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Micromachines
Volume 10
Issue 9
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Micromachines, Volume 10, Issue 9 (September 2019) – 74 articles

Cover Story (view full-size image): A modified mathematical model based on concentration distribution was applied to tumor growth in both static and dynamic platforms. Apoptosis and necrosis mechanisms were considered as the main inhibitory factors in the model, while tumor growth rate and nutrient consumption rate were modified in both quiescent and proliferative zones. Such modifications could better predict the experimental results of tumor growth. Finally, tumor growth kinetics in both U-shaped barriers and microwell structures were compared. View this paper
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13 pages, 3807 KiB  
Article
Spider Web-Like Phononic Crystals for Piezoelectric MEMS Resonators to Reduce Acoustic Energy Dissipation
by Fei-Hong Bao, Xue-Qian Wu, Xin Zhou, Qi-Die Wu, Xiao-Sheng Zhang and Jing-Fu Bao
Micromachines 2019, 10(9), 626; https://doi.org/10.3390/mi10090626 - 19 Sep 2019
Cited by 23 | Viewed by 3610
Abstract
Phononic crystals (PnC) are a remarkable example of acoustic metamaterials with superior wave attenuation mechanisms for piezoelectric micro-electro-mechanical systems (MEMS) resonators to reduce the energy dissipation. Herein, a spider web-like PnC (SW-PnC) is proposed to sufficiently isolate the wave vibration. Finite-element [...] Read more.
Phononic crystals (PnC) are a remarkable example of acoustic metamaterials with superior wave attenuation mechanisms for piezoelectric micro-electro-mechanical systems (MEMS) resonators to reduce the energy dissipation. Herein, a spider web-like PnC (SW-PnC) is proposed to sufficiently isolate the wave vibration. Finite-element analysis is performed to gain insight into the transmission property of finite PnC, and band characteristics by infinite periods. In comparison with the circle hole PnC at a similar bandgap, due to its already very lightweight PnC structure compared with previously reported PnCs, the proposed PnC offers a significantly lighter weight, smaller lattice constant, and greater energy leakage inhibition. More specifically, the resonator with the SW-PnC plate as the anchoring substrate exhibited a quality factor as high as 66569.7 at 75.82 MHz. Full article
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13 pages, 15865 KiB  
Article
Efficient and Precise Grinding of Sapphire Glass Based on Dry Electrical Discharge Dressed Coarse Diamond Grinding Wheel
by Yanjun Lu, Wang Luo, Xiaoyu Wu, Chaolan Zhou, Bin Xu, Hang Zhao and Liejun Li
Micromachines 2019, 10(9), 625; https://doi.org/10.3390/mi10090625 - 19 Sep 2019
Cited by 7 | Viewed by 3486
Abstract
In this paper, in view of low grinding efficiency and poor ground surface quality of sapphire glass, the coarse diamond grinding wheel dressed by dry impulse electrical discharge was proposed to perform efficient and precise grinding machining of sapphire glass. The dry electrical [...] Read more.
In this paper, in view of low grinding efficiency and poor ground surface quality of sapphire glass, the coarse diamond grinding wheel dressed by dry impulse electrical discharge was proposed to perform efficient and precise grinding machining of sapphire glass. The dry electrical discharge dressing technology was employed to obtain high grain protrusion and sharp micro-grain cutting edges. The influences of grinding process parameters such as wheel speed, depth of cut and feed speed on the ground surface quality, grinding force and grinding force ratio on sapphire glass were investigated, and the relationship between grinding force and ground surface quality was also revealed. The experimental results show that the grain protrusion height on the surface of a coarse diamond grinding wheel dressed by dry electrical discharge can reach 168.5 µm. The minimum line roughness Ra and surface roughness Sa of ground sapphire glass surface were 0.194 µm and 0.736 µm, respectively. In order to achieve highly efficient ground quality of sapphire glass, the depth of cut was controlled within 7 µm, and the wheel speed and feed speed were 3000–5000 r/min and 10–20 mm/min, respectively. The influences of feed speed and wheel speed on grinding force ratio were more significant, but the influence of depth of cut was little. Full article
(This article belongs to the Section D：Materials and Processing)
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12 pages, 9291 KiB  
Article
A Complete Protocol for Rapid and Low-Cost Fabrication of Polymer Microfluidic Chips Containing Three-Dimensional Microstructures Used in Point-of-Care Devices
by Trieu Nguyen, Aaydha Chidambara Vinayaka, Dang Duong Bang and Anders Wolff
Micromachines 2019, 10(9), 624; https://doi.org/10.3390/mi10090624 - 19 Sep 2019
Cited by 19 | Viewed by 5312
Abstract
This protocol provides insights into the rapid, low-cost, and largescale fabrication of polymer microfluidic chips containing three-dimensional microstructures used in point-of-care devices for applications such as detection of pathogens via molecular diagnostic methods. The details of the fabrication methods are described in this [...] Read more.
