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Micromachines
Special Issues
Ultrasonic Transducers and Sensors: Design, Fabrication and Applications
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Ultrasonic Transducers and Sensors: Design, Fabrication and Applications

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E：Engineering and Technology".

Deadline for manuscript submissions: closed (31 October 2022) | Viewed by 10098

Special Issue Editors

Dr. Yu-Jen Wang

E-Mail Website1 Website2
Guest Editor
Department of Mechanical and Electromechanical Engineering, National Sun Yat-sen University, Tainan, Taiwan
Interests: PZT actuator; energy harvester; force/torque sensor; ultrasonic transducer; precision machinery; parallel kinematic mechanism
Special Issues, Collections and Topics in MDPI journals
Dr. Tien-Fu Lu

E-Mail Website
Guest Editor
School of Mechanical Engineering, The University of Adelaide, Adelaide, Australia
Interests: nano-positioning and measurement technologies (piezoelectric actuator/sensor/energy harvester, flexure hinges and compliant mechanisms); robotics
Prof. Dr. Sheng-Chih Shen

E-Mail Website
Guest Editor
Department of Systems and Naval Mechatronic Engineering, National Cheng Kung University, Tainan, Taiwan
Interests: PVDF fibers device sensor; underwater sensor; nanowire 3D array; piezoelectric polymer
Dr. Shyang-Jye Chang

E-Mail Website
Guest Editor
Department of Mechanical Engineering, National Yunlin University of Science and Technology, Douliou, Taiwan
Interests: piezo actuator; 3D printing (SLM); deep learning

Special Issue Information

Dear Colleagues,

There is a variety of ultrasonic transducers and sensors used for a wide range of applications, such as actuating, energy harvesting, force sensing, scanning and imaging, these applications showing the advantages and penetration of ultrasonic devices. The fabrication process and applied materials, including polymers, bulk ceramics and thin films, are crucial issues. The design, analysis and mechanisms of ultrasonic transducers and sensors are also core technology topics requiring in-depth research. In this Special Issue, original research articles and reviews are welcome, areas of research including, but not limit to:

  • Ultrasonic devices: actuators, sensors, scanners, integrated systems and energy harvesters.
  • Designs: models, simulation methods, methodologies and calibrations.
  • New materials or fabrication processes of ultrasonic devices.
  • Novel applications.

Dr. Yu-Jen Wang
Dr. Tien-Fu Lu
Prof. Dr. Sheng-Chih Shen
Dr. Shyang-Jye Chang
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • ultrasonic actuator
  • piezoelectric sensor
  • ultrasonic transducer
  • piezoelectric energy harvester
  • acoustic device
  • ultrasound imaging
  • biosensing
  • PVDF
  • piezo ceramic
  • additive manufacturing
  • smart systems

Published Papers (7 papers)

