A Thermopile Detector Based on Micro-Bridges for Heat Transfer
Abstract
:1. Introduction
2. Materials and Methods
3. Results and Discussions
3.1. Structural Design and Simulation
3.2. Profile of the Fabricated Detectors
3.3. Performance Analysis
4. Conclusions
Author Contributions
Funding
Conflicts of Interest
References
- Graf, A.; Arndt, M.; Sauer, M.; Gerlach, G. Review of micromachined thermopiles for infrared detection. Meas. Sci. Technol. 2007, 18, R59–R75. [Google Scholar] [CrossRef]
- Chaglla, E.J.S.; Celik, N.; Balachandran, W. Measurement of Core Body Temperature Using Graphene-Inked Infrared Thermopile Sensor. Sensors 2018, 18, 3315. [Google Scholar] [CrossRef] [PubMed] [Green Version]
- Moisello, E.; Malcovati, P.; Bonizzoni, E. Thermal Sensors for Contactless Temperature Measurements, Occupancy Detection, and Automatic Operation of Appliances during the COVID-19 Pandemic: A Review. Micromachines 2021, 12, 148. [Google Scholar] [CrossRef] [PubMed]
- Randjelovic, D.; Petropoulos, A.; Kaltsas, G.; Stojanovic, M.; Lazic, Z.; Djuric, Z.; Matic, M. Multipurpose MEMS thermal sensor based on thermopiles. Sens. Actuators A Phys. 2008, 141, 404–413. [Google Scholar] [CrossRef]
- Yoo, K.P.; Hong, H.P.; Lee, M.J.; Min, S.J.; Park, C.W.; Choi, W.S.; Min, N.K. Fabrication, characterization and application of a microelectromechanical system (MEMS) thermopile for non-dispersive infrared gas sensors. Meas. Sci. Technol. 2011, 22, 115206. [Google Scholar] [CrossRef]
- Xue, D.; Song, F.; Wang, J.C.; Li, X.X. Single-Side Fabricated p(+)Si/Al Thermopile-Based Gas Flow Sensor for IC-Foundry-Compatible, High-Yield, and Low-Cost Volume Manufacturing. IEEE Trans. Electron Devices 2019, 66, 821–824. [Google Scholar] [CrossRef]
- Buchner, R.; Rohloff, K.; Benecke, W.; Lang, W. A high-temperature thermopile fabrication process for thermal flow sensors. Transducers 2005, 130, 262–266. [Google Scholar]
- Buchner, R.; Sosna, C.; Maiwald, M.; Benecke, W.; Lang, W. A high-temperature thermopile fabrication process for thermal flow sensors. Sens. Actuators A Phys. 2006, 130, 262–266. [Google Scholar] [CrossRef]
- Dijkstra, M.; Lammerink, T.S.J.; de Boer, M.J.; Berenschot, E.J.W.; Wiegerink, R.J.; Elwenspoek, M. Thermal Flow-Sensor Drift Reduction by Thermopile Voltage Cancellation via Power Feedback Control. J. Microelectromech. Syst. 2014, 23, 908–917. [Google Scholar] [CrossRef]
- Itoigawa, K.; Ueno, H.; Shiozaki, M.; Toriyama, T.; Sugiyama, S. Fabrication of flexible thermopile generator. J. Micromech. Microeng. 2005, 15, S233–S238. [Google Scholar] [CrossRef]
- Dhawan, R.; Madusanka, P.; Hu, G.Y.; Debord, J.; Tran, T.; Maggio, K.; Edwards, H.; Lee, M. Si0.97 Ge0.03 microelectronic thermoelectric generators with high power and voltage densities. Nat. Commun. 2020, 11, 4362. [Google Scholar] [CrossRef]
- Shiotsu, Y.; Seino, T.; Kondo, T.; Sugahara, S. Modeling and Design of Thin-Film π-Type Micro Thermoelectric Generator Using Vacuum/Insulator-Hybrid Isolation for Self-Powered Wearable Devices. IEEE Trans. Electron Devices 2020, 67, 3834–3842. [Google Scholar] [CrossRef]
- Van Herwaarden, A.W. Overview of calorimeter chips for various applications. Thermochim. Acta 2005, 432, 192–201. [Google Scholar] [CrossRef]
- Hartmann, T.; Barros, N.; Wolf, A.; Siewert, C.; Volpe, P.L.O.; Schemberg, J.; Grodrian, A.; Kessler, E.; Hanschke, F.; Mertens, F.; et al. Thermopile chip based calorimeter for the study of aggregated biological samples in segmented flow. Sens. Actuators B Chem. 2014, 201, 460–468. [Google Scholar] [CrossRef]
- Huynh, T.P.; Zhang, Y.L.; Yehuda, C. Fabrication and Characterization of a Multichannel 3D Thermopile for Chip Calorimeter Applications. Sensors 2015, 15, 3351–3361. [Google Scholar] [CrossRef] [Green Version]
- Xu, D.H.; Wang, Y.L.; Xiong, B.; Li, T. MEMS-based thermoelectric infrared sensors: A review. Front. Mech. Eng. 2017, 12, 557–566. [Google Scholar] [CrossRef]
- Bao, A.D.; Lei, C.; Mao, H.Y.; Li, R.R.; Guan, Y.H. Study on a High Performance MEMS Infrared Thermopile Detector. Micromachines 2019, 10, 877. [Google Scholar] [CrossRef] [PubMed] [Green Version]