This protocol provides insights into the rapid, low-cost, and largescale fabrication of polymer microfluidic chips containing three-dimensional microstructures used in point-of-care devices for applications such as detection of pathogens via molecular diagnostic methods. The details of the fabrication methods are described in this paper. This study offers suggestions for researchers and experimentalists, both at university laboratories and in industrial companies, to prevent doom fabrication issues. For a demonstration of bio-application in point-of-care testing, the 3D microarrays fabricated are then employed in multiplexed detection of Salmonella (Salmonella Typhimurium and Salmonella Enteritidis), based on a molecular detection technique called solid-phase polymerase chain reaction (SP-PCR). Full article
(This article belongs to the Special Issue Micro-, Nano-Fluidics and Biosensors in Food Safety Applications)
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12 pages, 3533 KiB  
Article
Simulation and Experiment on Droplet Volume for the Needle-Type Piezoelectric Jetting Dispenser
by Shizhou Lu, Xi Chen, Hai Zheng, Yupei Zhao and Yizhou Long
Micromachines 2019, 10(9), 623; https://doi.org/10.3390/mi10090623 - 18 Sep 2019
Cited by 11 | Viewed by 5509
Abstract
The needle-type piezoelectric jetting dispenser is widely applied in the microelectronics packaging field, and it is important to control the droplet size to ensure that the droplet jetting process is successful. In this study, we analyzed the influences of system parameters, such as [...] Read more.
The needle-type piezoelectric jetting dispenser is widely applied in the microelectronics packaging field, and it is important to control the droplet size to ensure that the droplet jetting process is successful. In this study, we analyzed the influences of system parameters, such as air pressure, nozzle size, needle strokes, and liquid properties, on droplet size and morphology by considering the droplet formation and separation process through a numerical simulation. An experimental platform was also designed to verify the reliability of the simulations and further analyze strategies for controlling the droplet size. We found that the droplet volume can be increased with an increase in air pressure, needle strokes, and nozzle size until the flow-stream or satellite droplets appear. On the other hand, very small values of these parameters will lead to adhesion or micro-dots. A large nozzle and needle displacement should be chosen for the high-viscosity liquid in order to produce normal droplets. The results also show the recommended ranges of parameter values and suitable droplet volumes for liquids with different viscosities, and these findings can be used to guide the droplet volume control process for needle-type jetting dispensers. Full article
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11 pages, 2821 KiB  
Article
Fabrication and Study on Magnetic-Optical Properties of Ni-Doped ZnO Nanorod Arrays
by Wei Wang, Shoulong Hui, Fuchun Zhang, Xiaoyang Wang, Shuili Zhang, Junfeng Yan and Weihu Zhang
Micromachines 2019, 10(9), 622; https://doi.org/10.3390/mi10090622 - 18 Sep 2019
Cited by 7 | Viewed by 2694
Abstract
Zn1-xNixO nanorod arrays were prepared on Si substrates by magnetron sputtering and hydrothermal methods at 100 °C. We studied the effects of doped concentration and hydrothermal growth conditions on the crystal structure, morphology, photoluminescence, and magnetic properties of Zn [...] Read more.
Zn1-xNixO nanorod arrays were prepared on Si substrates by magnetron sputtering and hydrothermal methods at 100 °C. We studied the effects of doped concentration and hydrothermal growth conditions on the crystal structure, morphology, photoluminescence, and magnetic properties of Zn1-xNixO nanorod arrays. The research results show that the Zn1-xNixO nanorod have the hexagonal wurtzite structure without the appearance of the second phase, and all samples have a highly preferred orientation of a (002) crystal face. The Zn1-xNixO nanorod arrays exhibit obvious room temperature ferromagnetism with saturation magnetization at 4.2 × 10−4 emu/g, the residual magnetization is 1.3 × 10−4 emu/g and the coercive field is 502 Oe, and also excellent luminescent properties with seven times greater luminous intensity than that of ZnO nanorod arrays. The redshift of the ultraviolet emission peak was found by Ni2+ doping. We further explained the source and essence of the magnetic properties of Zn1-xNixO nanorod arrays and deemed that the magnetic moment mainly comes from the hybrid electron exchange of O 2p and Ni 3d state. Full article
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10 pages, 1612 KiB  
Communication
Piezoelectric Impedance-Based Non-Destructive Testing Method for Possible Identification of Composite Debonding Depth
by Wongi S. Na and Jongdae Baek
Micromachines 2019, 10(9), 621; https://doi.org/10.3390/mi10090621 - 17 Sep 2019
Cited by 11 | Viewed by 2865
Abstract
Detecting the depth and size of debonding in composite structures is essential for assessing structural safety as it can weaken the structure possibly leading to a failure. As composite materials are used in various fields up to date including aircrafts and bridges, inspections [...] Read more.
