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Micromachines
Special Issues
Novel Surface and Bulk Acoustic Wave Devices
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Novel Surface and Bulk Acoustic Wave Devices

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".

Deadline for manuscript submissions: 30 May 2024 | Viewed by 5340

Special Issue Editors

Prof. Dr. Wei Luo

E-Mail Website
Guest Editor
School of Integrated Circuits, Huazhong University of Science and Technology, Wuhan 430074, China
Interests: acoustic wave signal processing devices; SAW sensors and read out system; piezoelectric MEMS devices
Prof. Dr. Chengjie Zuo

E-Mail Website
Guest Editor
School of Microelectronics, University of Science and Technology of China, Hefei 230026, China
Interests: RF-MEMS; nano-opto-electro-mechanical systems; RF filters (hybrid, IPD, SAW, BAW)
Prof. Dr. Wen Wang

E-Mail Website
Guest Editor
Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China
Interests: surface acoustic wave signal processing; sensor technology
Special Issues, Collections and Topics in MDPI journals
Dr. Jian Zhou

E-Mail Website
Guest Editor
College of Mechanical and Vehicle Engineering, Hunan University, Changsha 410082, China
Interests: surface acoustic wave sensors and their fabrication
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

Surface acoustic wave and bulk acoustic wave devices have always been a hotspot in the field of piezoelectric devices. Commercially, the demand for high-frequency, large-bandwidth, and low-loss filters in the RF front-end of mobile phones continues to drive the development of surface acoustic wave devices and bulk acoustic wave devices. Various high-sensitivity acoustic wave sensors are also attracting the attention of researchers and investors, especially the wireless and passive features make acoustic wave sensors are applied in many fields. At the same time, with the continuous improvement of the basic research, some new devices are also emerging, such as the surface acoustic wave amplifier based on the acousto-electric amplification effect, and the XSAW/XBAW devices based on the single crystal piezoelectric substrate. It is worth noting that sensors based on single-crystal piezoelectric thin-film substrates have not been studied much, which is undoubtedly an important topic in this field. Accordingly, this Special Issue seeks to showcase research papers, communications, and review articles that focus on novel methodology, design and fabrication developments in surface and bulk acoustic wave devices, including, but not limited to, the topics mentioned above.

We look forward to receiving your submissions!

Prof. Dr. Wei Luo
Prof. Dr. Chengjie Zuo
Prof. Dr. Wen Wang
Dr. Jian Zhou
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • surface acoustic waves
  • bulk acoustic waves
  • RF filters (Hybrid, SAW, BAW)
  • acoustic wave sensors
  • RF-MEMS

Published Papers (6 papers)

