Nanomanufacturing-Based Microelectromechanical Systems
A special issue of Nanomaterials (ISSN 2079-4991). This special issue belongs to the section "Nanofabrication and Nanomanufacturing".
Deadline for manuscript submissions: closed (30 November 2023) | Viewed by 1098
Special Issue Editor
Interests: memristor; 2D materials fabrication and device; in situ TEM
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
The study of nanomanufacturing-based microelectromechanical system (NMEMS) is among the leading topics of today’s nanotechnology research. NMEMS refers to the development and manufacturing of microelectromechanical systems (MEMS) using nanomanufacturing techniques and nanoscale materials. Nanomanufacturing techniques used for MEMS devices mainly include nanolithography, electron beam lithography, plasma etching and self-assembly; each of these enables precise control of material deposition and patterning at the nanoscale. The exploration of new nanomaterials (such as 2d materials, metal–organic frameworks, etc.) and new devices (such as MEMS mechanical energy harvesters, MEMS biosensors, etc.) will be necessary if we are to develop MEMS technology. NMEMS allows for the creation of devices that are more efficient, reliable, and durable than traditional MEMS devices. Meanwhile, it offers a variety of other advantages, such as the ability to manufacture complex, multi-functional devices on a single chip.
This Special Issue focuses on the latest developments in nanomaterials and state-of-the-art nanomanufacturing techniques. This publication also intends to consider the practical applications of microelectromechanical systems. We hope to attract both academic and industrial researchers in order to foster the current knowledge of nanomaterials and to present new ideas for use in future applications and new technologies.
Dr. Kuibo Yin
Guest Editor
Manuscript Submission Information
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Keywords
- nanomanufacturing
- nanomaterials
- nanodevices
- in situ fabrication
- microelectromechanical system
- nanoelectromechanical systems
