo Utke
Prof. Dr. Oddur Ingólfsson
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Nanomaterials is an international peer-reviewed open access semimonthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2900 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • electron-induced chemistry of FEBID precursors
  • focused electron-beam-induced deposition (FEBID)
  • focused electron-beam-induced processing (FEBIP)
  • electron-beam-induced surface activation (EBISA)
  • electron-enhanced atomic layer deposition (EE-ALD)
  • deposit purification and functionalization
  • electron-induced reactions in EUVL resists
  • surface science studies

Published Papers (11 papers)

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Research

12 pages, 7202 KiB  
Article
3D Magnonic Conduits by Direct Write Nanofabrication
by Sebastian Lamb-Camarena, Fabrizio Porrati, Alexander Kuprava, Qi Wang, Michal Urbánek, Sven Barth, Denys Makarov, Michael Huth and Oleksandr V. Dobrovolskiy
Nanomaterials 2023, 13(13), 1926; https://doi.org/10.3390/nano13131926 - 24 Jun 2023
Viewed by 1068
Abstract
Magnonics is a rapidly developing domain of nanomagnetism, with application potential in information processing systems. Realisation of this potential and miniaturisation of magnonic circuits requires their extension into the third dimension. However, so far, magnonic conduits are largely limited to thin films and [...] Read more.
Magnonics is a rapidly developing domain of nanomagnetism, with application potential in information processing systems. Realisation of this potential and miniaturisation of magnonic circuits requires their extension into the third dimension. However, so far, magnonic conduits are largely limited to thin films and 2D structures. Here, we introduce 3D magnonic nanoconduits fabricated by the direct write technique of focused-electron-beam induced deposition (FEBID). We use Brillouin light scattering (BLS) spectroscopy to demonstrate significant qualitative differences in spatially resolved spin-wave resonances of 2D and 3D nanostructures, which originates from the geometrically induced non-uniformity of the internal magnetic field. This work demonstrates the capability of FEBID as an additive manufacturing technique to produce magnetic 3D nanoarchitectures and presents the first report of BLS spectroscopy characterisation of FEBID conduits. Full article
(This article belongs to the Special Issue Nanomaterials Fabricated by Electron-Beam-Induced Deposition and Related Processes)
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14 pages, 2133 KiB  
Article
Ligand Size and Carbon-Chain Length Study of Silver Carboxylates in Focused Electron-Beam-Induced Deposition
by Jakub Jurczyk, Katja Höflich, Katarzyna Madajska, Luisa Berger, Leo Brockhuis, Thomas Edward James Edwards, Czesław Kapusta, Iwona B. Szymańska and Ivo Utke
Nanomaterials 2023, 13(9), 1516; https://doi.org/10.3390/nano13091516 - 29 Apr 2023
Cited by 1 | Viewed by 1276
Abstract
Gas-assisted focused electron-beam-induced deposition is a versatile tool for the direct writing of complex-shaped nanostructures with unprecedented shape fidelity and resolution. While the technique is well-established for various materials, the direct electron beam writing of silver is still in its infancy. Here, we [...] Read more.
Gas-assisted focused electron-beam-induced deposition is a versatile tool for the direct writing of complex-shaped nanostructures with unprecedented shape fidelity and resolution. While the technique is well-established for various materials, the direct electron beam writing of silver is still in its infancy. Here, we examine and compare five different silver carboxylates, three perfluorinated: [Ag2(µ-O2CCF3)2], [Ag2(µ-O2CC2F5)2], and [Ag2(µ-O2CC3F7)2], and two containing branched substituents: [Ag2(µ-O2CCMe2Et)2] and [Ag2(µ-O2CtBu)2], as potential precursors for focused electron-beam-induced deposition. All of the compounds show high sensitivity to electron dissociation and efficient dissociation of Ag-O bonds. The as-deposited materials have silver contents from 42 at.% to above 70 at.% and are composed of silver nano-crystals with impurities of carbon and fluorine between them. Precursors with the shortest carbon-fluorine chain ligands yield the highest silver contents. In addition, the deposited silver content depends on the balance of electron-induced ligand co-deposition and ligand desorption. For all of the tested compounds, low electron flux was related to high silver content. Our findings demonstrate that silver carboxylates constitute a promising group of precursors for gas-assisted focused electron beam writing of high silver content materials. Full article
(This article belongs to the Special Issue Nanomaterials Fabricated by Electron-Beam-Induced Deposition and Related Processes)
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17 pages, 4276 KiB  
Article
Fast and Efficient Simulation of the FEBID Process with Thermal Effects
by Alexander Kuprava and Michael Huth
Nanomaterials 2023, 13(5), 858; https://doi.org/10.3390/nano13050858 - 25 Feb 2023
Cited by 1 | Viewed by 1116
Abstract
Focused electron-beam-induced deposition (FEBID) is a highly versatile direct-write approach with particular strengths in the 3D nanofabrication of functional materials. Despite its apparent similarity to other 3D printing approaches, non-local effects related to precursor depletion, electron scattering and sample heating during the 3D [...] Read more.