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Research

33 pages, 3175 KiB  
Article
Mechanics of Small-Scale Spherical Inclusions Using Nonlocal Poroelasticity Integrated with Light Gradient Boosting Machine
by Ali Farajpour and Wendy V. Ingman
Micromachines 2024, 15(2), 210; https://doi.org/10.3390/mi15020210 - 30 Jan 2024
Viewed by 684
Abstract
Detecting inclusions in materials at small scales is of high importance to ensure the quality, structural integrity and performance efficiency of microelectromechanical machines and products. Ultrasound waves are commonly used as a non-destructive method to find inclusions or structural flaws in a material. [...] Read more.
Detecting inclusions in materials at small scales is of high importance to ensure the quality, structural integrity and performance efficiency of microelectromechanical machines and products. Ultrasound waves are commonly used as a non-destructive method to find inclusions or structural flaws in a material. Mathematical continuum models can be used to enable ultrasound techniques to provide quantitative information about the change in the mechanical properties due to the presence of inclusions. In this paper, a nonlocal size-dependent poroelasticity model integrated with machine learning is developed for the description of the mechanical behaviour of spherical inclusions under uniform radial compression. The scale effects on fluid pressure and radial displacement are captured using Eringen’s theory of nonlocality. The conservation of mass law is utilised for both the solid matrix and fluid content of the poroelastic material to derive the storage equation. The governing differential equations are derived by decoupling the equilibrium equation and effective stress–strain relations in the spherical coordinate system. An accurate numerical solution is obtained using the Galerkin discretisation technique and a precise integration method. A Dormand–Prince solution is also developed for comparison purposes. A light gradient boosting machine learning model in conjunction with the nonlocal model is used to extract the pattern of changes in the mechanical response of the poroelastic inclusion. The optimised hyperparameters are calculated by a grid search cross validation. The modelling estimation power is enhanced by considering nonlocal effects and applying machine learning processes, facilitating the detection of ultrasmall inclusions within a poroelastic medium at micro/nanoscales. Full article
(This article belongs to the Special Issue Ultrasonic Transducers and Sensors: Design, Fabrication and Applications)
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12 pages, 8691 KiB  
Article
Dynamic Characteristic Model of Giant Magnetostrictive Transducer with Double Terfenol-D Rods
by Yafang Li, Xia Dong and Xiaodong Yu
Micromachines 2023, 14(6), 1103; https://doi.org/10.3390/mi14061103 - 24 May 2023
Viewed by 904
Abstract
Giant magnetostrictive transducer can be widely used in active vibration control, micro-positioning mechanism, energy harvesting system, and ultrasonic machining. Hysteresis and coupling effects are present in transducer behavior. The accurate prediction of output characteristics is critical for a transducer. A dynamic characteristic model [...] Read more.
Giant magnetostrictive transducer can be widely used in active vibration control, micro-positioning mechanism, energy harvesting system, and ultrasonic machining. Hysteresis and coupling effects are present in transducer behavior. The accurate prediction of output characteristics is critical for a transducer. A dynamic characteristic model of a transducer is proposed, by providing a modeling methodology capable of characterizing the nonlinearities. To attain this objective, the output displacement, acceleration, and force are discussed, the effects of operating conditions on the performance of Terfenol-D are studied, and a magneto-mechanical model for the behavior of transducer is proposed. A prototype of the transducer is fabricated and tested to verify the proposed model. The output displacement, acceleration, and force have been theoretically and experimentally studied at different working conditions. The results show that, the displacement amplitude, acceleration amplitude, and force amplitude are about 49 μm, 1943 m/s2, and 20 N. The error between the model and experimental results are 3 μm, 57 m/s2, and 0.2 N. Calculation results and experimental results show a good agreement. Full article
(This article belongs to the Special Issue Ultrasonic Transducers and Sensors: Design, Fabrication and Applications)
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14 pages, 5694 KiB  
Article
Study on SAW Methane Sensor Based on Cryptophane-A Composite Film
by Xinlei Liu, Bin Shen, Leiming Jiang, Haiyang Yang, Chunbo Jin and Tianshun Zhou
Micromachines 2023, 14(2), 266; https://doi.org/10.3390/mi14020266 - 20 Jan 2023
Cited by 3 | Viewed by 1405
Abstract
