MEMS/NEMS for Sensing: Array, Integration, Intelligence and Application, 2nd Edition

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".

Deadline for manuscript submissions: 30 June 2024 | Viewed by 2416

Special Issue Editor

School of Mechano-Electronic Engineering, Xidian University, Xi’an 710071, China
Interests: MEMS; piezoresistive sensors; piezoelectric devices; flexible sensors
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

The continuous advances in micro- and nanotechnology not only require the development of new devices and techniques which allow us to explore the fascinating nanoworld, but also provide innovative solutions to old problems. In this aspect, the use of micro- and nano-electromechanical systems (MEMS/NEMS) has been revealed as a relentless approach for exploiting the possibilities provided by the nanoworld. These kind of systems allow us to characterize a wide variety of phenomena (physical, chemical, and biological) in the nanoscale by using them as sensors and probes. Moreover, applications based on the use of MEMS/NEMS can be the key for the next breakthroughs in different intelligent scenarios, such as healthcare, self-powered detection, micro-operation, flexible display, etc. This Special Issue seeks to compile different research papers, short communications, and review articles on MEMS/NEMS for innovative sensing solutions as well as their applications in different intelligent fields.

We are looking forward to receiving your submissions.

Dr. Yan Liu
Guest Editor

Manuscript Submission Information

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Keywords

  • MEMS/NEMS for sensing
    • physical sensing
    • chemical sensing
    • biological sensing
    • MEMS inertial navigation systems
  • MEMS/NEMS arrays
  • MEMS/NEMS integration, design, and fabrication
  • MEMS/NEMS theory and modeling
  • MEMS/NEMS in intelligence applications
    • microscale energy harvesting and self-powered systems
    • device and systems for healthcare
    • flexible circuit and display for intelligence
    • sensing devices in micro-operation
    • RF MEMS/optical MEMS

Published Papers (2 papers)

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Research

20 pages, 1343 KiB  
Article
Adaptive Expectation–Maximization-Based Kalman Filter/Finite Impulse Response Filter for MEMS-INS-Based Posture Capture of Human Upper Limbs
by Mingxu Sun, Yichen Li, Rui Gao, Jingwen Yu and Yuan Xu
Micromachines 2024, 15(4), 440; https://doi.org/10.3390/mi15040440 - 26 Mar 2024
Viewed by 1446
Abstract
To obtain precise positional information, in this study, we propose an adaptive expectation–maximization (EM)-based Kalman filter (KF)/finite impulse response (FIR) integrated filter for inertial navigation system (INS)-based posture capture of human upper limbs. Initially, a data fusion model for wrist and elbow position [...] Read more.
To obtain precise positional information, in this study, we propose an adaptive expectation–maximization (EM)-based Kalman filter (KF)/finite impulse response (FIR) integrated filter for inertial navigation system (INS)-based posture capture of human upper limbs. Initially, a data fusion model for wrist and elbow position is developed. Subsequently, the Mahalanobis distance is utilized to evaluate the performance of the filter. The integrated filter employs the EM-based KF to enhance noise estimation accuracy when the performance of KF declines. Conversely, upon deterioration in the performance of the EM-based KF, which is evaluated using the Mahalanobis distance, the FIR filter is employed to maintain the effectiveness of the data fusion filter. This research utilizes the proposed EM-based KF/FIR integrated filter to ascertain wrist and elbow positions. The empirical results demonstrate the proficiency of the proposed approach in estimating these positions, thereby overcoming the challenge and highlighting its inherent effectiveness. Full article
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15 pages, 4821 KiB  
Article
Investigation of New Accelerometer Based on Capacitive Micromachined Ultrasonic Transducer (CMUT) with Ring-Perforation Membrane
by Luhao Gou, Hongliang Wang, Qi Ding, Yulong Liu, Runze Yang, Feng Zhang, Pengcheng Zhang and Gang Cao
Micromachines 2024, 15(2), 279; https://doi.org/10.3390/mi15020279 - 16 Feb 2024
Viewed by 773
Abstract
Capacitive micromachined ultrasonic transducer (CMUT) has been widely studied due to its excellent resonance characteristics and array integration. This paper presents the first study of the CMUT electrostatic stiffness resonant accelerometer. To improve the sensitivity of the CMUT accelerometer, this paper innovatively proposes [...] Read more.
Capacitive micromachined ultrasonic transducer (CMUT) has been widely studied due to its excellent resonance characteristics and array integration. This paper presents the first study of the CMUT electrostatic stiffness resonant accelerometer. To improve the sensitivity of the CMUT accelerometer, this paper innovatively proposes the CMUT ring-perforation membrane structure, which effectively improves the acceleration sensitivity by reducing the mechanical stiffness of the elastic membrane. The acceleration sensitivity is 10.9 (Hz/g) in the acceleration range of 0–20 g, which is 100% higher than that of the conventional CMUT structure. This research contributes to the acceleration measurement field of CMUT and can effectively contribute to the breakthrough of vibration acceleration monitoring technology in aerospace, medical equipment, and automotive electronics. Full article
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