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Chip-Based MEMS Platforms
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Chip-Based MEMS Platforms

A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Physical Sensors".

Deadline for manuscript submissions: 25 November 2024 | Viewed by 11716

Special Issue Editor

Dr. Pengcheng Xu

E-Mail Website
Guest Editor
Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
Interests: bio-chemical MEMS sensors; gas sensors; chemical sensors; resonant microcantilever; integrated micro-hotplates; MEMS manufacturing techniques; sensing materials; low power sensors

Special Issue Information

Dear Colleagues,

In order to meet the requirements of the Internet of Things (IoT), point-of-care detection (POCT), wearable electronic devices and other applications, it is urgent to develop micro sensors with low power consumption, high sensitivity, high integration, and high consistency. Emerging MEMS chip technology provides an ideal platform for the development of next-generation sensors.

This special issue of Sensors is dedicated to the latest research in the chip-based MEMS platforms. MEMS chips play a vital role in constructing low-power sensors, integrated smart sensors, consumer electronic devices, and biomedical sensors. Nowadays, the design, fabrication, and application of MEMS chips are popular research topics in the field of chip-based MEMS platforms. Recently, MEMS chips have also been successfully used to explore advanced materials and other emerging areas, such as in situ TEM and MEMS-based scientific instrumentation. In this special issue, we present the latest advances in the research field of chip-based MEMS, including the simulation, design, fabrication, and measurement of MEMS chips, as well as new applications for these chips.

Potential topics include but are not limited to the following:

  • Design and Fabrication for MEMS chips
  • Lab on a chip
  • Physical & biochemical Sensors
  • Power MEMS
  • Emerging Technologies with MEMS chips

Dr. Pengcheng Xu
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Sensors is an international peer-reviewed open access semimonthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • MEMS chips
  • integrated chips
  • gas sensors
  • biochemical sensors
  • microfluidics
  • internet of things
  • point-of-care detection
  • wearable electronics
  • consumer electronics
  • low power consumption

Published Papers (6 papers)