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Research

12 pages, 5410 KiB  
Article
Rational Design of a Surface Acoustic Wave Device for Wearable Body Temperature Monitoring
by Yudi Xie, Minglong Deng, Jinkai Chen, Yue Duan, Jikai Zhang, Danyu Mu, Shurong Dong, Jikui Luo, Hao Jin and Shoji Kakio
Micromachines 2024, 15(5), 555; https://doi.org/10.3390/mi15050555 - 23 Apr 2024
Viewed by 279
Abstract
Continuous monitoring of vital signs based on advanced sensing technologies has attracted extensive attention due to the ravages of COVID-19. A maintenance-free and low-cost passive wireless sensing system based on surface acoustic wave (SAW) device can be used to continuously monitor temperature. However, [...] Read more.
Continuous monitoring of vital signs based on advanced sensing technologies has attracted extensive attention due to the ravages of COVID-19. A maintenance-free and low-cost passive wireless sensing system based on surface acoustic wave (SAW) device can be used to continuously monitor temperature. However, the current SAW-based passive sensing system is mostly designed at a low frequency around 433 MHz, which leads to the relatively large size of SAW devices and antenna, hindering their application in wearable devices. In this paper, SAW devices with a resonant frequency distributed in the 870 MHz to 960 MHz range are rationally designed and fabricated. Based on the finite-element method (FEM) and coupling-of-modes (COM) model, the device parameters, including interdigital transducer (IDT) pairs, aperture size, and reflector pairs, are systematically optimized, and the theoretical and experimental results show high consistency. Finally, SAW temperature sensors with a quality factor greater than 2200 are obtained for real-time temperature monitoring ranging from 20 to 50 °C. Benefitting from the higher operating frequency, the size of the sensing system can be reduced for human body temperature monitoring, showing its potential to be used as a wearable monitoring device in the future. Full article
(This article belongs to the Special Issue Novel Surface and Bulk Acoustic Wave Devices)
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11 pages, 2690 KiB  
Article
Ultra-High Frequency Surface Acoustic Wave Sensors for Temperature Detection
by Qi Dong, Qutong Yang, Xiaoyang Liu, Shenghe Hu, Wenzhe Nie, Zhao Jiang, Xiaoming Fan, Jingting Luo, Ran Tao and Chen Fu
Micromachines 2024, 15(1), 135; https://doi.org/10.3390/mi15010135 - 15 Jan 2024
Viewed by 870
Abstract
Highly sensitive surface acoustic wave (SAW) sensors have recently been recognized as a promising tool for various industrial and medical applications. However, existing SAW sensors generally suffer from a complex design, large size, and poor robustness. In this paper, we develop a simple [...] Read more.
Highly sensitive surface acoustic wave (SAW) sensors have recently been recognized as a promising tool for various industrial and medical applications. However, existing SAW sensors generally suffer from a complex design, large size, and poor robustness. In this paper, we develop a simple and stable delay line ultra-high frequency (UHF) SAW sensor for highly sensitive detection of temperature. A Z-shaped delay line is specially designed on the piezoelectric substrate to improve the sensitivity and reduce the substrate size. Herein, the optimum design parameters of extremely short-pitch interdigital transducers (IDTs) are given by numerical simulations. The extremely short pitch gives the SAW sensor ultra-high operating frequency and consequently ultra-high sensitivity. Several experiments are conducted to demonstrate that the sensitivity of the Z-shaped SAW delay line sensor can reach up to 116.685°/°C for temperature detection. The results show that the sensor is an attractive alternative to current SAW sensing platforms in many applications. Full article
(This article belongs to the Special Issue Novel Surface and Bulk Acoustic Wave Devices)
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17 pages, 7785 KiB  
Article
Design for SAW Antenna-Plexers with Improved Matching Inductance Circuits
by Min-Yuan Yang and Ruey-Beei Wu
Micromachines 2024, 15(1), 89; https://doi.org/10.3390/mi15010089 - 30 Dec 2023
Viewed by 1082
Abstract
This study designs antenna-plexers, including a surface acoustic wave (SAW) extractor and an upper- and mid-high band (UHB + MHB) diplexer, for LTE 4G and 5G bands using carrier aggregation. The SAW extractor combines a bandpass filter (BPF) and a band-stop filter (BSF) [...] Read more.
This study designs antenna-plexers, including a surface acoustic wave (SAW) extractor and an upper- and mid-high band (UHB + MHB) diplexer, for LTE 4G and 5G bands using carrier aggregation. The SAW extractor combines a bandpass filter (BPF) and a band-stop filter (BSF) in a single unit that consists of eight modified Butterworth–van Dyke (mBVD) resonators that resonate in parallel with an inductor and SAW resonators. This BSF behaves as a high-pass filter at frequencies lower than the designed WIFI band and as a capacitor at higher frequencies. The SAW extractor meets product specifications in the frequency range 0.7 to 2.7 GHz. The UHB + MHB diplexer, which is composed of a microwave filter, a SAW filter, and a simple matching inductor, uses frequency response methods to create an RF component for 2.4 GHz + WIFI 6E applications. The design uses a SAW’s interdigital transducer (IDT) structure, and the experimental results are in agreement with the simulation results, so the design is feasible. Full article
(This article belongs to the Special Issue Novel Surface and Bulk Acoustic Wave Devices)
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14 pages, 7102 KiB  
Article
