Multi-Dimensional Direct-Write Nanofabrication
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D:Materials and Processing".
Deadline for manuscript submissions: closed (31 October 2019) | Viewed by 53542
Special Issue Editor
Interests: direct-write nanofabrication; focused electron beam-induced deposition; focused ion beam processing; atomic force microscopy; functional nano-probes
Special Issue Information
Dear Colleagues,
During the last decade, additive direct-write manufacturing has attracted considerable attention in research and development. The main advantage of such a method is the ability to fabricate complex structures in a single-step, which expands accessibility to non-flat surfaces, morphologically exposed areas, already finished device architectures, or encapsulated packages; accordingly, such direct-write technologies complement situations in which alternative methods approach their intrinsic limitations. While applications on the micro- and meso-scale below are already well established in industrial productions such as roll-to-roll processes, laser sintering, inkjet printing, or imprint lithography, the extension to the real nanoscale is still an ongoing and highly challenging task. Promising candidates with the potential to meet these dimensional requirements are photons, ions, or electrons, as demonstrated by numerous proof-of-principle studies during the last decade. Aside from their technical nature, direct-write approaches enable controlled fabrication of complex, freestanding 3D nano-architectures in a single step, which paves the way for novel applications. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on (1) additive and/or subtractive direct-write technologies for (2) fabrication of 1D–3D nanostructures including their combination to larger structures, (3) modelling fundamental process mechanisms, and (4) applications and/or material properties of such structures that strongly benefit from direct-write fabrication approaches.
Prof. Dr. Harald Plank
Guest Editor
Manuscript Submission Information
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Keywords
- Additive direct-write nanofabrication
- Subtractive direct-write nanofabrication
- Process modelling
- Applications and material properties.