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Research

12 pages, 3121 KiB  
Article
Advanced In Situ TEM Microchip with Excellent Temperature Uniformity and High Spatial Resolution
by Xuelin Zhang, Yufan Zhou, Ying Chen, Ming Li, Haitao Yu and Xinxin Li
Sensors 2023, 23(9), 4470; https://doi.org/10.3390/s23094470 - 04 May 2023
Cited by 1 | Viewed by 1555
Abstract
Transmission electron microscopy (TEM) is a highly effective method for scientific research, providing comprehensive analysis and characterization. However, traditional TEM is limited to observing static material structures at room temperature within a high-vacuum environment. To address this limitation, a microchip was developed for [...] Read more.
Transmission electron microscopy (TEM) is a highly effective method for scientific research, providing comprehensive analysis and characterization. However, traditional TEM is limited to observing static material structures at room temperature within a high-vacuum environment. To address this limitation, a microchip was developed for in situ TEM characterization, enabling the real-time study of material structure evolution and chemical process mechanisms. This microchip, based on microelectromechanical System (MEMS) technology, is capable of introducing multi-physics stimulation and can be used in conjunction with TEM to investigate the dynamic changes of matter in gas and high-temperature environments. The microchip design ensures a high-temperature uniformity in the sample observation area, and a system of tests was established to verify its performance. Results show that the temperature uniformity of 10 real-time observation windows with a total area of up to 1130 μm2 exceeded 95%, and the spatial resolution reached the lattice level, even in a flowing atmosphere of 1 bar. Full article
(This article belongs to the Special Issue Chip-Based MEMS Platforms)
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12 pages, 2671 KiB  
Article
A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy
by Shuo Chen, Liuhaodong Feng, Song Guo, Yucheng Ji, Shuwen Zeng, Xinlin Peng, Yang Xu, Tianbao Hu, Zhenyu Wu and Shinan Wang
Sensors 2023, 23(3), 1276; https://doi.org/10.3390/s23031276 - 22 Jan 2023
Cited by 2 | Viewed by 2018
Abstract
To achieve a wide range and high accuracy detection of the vacuum level, for example, in an encapsulated vacuum microcavity, a composite-type MEMS Pirani gauge has been designed and fabricated. The Pirani gauge consists of two gauges of different sizes connected in series, [...] Read more.
To achieve a wide range and high accuracy detection of the vacuum level, for example, in an encapsulated vacuum microcavity, a composite-type MEMS Pirani gauge has been designed and fabricated. The Pirani gauge consists of two gauges of different sizes connected in series, with one gauge having a larger heat-sensitive area and a larger air gap for extending the lower measurable limit of pressure (i.e., the high vacuum end) and the other gauge having a smaller heat-sensitive area and a smaller air gap for extending the upper measurable limit. The high-resistivity titanium metal was chosen as the thermistor; SiNx was chosen as the dielectric layer, considering the factors relevant to simulation and manufacturing. By simulation using COMSOL Multiphysics and NI Multisim, a range of measurement of 2 × 10−2 to 2 × 105 Pa and a sensitivity of 52.4 mV/lgPa were obtained in an N2 environment. The performance of the fabricated Pirani gauge was evaluated by using an in-house made vacuum test system. In the test, the actual points of measurement range from 6.6 × 10−2 to 1.12 × 105 Pa, and the highest sensitivity is up to 457.6 mV/lgPa. The experimental results are better in the range of measurement, sensitivity, and accuracy than the simulation results. The Pirani gauge proposed in this study is simple in structure, easy to manufacture, and suitable for integration with other MEMS devices in a microcavity to monitor the vacuum level therein. Full article
(This article belongs to the Special Issue Chip-Based MEMS Platforms)
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12 pages, 8409 KiB  
Article
Bias-Repeatability Analysis of Vacuum-Packaged 3-Axis MEMS Gyroscope Using Oven-Controlled System
by Hussamud Din, Faisal Iqbal, Jiwon Park and Byeungleul Lee
Sensors 2023, 23(1), 256; https://doi.org/10.3390/s23010256 - 26 Dec 2022
Cited by 2 | Viewed by 2578
Abstract
The performance of microelectromechanical system (MEMS) inertial measurement units (IMUs) is susceptible to many environmental factors. Among different factors, temperature is one of the most challenging issues. This report reveals the bias stability analysis of an ovenized MEMS gyroscope. A micro-heater and a [...] Read more.
The performance of microelectromechanical system (MEMS) inertial measurement units (IMUs) is susceptible to many environmental factors. Among different factors, temperature is one of the most challenging issues. This report reveals the bias stability analysis of an ovenized MEMS gyroscope. A micro-heater and a control system exploiting PID/PWM were used to compensate for the bias stability variations of a commercial MEMS IMU from BOSCH “BMI 088”. A micro-heater made of gold (Au) thin film is integrated with the commercial MEMS IMU chip. A custom-designed micro-machined glass platform thermally isolates the MEMS IMU from the ambient environment and is vacuum sealed in the leadless chip carrier (LCC) package. The BMI 088 built-in temperature sensor is used for temperature sensing of the device and the locally integrated heater. The experimental results reveal that the bias repeatability of the devices has been improved significantly to achieve the target specifications, making the commercial devices suitable for navigation. Furthermore, the effect of vacuum-packaged and non-vacuum-packaged devices was compared. It was found that the bias repeatability of vacuum-packaged devices was improved by more than 60%. Full article