Detecting the depth and size of debonding in composite structures is essential for assessing structural safety as it can weaken the structure possibly leading to a failure. As composite materials are used in various fields up to date including aircrafts and bridges, inspections are carried out to maintain structural integrity. Although many inspection methods exist for detection damage of composites, most of the techniques require trained experts or a large equipment that can be time consuming. In this study, the possibility of using the piezoelectric material-based non-destructive method known as the electromechanical impedance (EMI) technique is used to identify the depth of debonding damage of glass epoxy laminates. Laminates with various thicknesses were prepared and tested to seek for the possibility of using the EMI technique for identifying the depth of debonding. Results show promising outcome for bringing the EMI technique a step closer for commercialization. Full article
(This article belongs to the Special Issue Piezoelectric Transducers: Materials, Devices and Applications)
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21 pages, 9245 KiB  
Article
Analysis and Optimization of a Microchannel Heat Sink with V-Ribs Using Nanofluids for Micro Solar Cells
by Ruijin Wang, Jiawei Wang and Weijia Yuan
Micromachines 2019, 10(9), 620; https://doi.org/10.3390/mi10090620 - 17 Sep 2019
Cited by 28 | Viewed by 4069
Abstract
It is crucial to control the temperature of solar cells for enhancing efficiency with the increasing power intensity of multiple photovoltaic systems. In order to improve the heat transfer efficiency, a microchannel heat sink (MCHS) with V-ribs using a water-based nanofluid as a [...] Read more.
It is crucial to control the temperature of solar cells for enhancing efficiency with the increasing power intensity of multiple photovoltaic systems. In order to improve the heat transfer efficiency, a microchannel heat sink (MCHS) with V-ribs using a water-based nanofluid as a coolant for micro solar cells was designed. Numerical simulations were carried out to investigate the flows and heat transfers in the MCHS when the Reynolds number ranges from 200 to 1000. The numerical results showed that the periodically arranged V-ribs can interrupt the thermal boundary, induce chaotic convection, increase heat transfer area, and subsequently improve the heat transfer performance of a MCHS. In addition, the preferential values of the geometric parameters of V-ribs and the physical parameters of the nanofluid were obtained on the basis of the Nusselt numbers at identical pump power. For MCHS with V-ribs on both the top and bottom wall, preferential values of V-rib are rib width d / W = 1 , flare angle α = 75 ° , rib height h r / H = 0.3 , and ratio of two slant sides b / a = 0.75 , respectively. This can provide sound foundations for the design of a MCHS in micro solar cells. Full article
(This article belongs to the Special Issue Nanostructured Photovoltaic Devices)
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18 pages, 3644 KiB  
Review
Nanostructures for Light Trapping in Thin Film Solar Cells
by Amalraj Peter Amalathas and Maan M Alkaisi
Micromachines 2019, 10(9), 619; https://doi.org/10.3390/mi10090619 - 17 Sep 2019
Cited by 118 | Viewed by 11297
Abstract
Thin film solar cells are one of the important candidates utilized to reduce the cost of photovoltaic production by minimizing the usage of active materials. However, low light absorption due to low absorption coefficient and/or insufficient active layer thickness can limit the performance [...] Read more.
Thin film solar cells are one of the important candidates utilized to reduce the cost of photovoltaic production by minimizing the usage of active materials. However, low light absorption due to low absorption coefficient and/or insufficient active layer thickness can limit the performance of thin film solar cells. Increasing the absorption of light that can be converted into electrical current in thin film solar cells is crucial for enhancing the overall efficiency and in reducing the cost. Therefore, light trapping strategies play a significant role in achieving this goal. The main objectives of light trapping techniques are to decrease incident light reflection, increase the light absorption, and modify the optical response of the device for use in different applications. Nanostructures utilize key sets of approaches to achieve these objectives, including gradual refractive index matching, and coupling incident light into guided modes and localized plasmon resonances, as well as surface plasmon polariton modes. In this review, we discuss some of the recent developments in the design and implementation of nanostructures for light trapping in solar cells. These include the development of solar cells containing photonic and plasmonic nanostructures. The distinct benefits and challenges of these schemes are also explained and discussed. Full article
(This article belongs to the Special Issue Nanostructured Photovoltaic Devices)
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3 pages, 152 KiB  
Editorial
Editorial for the Special Issue of Selected Papers from the 9th Symposium on Micro-Nano Science and Technology on Micromachines
by Norihisa Miki, Koji Miyazaki and Yuya Morimoto
Micromachines 2019, 10(9), 618; https://doi.org/10.3390/mi10090618 - 17 Sep 2019
Cited by 1 | Viewed by 2028
Abstract
The Micro-Nano Science and Technology Division of the JSME (Japan Society of Mechanical Engineers) promotes academic activities to pioneer novel research topics on microscopic mechanics [...] Full article
(This article belongs to the Special Issue Selected Papers from the 9th Symposium on Micro-Nano Science and Technology on Micromachines)
13 pages, 2269 KiB  
Article
An Integrated Portable Multiplex Microchip Device for Fingerprinting Chemical Warfare Agents
by Karolina Petkovic, Anthony Swallow, Robert Stewart, Yuan Gao, Sheng Li, Fiona Glenn, Januar Gotama, Mel Dell’Olio, Michael Best, Justin Doward, Simon Ovendon and Yonggang Zhu
Micromachines 2019, 10(9), 617; https://doi.org/10.3390/mi10090617 - 16 Sep 2019
Cited by 11 | Viewed by 3330
Abstract
The rapid and reliable detection of chemical and biological agents in the field is important for many applications such as national security, environmental monitoring, infectious diseases screening, and so on. Current commercially available devices may suffer from low field deployability, specificity, and reproducibility, [...] Read more.
