Novel Devices, Emerging Applications and Advances in MEMS Fabrication Processes, 2nd Edition
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D：Materials and Processing".
Deadline for manuscript submissions: 30 May 2024 | Viewed by 1617
Special Issue Editors
Interests: microelectromechanical systems; microactuators; compliance mechanisms; antenna design; innovation management; development of educational programs
Special Issues, Collections and Topics in MDPI journals
Interests: design of products implementing emerging sensors in medical applications; CMUT; microneedling; pressure sensors; gas sensors; flow sensors; bio-sensors; commercialization of technology
Special Issues, Collections and Topics in MDPI journals
Interests: microelectromechanical systems (MEMS); nanoelectromechanical systems (NEMS); microfluidics; mechanical design; microgripper; energy harvesting; magnetic field sensors; resonators; finite element method; mirrors
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
MEMS devices have endless advantages over macrodevices and traditional electromechanical devices, with sizes ranging from micrometers to millimeters. MEMS devices are generally produced by implementing micromachining techniques inherited from the integrated circuit industry of silicon technology. From the inception of microelectromechanical systems (MEMS), multiple devices have been developed. Some have passed the development stage and reached commercialization; the first MEMS devices were commercialized in early 1980, when MEMS pressure sensors and accelerometers were widely applied in the automotive industry, and in 1995, the possibility of miniaturization of chemical analysis was introduced. MEMS devices and applications have achieved significant advances in multiple areas that have a positive impact on the technology’s application, as well as in the manufacturing processes that make them a reality. Accordingly, this Special Issue seeks to showcase research papers, communications, and review articles that focus on the following area: (1) designs and modeling of novel MEMS devices; (2) new developments and emergent applications for MEMS devices; and (3) advances in MEMS fabrication processes.
Dr. Margarita Tecpoyotl-Torres
Dr. Jesus J. Alcantar Peña
Dr. Agustin L. Herrera-May
Guest Editors
Manuscript Submission Information
Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.
Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.
Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.
Keywords
- MEMS sensors
- MEMS actuators
- BioMEMS
- medical MEMS
- microfluidic devices
- PiezoMEMS
- energy harvesters
- triboelectric nanogenerators
- MEMS-based electronic systems
- MEMS fabrication processes
- MEMS emergent aplications
