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Photonics
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Optical Devices/Components/Coatings for Ultra-Precision Equipment
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Optical Devices/Components/Coatings for Ultra-Precision Equipment

A special issue of Photonics (ISSN 2304-6732). This special issue belongs to the section "Optoelectronics and Optical Materials".

Deadline for manuscript submissions: 15 September 2024 | Viewed by 2936

Special Issue Editors

Dr. Heyan Wang

E-Mail Website
Guest Editor
Ultra-Precision Optical & Electronic Instrument Engineering Center, Harbin Institute of Technology, Harbin 150001, China
Interests: ultrathin metal film; metallic meshes; transparent EMI shielding structures; micro-nano fabrication technology; infrared/terahertz/microwave metamaterials/metasurfaces
Dr. Liang Yu

E-Mail Website
Guest Editor
Ultra-Precision Optical & Electronic Instrument Engineering Center, Harbin Institute of Technology, Harbin 150001, China
Interests: laser interferometry; ultra-precision measurement; length metrology; angle metrology; multi-degree of freedom measurement

Special Issue Information

Dear Colleagues,

Optical devices/components/coatings are key parts that determine the performance of high-end equipment in the fields of aerospace, national defense and military, and advanced civilian applications. Typical applications include high-resolution earth observation systems, aircraft optical seekers, large astronomical telescopes, X-ray telescopes, ultraviolet/extreme ultraviolet lithography machines, precision inertial devices, consumer electronics, medical equipment, and other equipment. The continuous improvement in the service capability of major equipment puts forward higher requirements for the performance of optical devices/components/coatings. For example, in the field of semiconductor chip manufacturing, extreme ultraviolet lithography technology is key for the international semiconductor industry to continue Moore's Law and ensure that the lithography resolution enters the 7 nm node. The extreme ultraviolet lithography objective lens needs to adapt to a series of stringent requirements represented by full-band and sub-nanometer precision manufacturing to ensure lithography performance. Optical devices/components/coatings find exciting applications in a vast range of fields, from physics, material science, and life science to industrial development.

This Special Issue aims to collect both review papers and original research articles in the field of optical devices/components/coatings for both fundamental and applied aspects. Theoretical and experimental papers and reviews will all be considered for publication. In addition, the topics to be covered in the Special Issue include, but are not limited to, the following: functional micro/nano structures, functional optical coatings, infrared/terahertz/microwave metamaterials/metasurfaces, flexible optical components, intelligent sensing components, photonics crystals, electromagnetic functional devices, precision measurement devices, optical measurement/metrology methods, multi-function measurement devices and systems, multi-degree of freedom measurement devices and systems, sensors, etc.

Dr. Heyan Wang
Dr. Liang Yu
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Photonics is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2400 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • optical devices/components/coatings
  • functional micro-nano structures
  • EM metamaterials/metasurfaces
  • optical measurement/metrology methods
  • ultra-precision measurement and equipment
  • sensors

Published Papers (4 papers)

