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Journal: Eng. Proc., 2021
Volume: 4
Number: 30
Article:
Dynamic Characterization of Biosensing MEMS Cantilevers with Different Position of the Driving Electrode—Vacuum Response Versus Ambient Conditions
Authors:
by
Marius Pustan, Corina Birleanu and Florina Serdean
Link:
https://www.mdpi.com/2673-4591/4/1/30
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