Focused electron-beam-induced deposition (FEBID) is a highly versatile direct-write approach with particular strengths in the 3D nanofabrication of functional materials. Despite its apparent similarity to other 3D printing approaches, non-local effects related to precursor depletion, electron scattering and sample heating during the 3D growth process complicate the shape-true transfer from a target 3D model to the actual deposit. Here, we describe an efficient and fast numerical approach to simulate the growth process, which allows for a systematic study of the influence of the most important growth parameters on the resulting shape of the 3D structures. The precursor parameter set derived in this work for the precursor Me3PtCpMe enables a detailed replication of the experimentally fabricated nanostructure, taking beam-induced heating into account. The modular character of the simulation approach allows for additional future performance increases using parallelization or drawing on the use of graphics cards. Ultimately, beam-control pattern generation for 3D FEBID will profit from being routinely combined with this fast simulation approach for optimized shape transfer. Full article
(This article belongs to the Special Issue Nanomaterials Fabricated by Electron-Beam-Induced Deposition and Related Processes)
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14 pages, 3730 KiB  
Article
Selected Area Deposition of High Purity Gold for Functional 3D Architectures
by John Lasseter, Philip D. Rack and Steven J. Randolph
Nanomaterials 2023, 13(4), 757; https://doi.org/10.3390/nano13040757 - 17 Feb 2023
Viewed by 1833
Abstract
Selected area deposition of high purity gold films onto nanoscale 3D architectures is highly desirable as gold is conductive, inert, plasmonically active, and can be functionalized with thiol chemistries, which are useful in many biological applications. Here, we show that high-purity gold coatings [...] Read more.
Selected area deposition of high purity gold films onto nanoscale 3D architectures is highly desirable as gold is conductive, inert, plasmonically active, and can be functionalized with thiol chemistries, which are useful in many biological applications. Here, we show that high-purity gold coatings can be selectively grown with the Me2Au (acac) precursor onto nanoscale 3D architectures via a pulsed laser pyrolytic chemical vapor deposition process. The selected area of deposition is achieved due to the high thermal resistance of the nanoscale geometries. Focused electron beam induced deposits (FEBID) and carbon nanofibers are functionalized with gold coatings, and we demonstrate the effects that laser irradiance, pulse width, and precursor pressure have on the growth rate. Furthermore, we demonstrate selected area deposition with a feature-targeting resolutions of ~100 and 5 µm, using diode lasers coupled to a multimode (915 nm) and single mode (785 nm) fiber optic, respectively. The experimental results are rationalized via finite element thermal modeling. Full article
(This article belongs to the Special Issue Nanomaterials Fabricated by Electron-Beam-Induced Deposition and Related Processes)
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19 pages, 5643 KiB  
Article
3D Nanoprinting of All-Metal Nanoprobes for Electric AFM Modes
by Lukas Matthias Seewald, Jürgen Sattelkow, Michele Brugger-Hatzl, Gerald Kothleitner, Hajo Frerichs, Christian Schwalb, Stefan Hummel and Harald Plank
Nanomaterials 2022, 12(24), 4477; https://doi.org/10.3390/nano12244477 - 17 Dec 2022
Cited by 3 | Viewed by 1857
Abstract
3D nanoprinting via focused electron beam induced deposition (FEBID) is applied for fabrication of all-metal nanoprobes for atomic force microscopy (AFM)-based electrical operation modes. The 3D tip concept is based on a hollow-cone (HC) design, with all-metal material properties and apex radii in [...] Read more.