The rapid and reliable detection of chemical and biological agents in the field is important for many applications such as national security, environmental monitoring, infectious diseases screening, and so on. Current commercially available devices may suffer from low field deployability, specificity, and reproducibility, as well as a high false alarm rate. This paper reports the development of a portable lab-on-a-chip device that could address these issues. The device integrates a polymer multiplexed microchip system, a contactless conductivity detector, a data acquisition and signal processing system, and a graphic/user interface. The samples are pre-treated by an on-chip capillary electrophoresis system. The separated analytes are detected by conductivity-based microsensors. Extensive studies are carried out to achieve satisfactory reproducibility of the microchip system. Chemical warfare agents soman (GD), sarin (GB), O-ethyl S-[2-diisoproylaminoethyl] methylphsophonothioate (VX), and their degradation products have been tested on the device. It was demonstrated that the device can fingerprint the tested chemical warfare agents. In addition, the detection of ricin and metal ions in water samples was demonstrated. Such a device could be used for the rapid and sensitive on-site detection of both chemical and biological agents in the future. Full article
(This article belongs to the Special Issue IMCO 2019)
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13 pages, 8051 KiB  
Article
Investigation on the Edge Chipping in Ultrasonic Assisted Sawing of Monocrystalline Silicon
by Jianyun Shen, Xu Zhu, Jianbin Chen, Ping Tao and Xian Wu
Micromachines 2019, 10(9), 616; https://doi.org/10.3390/mi10090616 - 16 Sep 2019
Cited by 9 | Viewed by 3827
Abstract
Monocrystalline silicon is an important semiconductor material and occupies a large part of the market demand. However, as a hard-brittle material, monocrystalline silicon is extremely prone to happen edge chipping during sawing processing. The edge chipping seriously affects the quality and performance of [...] Read more.
Monocrystalline silicon is an important semiconductor material and occupies a large part of the market demand. However, as a hard-brittle material, monocrystalline silicon is extremely prone to happen edge chipping during sawing processing. The edge chipping seriously affects the quality and performance of silicon wafers. In this paper, both conventional and ultrasonicassisted sawing tests were carried out on monocrystalline silicon to study the formation mechanism of edge chipping. The shape and size of edge chipping after sawing process were observed and measured. The experimental results demonstrated that different sawing processes present different material removal modes and edge quality. The mode of crack propagation was continuous cracks in conventional sawing process, while the expansion mode in ultrasonic assisted sawing was blasting microcracks. This results in the cutting force of ultrasonic assisted sawing becomes much smaller than that of conventional sawing process, which can reduce the size of edge chipping and improve the quality of machined surface. Full article
(This article belongs to the Section D：Materials and Processing)
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3 pages, 138 KiB  
Editorial
Editorial for the Special Issue on MEMS Technology for Biomedical Imaging Applications
by Qifa Zhou and Yi Zhang
Micromachines 2019, 10(9), 615; https://doi.org/10.3390/mi10090615 - 16 Sep 2019
Cited by 2 | Viewed by 1876
Abstract
Biomedical imaging is the key technique and process to create informative images of the human body or other organic structures for clinical purposes or medical science [...] Full article
(This article belongs to the Special Issue MEMS Technology for Biomedical Imaging Applications)
11 pages, 1015 KiB  
Article
Cord-Based Microfluidic Chips as A Platform for ELISA and Glucose Assays
by Jenny Elomaa, Laura Gallegos and Frank A. Gomez
Micromachines 2019, 10(9), 614; https://doi.org/10.3390/mi10090614 - 15 Sep 2019
Cited by 5 | Viewed by 3044
Abstract
This paper describes the development and application of microfluidic cord-based analytical devices (µCADs) in two enzyme-linked immunosorbent assays (ELISAs) and glucose assay. In this study, biotinylated goat anti-mouse immunoglobulin (IgG) antibody, rabbit IgG antibody, and glucose are quantitatively detected. In the ELISA systems, [...] Read more.
This paper describes the development and application of microfluidic cord-based analytical devices (µCADs) in two enzyme-linked immunosorbent assays (ELISAs) and glucose assay. In this study, biotinylated goat anti-mouse immunoglobulin (IgG) antibody, rabbit IgG antibody, and glucose are quantitatively detected. In the ELISA systems, the antibody is spotted on the cord at the detection site and a series of washes, followed by streptavidin-alkaline phosphatase (Strep-ALP) or alkaline phosphatase (ALP)-conjugated secondary antibody and colorimetric substrate, completing the experiment. The devices are subsequently scanned and analyzed yielding a correlation between inverse yellow or inverse blue intensity and antibody concentration. For the first ELISA, a linear range of detection was observed at lower concentrations (2.50 × 10−4–1.75 × 10−3 mg/mL) of Strep-ALP with saturation of the enzyme achieved at higher concentrations (>2.50 × 10−4). For the second ELISA, the L50 was demonstrated to be 167.6 fmol/zone. The glucose assay consisted of spotting increasing concentrations of glucose on the analysis sites and transporting, via capillary action, a solution containing glucose oxidase (GOx), horseradish peroxidase (HRP), and potassium iodide (KI) to the detection sites realizing a yellow-brown color indicating oxidation of iodide to iodine. The device was then dried, scanned, and analyzed to show the correlation between yellow inverse intensity and glucose. Glucose in artificial urine showed good correlation using the devices. Full article
(This article belongs to the Special Issue 10th Anniversary of Micromachines)
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12 pages, 5749 KiB  
Article
Integration of Horizontal and Vertical Microfluidic Modules for Core-Shell Droplet Generation and Chemical Application
by Dong Hyun Yoon, Yoshito Nozaki, Daiki Tanaka, Tetsushi Sekiguchi and Shuichi Shoji
Micromachines 2019, 10(9), 613; https://doi.org/10.3390/mi10090613 - 15 Sep 2019
Cited by 5 | Viewed by 2926
Abstract
This paper presents a method for utilizing three-dimensional microfluidic channels fully to realize multiple functions in a single device. The final device structure was achieved by combining three independent modules that consisted of horizontal and vertical channels. The device allowed for the one-step [...] Read more.
