Editorial Board Members’ Collection Series: Nonlinear Control and Dynamics for MEMS

A special issue of Actuators (ISSN 2076-0825). This special issue belongs to the section "Miniaturized and Micro Actuators".

Deadline for manuscript submissions: 31 December 2024 | Viewed by 5226

Special Issue Editors


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Guest Editor
Department of Applied Mechanics, FEMTO-ST Institute, Université Bourgogne Franche-Comté, 25000 Besançon, France
Interests: MEMS; NEMS; sensors and actuators; energy harvesting; smart structures; nonlinear dynamics; vibrations; multiphysics modeling; computational methods

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Guest Editor
Department of Civil and Environmental Engineering; Politecnico di Milano, Milan, Italy
Interests: MEMS; metamaterials; piezoelectric transduction; energy harvesting; linear and non-linear dynamics; elastic waves
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Special Issue Information

Dear Colleagues,

The functionalization of nonlinearities and the design of nonlinear control systems for MEMS have attracted considerable interest in recent years because of their critical applications in the fields of sensors and actuators. For instance, the nonlinear dynamics of vibrating MEMS have been widely investigated in open and closed loops while including innovative and appropriate control methods, thus enabling the enhancement of the targeted performances. This Special Issue will focus on fundamental, experimental and theoretical research related to new designs, methods and control strategies applied to MEMS in order to address the scientific, technical and environmental challenges set by recent industrial demands.

Dr. Najib Kacem
Dr. Raffaele Ardito
Guest Editors

Manuscript Submission Information

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Keywords

  • MEMS
  • functionalized nonlinearity
  • nonlinear
  • dynamics and vibrations
  • bifurcation topology
  • multistability
  • frequency stability
  • chaos
  • modal interactions
  • nonlinear controllers
  • dynamic
  • stability
  • robust control
  • hybrid controllers
  • adaptive control
  • reduced order modeling

Published Papers (4 papers)