3D nanoprinting via focused electron beam induced deposition (FEBID) is applied for fabrication of all-metal nanoprobes for atomic force microscopy (AFM)-based electrical operation modes. The 3D tip concept is based on a hollow-cone (HC) design, with all-metal material properties and apex radii in the sub-10 nm regime to allow for high-resolution imaging during morphological imaging, conductive AFM (CAFM) and electrostatic force microscopy (EFM). The study starts with design aspects to motivate the proposed HC architecture, followed by detailed fabrication characterization to identify and optimize FEBID process parameters. To arrive at desired material properties, e-beam assisted purification in low-pressure water atmospheres was applied at room temperature, which enabled the removal of carbon impurities from as-deposited structures. The microstructure of final HCs was analyzed via scanning transmission electron microscopy—high-angle annular dark field (STEM-HAADF), whereas electrical and mechanical properties were investigated in situ using micromanipulators. Finally, AFM/EFM/CAFM measurements were performed in comparison to non-functional, high-resolution tips and commercially available electric probes. In essence, we demonstrate that the proposed all-metal HCs provide the resolution capabilities of the former, with the electric conductivity of the latter onboard, combining both assets in one design. Full article
(This article belongs to the Special Issue Nanomaterials Fabricated by Electron-Beam-Induced Deposition and Related Processes)
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20 pages, 2945 KiB  
Article
Towards Improved Humidity Sensing Nanomaterials via Combined Electron and NH3 Treatment of Carbon-Rich FEBID Deposits
by Hannah Boeckers, Petra Swiderek and Markus Rohdenburg
Nanomaterials 2022, 12(24), 4455; https://doi.org/10.3390/nano12244455 - 15 Dec 2022
Cited by 1 | Viewed by 1585
Abstract
Focused Electron Beam Induced Deposition (FEBID) is a unique tool to produce nanoscale materials. The resulting deposits can be used, for instance, as humidity or strain sensors. The humidity sensing concept relies on the fact that FEBID using organometallic precursors often yields deposits [...] Read more.
Focused Electron Beam Induced Deposition (FEBID) is a unique tool to produce nanoscale materials. The resulting deposits can be used, for instance, as humidity or strain sensors. The humidity sensing concept relies on the fact that FEBID using organometallic precursors often yields deposits which consist of metal nanoparticles embedded in a carbonaceous matrix. The electrical conductivity of such materials is altered in the presence of polar molecules such as water. Herein, we provide evidence that the interaction with water can be enhanced by incorporating nitrogen in the deposit through post-deposition electron irradiation in presence of ammonia (NH3). This opens the perspective to improve and tune the properties of humidity sensors fabricated by FEBID. As a proof-of-concept experiment, we have prepared carbonaceous deposits by electron irradiation of adsorbed layers of three different precursors, namely, the aliphatic hydrocarbon n-pentane, a simple alkene (2-methyl-2-butene), and the potential Ru FEBID precursor bis(ethylcyclopentadienyl)ruthenium(II). In a subsequent processing step, we incorporated C-N bonds in the deposit by electron irradiation of adsorbed NH3. To test the resulting material with respect to its potential humidity sensing capabilities, we condensed sub-monolayer quantities of water (H2O) on the deposit and evaluated their thermal desorption behavior. The results confirm that the desorption temperature of H2O decisively depends on the degree of N incorporation into the carbonaceous residue which, in turn, depends on the chemical nature of the precursor used for deposition of the carbonaceous layer. We thus anticipate that the sensitivity of a FEBID-based humidity sensor can be tuned by a precisely timed post-deposition electron and NH3 processing step. Full article
(This article belongs to the Special Issue Nanomaterials Fabricated by Electron-Beam-Induced Deposition and Related Processes)
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13 pages, 6552 KiB  
Article
Controlled Morphological Bending of 3D-FEBID Structures via Electron Beam Curing
by Anna Weitzer, Robert Winkler, David Kuhness, Gerald Kothleitner and Harald Plank
Nanomaterials 2022, 12(23), 4246; https://doi.org/10.3390/nano12234246 - 29 Nov 2022
Cited by 1 | Viewed by 1238
Abstract
Focused electron beam induced deposition (FEBID) is one of the few additive, direct-write manufacturing techniques capable of depositing complex 3D nanostructures. In this work, we explore post-growth electron beam curing (EBC) of such platinum-based FEBID deposits, where free-standing, sheet-like elements were deformed in [...] Read more.