This paper presents a method for utilizing three-dimensional microfluidic channels fully to realize multiple functions in a single device. The final device structure was achieved by combining three independent modules that consisted of horizontal and vertical channels. The device allowed for the one-step generation of water-in-oil-in-water droplets without the need for partial treatment of the polydimethylsiloxane channel surface using separate modules for generating water-in-oil droplets on the horizontal plane and oil-in-water droplets on the vertical plane. The second vertically structured module provided an efficient flow for the generation of highly wettable liquid droplets, and tuning of the first horizontally structured module enabled different modes of inner-core encapsulation within the oil shell. The successful integration of the vertical and horizontal channels for core-shell droplet generation and the chemical synthesis of a metal complex within the droplets were evaluated. The proposed approach of integrating independent modules will expand and enhance the functions of microfluidic platforms. Full article
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8 pages, 1638 KiB  
Article
High-Precision Propagation-Loss Measurement of Single-Mode Optical Waveguides on Lithium Niobate on Insulator
by Jintian Lin, Junxia Zhou, Rongbo Wu, Min Wang, Zhiwei Fang, Wei Chu, Jianhao Zhang, Lingling Qiao and Ya Cheng
Micromachines 2019, 10(9), 612; https://doi.org/10.3390/mi10090612 - 15 Sep 2019
Cited by 23 | Viewed by 5830
Abstract
We demonstrate the fabrication of single-mode optical waveguides on lithium niobate on an insulator (LNOI) by optical patterning combined with chemomechanical polishing. The fabricated LNOI waveguides had a nearly symmetric mode profile of ~2.5 µm mode field size (full-width at half-maximum). We developed [...] Read more.
We demonstrate the fabrication of single-mode optical waveguides on lithium niobate on an insulator (LNOI) by optical patterning combined with chemomechanical polishing. The fabricated LNOI waveguides had a nearly symmetric mode profile of ~2.5 µm mode field size (full-width at half-maximum). We developed a high-precision measurement approach by which single-mode waveguides were characterized to have propagation loss of ~0.042 dB/cm. Full article
(This article belongs to the Special Issue Femtosecond Laser Micromachining for Photonics Applications)
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17 pages, 4891 KiB  
Article
A Monolithic Gimbal Micro-Mirror Fabricated and Remotely Tuned with a Femtosecond Laser
by Saood Ibni Nazir and Yves Bellouard
Micromachines 2019, 10(9), 611; https://doi.org/10.3390/mi10090611 - 14 Sep 2019
Cited by 7 | Viewed by 4125
Abstract
With the advent of ultrafast lasers, new manufacturing techniques have come into existence. In micromachining, the use of femtosecond lasers not only offers the possibility for three-dimensional monolithic fabrication inside a single optically transparent material, but also a means for remotely, and arbitrarily, [...] Read more.
With the advent of ultrafast lasers, new manufacturing techniques have come into existence. In micromachining, the use of femtosecond lasers not only offers the possibility for three-dimensional monolithic fabrication inside a single optically transparent material, but also a means for remotely, and arbitrarily, deforming substrates with nanometer resolution. Exploiting this principle and combining it with flexure design, we demonstrate a monolithic micro-mirror entirely made with a femtosecond laser and whose orientation is tuned in a non-contact manner by exposing some part of the device to low energy femtosecond pulses. Given the non-contact nature of the process, the alignment can be very precisely controlled with a resolution that is many orders of magnitude better than conventional techniques based on mechanical positioners. Full article
(This article belongs to the Special Issue Femtosecond Laser Micromachining for Photonics Applications)
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13 pages, 4168 KiB  
Article
Analysis of Orthogonal Coupling Structure Based on Double Three-Contact Vertical Hall Device
by Rongshan Wei and Yuxuan Du
Micromachines 2019, 10(9), 610; https://doi.org/10.3390/mi10090610 - 14 Sep 2019
Cited by 3 | Viewed by 2332
Abstract
A vertical Hall device is an important component of 3D Hall sensors, used for detecting magnetic fields parallel to the sensor surface. The Hall devices described in existing research still have problems, such as large offset voltage and low sensitivity. Aiming to solve [...] Read more.
