Microplasma technology and applications in MEMS
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E：Engineering and Technology".
Deadline for manuscript submissions: closed (31 August 2021) | Viewed by 3169
Special Issue Editor
Special Issue Information
Dear colleagues,
Microplasmas, defined as plasmas where at least one dimension is in the submillimeter range, include microarcs and microsparks, which are generated by electrical breakdown in gases and in liquids. Microplasma has attracted significant attention from various fields owing to its unique characteristics, like high pressure operation, non-equilibrium chemistry, continuous-flow, microscale geometry, and the self-organization phenomenon. The field of microplasmas gained recognition as a well-defined area of research and application within the larger field of plasma science and technology about 20 years ago. Since then, the activity in microplasma research and applications has continuously increased to sensors, biomedical devices, light source, etc.
This Special Issue seeks research papers and review articles that focus on microplasma physics, microplasma generation technology, and their applications. The scope covers all the relevant topics, including (but not limited to): environmental applications, surface modifications, micromachining technology, nanomaterial synthesis, micro and nano machining fabrication.
Prof. Dr. Kangil Kim
Guest Editor
Manuscript Submission Information
Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.
Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.
Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.
Keywords
- Microplasma physics
- Microplasma generation
- Microplasma sensors
- Surface modification
- Microplasma applications
- Plasma fabirication