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Research

15 pages, 5025 KiB  
Article
Depth Measurement Error Analysis and Structural Parameter Correction of Structured Light Depth Imager
by Shuang Yu, Haoran Guo, Wenlong Yang, Yanqiao Zhao, Haibin Wu, Xiaoming Sun and Xiaoyang Yu
Photonics 2024, 11(5), 396; https://doi.org/10.3390/photonics11050396 (registering DOI) - 24 Apr 2024
Viewed by 310
Abstract
Considering that structured light depth imagers are difficult to use for precision measurements due to their limited measurement accuracy, we propose an innovative method for correcting structural parameters of structured light depth imagers to reduce the depth measurement error caused by structural parameter [...] Read more.
Considering that structured light depth imagers are difficult to use for precision measurements due to their limited measurement accuracy, we propose an innovative method for correcting structural parameters of structured light depth imagers to reduce the depth measurement error caused by structural parameter errors. For the structured light depth imager, the analytical imaging model is established, and the model of depth error caused by structural parameter errors is established based on the analysis of the depth measurement error analysis. Then, structural parameters are corrected according to the depth measurement error analysis and processing based on experimental depth imaging data of the standard reference plane at the maximum depth. As a result, the corrected analytical imaging model and corrected depth measurement values are obtained. Experimental results have demonstrated the success of this proposed method and its simplicity and convenience. Full article
(This article belongs to the Special Issue Optical Devices/Components/Coatings for Ultra-Precision Equipment)
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13 pages, 16919 KiB  
Article
A Picometre-Level Resolution Test Method without Nonlinearity for Heterodyne Interferometer Measurement Electronics
by Yunke Sun, Wenjun Li, Xu Xing, Jianing Wang, Pengcheng Hu and Jiubin Tan
Photonics 2024, 11(4), 331; https://doi.org/10.3390/photonics11040331 - 02 Apr 2024
Viewed by 549
Abstract
The wide application of displacement measurement in high-precision equipment production and high-precision metrology is placing increasing pressure on the resolution of heterodyne interferometers. However, as the core component of an interferometer, since measurement electronics includes the cross-physical process of photoelectric conversion, its resolution [...] Read more.
The wide application of displacement measurement in high-precision equipment production and high-precision metrology is placing increasing pressure on the resolution of heterodyne interferometers. However, as the core component of an interferometer, since measurement electronics includes the cross-physical process of photoelectric conversion, its resolution is rarely evaluated, either on an individual level or as a whole. Therefore, in this paper, we propose a picometer resolution test method for measurement electronics, that uses intensity modulation signals based on an AOM to replace the beat frequency interference signals, and an ordinary commercial guide rail to equivalently generate the pm-level displacement of the heterodyne interferometer under laboratory conditions. Based on the detailed analysis of the type of noise in the test device, the correlation between the light intensity and the nonlinear error was established, and nonlinearity was suppressed to 10% of the original level. Furthermore, this test method allows one to perform a 0.1 mrad phase step test at 1 MHz signal frequency, equivalent to a 2.5 pm resolution test in a double-pass heterodyne interferometer. Simultaneously, it can be directly applied to the resolution test for measurement electronics with a center frequency in the range of 1 MHz to 20 MHz. Full article
(This article belongs to the Special Issue Optical Devices/Components/Coatings for Ultra-Precision Equipment)
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12 pages, 1996 KiB  
Article
Research on Tip Characterization Techniques Based on Two-Dimensional Self-Traceable Nano-Gratings
by Yingfan Xiong, Jinming Gou, Zhaohui Tang, Guangxu Xiao, Lihua Lei, Song Song, Xiao Deng and Xinbin Cheng
Photonics 2023, 10(11), 1272; https://doi.org/10.3390/photonics10111272 - 17 Nov 2023
Viewed by 837
Abstract
The characterization of scanning tip morphology is crucial for accurate linewidth measurements. Conventional rectangular characterizers are affected by lateral distortion caused by the nonlinearities in AFM scanning, leading to errors between the actual characterization results and the true values. In this study, we [...] Read more.
The characterization of scanning tip morphology is crucial for accurate linewidth measurements. Conventional rectangular characterizers are affected by lateral distortion caused by the nonlinearities in AFM scanning, leading to errors between the actual characterization results and the true values. In this study, we innovatively developed self-traceable two-dimensional nano-gratings using chromium atomic deposition technology and extreme ultraviolet interference lithography. We used this structure as a characterizer for conducting scanning tip characterizations.This paper analyzed the periodic stability of the grating sample during scanning and corrected the lateral distortion of atomic force microscopy (AFM) at scan scales of 0.5 µm and 1 µm based on its self-traceable characteristics. Additionally, we extracted the angle information of the scanning tip in the X direction and Y direction within a scan scale of 0.5 µm. The results demonstrate that the two-dimensional grating sample exhibited excellent periodic stability during scanning. The characterization errors for the tip’s X direction and Y direction angles are within ±2°, showing high consistency. This study highlights that self-traceable two-dimensional grating samples have the capability for in situ bidirectional characterization of tip information, providing a creative solution for the development of new-style tip characterizers. Full article
(This article belongs to the Special Issue Optical Devices/Components/Coatings for Ultra-Precision Equipment)
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14 pages, 6359 KiB  
Article
An Eccentricity Error Separation Method for Rotary Table Based on Phase Feature of Moiré Signal of Single Reading Head
by Yao Huang, Shuangliang Che, Weibin Zhu, Cheng Ma, Yi Zhou, Wei Zou and Zi Xue
Photonics 2023, 10(11), 1267; https://doi.org/10.3390/photonics10111267 - 16 Nov 2023
Viewed by 695
Abstract
In view of the limitations of the existing eccentricity error separation method of the rotary table, an eccentricity error separation method based on the phase feature of the moiré signal of a single reading head is proposed herein. A grating pair transmission model [...] Read more.
In view of the limitations of the existing eccentricity error separation method of the rotary table, an eccentricity error separation method based on the phase feature of the moiré signal of a single reading head is proposed herein. A grating pair transmission model is established based on the analysis of the principle of the rotary table; thereby, the influence of eccentricity error on the phase feature of the moiré signal in the rotation course of the rotary table is clarified, and the corresponding model between the phase feature spectral components and the eccentricity error is established. The verification experiments of the proposed method are carried out based on the laboratory-made circuit system. After verifying the accuracy of the data acquisition of the laboratory-made circuit board, the verification experiments of the eccentricity error separation effect of the proposed method are carried out. The experimental data are compared with those of the traditional method, and the results show that the error between the two methods is 2.34 μm, while the relative error is 2.3%. Full article
(This article belongs to the Special Issue Optical Devices/Components/Coatings for Ultra-Precision Equipment)
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