Micro/Nano Sensors: Fabrication and Applications

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".

Deadline for manuscript submissions: 30 November 2024 | Viewed by 1805

Special Issue Editors


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Guest Editor
State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China
Interests: MEMS; MEMS sensors; extreme environment sensing; high-temperature fiber sensors; FBG fabrication; optical signal processing in high precision instrumentation and sensors
Special Issues, Collections and Topics in MDPI journals

E-Mail Website
Guest Editor
State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China
Interests: fiber sensors; distributed fiber sensing; chalcogenide fiber sensorsbrillouin lasers; random fiber lasers; fiber tapering and fabrication; fiber optics; nonlinear optics

Special Issue Information

Dear Colleagues,

Sensors used to measure physical quantities such as pressure, vibration, and temperature are of ever-growing importance in diverse fields such as electronics, transportation, healthcare, industry, and aerospace. Recent years have witnessed remarkable progress in sensor technologies and fabrication techniques, femtosecond laser processing, Micro-Electro-Mechanical Systems (MEMS), and other innovative methods.

The fabrication of sensors spans a spectrum of methodologies, ranging from traditional to cutting-edge approaches. Advancements in micromachining and inscription technologies, particularly with femtosecond lasers, have revolutionized sensor fabrication. The precise control offered by femtosecond laser processing enables the creation of intricate structures, such as fiber Bragg gratings and gratings on waveguides, enabling high-resolution sensors with improved accuracy and reliability. MEMS technology plays an important role in the miniaturization and integration of sensors. MEMS-based sensors offer compact designs, low power consumption, and can be incorporated into devices. This technology has paved the way for multifunctional, miniaturized sensing devices with broad-ranging applications. Temperature and strain sensors, acoustic/vibration sensors, and chemical sensors based on these methods have undergone significant improvements in terms of sensitivity, reliability, and response time.

The topics of the Special Issue focus on cutting-edge developments and trends in various sensors, and sensing technologies based on novel mechanisms and principles, intelligent design and fabrication, new material exploration, and efficient applications. We warmly invite you to submit original research, communications, and review articles to provide valuable insights into the status and future of this field.

Prof. Dr. Pinggang Jia
Dr. Haiyang Wang
Guest Editors

Manuscript Submission Information

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Keywords

  • femtosecond fabrication technology
  • MEMS fabrication technology
  • other microfabrication technology
  • MEMS sensors
  • fiber-optic sensors
  • optical MEMS sensors
  • temperature/pressure/acoustic/strain sensors
  • accelerometer
  • fiber Bragg grating
  • applications of sensors
  • signal processing, algorithms, and integration.

Published Papers (3 papers)