Focused electron beam induced deposition (FEBID) is one of the few additive, direct-write manufacturing techniques capable of depositing complex 3D nanostructures. In this work, we explore post-growth electron beam curing (EBC) of such platinum-based FEBID deposits, where free-standing, sheet-like elements were deformed in a targeted manner by local irradiation without precursor gas present. This process diminishes the volumes of exposed regions and alters nano-grain sizes, which was comprehensively characterized by SEM, TEM and AFM and complemented by Monte Carlo simulations. For obtaining controlled and reproducible conditions for smooth, stable morphological bending, a wide range of parameters were varied, which will here be presented as a first step towards using local EBC as a tool to realize even more complex nano-architectures, beyond current 3D-FEBID capabilities, such as overhanging structures. We thereby open up a new prospect for future applications in research and development that could even be further developed towards functional imprinting. Full article
(This article belongs to the Special Issue Nanomaterials Fabricated by Electron-Beam-Induced Deposition and Related Processes)
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11 pages, 2087 KiB  
Article
Charge Transport inside TiO2 Memristors Prepared via FEBID
by Markus Baranowski, Roland Sachser, Bratislav P. Marinković, Stefan Dj. Ivanović and Michael Huth
Nanomaterials 2022, 12(23), 4145; https://doi.org/10.3390/nano12234145 - 23 Nov 2022
Cited by 3 | Viewed by 1288
Abstract
We fabricated memristive devices using focused electron beam-induced deposition (FEBID) as a direct-writing technique employing a Pt/TiO2/Pt sandwich layer device configuration. Pinching in the measured current-voltage characteristics (i-v), the characteristic fingerprint of memristive behavior was clearly observed. The temperature [...] Read more.
We fabricated memristive devices using focused electron beam-induced deposition (FEBID) as a direct-writing technique employing a Pt/TiO2/Pt sandwich layer device configuration. Pinching in the measured current-voltage characteristics (i-v), the characteristic fingerprint of memristive behavior was clearly observed. The temperature dependence was measured for both high and low resistive states in the range from 290 K down to about 2 K, showing a stretched exponential behavior characteristic of Mott-type variable-range hopping. From this observation, a valence change mechanism of the charge transport inside the TiO2 layer can be deduced. Full article
(This article belongs to the Special Issue Nanomaterials Fabricated by Electron-Beam-Induced Deposition and Related Processes)
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20 pages, 2650 KiB  
Article
On the Electron-Induced Reactions of (CH3)AuP(CH3)3: A Combined UHV Surface Science and Gas-Phase Study
by Ali Kamali, Elif Bilgilisoy, Alexander Wolfram, Thomas Xaver Gentner, Gerd Ballmann, Sjoerd Harder, Hubertus Marbach and Oddur Ingólfsson
Nanomaterials 2022, 12(15), 2727; https://doi.org/10.3390/nano12152727 - 08 Aug 2022
Cited by 2 | Viewed by 1702
Abstract
Focused-electron-beam-induced deposition (FEBID) is a powerful nanopatterning technique where electrons trigger the local dissociation of precursor molecules, leaving a deposit of non-volatile dissociation products. The fabrication of high-purity gold deposits via FEBID has significant potential to expand the scope of this method. For [...] Read more.
Focused-electron-beam-induced deposition (FEBID) is a powerful nanopatterning technique where electrons trigger the local dissociation of precursor molecules, leaving a deposit of non-volatile dissociation products. The fabrication of high-purity gold deposits via FEBID has significant potential to expand the scope of this method. For this, gold precursors that are stable under ambient conditions but fragment selectively under electron exposure are essential. Here, we investigated the potential gold precursor (CH3)AuP(CH3)3 using FEBID under ultra-high vacuum (UHV) and spectroscopic characterization of the corresponding metal-containing deposits. For a detailed insight into electron-induced fragmentation, the deposit’s composition was compared with the fragmentation pathways of this compound through dissociative ionization (DI) under single-collision conditions using quantum chemical calculations to aid the interpretation of these data. Further comparison was made with a previous high-vacuum (HV) FEBID study of this precursor. The average loss of about 2 carbon and 0.8 phosphor per incident was found in DI, which agreed well with the carbon content of the UHV FEBID deposits. However, the UHV deposits were found to be as good as free of phosphor, indicating that the trimethyl phosphate is a good leaving group. Differently, the HV FEBID experiments showed significant phosphor content in the deposits. Full article
(This article belongs to the Special Issue Nanomaterials Fabricated by Electron-Beam-Induced Deposition and Related Processes)
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17 pages, 2276 KiB  
Article
In Situ Time-of-Flight Mass Spectrometry of Ionic Fragments Induced by Focused Electron Beam Irradiation: Investigation of Electron Driven Surface Chemistry inside an SEM under High Vacuum
by Jakub Jurczyk, Lex Pillatsch, Luisa Berger, Agnieszka Priebe, Katarzyna Madajska, Czesław Kapusta, Iwona B. Szymańska, Johann Michler and Ivo Utke
Nanomaterials 2022, 12(15), 2710; https://doi.org/10.3390/nano12152710 - 06 Aug 2022
Cited by 3 | Viewed by 1671
Abstract
Recent developments in nanoprinting using focused electron beams have created a need to develop analysis methods for the products of electron-induced fragmentation of different metalorganic compounds. The original approach used here is termed focused-electron-beam-induced mass spectrometry (FEBiMS). FEBiMS enables the investigation of the [...] Read more.