(This article belongs to the Special Issue Chip-Based MEMS Platforms)
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9 pages, 5456 KiB  
Article
Flat Multi-Wavelength Brillouin Erbium-Doped Fiber Laser Based on a Sagnac Loop for High-Sensitivity Sensor
by Liang Chen, Jian He and Yi Liu
Sensors 2022, 22(22), 9017; https://doi.org/10.3390/s22229017 - 21 Nov 2022
Viewed by 1852
Abstract
We have demonstrated the use of a flat multi-wavelength Brillouin erbium-doped fiber laser (MWBEFL) based on a Sagnac loop with an unpumped erbium-doped fiber (Un-EDF) as a high-sensitivity sensor. A Sagnac loop with a Un-EDF was used as power equalizer to achieve multi-wavelength [...] Read more.
We have demonstrated the use of a flat multi-wavelength Brillouin erbium-doped fiber laser (MWBEFL) based on a Sagnac loop with an unpumped erbium-doped fiber (Un-EDF) as a high-sensitivity sensor. A Sagnac loop with a Un-EDF was used as power equalizer to achieve multi-wavelength power flatness by adjusting the birefringence beat length properly. In the experiments, the best result obtained in terms of Brillouin Stokes lines and output power flatness was ±0.315 dB and the optical signal-to-noise ratio (OSNR) was 18.97 dB within a 33 nm bandwidth range from 1532.0 nm to 1565.0 nm. The flatness of the 33 nm bandwidth range varied from ±0.315 dB to ±1.38 dB and the average OSNR was about 17.51 dB. The peak power values of Brillouin Stokes lines observed under different wavelengths were extremely close and their range of fluctuation was about ±0.37 dB. These experimental results were close to our previous experimental values obtained using a passive Sagnac loop with a Un-EDF. The flat range covering almost the entire C-band has broad application prospects in high-sensitivity distributed optical fiber sensing and wavelength-division multiplexing. Full article
(This article belongs to the Special Issue Chip-Based MEMS Platforms)
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9 pages, 2411 KiB  
Article
Gas-Sensitive Characteristics of Graphene Composite Tungsten Disulfide to Ammonia
by Fei Zhao, Zhongxue Li, Yongzhong Fu and Quan Wang
Sensors 2022, 22(22), 8672; https://doi.org/10.3390/s22228672 - 10 Nov 2022
Cited by 4 | Viewed by 1212
Abstract
Two-dimensional materials have outstanding application prospects in gas sensing. By constructing composite structures of various gas-sensitive materials, more-efficient and sensitive gas sensors can be further developed. After graphene is compounded with WS2, the composite material can improve the gas detection performance. [...] Read more.
Two-dimensional materials have outstanding application prospects in gas sensing. By constructing composite structures of various gas-sensitive materials, more-efficient and sensitive gas sensors can be further developed. After graphene is compounded with WS2, the composite material can improve the gas detection performance. In this work, the adsorption energy and the electronic properties of a graphene/WS2 structure were calculated by first-principles before and after adsorption of NH3. The calculation results indicate that the bandgap of the material was appreciably reduced after NH3 was adsorbed. In addition, a graphene/WS2 gas sensor was prepared. The response of the sensor to NH3 at a concentration of 100 ppm was 2.42% and 1.73% at 30 °C and 60 °C, respectively. Combining simulation with experiment, it is feasible to use graphene composite WS2 to detect NH3, which provides a new idea for applications of graphene and other composite materials in gas sensing. Full article
(This article belongs to the Special Issue Chip-Based MEMS Platforms)
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9 pages, 1849 KiB  
Article
Highly Sensitive MEMS Sensor Using Bimetallic Pd–Ag Nanoparticles as Catalyst for Acetylene Detection
by Yuan Tian, Hui Qiao, Tao Yao, Shuguo Gao, Lujian Dai, Jun Zhao, Ying Chen and Pengcheng Xu
Sensors 2022, 22(19), 7485; https://doi.org/10.3390/s22197485 - 02 Oct 2022
Viewed by 1658
Abstract
Acetylene detection plays an important role in fault diagnosis of power transformers. However, the available dissolved gas analysis (DGA) techniques have always relied on bulky instruments and are time-consuming. Herein, a high-performance acetylene sensor was fabricated on a microhotplate chip using In2 [...] Read more.
Acetylene detection plays an important role in fault diagnosis of power transformers. However, the available dissolved gas analysis (DGA) techniques have always relied on bulky instruments and are time-consuming. Herein, a high-performance acetylene sensor was fabricated on a microhotplate chip using In2O3 as the sensing material. To achieve high sensing response to acetylene, Pd–Ag core-shell nanoparticles were synthesized and used as catalysts. The transmission electron microscopy (TEM) image clearly shows that the Ag shell is deposited on one face of the cubic Pd nanoseeds. By loading the Pd–Ag bimetallic catalyst onto the surface of In2O3 sensing material, the acetylene sensor has been fabricated for acetylene detection. Due to the high catalytic performance of Pd–Ag bimetallic nanoparticles, the microhotplate sensor has a high response to acetylene gas, with a limit of detection (LOD) of 10 ppb. In addition to high sensitivity, the fabricated microhotplate sensor exhibits satisfactory selectivity, good repeatability, and fast response to acetylene. The high performance of the microhotplate sensor for acetylene gas indicates the application potential of trace acetylene detection in power transformer fault diagnosis. Full article
(This article belongs to the Special Issue Chip-Based MEMS Platforms)
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