Special Issue "Micro-Machined Thin-Film Piezoelectric Sensors"
Deadline for manuscript submissions: closed (31 January 2020) | Viewed by 14792
Interests: micro-resonators; resonant sensors; thin-film piezoelectric micro-devices; biomedical sensors
Special Issues, Collections and Topics in MDPI journals
Special Issue in Micromachines: Micro-Resonators: The Quest for Superior Performance, II
Historically, piezoelectricity has always been one of the preferred transduction mechanisms in electromechanical sensors at a macro-scale, because of the possibility of achieving significantly higher coupling efficiency in piezoelectric transducers compared to alternatives such as capacitive transducers. However, with the emergence of micro-machined sensors, capacitive transduction became the main mechanism of choice, as the integration of a suitable piezoelectric material into the microfabrication foundries turned out to be extremely complicated, and in many instances impossible. This trend started to change in the early 21st century, once a reliable deposition of high-quality piezoelectric AlN on silicon substrates was demonstrated through the sputtering process. Since then, other thin-film piezoelectric materials have been explored, and the commercial application of piezoelectric transduction for sensing has increased significantly, and this trend is expected to continue. In this Special Issue, we focus on the recent advances in the field of thin-film piezoelectric sensors.
Dr. Reza Abdolvand
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- Thin Film Piezoelectric