The preparation process is mainly divided into three parts: the preparation of stretchable substrate, the preparation of the electrode by laser patterning and the assembly and packaging of circuit. In order to prepare the stretchable electrode with better performance, it is necessary to evaluate the influence of the main parameters of laser processing equipment on the notch quality of copper foil, so as to optimize the processing parameters.
3.1. Optimal Design of Stretchable Electrodes and Simulation of Tensile Properties
A variety of typical electrode interconnection structures are studied by establishing a simulation model, and the optimal structure type and size parameters are determined. First, metal copper was selected as the electrode material, and the typical stretchable interconnect structures (U-shaped, V-shaped, horseshoe-shaped) were designed and simulated, respectively. Secondly, according to the actual situation of laser processing and raw material parameters, the size parameters are set, and further optimization through simulation is used for the design of laser processing interconnect electrode patterns. As shown in
Figure 3a, the single-cycle models of the three stretchable interconnect structures were established using Workbench.
The key factors that lead to tearing or failure of an electrode when it is stretched are its stress and plastic strain.
Figure 3b shows the variation of the maximum equivalent stress and maximum equivalent plastic strain with the tensile rate of the three electrodes under the same tensile conditions. It can be seen that when the stretching rate gradually increases, the maximum equivalent stress and the maximum equivalent plastic strain of the three electrodes increase with the increase of the electrode stretching rate: the maximum equivalent stress of the V-shaped electrode changes the most, from 320.5 MPa increased to 562.1 MPa; followed by U-shaped electrode, the maximum equivalent stress increased from 315.4 to 406.5 MPa; the maximum equivalent stress of the horseshoe-shaped electrode was always the smallest, increased from 299.4 to 392.9 MPa. As shown in
Figure 3c, for the maximum equivalent plastic strain, the horseshoe electrode still performs optimally, increasing from 0.4% to 9.3%. Therefore, during the stretching process, the maximum equivalent stress and equivalent plastic deformation of the interconnected electrodes with the horseshoe shape in the three structures are always kept the minimum, and there is the possibility of bearing a larger tensile load. According to the above analysis, a stretchable circuit was fabricated using electrodes with a horseshoe-shaped structure.
3.2. Preparation of Stretchable Substrates
The substrate is an important part of the stretchable circuit, carrying the electrodes and components. Pour equal proportions of Ecoflex 00-30 (smooth-on, USA) A and B into A beaker and stir well. Seal with clingfilm and refrigerate at −18 °C for 1 h to remove small bubbles from the gel. Glass plate was selected as the bearing substrate of the base layer, and the glass plate was cleaned by JP-020S (Skymen, China) ultrasonic cleaning machine with anhydrous ethanol for 15 min, and then dried. The Ecoflex mixture is rotated by a leveling machine and cured.
Since the laser is very sensitive to changes in the focal length during processing, once the surface of the sample is undulating, the processing effect will be unsatisfactory. In order to obtain a good processing effect, a flat and uniform elastic film is required as a substrate to fabricate a circuit first. For the preparation of thin films, the spin coating method can accurately control the thickness and uniformity of the thin films, and is easy to operate and cost-effective. The elastic base film has uniform texture, good performance and can be used as a substrate was prepared by a gluer. The experiment used the EZ6-S (Jiangsu Lebo, China) smart gluer. The principle is to adsorb the hard substrate through a hollow turntable. Thereby, negative pressure is generated, the hard substrate to be spin-coated is adsorbed on the turntable, and then the coating material mixed glue is dropped on the surface of the hard substrate, and the rotational speed of the turntable is controlled by adjusting the motor speed, thereby changing the centrifugal force and the desired film thickness. The working schematic of the glue dispenser is shown in
Figure 4a. After spin coating, the colloid is cured and peeled off from the hard substrate to obtain an elastic film.
In the experiment to explore the effect of spin coating speed on substrate thickness, the amount of glue dispensed, the acceleration and the duration of the uniform spin coating stage were used as quantification, and the total spin coating time varied with the target spin coating speed. As shown in
Figure 4b, the film thickness decreases with increasing spin coating speed, and the amount of film thickness variation decreases with increasing speed. When the spin coating speed reaches a certain value, the thickness of the film will no longer change. The films had similar thicknesses when the spin coating speed reached 1600 rpm in the experiments and the spin coating speed was continued to increase.
As shown in
Figure 4c, in the experiment to explore the effect of spin coating time on the thickness of the substrate, the acceleration was uniformly set to 600 rpm/s, the initial dispensing amount was 0.5 mL each time, and the spin coating speed was 1200 rpm. The film thickness decreased from 132 to 69 μm when the spin coating speed was constant and the spin coating time was increased from 13 to 53 s. With the increase of spin coating time, the film thickness will not change in the end, this is because under sufficient spin coating time, the colloid on the hard substrate is fully spin-coated and reaches a relatively balanced state, continue to increase the spin coating time to balance. The state is not broken and the film thickness is not affected.
The small amount of glue and the setting of equipment parameters before spin coating sometimes make the glue unable to cover the entire substrate. When exploring the effect of the initial amount of colloid on the final film thickness, it is necessary to ensure that the amount of glue dispensed in each experiment must be such that the mixed colloid can completely cover the surface of the hard substrate.
Figure 4d shows the effect of the initial dispensing amount on the film thickness. When the minimum dispensing amount is 0.5 mL, the end of spin coating can completely cover the hard substrate. When the dispensing amount increases from 0.5 to 2.5 mL, the film thickness has no obvious difference. It shows that the colloid that can stay on the surface of the substrate and form a thin film after spin coating is fixed under a certain spin coating speed and time. At the same time, according to the experimental results of the two control groups, in the case of no spin coating, dripping 0.5 and 1 mL of colloid on the hard substrate has the same film thickness after curing. In summary, both the spin coating speed and the spin coating time have an effect on the film thickness, and the effect of the spin coating speed is greater than that of the spin coating time. The initial amount of glue drop has no obvious effect on the film thickness, but adding more mixed colloids will cause a great waste of raw materials.
