Smart Sensors and Integration Technology for MEMS Devices
A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Intelligent Sensors".
Deadline for manuscript submissions: 15 October 2024 | Viewed by 168
Special Issue Editors
Interests: MEMS devices and integration technology; intelligent target sensing; biochip systems
2. Department of Biomedical Engineering, National University of Singapore, Singapore 119276, Singapore
Interests: MEMS technique; magnetism and magnetic nanomaterials; micro magnetic sensor and microsystem; smart sensors; biochips; bioMEMS and microfluidics
Special Issue Information
Dear Colleagues,
The MEMS industry has gained vital recognition as the electronics industry is shifting its focus from traditional sensors to MEMS technology. The explosive development of Internet of Things (IoTs) is driving the demand for MEMS devices in areas including smart grids, asset-tracking systems, and building automation. From the perspective of technology and product trends, MEMS devices are evolving to the four modernizations: intelligence, integration, low power consumption, and miniaturization. Smart sensors are evolving through intricate interactions with artificial intelligence, Bluetooth, medical, cloud computing, and other technologies. Smart sensors and MEMS include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion, and memory functions.
Potential topics include, but are not limited to, the following:
- Microfabrication technologies used for creating smart devices;
- Microactuators;
- Dynamic behavior of smart MEMS;
- MEMS integrating motion and displacement sensors;
- MEMS print heads for industrial printing;
- Photovoltaic and fuel cells in power MEMS for smart energy management;
- Radio frequency (RF) MEMS for smart communication microsystems;
- Intelligent devices and microsystems.
This Special Issue aims to collate original research and review articles on recent advances, technologies, solutions, applications, and new challenges in the field of intelligent and integrated MEMS devices.
Dr. Chong Lei
Dr. Zhen Yang
Guest Editors
Manuscript Submission Information
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Keywords
- MEMS processing techniques
- integrating microelectronics and MEMS
- design, modeling, and simulation of microdevices
- smart devices
- MEMS and smart structures