Surface Acoustic Wave (SAW) methane-sensing technology is a new way to detect methane at room temperature. However, the material and structure of the sensitive film are the important factors affecting the detection performance of the sensor. In this paper—with a SAW methane sensor [...] Read more.
Surface Acoustic Wave (SAW) methane-sensing technology is a new way to detect methane at room temperature. However, the material and structure of the sensitive film are the important factors affecting the detection performance of the sensor. In this paper—with a SAW methane sensor using graphene–nickel cavitation—a composite film is proposed, which can work at room temperature. A delay linear dual-channel differential oscillator with center frequency of 204.3 MHz and insertion loss of −5.658 dB was designed; Cryptophane-A material was prepared by the “three-step method”. The composite sensitive film was synthesized by a drop coating method, electrochemical deposition method and electroplating method. The composite film was characterized by SEM. The sensor performance test system and gas sensitivity test system were constructed to determine the response performance of the sensor at concentrations of 0~5% CH4. The results showed that the sensor had a good response recovery performance in the test concentration range, and the frequency offset was positively correlated with methane concentration. The 90% average response time and recovery times were 41.2 s and 57 s, respectively. The sensor sensitivity was 809.4 ± 6.93 Hz/(1% CH4). This study provides a good theoretical basis for the development of surface acoustic-wave methane sensors. Full article
(This article belongs to the Special Issue Ultrasonic Transducers and Sensors: Design, Fabrication and Applications)
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10 pages, 2849 KiB  
Article
Thermal Analysis of Terfenol-D Rods with Different Structures
by Qiang Liu and Xiping He
Micromachines 2023, 14(1), 216; https://doi.org/10.3390/mi14010216 - 14 Jan 2023
Cited by 1 | Viewed by 1267
Abstract
To reduce the heating of the Terfenol-D rod and evaluate its working efficiency, six kinds of Terfenol-D rods were designed, and the temperature field of the rods was simulated and calculated using the finite element method to obtain the temperature distribution. The results [...] Read more.
To reduce the heating of the Terfenol-D rod and evaluate its working efficiency, six kinds of Terfenol-D rods were designed, and the temperature field of the rods was simulated and calculated using the finite element method to obtain the temperature distribution. The results showed that the untreated rod had the highest temperature; the temperature was higher in the middle and lower at both ends; higher on the outer diameter surface; and lower on the inside. When compared to the untreated rod, the temperatures of sliced rods and slit rods decreased, and the temperature of sliced rods was lower than that of slit rods; the temperature of slit rods was higher in the middle and lower at both ends; the temperature distribution of sliced rods was more uniform relatively; the slice treatment rod had the lowest temperature and the best heat suppression effect. Three structural rods were chosen and manufactured from a total of six that were tested. It shows that the temperature of all rods was higher in the middle and lower at both ends after 30 min of operation. The actual temperature of untreated rod was 34 °C, the actual temperature of radially slit rod was 32 °C, and the actual temperature of sliced rod at both ends was 28 °C. The tested temperature distributions of three rods agreed with the calculated ones. Full article
(This article belongs to the Special Issue Ultrasonic Transducers and Sensors: Design, Fabrication and Applications)
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11 pages, 3558 KiB  
Article
Magnetic Energy Losses and Temperature Control System for Giant Magnetostrictive Transducer
by Yafang Li, Xia Dong and Xiaodong Yu
Micromachines 2023, 14(1), 177; https://doi.org/10.3390/mi14010177 - 10 Jan 2023
Cited by 4 | Viewed by 988
Abstract
The giant magnetostrictive transducer (GMT) can be widely used in ultra-precision machining in precision-fluid-control fields. The temperature stability of GMT is critical for the reliable generation of output characteristics. This study presents a magnetic-energy-losses method for the GMT working at high frequency, and [...] Read more.
The giant magnetostrictive transducer (GMT) can be widely used in ultra-precision machining in precision-fluid-control fields. The temperature stability of GMT is critical for the reliable generation of output characteristics. This study presents a magnetic-energy-losses method for the GMT working at high frequency, and designs a temperature-stable control system to improve energy transmission and heat dissipation. Based on the loss-separation theory and experimental data, the temperature-rise characteristics of the transducer are analyzed. The temperature rise considers the effects of hysteresis loss, the eddy-current loss, the anomalous loss and the Joule heat. A constitutive relation among losses, frequency and magnetic-flux density is given. The temperature distribution of the transducer can be quickly and accurately calculated, using the constitutive equation. According to the convective heat-transfer and the thermal-compensation method, a temperature-control system is designed. A prototype of the system is then fabricated and tested to verify the feasibility and efficacy of the proposed design methods. The results demonstrate that the output- displacement deviation can be controlled at less than 0.65 μm, and the temperature difference is less than 3 °C. Full article
