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Micro-Machined Thin-Film Piezoelectric Sensors
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Micro-Machined Thin-Film Piezoelectric Sensors

A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Physical Sensors".

Deadline for manuscript submissions: closed (31 January 2020) | Viewed by 16919

Special Issue Editor

Dr. Reza Abdolvand

E-Mail Website
Guest Editor
Harris Corp. Engineering Center (HEC), University of Central Florida, 4000 Central Florida Blvd. Orlando, FL 32816, USA
Interests: micro-resonators; resonant sensors; thin-film piezoelectric micro-devices; biomedical sensors
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

Historically, piezoelectricity has always been one of the preferred transduction mechanisms in electromechanical sensors at a macro-scale, because of the possibility of achieving significantly higher coupling efficiency in piezoelectric transducers compared to alternatives such as capacitive transducers. However, with the emergence of micro-machined sensors, capacitive transduction became the main mechanism of choice, as the integration of a suitable piezoelectric material into the microfabrication foundries turned out to be extremely complicated, and in many instances impossible. This trend started to change in the early 21st century, once a reliable deposition of high-quality piezoelectric AlN on silicon substrates was demonstrated through the sputtering process. Since then, other thin-film piezoelectric materials have been explored, and the commercial application of piezoelectric transduction for sensing has increased significantly, and this trend is expected to continue. In this Special Issue, we focus on the recent advances in the field of thin-film piezoelectric sensors.

Dr. Reza Abdolvand
Guest Editor

Manuscript Submission Information

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Keywords

  • Thin Film Piezoelectric
  • Electro-mechanical
  • Micro-machined
  • Sensors

Published Papers (3 papers)

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Research

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22 pages, 6419 KiB  
Article
Weakly Coupled Piezoelectric MEMS Resonators for Aerosol Sensing
by Malar Chellasivalingam, Hassan Imran, Milind Pandit, Adam M. Boies and Ashwin A. Seshia
Sensors 2020, 20(11), 3162; https://doi.org/10.3390/s20113162 - 02 Jun 2020
Cited by 18 | Viewed by 5276
Abstract
This paper successfully demonstrates the potential of weakly coupled piezoelectric MEMS (Micro-Electro-Mechanical Systems) gravimetric sensors for the detection of ultra-fine particulates. As a proof-of-principle, the detection of diesel soot particles of 100 nanometres or less is demonstrated. A practical monitoring context also exists [...] Read more.
This paper successfully demonstrates the potential of weakly coupled piezoelectric MEMS (Micro-Electro-Mechanical Systems) gravimetric sensors for the detection of ultra-fine particulates. As a proof-of-principle, the detection of diesel soot particles of 100 nanometres or less is demonstrated. A practical monitoring context also exists for diesel soot particles originating from combustion engines, as they are of serious health concern. The MEMS sensors employed in this work operate on the principle of vibration mode-localisation employing an amplitude ratio shift output metric for readout. Notably, gains are observed while comparing parametric sensitivities and the input referred stability for amplitude ratio and resonant frequency variations, demonstrating that the amplitude ratio output metric is particularly suitable for long-term measurements. The soot particle mass directly estimated using coupled MEMS resonators can be correlated to the mass, indirectly estimated using the condensation particle counter used as the reference instrument. Full article
(This article belongs to the Special Issue Micro-Machined Thin-Film Piezoelectric Sensors)
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12 pages, 4661 KiB  
Article
Flexible and Highly Sensitive Strain Sensor Based on Laser-Induced Graphene Pattern Fabricated by 355 nm Pulsed Laser
by Sung-Yeob Jeong, Yong-Won MA, Jun-Uk Lee, Gyeong-Ju Je and Bo-sung Shin
Sensors 2019, 19(22), 4867; https://doi.org/10.3390/s19224867 - 08 Nov 2019
Cited by 40 | Viewed by 5440
Abstract
A laser-induced-graphene (LIG) pattern fabricated using a 355 nm pulsed laser was applied to a strain sensor. Structural analysis and functional evaluation of the LIG strain sensor were performed by Raman spectroscopy, scanning electron microscopy (SEM) imaging, and electrical–mechanical coupled testing. The electrical [...] Read more.
A laser-induced-graphene (LIG) pattern fabricated using a 355 nm pulsed laser was applied to a strain sensor. Structural analysis and functional evaluation of the LIG strain sensor were performed by Raman spectroscopy, scanning electron microscopy (SEM) imaging, and electrical–mechanical coupled testing. The electrical characteristics of the sensor with respect to laser fluence and focal length were evaluated. The sensor responded sensitively to small deformations, had a high gauge factor of ~160, and underwent mechanical fracture at 30% tensile strain. In addition, we have applied the LIG sensor, which has high sensitivity, a simple manufacturing process, and good durability, to human finger motion monitoring. Full article
(This article belongs to the Special Issue Micro-Machined Thin-Film Piezoelectric Sensors)
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Review

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39 pages, 6380 KiB  
Review
Physics-Based Device Models and Progress Review for Active Piezoelectric Semiconductor Devices
by Hongseok Oh and Shadi A. Dayeh
Sensors 2020, 20(14), 3872; https://doi.org/10.3390/s20143872 - 11 Jul 2020
Cited by 13 | Viewed by 5474
Abstract
Piezoelectric devices transduce mechanical energy to electrical energy by elastic deformation, which distorts local dipoles in crystalline materials. Amongst electromechanical sensors, piezoelectric devices are advantageous because of their scalability, light weight, low power consumption, and readily built-in amplification and ability for multiplexing, which [...] Read more.
Piezoelectric devices transduce mechanical energy to electrical energy by elastic deformation, which distorts local dipoles in crystalline materials. Amongst electromechanical sensors, piezoelectric devices are advantageous because of their scalability, light weight, low power consumption, and readily built-in amplification and ability for multiplexing, which are essential for wearables, medical devices, and robotics. This paper reviews recent progress in active piezoelectric devices. We classify these piezoelectric devices according to the material dimensionality and present physics-based device models to describe and quantify the piezoelectric response for one-dimensional nanowires, emerging two-dimensional materials, and three-dimensional thin films. Different transduction mechanisms and state-of-the-art devices for each type of material are reviewed. Perspectives on the future applications of active piezoelectric devices are discussed. Full article
(This article belongs to the Special Issue Micro-Machined Thin-Film Piezoelectric Sensors)
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