Estimation, Control and Self-Sensing Approaches for Microelectromechanical (MEMS) Systems
A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Intelligent Sensors".
Deadline for manuscript submissions: 31 August 2024 | Viewed by 159
Special Issue Editors
Interests: MEMS; analog electronics; atomic force microscopy; vibration control; precision mechatronics
Interests: intelligent mechatronics; precision instrumentation; medical devices; nanotechnology; robotics
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
Microelectromechanical systems (MEMS) have been a catalyst for innovation, giving rise to new types of applications in smart homes, wearables, and the Internet of Things (IoT) which were not possible with traditional technologies. MEMS technology enables for device miniaturization and utilizes unconventional physics at the nanoscale for sensing and actuation. Compared to macroscopic systems, the internal state estimation and control of miniaturized systems can be challenging due to their small size. In resource-limited MEMS devices, integrated sensing capabilities are important to allow for the autonomous monitoring of system states without separate sensors or external inputs, which enables for physically intelligent responses to changes. Various integrated sensing mechanisms are available in MEMS smart devices, making use of piezoresistive, piezoelectric, capacitive, thermal, and optical effects. The development of estimation and control techniques using self-sensing elements is of high interest when it comes to improving MEMS device performance.
This Special Issue aims to collect novel methods and applications of estimation, controlled and sensing approaches in MEMS systems. Original research work and review articles covering topics including the modeling, fabrication, integration, actuation, sensing, signal processing, state estimation and control of MEMS devices are all welcome.
Dr. Michael G. Ruppert
Dr. Fangzhou Xia
Guest Editors
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Keywords
- actuation and sensing
- MEMS
- state estimation
- control
- piezoelectric
- piezoresistive
- integration