A vertical Hall device is an important component of 3D Hall sensors, used for detecting magnetic fields parallel to the sensor surface. The Hall devices described in existing research still have problems, such as large offset voltage and low sensitivity. Aiming to solve these problems, this study proposes a double three-contact vertical Hall device with low offset voltage, and a conformal mapping analysis method to improve the sensitivity of the device. Secondly, an orthogonal coupling structure composed of two sets of double three-contact vertical Hall devices is proposed, which further reduces the offset voltage of the device. Finally, the TCAD simulation software was used to analyze the performance of the devices, and an existing vertical Hall device was compared to ours. The results show that the orthogonal coupling structure in this study exhibits better performance, reaching an average voltage sensitivity of 17.5222 mV/VT and an average offset voltage of about 0.075 mV. In addition, the structure has the same magnitude of offset voltage in the four phases of the rotating current method. This characteristic enables the back-end circuit to more accurately filter out the offset voltage and acquire the Hall signal. Full article
(This article belongs to the Section A：Physics)
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6 pages, 3698 KiB  
Article
Hybrid Quantum Dot Light-Emitting Diodes for White Emission Using Blue Phosphorescent Organic Molecules and Red Quantum Dots
by Aram Moon and Jiwan Kim
Micromachines 2019, 10(9), 609; https://doi.org/10.3390/mi10090609 - 14 Sep 2019
Cited by 3 | Viewed by 3775
Abstract
Hybrid quantum dot light-emitting diodes (QLEDs) with no buffer layer were developed to achieve white emission using red quantum dots by spin-coating, and blue phosphorescent organic molecules by thermal evaporation. These unique bichromatic devices exhibit two distinct electroluminescent peaks with similar intensities at [...] Read more.
Hybrid quantum dot light-emitting diodes (QLEDs) with no buffer layer were developed to achieve white emission using red quantum dots by spin-coating, and blue phosphorescent organic molecules by thermal evaporation. These unique bichromatic devices exhibit two distinct electroluminescent peaks with similar intensities at 10.5 V. For white emission, these hybrid QLEDs present a maximum luminance of 6195 cd/m2 and a current efficiency of 2.02 cd/A. These results indicate that the unique double emission layers have the potential for bright and efficient white devices using fewer materials. Full article
(This article belongs to the Special Issue Flexible/Transparent Optoelectronic Devices for Wearable Application)
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12 pages, 4693 KiB  
Article
Application of Improved Wavelet Thresholding Method and an RBF Network in the Error Compensating of an MEMS Gyroscope
by Guangrun Sheng, Guowei Gao and Boyuan Zhang
Micromachines 2019, 10(9), 608; https://doi.org/10.3390/mi10090608 - 13 Sep 2019
Cited by 20 | Viewed by 2680
Abstract
The large random errors in Micro-Electro-Mechanical System (MEMS) gyros are one of the major factors that affect the precision of inertial navigation systems. Based on the indoor inertial navigation system, an improved wavelet threshold de-noising method was proposed and combined with a gradient [...] Read more.
The large random errors in Micro-Electro-Mechanical System (MEMS) gyros are one of the major factors that affect the precision of inertial navigation systems. Based on the indoor inertial navigation system, an improved wavelet threshold de-noising method was proposed and combined with a gradient radial basis function (RBF) neural network to better compensate errors. We analyzed the random errors in an MEMS gyroscope by using Allan variance, and introduced the traditional wavelet threshold methods. Then, we improved the methods and proposed a new threshold function. The new method can be used more effectively to detach white noise and drift error in the error model. Finally, the drift data was modeled and analyzed in combination with the RBF neural network. Experimental results indicate that the method is effective, and this is of great significance for improving the accuracy of indoor inertial navigation based on MEMS gyroscopes. Full article
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16 pages, 8534 KiB  
Article
Manipulation of Magnetic Beads with Thin Film Microelectromagnet Traps
by Vania Silverio, Miguel Amaral, João Gaspar, Susana Cardoso and Paulo P. Freitas
Micromachines 2019, 10(9), 607; https://doi.org/10.3390/mi10090607 - 13 Sep 2019
Cited by 6 | Viewed by 2895
Abstract
Integration of point-of-care assays can be facilitated with the use of actuated magnetic beads (MB) to perform testing in less expensive settings to enable the delivery of cost-effective care. In this paper we present six different designs of planar microelectromagnets traps (MEMT) with [...] Read more.
Integration of point-of-care assays can be facilitated with the use of actuated magnetic beads (MB) to perform testing in less expensive settings to enable the delivery of cost-effective care. In this paper we present six different designs of planar microelectromagnets traps (MEMT) with four external coils in series and one central coil connected for an opposite direction of manipulation of MB in microfluidic flows. The development of a simulation tool facilitated the rapid and efficient optimization of designs by presenting the influence of system variables on real time concentrations of MB. Real time experiments are in good agreement with the simulations and showed that the design enabled synchronous concentration and dispersion of MB on the same MEMT. The yield of local concentration is seen to be highly dependent on coil design. Additional coil turns between the central and external coils (inter-windings) doubled magnetic concentration and repulsion with no significant electrical resistance increase. The assemblage of a copper microchannel closed loop cooling system to the coils successfully eliminated the thermal drift promoted by joule heating generated by applied current. Full article
(This article belongs to the Special Issue Magnetic Biosensors)
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12 pages, 4315 KiB  
Communication
Microfluidic System for Observation of Bacterial Culture and Effects on Biofilm Formation at Microscale
by Xiao-Yan Zhang, Kai Sun, Aliya Abulimiti, Pian-Pian Xu and Zhe-Yu Li
Micromachines 2019, 10(9), 606; https://doi.org/10.3390/mi10090606 - 12 Sep 2019
Cited by 18 | Viewed by 4899
Abstract
Biofilms exist in the natural world and applied to many industries. However, due to the variety of characteristics caused by their complex components, biofilms can also lead to membrane fouling and recurrent infections which pose threats to human health. So, to make the [...] Read more.