3.3. Performance Evaluation of Laser Patterned Copper Foil
The surface of Ecoflex is further coated with a layer of PI solution, which makes the copper foil and substrate adhere well [
17,
18]. When it is semi-dry, paste the copper foil (red copper) and fully roll it with a pressing roller, so that the copper foil can be spread out better. The copper foil is directly patterned by low-power ultraviolet laser to realize the processing of the extendable interconnect electrode. The processing equipment is HG-LU-5 (Wuhan Huagong, China) ultraviolet laser marking machine. The main parameters are shown in
Table 1. AutoCAD software was used to draw the vector graph of electrode contour, and Ezcad software was used to mark the graph and control the cutting of copper foil.
The processing effect of laser varies greatly under different processing parameters, so it is necessary to optimize the processing parameters to obtain better processing effect. In general, the laser marking machine needs to adjust the parameters of laser processing speed, pulse repetition frequency and processing times [
19,
20,
21]. Among them, the processing speed refers to the distance of movement per unit time; pulse repetition rate is the number of pulses released by laser per second; the number of processing is the number of repeated laser scanning for the processing path. A copper foil 40 μm thick was selected to process a straight line 10 mm long. The fixed processing times were 10 times. The control variable method was used to conduct experiments to study the effects of pulse repetition frequency and laser cutting speed on the notch quality one by one.
In this experiment, the pulse repetition frequency range of ultraviolet laser marking machine was 0–100 KHz. In order to explore the influence of laser pulse repetition frequency on cutting, experimental parameters were set as follows: the cutting speed was 150 mm/s, the pulse repetition frequency was set as 20, 40, 60, 80 and 100 KHz respectively, and the processing times were 10 times. The measurement results of incisions at different pulse repetition frequencies are shown in
Figure 5a. It can be seen that there are black oxidized parts on both sides of the laser cut, which is caused by the thermal effect of laser cutting. In laser cutting, the processing area is the highest temperature, due to the thermal conductivity of the metal in the vicinity of the incision and the accumulation of higher heat, so the copper is under high temperature in the air oxidation phenomenon.
With the increase of frequency, the thermal effect decreases, and there is a nonlinear inverse relationship between pulse repetition frequency and slit width. The pulse repetition frequency increases from 20 to 100 KHz, and the slit width decreases from 32 to 15 μm. When the frequency reaches a certain value, the slit width changes very little. With the increase of laser pulse repetition frequency, the flatness of the incision becomes worse, while the width of the incision and the width of the heat affected zone decrease, which is caused by the influence of pulse repetition frequency on the peak power of the laser. When selecting the pulse repetition frequency, it is necessary to reduce the influence of thermal effect as much as possible under the premise of ensuring the laser cutting effect.
- 2.
Laser cutting speed
Laser cutting speed is also one of the important factors affecting the effect of laser cutting, directly affecting the width of the incision and surface roughness. In this experiment, the cutting speed of laser marking machine ranges from 0 to 7000 mm/s. Due to the low absorption rate of ultraviolet laser on copper foil, the action time between laser and copper foil is shortened due to the excessive cutting speed, so the efficiency of high-speed processing is low. In order to explore the impact of laser cutting speed on notch quality, pulse repetition frequency of 80 KHz was selected for the test.
Figure 5b shows the notch of copper foil under low-speed laser cutting. When the cutting speed increases from 50 to 250 mm/s, the cut width decreases from 25 to 20 μm. Laser cutting speed has little effect on the slit width. When the cutting speed is slow, the action time of laser energy in the incision will be prolonged, and the effective spot area and slit width will increase.
At the cutting speed of 50 mm/s, a large amount of material accumulation was observed on both sides of the incision, which was caused by excessive ablation due to the slow cutting speed, which made the incision larger and the edge rough. Therefore, on the premise of ensuring that the cutting through, choose a larger cutting speed as far as possible. In addition, when the cutting speed is greater than 1000 mm/s, the energy obtained per unit area of the workpiece surface is reduced, and the situation cannot be cut through. Only when the processing times are increased to more than 40 times, can the obvious incision be seen, but this will undoubtedly greatly reduce the processing efficiency. When the cutting speed is further increased to 5000 mm/s, the laser cannot completely cut through the copper foil, and a series of continuous circular holes with the diameter of about 15 μm are generated on the copper foil. The spacing of adjacent holes increases with the increase of cutting speed.
To sum up, for the laser cutting of copper foil, the quality of the incision is inseparable from the laser energy. When the input energy is large, it is easy to obtain a wider incision, accompanied by a more serious thermal effect. When the cutting speed increases, the oxidized area on both sides of the cut decreases significantly. Increasing the cutting speed can reduce the oxidation on the metal surface to a certain extent. When the cutting speed is too fast, the width of the cut is reduced accordingly. At this time, it is difficult to cut through the copper foil simply by increasing the processing times, but it is easy to cause the accumulation of heat on the surface of the material to cause serious deformation of the copper foil. At the same time, when the laser processing speed is too large and the processing distance is limited, the laser speed change needs to be carried out in a very short time, which makes the stability of the processing decline, and even cannot cut through the copper foil.
Therefore, when choosing to cut copper foil, it is necessary to ensure that low-speed cutting is preferred on the premise of being able to cut through copper foil, so as to improve the cutting efficiency and obtain better processing quality. Through many comparative experiments, the ideal processing parameters of copper foil were determined as follows: cutting speed 150 mm/s, processing frequency 80 KHz, processing times 10 times.