MEMS Microgrippers and Their Applications

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".

Deadline for manuscript submissions: closed (30 April 2023) | Viewed by 1767

Special Issue Editors


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Guest Editor
Robotics and Intelligence Machines Research Group, School of Engineering, Universidad Don Bosco (UDB), Soyapango, El Salvador
Interests: robotics; sensors; exoskeletons robots; MEMS; computer vision

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Guest Editor
School of Engineering, Science and Technology, Universidad del Rosario, Bogotá, Colombia
Interests: human-robot interaction; healthcare robotics; rehabilitation robotics; robotic systems

Special Issue Information

Dear Colleagues,

The use of microelectromechanical systems (MEMS) has grown in recent years and has been applied in many areas of engineering. Due to their compact size, MEMS-microgripper-based systems represent essential tools in the fields of micromanipulation and micro-assembly, including manufacturing, electronics, the search for new materials, and the medical and biological fields. Moreover, MEMS-microgripper systems include microactuators based on electromagnetic, pneumatic, electrostatic, piezoelectric, electrothermal, and shape memory alloy (SMA) principles. On the other hand, micro grippers are required to be efficient and have precise control, a low actuation temperature, and low power consumption. Thus, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on: (1) novel designs, fabrication, control, and modeling of MEMS-microgripper systems; and (2) new developments in applying MEMS microgrippers of any kind in consumer electronics, industry, the search for new materials, and in the medical and biological fields.

Prof. Dr. Manuel Cardona
Prof. Dr. Carlos Cifuentes
Guest Editors

Manuscript Submission Information

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Keywords

  • MEMS
  • microgrippers
  • micromanipulation
  • microactuators

Published Papers (1 paper)

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Research

25 pages, 9679 KiB  
Article
Thermo-Mechanical Fluid–Structure Interaction Numerical Modelling and Experimental Validation of MEMS Electrothermal Actuators for Aqueous Biomedical Applications
by Thomas Sciberras, Marija Demicoli, Ivan Grech, Bertram Mallia, Pierluigi Mollicone and Nicholas Sammut
Micromachines 2023, 14(6), 1264; https://doi.org/10.3390/mi14061264 - 17 Jun 2023
Cited by 2 | Viewed by 1028
Abstract
Recent developments in MEMS technologies have made such devices attractive for use in applications that involve precision engineering and scalability. In the biomedical industry, MEMS devices have gained popularity in recent years for use as single-cell manipulation and characterisation tools. A niche application [...] Read more.
Recent developments in MEMS technologies have made such devices attractive for use in applications that involve precision engineering and scalability. In the biomedical industry, MEMS devices have gained popularity in recent years for use as single-cell manipulation and characterisation tools. A niche application is the mechanical characterisation of single human red blood cells, which may exhibit certain pathological conditions that impart biomarkers of quantifiable magnitude that are potentially detectable via MEMS devices. Such applications come with stringent thermal and structural specifications wherein the potential device candidates must be able to function with no exceptions. This work presents a state-of-the-art numerical modelling methodology that is capable of accurately predicting MEMS device performance in various media, including aqueous ones. The method is strongly coupled in nature, whereby thermal as well as structural degrees of freedom are transferred to and from finite element and finite volume solvers at every iteration. This method therefore provides MEMS design engineers with a reliable tool that can be used in design and development stages and helps to avoid total reliability on experimental testing. The proposed numerical model is validated via a series of physical experiments. Four MEMS electrothermal actuators with cascaded V-shaped drivers are presented. With the use of the newly proposed numerical model as well as the experimental testing, the MEMS devices’ suitability for biomedical applications is confirmed. Full article
(This article belongs to the Special Issue MEMS Microgrippers and Their Applications)
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