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Journal: Coatings, 2023
Volume: 13
Number: 1070
Article:
Study on the Deposition Characteristics of Molybdenum Thin Films Deposited by the Thermal Atomic Layer Deposition Method Using MoO2Cl2 as a Precursor
Authors:
by
Baek-Ju Lee, Kyu-Beom Lee, Min-Ho Cheon, Dong-Won Seo and Jae-Wook Choi
Link:
https://www.mdpi.com/2079-6412/13/6/1070
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