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Graphene Nano-Electro-Mechanical (NEM) Devices and Applications

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A special issue of Micromachines (ISSN 2072-666X).

Deadline for manuscript submissions: closed (31 May 2016) | Viewed by 41892

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Prof. Dr. Hiroshi Mizuta

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Guest Editor

School of Materials Science, Japan Advanced Institute of Science and Technology (JAIST), 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan
Interests: graphene and silicon nanoelectronics and NEMS; advanced sensing; atomic-scale devices

Special Issue Information

Graphene, as an atomically-thin carbon sheet, possesses remarkable mechanical properties, including ultra-high Young’s modulus and robustness against tensile strain. Combined with its unique electronic and optical properties, graphene provides a promising platform to explore future Nano-Electro-Mechanical (NEM) devices. High-frequency graphene resonators feature excellent tunability of their resonant frequencies by adding small tensile strain. Graphene NEM contact switches enable very low actuation voltage and abrupt switching with a high current on/off ratio, making them attractive for ultra-low-power logic circuits and advanced power-management applications. Furthermore, graphene’s extremely low mass and high surface-to-volume ratio are best suited to explore high-performance NEM sensors with single-molecular-level detection limit. This Special Issue seeks reviews, regular research papers and short communications on fundamental properties of graphene NEM components and state-of-the-art devices towards challenging applications.

Prof. Dr. Hiroshi Mizuta
Guest Editor

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Keywords

graphene
NEMS
Resonators
Transducers
mechanical switches
NEMS sensors

Published Papers (7 papers)

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Research

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2745 KiB

Open AccessArticle

Thermoelectric Responsive Shape Memory Graphene/Hydro-Epoxy Composites for Actuators

by Yongkun Wang, Wenchao Tian, Jianqiang Xie and Yan Liu

Micromachines 2016, 7(8), 145; https://doi.org/10.3390/mi7080145 - 22 Aug 2016

Cited by 27 | Viewed by 5209

Abstract

A series of thermoelectric responsive shape memory hydro-epoxy (H-EP) composites filled with different contents of graphene were developed and characterized. Compared with traditional actuation materials, these novel shape memory composites exhibit attractive properties, such as light weight, large deformation, good processability and high response speed, making them good candidates for actuator materials. The effect of graphene content on the shape memory composites was studied in terms of mechanical, dynamic mechanical analysis (DMA), electrical properties, and thermoelectric responsive shape memory test. The results show that when graphene content was 2 wt %, the bend strength of the composite improved by about 47% with a storage modulus larger than other composites. The shape recovery ratio of the composites was about 100%, and the shape recovery speed increased with the increment of graphene content, applied voltage, and temperature. Due to the excellent actuation performance, the graphene/hydro-epoxy composite has potential applications in the actuator in the future. Full article

(This article belongs to the Special Issue Graphene Nano-Electro-Mechanical (NEM) Devices and Applications)

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3368 KiB

Open AccessArticle

3D Finite Element Simulation of Graphene Nano-Electro-Mechanical Switches

by Jothiramalingam Kulothungan, Manoharan Muruganathan and Hiroshi Mizuta

Micromachines 2016, 7(8), 143; https://doi.org/10.3390/mi7080143 - 15 Aug 2016

Cited by 13 | Viewed by 6503

Abstract

In this paper, we report the finite element method (FEM) simulation of double-clamped graphene nanoelectromechanical (NEM) switches. Pull-in and pull-out characteristics are analyzed for graphene NEM switches with different dimensions and these are consistent with the experimental results. This numerical model is used to study the scaling nature of the graphene NEM switches. We show the possibility of achieving a pull-in voltage as low as 2 V for a 1.5-μm-long and 3-nm-thick nanocrystalline graphene beam NEM switch. In order to study the mechanical reliability of the graphene NEM switches, von Mises stress analysis is carried out. This analysis shows that a thinner graphene beam results in a lower von Mises stress. Moreover, a strong electrostatic force at the beam edges leads to a mechanical deflection at the edges larger than that around the center of the beam, which is consistent with the von Mises stress analysis. Full article

