Laser Micro/Nano Fabrication, Second Edition

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D:Materials and Processing".

Deadline for manuscript submissions: 30 June 2024 | Viewed by 2178

Special Issue Editor


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Guest Editor
Department of Physics and Optical Science, University of North Carolina at Charlotte, Charlotte, NC 28223, USA
Interests: high-energy lasers; HEL; laser-induced damage threshold; LIDT; laser therapeutics; opto-mechanical design; reactive ion etching
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Special Issue Information

Dear Colleagues,

I invite you to contribute to this Special Issue, which seeks research and review articles on laser micro/nanofabrication techniques. These include but are not limited to (1) new laser-based approaches to fabricate micro/nanostructures, (2) subtractive methods, precision laser ablation and cutting, (3) additive methods and laser-induced deposition, (4) laser bonding, welding, and the formation of components; (5) novel software, CAD, and nanometer precision hardware for direct laser writing, and (6) potential research and industrial applications in optical, electronic, and biological fields. Laser micro/nanofabrication is rapidly becoming a preferred manufacturing method due to its inherent high precision, mask-less nature, and rapid processing speed. This Special Issue aims to feature the latest developments in various applications of laser micromachining.

Dr. Thomas C. Hutchens
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • laser micro/nanofabrication/machining
  • direct laser writing
  • subtractive/additive processing
  • surface texturing
  • optical surface modification
  • ultrafast/femtosecond lasers

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Published Papers (3 papers)

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Research

13 pages, 5714 KiB  
Article
Femtosecond Laser Percussion Drilling of Silicon Using Repetitive Single Pulse, MHz-, and GHz-Burst Regimes
by Pierre Balage, Manon Lafargue, Théo Guilberteau, Guillaume Bonamis, Clemens Hönninger, John Lopez and Inka Manek-Hönninger
Micromachines 2024, 15(5), 632; https://doi.org/10.3390/mi15050632 - 9 May 2024
Viewed by 816
Abstract
In this contribution, we present novel results on top-down drilling in silicon, the most important semiconductor material, focusing specifically on the influence of the laser parameters. We compare the holes obtained with repetitive single pulses, as well as in different MHz- and GHz-burst [...] Read more.
In this contribution, we present novel results on top-down drilling in silicon, the most important semiconductor material, focusing specifically on the influence of the laser parameters. We compare the holes obtained with repetitive single pulses, as well as in different MHz- and GHz-burst regimes. The deepest holes were obtained in GHz-burst mode, where we achieved holes of almost 1 mm depth and 35 µm diameter, which corresponds to an aspect ratio of 27, which is higher than the ones reported so far in the literature, to the best of our knowledge. In addition, we study the influence of the energy repartition within the burst in GHz-burst mode. Full article
(This article belongs to the Special Issue Laser Micro/Nano Fabrication, Second Edition)
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13 pages, 11058 KiB  
Article
Improving the Quality of Laser Drilling by Assisted Process Methods of Static Solution and Mist Blowing
by Yuan Tao, Zhiwei Wang, Shanshan Hu, Yufei Feng, Fan Yang and Guangliang Li
Micromachines 2024, 15(4), 515; https://doi.org/10.3390/mi15040515 - 12 Apr 2024
Viewed by 502
Abstract
The use of static solution-assisted laser drilling can effectively improve hole roundness, decrease taper angle, and reduce recast layer thickness and hole wall slag adhesion. However, the enormous energy of the laser will evaporate the solution to form a suspension droplet and reduce [...] Read more.
The use of static solution-assisted laser drilling can effectively improve hole roundness, decrease taper angle, and reduce recast layer thickness and hole wall slag adhesion. However, the enormous energy of the laser will evaporate the solution to form a suspension droplet and reduce the quality and efficiency of laser drilling. To deal with this defect, the mist-blowing method was used to reduce the influence of droplets on the taper angle and recast layer. In this work, the effect of wind speed on drilling quality was examined, and laser drilling in air, water, and NaCl solution was carried out to analyse the effect of solution composition on hole wall morphology. The results showed that a speed fan with a proper wind speed that disperses the droplets formed in the processing area can significantly reduce the refraction and scattering of the laser, and the taper angle and roundness of the drilling hole were also reduced by 15.6% and improved by 2.4%, respectively, under the wind speed of 2 m/s. The hole wall morphology showed a thicker recast layer and cracking in air, while it was thinner in water and there was little or no layer in the NaCl solution in the same current. When drilling in NaCl, the taper angle and roundness of the drilling hole were reduced by 4.13% and improved by 2.11%, respectively, compared to water. Due to the mechanical effect of the laser in the NaCl solution, the impact force on the material was much greater than that in water. The solution cavitation effect, generated by the absorption of laser energy, caused an explosive impact on the molten material adhered to the surface of the hole wall. Above all, drilling in the NaCl solution with a current of 200 A and a wind speed of 2 m/s was the optimal condition for obtaining the best processing quality. Full article
(This article belongs to the Special Issue Laser Micro/Nano Fabrication, Second Edition)
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12 pages, 2651 KiB  
Article
Fabrication of Thin-Wall Structures with a Femtosecond Laser and Stainless Steel Powder
by Iñigo Ramon-Conde, Luis Omeñaca, Mikel Gomez-Aranzadi, Enrique Castaño, Ainara Rodriguez and Santiago M. Olaizola
Micromachines 2024, 15(4), 444; https://doi.org/10.3390/mi15040444 - 26 Mar 2024
Viewed by 536
Abstract
Additive Manufacturing (AM) has revolutionized the production of complex three-dimensional (3D) structures; however, the efficient and precise fabrication of thin profiles remains a challenge. This study explores the application of femtosecond-laser-based additive manufacturing techniques for the production of thin profiles with micron-scale features, [...] Read more.
Additive Manufacturing (AM) has revolutionized the production of complex three-dimensional (3D) structures; however, the efficient and precise fabrication of thin profiles remains a challenge. This study explores the application of femtosecond-laser-based additive manufacturing techniques for the production of thin profiles with micron-scale features, reaching profile thicknesses below 100 µm. The study investigates the effects of scanning strategy, with optimized processing parameters, on the fabrication of thin profiles; wall thickness measurements were carried out using various technologies to analyse the influence of each on the resulting values. The quality of the walls was quantified by means of a visual characterization of the melted volumes, analysing the evolution of the measured thickness with regard to the processing conditions and in relation to the theoretical thicknesses of the walls. Full article
(This article belongs to the Special Issue Laser Micro/Nano Fabrication, Second Edition)
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