Special Issue "Nanomanufacturing-Based Microelectromechanical Systems"

A special issue of Nanomaterials (ISSN 2079-4991). This special issue belongs to the section "Nanofabrication and Nanomanufacturing".

Deadline for manuscript submissions: 30 November 2023 | Viewed by 143

Special Issue Editor

Dr. Kuibo Yin
E-Mail Website
Guest Editor
SEU-FEI Nano-Pico Center, Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China
Interests: micro electromechanical system; nano electromechanical system; in-situ TEM; 2D materials

Special Issue Information

Dear Colleagues,

The study of nanomanufacturing-based microelectromechanical system (NMEMS) is among the leading topics of today’s nanotechnology research. NMEMS refers to the development and manufacturing of microelectromechanical systems (MEMS) using nanomanufacturing techniques and nanoscale materials. Nanomanufacturing techniques used for MEMS devices mainly include nanolithography, electron beam lithography, plasma etching and self-assembly; each of these enables precise control of material deposition and patterning at the nanoscale. The exploration of new nanomaterials (such as 2d materials, metal–organic frameworks, etc.) and new devices (such as MEMS mechanical energy harvesters, MEMS biosensors, etc.) will be necessary if we are to develop MEMS technology. NMEMS allows for the creation of devices that are more efficient, reliable, and durable than traditional MEMS devices. Meanwhile, it offers a variety of other advantages, such as the ability to manufacture complex, multi-functional devices on a single chip.

This Special Issue focuses on the latest developments in nanomaterials and state-of-the-art nanomanufacturing techniques. This publication also intends to consider the practical applications of microelectromechanical systems. We hope to attract both academic and industrial researchers in order to foster the current knowledge of nanomaterials and to present new ideas for use in future applications and new technologies.

Dr. Kuibo Yin
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Nanomaterials is an international peer-reviewed open access semimonthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2900 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.


  • nanomanufacturing
  • nanomaterials
  • nanodevices
  • in situ fabrication
  • microelectromechanical system
  • nanoelectromechanical systems

Published Papers

This special issue is now open for submission.
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