(This article belongs to the Special Issue Graphene Nano-Electro-Mechanical (NEM) Devices and Applications)

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2272 KiB

Open AccessArticle

A Reduced Graphene Oxide Based Radio Frequency Glucose Sensing Device Using Multi-Dimensional Parameters

by Byeongho Park, Hyung Goo Park, Jae-hoon Ji, Jinsoo Cho and Seong Chan Jun

Micromachines 2016, 7(8), 136; https://doi.org/10.3390/mi7080136 - 05 Aug 2016

Cited by 13 | Viewed by 6220

Abstract

A reduced graphene oxide (RGO) based glucose sensor using a radio frequency (RF) signal is demonstrated. An RGO with outstanding electrical property was employed as the interconnector material between signal electrodes in an RF electric circuit, and it was functionalized with phenylbutyric acid (PBA) as a linker molecule to bind glucoses. By adding glucose solution, the fabricated sensor with RGO and PBA showed detecting characteristics in RF signal transmission and reflection. Frequency dependent electrical parameters such as resistance, inductance, shunt conductance and shunt capacitance were extracted from the RF results under the equivalent circuit model. These parameters also provided sensing characteristics of glucose with different concentrations. Using these multi-dimensional parameters, the RF sensor device detected glucose levels in the range of 1–4 mM, which ordinarily covers the testing range for diabetes or medical examination. The RGO based RF sensor, which fits well to a linear curve with fine stability, holds considerable promise for biomaterials detection, including glucose. Full article

(This article belongs to the Special Issue Graphene Nano-Electro-Mechanical (NEM) Devices and Applications)

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1637 KiB

Open AccessArticle

Locally-Actuated Graphene-Based Nano-Electro-Mechanical Switch

by Jian Sun, Manoharan Muruganathan, Nozomu Kanetake and Hiroshi Mizuta

Micromachines 2016, 7(7), 124; https://doi.org/10.3390/mi7070124 - 19 Jul 2016

Cited by 21 | Viewed by 5350

Abstract

The graphene nano-electro-mechanical switches are promising components due to their outstanding switching performance. However, most of the reported devices suffered from a large actuation voltages, hindering them from the integration in the conventional complementary metal-oxide-semiconductor (CMOS) circuit. In this work, we demonstrated the graphene nano-electro-mechanical switches with the local actuation electrode via conventional nanofabrication techniques. Both cantilever-type and double-clamped beam switches were fabricated. These devices exhibited the sharp switching, reversible operation cycles, high on/off ratio, and a low actuation voltage of below 5 V, which were compatible with the CMOS circuit requirements. Full article

(This article belongs to the Special Issue Graphene Nano-Electro-Mechanical (NEM) Devices and Applications)

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14556 KiB

Open AccessArticle

Synthesis and Electro-Magneto-Mechanical Properties of Graphene Aerogels Functionalized with Co-Fe-P Amorphous Alloys

by Guang-Ping Zheng, Xi Lu and Zhuo Han

Micromachines 2016, 7(7), 117; https://doi.org/10.3390/mi7070117 - 12 Jul 2016

Cited by 6 | Viewed by 4579

Abstract

Graphene aerogels (GAs) are functionalized with Fe-Co-P alloy using an electro-deposition method. The Fe-Co-P alloy coated on the graphene nanosheets is found to possess an amorphous structure and a nanoporous architecture of GAs. The electro-mechanical properties of GAs are significantly affected by the Fe-Co-P nanoparticles embedded inside GAs. The electro-mechanical responses of GA/Fe-Co-P nanoporous hybrid structures are sensitive to an applied magnetic field, demonstrating that they are promising for electro-magneto-mechanical applications. The light-weight, high-strength and nanoporous GAs functionalized with Fe-Co-P amorphous alloys are desirable sensors, actuators, and nano-electro-mechanical systems that could be controlled or manipulated by mechanical, electric and magnetic fields. Full article