(This article belongs to the Special Issue Ultrasonic Transducers and Sensors: Design, Fabrication and Applications)
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12 pages, 5222 KiB  
Article
Research on Effects of Dust Removal Using Ultrasonic Vibrators
by Chong Li, Ruimin Chen and Da Gao
Micromachines 2022, 13(12), 2155; https://doi.org/10.3390/mi13122155 - 06 Dec 2022
Cited by 2 | Viewed by 1986
Abstract
This work presents two types of ultrasonic vibrators in order to comparatively analyze their dust removal properties for microscopic particles. The vibrators were constructed by pasting four piezoceramic (PZT) plates onto the upper surface of a rectangular metal substrate. The longitudinal or bending [...] Read more.
This work presents two types of ultrasonic vibrators in order to comparatively analyze their dust removal properties for microscopic particles. The vibrators were constructed by pasting four piezoceramic (PZT) plates onto the upper surface of a rectangular metal substrate. The longitudinal or bending mode is excited to form a standing wave in the vibrators. The superposition of the longitudinal and bending modes generates a traveling wave. Because the bending and longitudinal vibrations are two different modes, the process of tuning their resonant frequencies to be close is necessary for the traveling wave vibrator. The structural parameters of the vibrators were optimized by the finite element method. During experiments, the dust removal performances of these vibrators were evaluated by dumping cigarette ash or alumina powders randomly on the surface of the prototype vibrators. The measured experimental results indicate that the dust removal performance of the traveling wave oscillator is better than that of the standing wave oscillator. The two operating modes of the traveling wave vibrator produce orthogonal vibration displacements on the vibrator driving points. Vibration in one direction generates friction force, which drives adherent dust particles. Vibration in the other direction provides intermittent contact pressure between the vibrators and deposited dust particles. The synthesized elliptical motion of vibrator particles helps to improve the dust removal characteristics of the vibrators. The simple structure of the developed vibrators makes them the most promising candidates for dust removal from engines, camera lenses, car windows, and navigation systems. Full article
(This article belongs to the Special Issue Ultrasonic Transducers and Sensors: Design, Fabrication and Applications)
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10 pages, 2865 KiB  
Article
Simulation Study of FEUDT Structure Optimization and Sensitive Film Loading of SAW Devices
by Shen Bin, Haiyang Yang, Leiming Jiang and Xinlei Liu
Micromachines 2022, 13(10), 1643; https://doi.org/10.3390/mi13101643 - 30 Sep 2022
Cited by 1 | Viewed by 1437
Abstract
In order to further improve the degree of frequency response of the surface acoustic wave (SAW) sensor for gas detection, the structure of the forked-finger transducer was analyzed, and its optimal structural parameters were simulated and designed. The simulation model of the unidirectional [...] Read more.
In order to further improve the degree of frequency response of the surface acoustic wave (SAW) sensor for gas detection, the structure of the forked-finger transducer was analyzed, and its optimal structural parameters were simulated and designed. The simulation model of the unidirectional fork-finger transducer is established by using COMSOL finite element software. The thickness of the piezoelectric substrate, the electrode structure and material, and the thickness of the coating film are optimized and simulated. The results show that: the optimal thickness of the piezoelectric substrate is 3λ. The optimal thickness ratio and the lay-up ratio of the forked-finger electrode are 0.02 and 0.5, respectively. The Al electrode is more suitable as the a forked-finger electrode material compared to Cu, Au and Pt materials. Under the same conditions, the metal oxide-sensitive film (ZnO and TiO2) has a higher frequency response than the polymer-sensitive film (polyisobutylene and polystyrene), and the best sensitive film thickness range is 0.5~1 μm. Full article
(This article belongs to the Special Issue Ultrasonic Transducers and Sensors: Design, Fabrication and Applications)
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