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Micromachines
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MEMS Sensors: Fabrication and Application
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MEMS Sensors: Fabrication and Application

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".

Deadline for manuscript submissions: closed (31 October 2022) | Viewed by 11689

Special Issue Editor

Dr. Ying Dong

E-Mail Website
Guest Editor
Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China
Interests: sensor; MEMS; micro sensor; wearable device; implantable device

Special Issue Information

Dear Colleagues,

Sensors based on Micro-electro-mechanical systems (MEMS) technology possess such unique features as micro size, ease of integration, low cost, low power consumption, high resonant frequency and high sensitivity. These features not only contribute specially in the traditional areas such as automobile, consumer electronics, office automation and portable medical devices, but also inspire and support the emerging applications such as Wireless Sensor Networks (WSN), wearable devices, robots, implantable medical devices and so on. The special issue “MEMS sensors: Fabrication and Application” collects contributions on the topics of design, material, fabrication process, packaging and testing technologies to realize all kinds of micro sensors based on the cost effective and well established micro fabrication technology, as well as the sensing technologies developed for different applications based on micro sensors.

Dr. Ying Dong
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • sensor
  • MEMS
  • micro sensor
  • WSN
  • wearable device
  • implantable device

Published Papers (6 papers)

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Research

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13 pages, 5147 KiB  
Article
Metal–Phenolic Film Coated Quartz Crystal Microbalance as a Selective Sensor for Methanol Detection in Alcoholic Beverages
by Karekin D. Esmeryan, Yuliyan Lazarov, Teodor Grakov, Yulian I. Fedchenko, Lazar G. Vergov and Stefan Staykov
Micromachines 2023, 14(6), 1274; https://doi.org/10.3390/mi14061274 - 20 Jun 2023
Cited by 1 | Viewed by 1224
Abstract
The facile real-time monitoring of methyl content in fermented beverages is of fundamental significance in the alcohol and restaurant industry, since as little as 4 mL of methanol entering the blood may cause intoxication or blindness. So far, the practical applicability of available [...] Read more.
The facile real-time monitoring of methyl content in fermented beverages is of fundamental significance in the alcohol and restaurant industry, since as little as 4 mL of methanol entering the blood may cause intoxication or blindness. So far, the practical applicability of available methanol sensors, including the piezoresonance analogs, is somewhat limited to laboratory use due to the complexity and bulkiness of the measuring equipment involving multistep procedures. This article introduces a hydrophobic metal–phenolic film-coated quartz crystal microbalance (MPF-QCM) as a novel streamlined detector of methanol in alcoholic drinks. Unlike other QCM-based alcohol sensors, our device operates under saturated vapor pressure conditions, permitting rapid detection of methyl fractions up to seven times below the tolerable levels in spirits (e.g., whisky) while effectively suppressing the cross-sensitivity to interfering chemical compounds such as water, petroleum ether or ammonium hydroxide. Furthermore, the good surface adhesion of metal–phenolic complexes endows the MPF-QCM with superior long-term stability, contributing to the repeatable and reversible physical sorption of the target analytes. These features, combined with the lack of mass flow controllers, valves and connecting pipes delivering the gas mixture, outline the likelihood for future design of a portable MPF-QCM prototype suitable to point-of-use analysis in drinking establishments. Full article
(This article belongs to the Special Issue MEMS Sensors: Fabrication and Application)
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13 pages, 5117 KiB  
Article
SnO2-Based NO2 Gas Sensor with Outstanding Sensing Performance at Room Temperature
by Rahul Kumar, Mamta, Raman Kumari and Vidya Nand Singh
Micromachines 2023, 14(4), 728; https://doi.org/10.3390/mi14040728 - 25 Mar 2023
Cited by 4 | Viewed by 2217
Abstract
The controlled and efficient formation of oxygen vacancies on the surface of metal oxide semiconductors is required for their use in gas sensors. This work addresses the gas-sensing behaviour of tin oxide (SnO2) nanoparticles for nitrogen oxide (NO2), NH [...] Read more.