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Research

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24 pages, 4654 KiB  
Article
Modal Behavior of Microcantilevers Arrays with Tunable Electrostatic Coupling
by Nir Dick and Slava Krylov
Actuators 2023, 12(10), 386; https://doi.org/10.3390/act12100386 - 13 Oct 2023
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Abstract
We analyse the spectral content and parametric resonant dynamics of an array of elastically and electrostatically coupled interdigitated micro cantilevers assembled into two identical half-arrays. In this uncommon arrangement, within each of the half-arrays, the beams are coupled only elastically. The half-arrays are [...] Read more.
We analyse the spectral content and parametric resonant dynamics of an array of elastically and electrostatically coupled interdigitated micro cantilevers assembled into two identical half-arrays. In this uncommon arrangement, within each of the half-arrays, the beams are coupled only elastically. The half-arrays are intercoupled only electrostatically, through fringing fields. First, by using the reduced order (RO) model, we analyse the voltage-dependent evolution of the eigenvalues and the eigenvectors of the equivalent mass-spring system, starting from the small two, three and four beams arrays and up to large beams assemblies. We show that at the coupling voltages below a certain critical value, the shape of the eigenvectors, the frequencies of the veering and of the crossing are influenced by the electrostatic coupling and can be tuned by the voltage. Next, by implementing the assumed modes techniques we explore the parametric resonant behavior of the array. We show that in the case of the sub critical electrostatic coupling the actuating voltages required to excite parametric resonance in the damped system can be lower than in a strongly coupled array. The results of the work may inspire new designs of more efficient resonant sensors. Full article
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18 pages, 6980 KiB  
Article
On the Structural Behavior of MEMS Shallow Arch under Combined Effects of In-Plane Parallel Fields and Out-of-Plane Fringing-Fields
by Hassen M. Ouakad, Fehmi Najar and Najib Kacem
Actuators 2023, 12(10), 374; https://doi.org/10.3390/act12100374 - 28 Sep 2023
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Abstract
We propose to study the nonlinear stroke and lower-order modal interactions of a clamped–clamped shallow-arch flexible micro-electrode. The flexible electrode is electrically actuated through an in-plane parallel-plates field superimposed over out-of-plane electrostatic fringing fields. The in-plane electrostatic fields result from a difference of [...] Read more.
We propose to study the nonlinear stroke and lower-order modal interactions of a clamped–clamped shallow-arch flexible micro-electrode. The flexible electrode is electrically actuated through an in-plane parallel-plates field superimposed over out-of-plane electrostatic fringing fields. The in-plane electrostatic fields result from a difference of potential between the initially curved flexible electrode and a lower stationary parallel-grounded electrode. Moreover, the out-of-plane fringing fields are mainly due to the out-of-plane asymmetry of the flexible shallow arch and two respective surrounding stationary side electrodes (left and right). A nonlinear beam model is first introduced, consisting of a nonlinear partial differential equation governing the flexible shallow-arch in-plane deflection. Then, a resultant reduced-order model (ROM) is derived assuming a Galerkin modal decomposition with mode-shapes of a clamped–clamped beam as basis functions. The ROM coupled modal equations are numerically solved to obtain the static deflection. The results indicate the possibility of mono-stable and bi-stable structural behaviors for this particular device, depending on the flexible electrode’s initial rise and the size of its stationary side electrodes. The eigenvalue problem is also derived and examined to estimate the variation of the first three lower natural frequencies of the device when the microbeam is electrostatically actuated. The proposed micro-device is tunable with the possibility of pull-in-free states in addition to modal interactions through linear coupled mode veering and crossover processes. Remarkably, the veering zone between the first and third modes can be electrostatically adjusted and reach 22.6kHz for a particular set of design parameters. Full article
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11 pages, 1408 KiB  
Communication
Non-Reciprocal MEMS Periodic Structure
by Jacopo Marconi, Davide Enrico Quadrelli and Francesco Braghin
Actuators 2023, 12(4), 161; https://doi.org/10.3390/act12040161 - 04 Apr 2023
Cited by 3 | Viewed by 1112
Abstract
In recent years, active periodic structures with in-time modulated parameters have drawn ever-increasing attention due to their peculiar (and sometimes exotic) wave propagation properties. Although many experimental works have shown the efficacy of time-modulation strategies, the benchmarks proposed until now have been mostly [...] Read more.
In recent years, active periodic structures with in-time modulated parameters have drawn ever-increasing attention due to their peculiar (and sometimes exotic) wave propagation properties. Although many experimental works have shown the efficacy of time-modulation strategies, the benchmarks proposed until now have been mostly proof-of-concept demonstrators, with little attention to the feasibility of the solution for practical purposes. In this work, we propose a micro electro-mechanical system (MEMS) periodic structure with modulated electromechanical stiffness featuring non-reciprocal band-gaps that are frequency bands where elastic waves are allowed to travel only in one direction. To this aim, we derive a simplified analytical lumped-parameter model, which is then verified through numerical simulations of both the lumped-parameter system and the high-fidelity multiphysics finite element model including electrostatic effects. We envision that this system, which can easily be manufactured through standard MEMS production processes, may be used as a directional filter in MEMS devices such as insulators and circulators. Full article
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Review

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19 pages, 3625 KiB  
Review
A Review of Nonlinear Mechanisms for Frequency Up-Conversion in Energy Harvesting
by Michele Rosso and Raffaele Ardito
Actuators 2023, 12(12), 456; https://doi.org/10.3390/act12120456 - 08 Dec 2023
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Abstract
Vibration-based energy harvesting has garnered considerable attention from researchers over the past two decades, using different transduction mechanisms. In this context, the utilization of piezoelectric materials has proven to be highly successful, due to their power density, across a broad range of voltages. [...] Read more.
Vibration-based energy harvesting has garnered considerable attention from researchers over the past two decades, using different transduction mechanisms. In this context, the utilization of piezoelectric materials has proven to be highly successful, due to their power density, across a broad range of voltages. A primary challenge in environmental vibration harvesting lies in the frequency mismatch between the devices, which typically exhibit optimal performance at hundreds or thousands of hertz due to their small size (centimeter or millimeter) and the environmental vibration. The latter has considerable energy density around tens of hertz. For this reason, over the last 15 years, the scientific community has concentrated on exploring techniques for band broadening or frequency up-conversion by intentionally introduced (or designed) nonlinearities. This review, following an introduction to the topic of vibration energy harvesting, provides a description of the primarily developed mechanisms, presenting a chronological development for each, from the initial works to the most recent advancements. Additionally, the review touches upon implementation efforts at the micro-electromechanical systems (MEMS) scale for each described technique. Finally, the incorporation of nonlinearities through electronic circuits to enhance performance is briefly discussed. Full article
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