Biofilms exist in the natural world and applied to many industries. However, due to the variety of characteristics caused by their complex components, biofilms can also lead to membrane fouling and recurrent infections which pose threats to human health. So, to make the best use of their advantages and avoid their disadvantages, knowing the best time and methods for improving or preventing biofilm formation is important. In situ observation without fluorescence labeling in microscale and according to a time scale is useful to research biofilm and confine its formation. In this study, we developed a microfluidic system for real-time observation of bacteria culture and biofilms development at microscale. We cultured E. coli ATCC 25922 on a chip at continuous flow of the velocity, which could promote bacterial formation. Biofilms formation under the condition of adding amoxicillin at different times is also discussed. In addition, the mixed strains from sludge were also cultured on chip, and possible factors in biofilm formation are discussed. Our results show that a microfluidic device could culture microorganisms in continuous flow and accelerate them to adhere to the surface, thereby promoting biofilm formation. Overall, this platform is a useful tool in research on initial biofilm formation, which can contribute to preventing biofouling and infections. Full article
(This article belongs to the Collection Lab-on-a-Chip)
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12 pages, 1212 KiB  
Article
Metallization of Organically Modified Ceramics for Microfluidic Electrochemical Assays
by Ashkan Bonabi, Sari Tähkä, Elisa Ollikainen, Ville Jokinen and Tiina Sikanen
Micromachines 2019, 10(9), 605; https://doi.org/10.3390/mi10090605 - 12 Sep 2019
Cited by 7 | Viewed by 3240
Abstract
Organically modified ceramic polymers (ORMOCERs) have attracted substantial interest in biomicrofluidic applications owing to their inherent biocompatibility and high optical transparency even in the near-ultraviolet (UV) range. However, the processes for metallization of ORMOCERs as well as for sealing of metallized surfaces have [...] Read more.
Organically modified ceramic polymers (ORMOCERs) have attracted substantial interest in biomicrofluidic applications owing to their inherent biocompatibility and high optical transparency even in the near-ultraviolet (UV) range. However, the processes for metallization of ORMOCERs as well as for sealing of metallized surfaces have not been fully developed. In this study, we developed metallization processes for a commercial ORMOCER formulation, Ormocomp, covering several commonly used metals, including aluminum, silver, gold, and platinum. The obtained metallizations were systematically characterized with respect to adhesion (with and without adhesion layers), resistivity, and stability during use (in electrochemical assays). In addition to metal adhesion, the possibility for Ormocomp bonding over each metal as well as sufficient step coverage to guarantee conductivity over topographical features (e.g., over microchannel edges) was addressed with a view to the implementation of not only planar, but also three-dimensional on-chip sensing elements. The feasibility of the developed metallization for implementation of microfluidic electrochemical assays was demonstrated by fabricating an electrophoresis separation chip, compatible with a commercial bipotentiostat, and incorporating integrated working, reference, and auxiliary electrodes for amperometric detection of an electrochemically active pharmaceutical, acetaminophen. Full article
(This article belongs to the Special Issue Polymer Based Microsystems)
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1 pages, 160 KiB  
Correction
Correction: Ma, X. et al. Conducting Polymeric Nanocomposites with a Three-Dimensional Co-flow Microfluidics Platform. Micromachines, 2019, 10, 383
by Xiaodong Ma, Yuezhou Zhang and Korbinian Weisensee
Micromachines 2019, 10(9), 604; https://doi.org/10.3390/mi10090604 - 12 Sep 2019
Cited by 4 | Viewed by 1899
Abstract
The authors would like to indicate the following financial support they received to the Funding Section of their published paper [...] Full article
2 pages, 151 KiB  
Editorial
Editorial for the Special Issue on Implantable Microdevices
by Wen Li and Zhen Qiu
Micromachines 2019, 10(9), 603; https://doi.org/10.3390/mi10090603 - 12 Sep 2019
Viewed by 1687
Abstract
Implantable microdevices, providing accurate measurement of target analytes in animals and humans, have always been important in biological science, medical diagnostics, clinical therapy, and personal healthcare [...] Full article
(This article belongs to the Special Issue Implantable Microdevices)
10 pages, 3820 KiB  
Article
Microfluidic-Based Mechanical Phenotyping of Androgen-Sensitive and Non-sensitive Prostate Cancer Cells Lines
by Na Liu, Panpan Du, Xiaoxiao Xiao, Yuanyuan Liu, Yan Peng, Chen Yang and Tao Yue
Micromachines 2019, 10(9), 602; https://doi.org/10.3390/mi10090602 - 12 Sep 2019
Cited by 13 | Viewed by 3041
Abstract
Cell mechanical properties have been identified to characterize cells pathologic states. Here, we report our work on high-throughput mechanical phenotyping of androgen-sensitive and non-sensitive human prostate cancer cell lines based on a morphological rheological microfluidic method. The theory for extracting cells’ elastic modulus [...] Read more.