The controlled and efficient formation of oxygen vacancies on the surface of metal oxide semiconductors is required for their use in gas sensors. This work addresses the gas-sensing behaviour of tin oxide (SnO2) nanoparticles for nitrogen oxide (NO2), NH3, CO, and H2S detection at various temperatures. Synthesis of SnO2 powder and deposition of SnO2 film is conducted using sol-gel and spin-coating methods, respectively, as these methods are cost-effective and easy to handle. The structural, morphological, and optoelectrical properties of nanocrystalline SnO2 films were studied using XRD, SEM, and UV-visible characterizations. The gas sensitivity of the film was tested by a two-probe resistivity measurement device, showing a better response for the NO2 and outstanding low-concentration detection capacity (down to 0.5 ppm). The anomalous relationship between specific surface area and gas-sensing performance indicates the SnO2 surface’s higher oxygen vacancies. The sensor depicts a high sensitivity at 2 ppm for NO2 with response and recovery times of 184 s and 432 s, respectively, at room temperature. The result demonstrates that oxygen vacancies can significantly improve the gas-sensing capability of metal oxide semiconductors. Full article
(This article belongs to the Special Issue MEMS Sensors: Fabrication and Application)
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9 pages, 2066 KiB  
Article
Simulation of a Miniature Linear Ion Trap with Half-Round Rod Electrodes
by Xichi Lu, John T. W. Yeow, Gongyu Jiang, Yu Xiao, Rujiao Yao, Qi Zhang, Jiacheng Song and Jinyuan Yao
Micromachines 2022, 13(10), 1572; https://doi.org/10.3390/mi13101572 - 22 Sep 2022
Viewed by 1583
Abstract
The miniaturization of ion trap mass analyzers is an important direction in the development of mass spectrometers. In this work, we proposed two models of miniaturized HreLIT with a field radius of about 2 mm based on the existing research on conventional HreLIT [...] Read more.
The miniaturization of ion trap mass analyzers is an important direction in the development of mass spectrometers. In this work, we proposed two models of miniaturized HreLIT with a field radius of about 2 mm based on the existing research on conventional HreLIT and other ion traps, one with ions ejection slits on one pair of electrodes only (2-slit model) and the other with the same slits on all electrodes (4-slit model). The relationship of mass resolution with r/rx and the “stretch” distance of electrodes in the ejection direction is investigated by theoretical simulations. Trends of electric fields inside the ion traps were discussed as well. The comparable maximum resolution is observed at r/rx = 2/1.4 in both models, but stretching simulations revealed that the peak resolution of the 2-slit model was higher than that of the other model by about 8%. The highest value of 517 was obtained when stretching 1.1 mm. Furthermore, the resolution of ions with m/z = 119 could exceed 1000 when the scan rate was reduced to 800 Th/s. The mass spectrometry capability of miniature HreLIT has been confirmed theoretically, and it laid the foundation for the subsequent fabrication with MEMS technology. Full article
(This article belongs to the Special Issue MEMS Sensors: Fabrication and Application)
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9 pages, 2469 KiB  
Article
A Low-Frequency MEMS Magnetoelectric Antenna Based on Mechanical Resonance
by Yinan Wang, Zhibo Ma, Guanglei Fu, Jiayan Wang, Qi Xi, Yuanhang Wang, Ziqiang Jia and Guhao Zi
Micromachines 2022, 13(6), 864; https://doi.org/10.3390/mi13060864 - 30 May 2022
Cited by 7 | Viewed by 2466
Abstract
Antenna miniaturization technology has been a challenging problem in the field of antenna design. The demand for antenna miniaturization is even stronger because of the larger size of the antenna in the low-frequency band. In this paper, we consider MEMS magnetoelectric antennas based [...] Read more.
Antenna miniaturization technology has been a challenging problem in the field of antenna design. The demand for antenna miniaturization is even stronger because of the larger size of the antenna in the low-frequency band. In this paper, we consider MEMS magnetoelectric antennas based on mechanical resonance, which sense the magnetic fields of electromagnetic waves through the magnetoelectric (ME) effect at their mechanical resonance frequencies, giving a voltage output. A 70 μm diameter cantilever disk with SiO2/Cr/Au/AlN/Cr/Au/FeGaB stacked layers is prepared on a 300 μm silicon wafer using the five-masks micromachining process. The MEMS magnetoelectric antenna showed a giant ME coefficient is 2.928 kV/cm/Oe in mechanical resonance at 224.1 kHz. In addition, we demonstrate the ability of this MEMS magnetoelectric antenna to receive low-frequency signals. This MEMS magnetoelectric antenna can provide new ideas for miniaturization of low-frequency wireless communication systems. Meanwhile, it has the potential to detect weak electromagnetic field signals. Full article
(This article belongs to the Special Issue MEMS Sensors: Fabrication and Application)
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Review