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Research

11 pages, 5039 KiB  
Article
Temperature-Decoupled Single-Crystal MgO Fiber-Optic Fabry–Perot Vibration Sensor Based on MEMS Technology for Harsh Environments
by Chengxin Su, Pinggang Jia, Aihao Zhao, Jiacheng Tu, Jia Liu, Qianyu Ren and Jijun Xiong
Micromachines 2024, 15(5), 616; https://doi.org/10.3390/mi15050616 - 1 May 2024
Viewed by 505
Abstract
A high-temperature-resistance single-crystal magnesium oxide (MgO) extrinsic Fabry–Perot (FP) interferometer (EFPI) fiber-optic vibration sensor is proposed and experimentally demonstrated at 1000 °C. Due to the excellent thermal properties (melting point > 2800 °C) and optical properties (transmittance ≥ 90%), MgO is chosen as [...] Read more.
A high-temperature-resistance single-crystal magnesium oxide (MgO) extrinsic Fabry–Perot (FP) interferometer (EFPI) fiber-optic vibration sensor is proposed and experimentally demonstrated at 1000 °C. Due to the excellent thermal properties (melting point > 2800 °C) and optical properties (transmittance ≥ 90%), MgO is chosen as the ideal material to be placed in the high-temperature testing area. The combination of wet chemical etching and direct bonding is used to construct an all-MgO sensor head, which is favorable to reduce the temperature gradient inside the sensor structure and avoid sensor failure. A temperature decoupling method is proposed to eliminate the cross-sensitivity between temperature and vibration, improving the accuracy of vibration detection. The experimental results show that the sensor is stable at 20–1000 °C and 2–20 g, with a sensitivity of 0.0073 rad (20 °C). The maximum nonlinearity error of the vibration sensor measurement after temperature decoupling is 1.17%. The sensor with a high temperature resistance and outstanding dynamic performance has the potential for applications in testing aero-engines and gas turbine engines. Full article
(This article belongs to the Special Issue Micro/Nano Sensors: Fabrication and Applications)
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14 pages, 3667 KiB  
Communication
Wireless Temperature Measurement for Curved Surfaces Based on AlN Surface Acoustic Wave Resonators
by Huali Liu, Zhixin Zhou and Liang Lou
Micromachines 2024, 15(5), 562; https://doi.org/10.3390/mi15050562 - 25 Apr 2024
Viewed by 469
Abstract
In this paper, we propose a novel method for temperature measurement using surface acoustic wave (SAW) temperature sensors on curved or irregular surfaces. We integrate SAW resonators onto flexible printed circuit boards (FPCBs) to ensure better conformity of the temperature sensor with the [...] Read more.
In this paper, we propose a novel method for temperature measurement using surface acoustic wave (SAW) temperature sensors on curved or irregular surfaces. We integrate SAW resonators onto flexible printed circuit boards (FPCBs) to ensure better conformity of the temperature sensor with the surface of the object under test. Compared to traditional rigid PCBs, FPCBs offer greater dynamic flexibility, lighter weight, and thinner thickness, which make them an ideal choice for making SAW devices working for temperature measurements under curved surfaces. We design a temperature sensor array consisting of three devices with different operating frequencies to measure the temperature at multiple points on the surface of the object. To distinguish between different target points in the sensor array, each sensor operates at a different frequency, and the operating frequency bands do not overlap. This differentiation is achieved using Frequency Division Multiple Access (FDMA) technology. Experimental results indicate that the frequency temperature coefficients of these sensors are −30.248 ppm/°C, −30.195 ppm/°C, and −30.115 ppm/°C, respectively. In addition, the sensor array enables wireless communication via antenna and transceiver circuits. This innovation heralds enhanced adaptability and applicability for SAW temperature sensor applications. Full article
(This article belongs to the Special Issue Micro/Nano Sensors: Fabrication and Applications)
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13 pages, 7051 KiB  
Article
A Five-Hole Pressure Probe Based on Integrated MEMS Fiber-Optic Fabry-Perot Sensors
by Yumiao Song, Shuanghui Ma, Jichun Zhao, Jia Liu, Jingyi Wang and Yongjun Cui
Micromachines 2024, 15(4), 554; https://doi.org/10.3390/mi15040554 - 22 Apr 2024
Viewed by 621
Abstract
The five-hole pressure probe based on Micro-Electro-Mechanical Systems (MEMS) technology is designed to meet the needs of engine inlet pressure measurement. The probe, including a pressure-sensitive detection unit and a five-hole probe encapsulation structure, combines the advantages of a five-hole probe with fiber [...] Read more.
The five-hole pressure probe based on Micro-Electro-Mechanical Systems (MEMS) technology is designed to meet the needs of engine inlet pressure measurement. The probe, including a pressure-sensitive detection unit and a five-hole probe encapsulation structure, combines the advantages of a five-hole probe with fiber optic sensing. The pressure-sensitive detection unit utilizes silicon-glass anodic bonding to achieve the integrated and batch-producible manufacturing of five pressure-sensitive Fabry–Perot (FP) cavities. The probe structure and parameters of the sensitive unit were optimized based on fluid and mechanical simulations. The non-scanning correlation demodulation technology was applied to extract specific cavity lengths from multiple interference surfaces. The sealing platform was established to analyze the sealing performance of the five-hole probe and the pressure-sensitive detection unit. The testing platform was established to test the pressure response characteristics of the probe. Experimental results indicate that the probe has good sealing performance between different air passages, making it suitable for detecting pressure from multiple directions. The pressure responses are linear within the range of 0–250 kPa, with the average pressure sensitivity of the five sensors ranging from 11.061 to 11.546 nm/kPa. The maximum non-linear error is ≤1.083%. Full article
(This article belongs to the Special Issue Micro/Nano Sensors: Fabrication and Applications)
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