Recent developments in nanoprinting using focused electron beams have created a need to develop analysis methods for the products of electron-induced fragmentation of different metalorganic compounds. The original approach used here is termed focused-electron-beam-induced mass spectrometry (FEBiMS). FEBiMS enables the investigation of the fragmentation of electron-sensitive materials during irradiation within the typical primary electron beam energy range of a scanning electron microscope (0.5 to 30 keV) and high vacuum range. The method combines a typical scanning electron microscope with an ion-extractor-coupled mass spectrometer setup collecting the charged fragments generated by the focused electron beam when impinging on the substrate material. The FEBiMS of fragments obtained during 10 keV electron irradiation of grains of silver and copper carboxylates and shows that the carboxylate ligand dissociates into many smaller volatile fragments. Furthermore, in situ FEBiMS was performed on carbonyls of ruthenium (solid) and during electron-beam-induced deposition, using tungsten carbonyl (inserted via a gas injection system). Loss of carbonyl ligands was identified as the main channel of dissociation for electron irradiation of these carbonyl compounds. The presented results clearly indicate that FEBiMS analysis can be expanded to organic, inorganic, and metal organic materials used in resist lithography, ice (cryo-)lithography, and focused-electron-beam-induced deposition and becomes, thus, a valuable versatile analysis tool to study both fundamental and process parameters in these nanotechnology fields. Full article
(This article belongs to the Special Issue Nanomaterials Fabricated by Electron-Beam-Induced Deposition and Related Processes)
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21 pages, 5462 KiB  
Article
Electron-Induced Decomposition of Different Silver(I) Complexes: Implications for the Design of Precursors for Focused Electron Beam Induced Deposition
by Petra Martinović, Markus Rohdenburg, Aleksandra Butrymowicz, Selma Sarigül, Paula Huth, Reinhard Denecke, Iwona B. Szymańska and Petra Swiderek
Nanomaterials 2022, 12(10), 1687; https://doi.org/10.3390/nano12101687 - 15 May 2022
Cited by 3 | Viewed by 1877
Abstract
Focused electron beam induced deposition (FEBID) is a versatile tool to produce nanostructures through electron-induced decomposition of metal-containing precursor molecules. However, the metal content of the resulting materials is often low. Using different Ag(I) complexes, this study shows that the precursor performance depends [...] Read more.
Focused electron beam induced deposition (FEBID) is a versatile tool to produce nanostructures through electron-induced decomposition of metal-containing precursor molecules. However, the metal content of the resulting materials is often low. Using different Ag(I) complexes, this study shows that the precursor performance depends critically on the molecular structure. This includes Ag(I) 2,2-dimethylbutanoate, which yields high Ag contents in FEBID, as well as similar aliphatic Ag(I) carboxylates, aromatic Ag(I) benzoate, and the acetylide Ag(I) 3,3-dimethylbutynyl. The compounds were sublimated on inert surfaces and their electron-induced decomposition was monitored by electron-stimulated desorption (ESD) experiments in ultrahigh vacuum and by reflection−absorption infrared spectroscopy (RAIRS). The results reveal that Ag(I) carboxylates with aliphatic side chains are particularly favourable for FEBID. Following electron impact ionization, they fragment by loss of volatile CO2. The remaining alkyl radical converts to a stable and equally volatile alkene. The lower decomposition efficiency of Ag(I) benzoate and Ag(I) 3,3-dimethylbutynyl is explained by calculated average local ionization energies (ALIE) which reveal that ionization from the unsaturated carbon units competes with ionization from the coordinate bond to Ag. This can stabilise the ionized complex with respect to fragmentation. This insight provides guidance with respect to the design of novel FEBID precursors. Full article
(This article belongs to the Special Issue Nanomaterials Fabricated by Electron-Beam-Induced Deposition and Related Processes)
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