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18 pages, 5307 KiB  
Review
Using Nanomaterials for SARS-CoV-2 Sensing via Electrochemical Techniques
by My-Van Tieu, Hien T. Ngoc Le and Sungbo Cho
Micromachines 2023, 14(5), 933; https://doi.org/10.3390/mi14050933 - 25 Apr 2023
Cited by 3 | Viewed by 1338
Abstract
Advancing low-cost and user-friendly innovations to benefit public health is an important task of scientific and engineering research. According to the World Health Organization (WHO), electrochemical sensors are being developed for low-cost SARS-CoV-2 diagnosis, particularly in resource-limited settings. Nanostructures with sizes ranging from [...] Read more.
Advancing low-cost and user-friendly innovations to benefit public health is an important task of scientific and engineering research. According to the World Health Organization (WHO), electrochemical sensors are being developed for low-cost SARS-CoV-2 diagnosis, particularly in resource-limited settings. Nanostructures with sizes ranging from 10 nm to a few micrometers could deliver optimum electrochemical behavior (e.g., quick response, compact size, sensitivity and selectivity, and portability), providing an excellent alternative to the existing techniques. Therefore, nanostructures, such as metal, 1D, and 2D materials, have been successfully applied in in vitro and in vivo detection of a wide range of infectious diseases, particularly SARS-CoV-2. Electrochemical detection methods reduce the cost of electrodes, provide analytical ability to detect targets with a wide variety of nanomaterials, and are an essential strategy in biomarker sensing as they can rapidly, sensitively, and selectively detect SARS-CoV-2. The current studies in this area provide fundamental knowledge of electrochemical techniques for future applications. Full article
(This article belongs to the Special Issue MEMS Sensors: Fabrication and Application)
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23 pages, 4528 KiB  
Review
Micro-Sized pH Sensors Based on Scanning Electrochemical Probe Microscopy
by Muhanad Al-Jeda, Emmanuel Mena-Morcillo and Aicheng Chen
Micromachines 2022, 13(12), 2143; https://doi.org/10.3390/mi13122143 - 04 Dec 2022
Cited by 6 | Viewed by 2176
Abstract
Monitoring pH changes at the micro/nano scale is essential to gain a fundamental understanding of surface processes. Detection of local pH changes at the electrode/electrolyte interface can be achieved through the use of micro-/nano-sized pH sensors. When combined with scanning electrochemical microscopy (SECM), [...] Read more.
Monitoring pH changes at the micro/nano scale is essential to gain a fundamental understanding of surface processes. Detection of local pH changes at the electrode/electrolyte interface can be achieved through the use of micro-/nano-sized pH sensors. When combined with scanning electrochemical microscopy (SECM), these sensors can provide measurements with high spatial resolution. This article reviews the state-of-the-art design and fabrication of micro-/nano-sized pH sensors, as well as their applications based on SECM. Considerations for selecting sensing probes for use in biological studies, corrosion science, in energy applications, and for environmental research are examined. Different types of pH sensitive probes are summarized and compared. Finally, future trends and emerging applications of micro-/nano-sized pH sensors are discussed. Full article
(This article belongs to the Special Issue MEMS Sensors: Fabrication and Application)
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