(This article belongs to the Special Issue Graphene Nano-Electro-Mechanical (NEM) Devices and Applications)

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7889 KiB

Open AccessArticle

The Graphene/l-Cysteine/Gold-Modified Electrode for the Differential Pulse Stripping Voltammetry Detection of Trace Levels of Cadmium

by Yu Song, Chao Bian, Jianhua Tong, Yang Li and Shanghong Xia

Micromachines 2016, 7(6), 103; https://doi.org/10.3390/mi7060103 - 13 Jun 2016

Cited by 17 | Viewed by 6349

Abstract

Cadmium(II) is a common water pollutant with high toxicity. It is of significant importance for detecting aqueous contaminants accurately, as these contaminants are harmful to human health and environment. This paper describes the fabrication, characterization, and application of an environment-friendly graphene (Gr)/l-cysteine/gold electrode to detect trace levels of cadmium (Cd) by differential pulse stripping voltammetry (DPSV). The influence of hydrogen overflow was decreased and the current response was enhanced because the modified graphene extended the potential range of the electrode. The Gr/l-cysteine/gold electrode showed high electrochemical conductivity, producing a marked increase in anodic peak currents (vs. the glass carbon electrode (GCE) and boron-doped diamond (BDD) electrode). The calculated detection limits are 1.15, 0.30, and 1.42 µg/L, and the sensitivities go up to 0.18, 21.69, and 152.0 nA·mm⁻²·µg⁻¹·L for, respectively, the BDD electrode, the GCE, and the Gr/l-cysteine/gold electrode. It was shown that the Gr/l-cysteine/gold-modified electrode is an effective means for obtaining highly selective and sensitive electrodes to detect trace levels of cadmium. Full article

(This article belongs to the Special Issue Graphene Nano-Electro-Mechanical (NEM) Devices and Applications)

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Review

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1640 KiB

Open AccessFeature PaperReview

Energy Dissipation in Graphene Mechanical Resonators with and without Free Edges

by Makoto Takamura, Hajime Okamoto, Kazuaki Furukawa, Hiroshi Yamaguchi and Hiroki Hibino

Micromachines 2016, 7(9), 158; https://doi.org/10.3390/mi7090158 - 05 Sep 2016

Cited by 14 | Viewed by 6866

Abstract

Graphene-based nanoelectromechanical systems (NEMS) have high future potential to realize sensitive mass and force sensors owing to graphene’s low mass density and exceptional mechanical properties. One of the important remaining issues in this field is how to achieve mechanical resonators with a high quality factor (Q). Energy dissipation in resonators decreases Q, and suppressing it is the key to realizing sensitive sensors. In this article, we review our recent work on energy dissipation in doubly-clamped and circular drumhead graphene resonators. We examined the temperature (T) dependence of the inverse of a quality factor (

Q^{- 1}

) to reveal what the dominant dissipation mechanism is. Our doubly-clamped trilayer resonators show a characteristic

Q^{- 1}

-T curve similar to that observed in monolayer resonators:

Q^{- 1}

∝

T^{2}

above ∼100 K and ∝

T^{0.3}

below ∼100 K. By comparing our results with previous experimental and theoretical results, we determine that the

T^{2}

and

T^{0.3}

dependences can be attributed to tensile strain induced by clamping metals and vibrations at the free edges in doubly-clamped resonators, respectively. The

Q^{- 1}

-T curve in our circular drumhead resonators indicates that removing free edges and clamping metal suppresses energy dissipation in the resonators, resulting in a linear T dependence of

Q^{- 1}

in a wide temperature range. Full article

(This article belongs to the Special Issue Graphene Nano-Electro-Mechanical (NEM) Devices and Applications)

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