- Muller, M.; Budde, W.; GottfriedGottfried, R.; Hubel, A.; Jahne, R.; Kuck, H. A thermoelectric infrared radiation sensor with monolithically integrated amplifier stage and temperature sensor. Sens. Actuators A Phys. 1996, 54, 601–605. [Google Scholar] [CrossRef]
- He, Y.Q.; Wang, Y.L.; Li, T. Performance Enhanced Thermopile with Rough Dielectric Film Black. IEEE Electron Device Lett. 2020, 41, 593–596. [Google Scholar] [CrossRef]
- He, Y.Q.; Wang, Y.L.; Li, T. Improved Thermopile on Pyramidally-Textured Dielectric Film. IEEE Electron Device Lett. 2020, 41, 1094–1097. [Google Scholar] [CrossRef]
- Li, H.B.; Xu, G.B.; Zhang, C.C.; Mao, H.Y.; Zhou, N.; Chen, D.P. A Sensitivity Controllable Thermopile Infrared Sensor by Monolithic Integration of a N-channel Metal Oxide Semiconductor. ECS J. Solid State Sci. Technol. 2021, 10, 097002. [Google Scholar] [CrossRef]
- Liang, F.; Cai, C.H.; Zhang, K.; Zhang, L.L.; Li, J.D.; Bi, H.C.; Wu, P.S.; Zhu, H.; Wang, C.L.; Wang, H.L. Infrared Gesture Recognition System Based on Near-Sensor Computing. IEEE Electron Device Lett. 2021, 42, 1053–1056. [Google Scholar] [CrossRef]
- Chen, C.N.; Huang, W.C. A CMOS-MEMS Thermopile with Low Thermal Conductance and a Near-Perfect Emissivity in the 8–14 μm Wavelength Range. IEEE Electron Device Lett. 2011, 32, 96–98. [Google Scholar] [CrossRef]
- De Luca, A.; Cole, M.T.; Hopper, R.H.; Boual, S.; Warner, J.H.; Robertson, A.R.; Ali, S.Z.; Udrea, F.; Gardner, J.W.; Milne, W.I. Enhanced spectroscopic gas sensors using in-situ grown carbon nanotubes. Appl. Phys. Lett. 2015, 106, 194101. [Google Scholar] [CrossRef]
- Yu, X.Y.; Zhao, J.H.; Li, C.H.; Chen, Q.D.; Sun, H.B. Gold-Hyperdoped Black Silicon with High IR Absorption by Femtosecond Laser Irradiation. IEEE Trans. Nanotechnol. 2017, 16, 502–506. [Google Scholar] [CrossRef]
- Shi, M.; Dai, X.; Liu, Y.; Zhou, N.; Zhang, C.C.; Ni, Y.; Mao, H.Y.; Chen, D.P. Infrared Thermopile Sensors with in-Situ Integration of Composite Nanoforests for Enhanced Optical Absorption. In Proceedings of the 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), Gainesville, FL, USA, 25–29 January 2021; pp. 283–285. [Google Scholar]
- Li, M.; Shi, M.; Wang, B.; Zhang, C.C.; Yang, S.; Yang, Y.D.; Zhou, N.; Guo, X.; Chen, D.P.; Li, S.J.; et al. Quasi-Ordered Nanoforests with Hybrid Plasmon Resonances for Broadband Absorption and Photodetection. Adv. Funct. Mater. 2021, 31, 2102840. [Google Scholar] [CrossRef]
- Zhou, N.; Li, J.J.; Mao, H.Y.; Liu, H.; Liu, J.B.; Gao, J.F.; Xiang, J.J.; Hu, Y.P.; Shi, M.; Ju, J.X.; et al. The Study of Reactive Ion Etching of Heavily Doped Polysilicon Based on HBr/O2/He Plasmas for Thermopile Devices. Materials 2020, 13, 4278. [Google Scholar] [CrossRef] [PubMed]
- Du, C.H.; Lee, C. Characterization of thermopile based on complementary metal-oxide-semiconductor (CMOS) materials and post CMOS micromachining. Jpn. J. App. Phys. 2002, 41, 4340–4345. [Google Scholar] [CrossRef]
- He, Y.Q.; Wang, Y.L.; Li, T. Simultaneously controlling heat conduction and infrared absorption with a textured dielectric film to enhance the performance of thermopiles. Microsyst. Nanoeng. 2021, 7, 36. [Google Scholar] [CrossRef] [PubMed]
Structural Parameters | Value |
---|---|
Pairs of thermocouples | 16 |
Device area (mm2) | 1.44 |
Absorber area (mm2) | 0.5708 |
Thickness of Si3N4 Absorber (Å) | 5000 |
Thickness of n-type poly-Si (Å) | 3000 |
Thickness of p-type poly-Si (Å) | 3000 |
Trench depth (μm) | 2.3 |
Publisher’s Note: MDPI stays neutral with regard to jurisdictional claims in published maps and institutional affiliations. |
© 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
Share and Cite
Zhou, N.; Ding, X.; Li, H.; Ni, Y.; Pu, Y.; Mao, H. A Thermopile Detector Based on Micro-Bridges for Heat Transfer. Micromachines 2021, 12, 1554. https://doi.org/10.3390/mi12121554
Zhou N, Ding X, Li H, Ni Y, Pu Y, Mao H. A Thermopile Detector Based on Micro-Bridges for Heat Transfer. Micromachines. 2021; 12(12):1554. https://doi.org/10.3390/mi12121554
Chicago/Turabian StyleZhou, Na, Xuefeng Ding, Hongbo Li, Yue Ni, Yonglong Pu, and Haiyang Mao. 2021. "A Thermopile Detector Based on Micro-Bridges for Heat Transfer" Micromachines 12, no. 12: 1554. https://doi.org/10.3390/mi12121554