Precision Optical Manufacturing and Processing

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D:Materials and Processing".

Deadline for manuscript submissions: 30 November 2024 | Viewed by 809

Special Issue Editors

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Guest Editor
School of Mechanical Engineering, Tianjin University, Tianjin 300072, China
Interests: ultra-precision machining technology; intelligent manufacturing and industrial robotics; abrasive machining technology; innovative hybrid manufacturing processes for difficult-to-machine materials; materials science/workpiece surface integrity analysis; modelling, simulation, and optimization of manufacturing processes
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Guest Editor
Department of Optical Science and Engineering, Fudan University, Shanghai 200438, China
Interests: manufacturing process mechanics; 3D printing; ultra-precision manufacturing and metrology; freeform measurement and characterization; manufacturing process optimization; fring projection; 3D vision; VR/AR/MR; light field; machine learning
Special Issues, Collections and Topics in MDPI journals

Guest Editor
Xi'an Jiaotong University-GENERTEC Joint Research Institute, Xi'an, China
Interests: precision and ultra-precision machining technology; ultra-precision single point diamond cutting technology and machine tools; advanced optical manufacturing; machining process and on-line measurement; processing of difficult-to-machine materials

Special Issue Information

Dear Colleagues,

Precision optical elements have always been essential to strategic fields such as aerospace, defense, medical equipment, and electronics. In recent years, the development of those fields has created new requirements for optical manufacturing technology, which mainly focus on higher precision, efficiency, complexity, and intelligence. Therefore, developing new advanced micro/nanoscale machining technologies, state-of-the-art processing techniques, and corresponding equipment and establishing theoretical systems for better understanding and application of the process are of great significance. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on, but are not limited to, the recent advances and frontiers of the following areas:

  1. Precision engineering, inspection, measurement, and metrology;
  2. Manufacturing planning, optimization, and simulation;
  3. Computer-integrated manufacturing systems;
  4. Smart manufacturing;
  5. Micro/nanofabrication and manufacturing;
  6. Ultraprecision machining technology.

We look forward to receiving your contributions.

Dr. Zhongchen Cao
Prof. Dr. Lingbao Kong
Dr. Dongxu Wu
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.


  • optical manufacturing
  • precision processing
  • process chains
  • micro- and nanometrology
  • modelling and simulation

Published Papers (1 paper)

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17 pages, 8260 KiB  
Research on the Influence of the Material Removal Profile of a Spherical Polishing Tool on the Mid-Spatial Frequency Errors of Optical Surfaces
by Zhaohao He, Kuo Hai, Kailong Li, Jiahao Yu, Lingwei Wu, Lin Zhang, Xing Su, Lisheng Cai, Wen Huang and Wei Hang
Micromachines 2024, 15(5), 654; - 15 May 2024
Viewed by 350
Elastic spherical polishing tools effectively conform to the polishing surface and exhibit high efficiency in the removal of materials, so they are extensively used in the sub-aperture polishing stages of optical components. However, their processing is often accompanied by significant mid-spatial frequency (MSF) [...] Read more.
Elastic spherical polishing tools effectively conform to the polishing surface and exhibit high efficiency in the removal of materials, so they are extensively used in the sub-aperture polishing stages of optical components. However, their processing is often accompanied by significant mid-spatial frequency (MSF) errors, which critically degrade the performance of optical systems. To suppress the MSF errors generated during polishing with spherical tools, this study investigates the influence factor of MSF errors during the polishing process through an analysis of the convolution effect in material removal. A material removal profile model is established, and a uniform removal simulation is conducted to assess the influence of different shape material removal profiles on MSF errors. Simulation and experimental results show that a Gaussian-like shape material removal profile is more effective in suppressing the MSF errors during polishing compared to the “W” and trapezoidal shape material removal profiles. In addition, based on the characteristics of the RMS decreasing in a serrated trend with the decrease in path spacing, a path spacing optimization method considering the polishing efficiency is proposed to improve the polishing efficiency while controlling the MSF errors, and the effectiveness of the path spacing optimization method is verified by comparing the MSF error at the maximum theoretical path spacing and the path spacing that is less than this. Finally, the path spacing optimization method is used to polish single-crystal silicon to further illustrate its practicality. Full article
(This article belongs to the Special Issue Precision Optical Manufacturing and Processing)
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