Optimization of Surface Acoustic Wave Resonators on 42°Y-X LiTaO3/SiO2/Poly-Si/Si Substrate for Improved Performance and Transverse Mode Suppression
by Hongzhi Pan, Yang Yang, Lingqi Li, Qiaozhen Zhang, Zeyu Zheng, Xuesong Du, Pingjing Chen, Jiahe Dong, Chuan Lu, Xiao Xie, Hualin Li, Qiang Xiao, Jinyi Ma and Zhenglin Chen
Micromachines 2024, 15(1), 12; https://doi.org/10.3390/mi15010012 (registering DOI) - 21 Dec 2023
Viewed by 782
Abstract
SAW devices with a multi-layered piezoelectric substrate have excellent performance due to advantages such as a high quality factor, Q, low loss insertion, large bandwidth, etc. Prior to manufacturing, a comprehensive analysis and proper design are essential to evaluating the device’s key [...] Read more.
SAW devices with a multi-layered piezoelectric substrate have excellent performance due to advantages such as a high quality factor, Q, low loss insertion, large bandwidth, etc. Prior to manufacturing, a comprehensive analysis and proper design are essential to evaluating the device’s key performance indicators, including the Bode Q value, bandwidth, and transverse mode suppression. This study explored the performance of SAW resonators employing a 42°Y-X LiTaO3 (LT) thin-plate-based multi-layered piezoelectric substrate. The thicknesses for each layer of the 42°Y-X LT/SiO2/poly-Si/Si substrate were optimized according to the index of phase velocity, Bode Q value, and bandwidth. The effect of the device structure parameters on the dispersion curve and slowness curve was studied, and a flat slowness curve was found to be favorable for transverse mode suppression. In addition, the design of the dummy configuration was also optimized for the suppression of spurious waves. Based on the optimized design, a one-port resonator on the 42°Y-X LT/SiO2/poly-Si/Si substrate was fabricated. The simulation results and measurements are presented and compared, which provides guidelines for the design of new types of SAW devices configured with complex structures. Full article
(This article belongs to the Special Issue Novel Surface and Bulk Acoustic Wave Devices)
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14 pages, 2576 KiB  
Article
Phononic-Crystal-Based SAW Magnetic-Field Sensors
by Mohsen Samadi, Julius Schmalz, Jana Marie Meyer, Fabian Lofink and Martina Gerken
Micromachines 2023, 14(11), 2130; https://doi.org/10.3390/mi14112130 - 20 Nov 2023
Viewed by 955
Abstract
In this theoretical study, we explore the enhancement of sensing capabilities in surface acoustic wave (SAW)-based magnetic field sensors through the integration of engineered phononic crystals (PnCs). We particularly focus on amplifying the interaction between the SAW and magnetostrictive materials within the PnC [...] Read more.
In this theoretical study, we explore the enhancement of sensing capabilities in surface acoustic wave (SAW)-based magnetic field sensors through the integration of engineered phononic crystals (PnCs). We particularly focus on amplifying the interaction between the SAW and magnetostrictive materials within the PnC structure. Through comprehensive simulations, we demonstrate the synchronization between the SAWs generated by IDTs and the resonant modes of PnCs, thereby leading to an enhancement in sensitivity. Furthermore, we investigate the ΔE effect, highlighting the sensor’s responsiveness to changes in external magnetic fields, and quantify its magnetic sensitivity through observable changes in the SAW phase velocity leading to phase shifts at the end of the delay line. Notably, our approach yields a magnetic field sensitivity of approximately S~138 °mT for a delay line length of only 77 µm in homogeneous magnetic fields. Our findings underline the potential of PnCs to advance magnetic field sensing. This research offers insights into the integration of engineered materials for improved sensor performance, paving the way for more effective and accurate magnetic field detection solutions. Full article
(This article belongs to the Special Issue Novel Surface and Bulk Acoustic Wave Devices)
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14 pages, 3105 KiB  
Article
Research on the SAW Gyroscopic Effect in a Double-Layer Substrate Structure Incorporating Non-Piezoelectric Materials
by Hengbiao Chen, Lili Meng, Mengjiao Lu, Ziwen Song, Wen Wang and Xiuting Shao
Micromachines 2023, 14(10), 1834; https://doi.org/10.3390/mi14101834 - 26 Sep 2023
Viewed by 702
Abstract
The SAW (surface acoustic wave) gyroscopic effect is a key parameter that reflects the sensitivity performance of SAW angular velocity sensors. This study found that adding a layer of non-piezoelectric material with a lower reflection coefficient than that of the upper-layer material below [...] Read more.
The SAW (surface acoustic wave) gyroscopic effect is a key parameter that reflects the sensitivity performance of SAW angular velocity sensors. This study found that adding a layer of non-piezoelectric material with a lower reflection coefficient than that of the upper-layer material below the piezoelectric substrate to form a double-layer structure significantly enhanced the SAW gyroscopic effect, and the smaller the reflection coefficient of the lower-layer material, the stronger the SAW gyroscopic effect, with values being reached that were two to three times those with single-layer substrate structures. This was confirmed using a three-dimensional model, and the experimental results also showed that the thickness of the piezoelectric layer and the type of the lower-layer material also had a significant impact on the SAW gyroscopic effect. This novel discovery will pave the way for the future development of SAW angular velocity sensors. Full article
(This article belongs to the Special Issue Novel Surface and Bulk Acoustic Wave Devices)
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