Cell mechanical properties have been identified to characterize cells pathologic states. Here, we report our work on high-throughput mechanical phenotyping of androgen-sensitive and non-sensitive human prostate cancer cell lines based on a morphological rheological microfluidic method. The theory for extracting cells’ elastic modulus from their deformation and area, and the used experimental parameters were analyzed. The mechanical properties of three types of prostate cancer cells lines with different sensitivity to androgen including LNCaP, DU145, and PC3 were quantified. The result shows that LNCaP cell was the softest, DU145 was the second softest, and PC3 was the stiffest. Furthermore, atomic force microscopy (AFM) was used to verify the effectiveness of this high-throughput morphological rheological method. Full article
(This article belongs to the Special Issue Advanced MEMS/NEMS Technology, Volume II)
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10 pages, 4417 KiB  
Article
Sustainable Fully Printed UV Sensors on Cork Using Zinc Oxide/Ethylcellulose Inks
by Joana Figueira, Cristina Gaspar, José Tiago Carvalho, Joana Loureiro, Elvira Fortunato, Rodrigo Martins and Luís Pereira
Micromachines 2019, 10(9), 601; https://doi.org/10.3390/mi10090601 - 12 Sep 2019
Cited by 15 | Viewed by 3049
Abstract
Low-cost and large-scale production techniques for flexible electronics have evolved greatly in recent years, having great impact in applications such as wearable technology and the internet of things. In this work, we demonstrate fully screen-printed UV photodetectors, successfully fabricated at a low temperature [...] Read more.
Low-cost and large-scale production techniques for flexible electronics have evolved greatly in recent years, having great impact in applications such as wearable technology and the internet of things. In this work, we demonstrate fully screen-printed UV photodetectors, successfully fabricated at a low temperature on a cork substrate, using as the active layer a mixture of zinc oxide nanoparticles and ethylcellulose. The photoresponse under irradiation with a UV lamp with peak emission at 302 nm exhibited a quasi-quadratic behavior directly proportional to the applied voltage, with a photocurrent of about 5.5 and 20 μA when applying 1.5 V and 5 V, respectively. The dark current stayed below 150 nA, while the rise and falling times were, respectively, below 5 and 2 s for both applied voltages. The performance was stable over continuous operation and showed a degradation of only 9% after 100 bending cycles in a 45 mm radius test cylinder. These are promising results regarding the use of this type of sensor in wearable applications such as cork hats, bracelets, or bags. Full article
(This article belongs to the Special Issue Printable and Flexible Electronics for Sensors)
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2 pages, 144 KiB  
Editorial
Editorial for the Special Issue on “Micro- and Nanofluidics for Bionanoparticle Analysis”
by Xuanhong Cheng and Yong Zeng
Micromachines 2019, 10(9), 600; https://doi.org/10.3390/mi10090600 - 12 Sep 2019
Viewed by 1695
Abstract
Bionanoparticles such as microorganisms and exosomes are recognized as important targets for clinical diagnostic and therapeutic applications as well as for food safety and environmental monitoring [...] Full article
(This article belongs to the Special Issue Micro- and Nanofluidics for Bionanoparticle Analysis)
15 pages, 2022 KiB  
Article
The Applications of Lattice Light-Sheet Microscopy for Functional Volumetric Imaging of Hippocampal Neurons in a Three-Dimensional Culture System
by Chin-Yi Chen, Yen-Ting Liu, Chieh-Han Lu, Po-Yi Lee, Yun-Chi Tsai, Jyun-Sian Wu, Peilin Chen and Bi-Chang Chen
Micromachines 2019, 10(9), 599; https://doi.org/10.3390/mi10090599 - 11 Sep 2019
Cited by 9 | Viewed by 4191
Abstract
The characterization of individual cells in three-dimensions (3D) with very high spatiotemporal resolution is crucial for the development of organs-on-chips, in which 3D cell cultures are integrated with microfluidic systems. In this study, we report the applications of lattice light-sheet microscopy (LLSM) for [...] Read more.
The characterization of individual cells in three-dimensions (3D) with very high spatiotemporal resolution is crucial for the development of organs-on-chips, in which 3D cell cultures are integrated with microfluidic systems. In this study, we report the applications of lattice light-sheet microscopy (LLSM) for monitoring neuronal activity in three-dimensional cell culture. We first established a 3D environment for culturing primary hippocampal neurons by applying a scaffold-based 3D tissue engineering technique. Fully differentiated and mature hippocampal neurons were observed in our system. With LLSM, we were able to monitor the behavior of individual cells in a 3D cell culture, which was very difficult under a conventional microscope due to strong light scattering from thick samples. We demonstrated that our system could study the membrane voltage and intracellular calcium dynamics at subcellular resolution in 3D under both chemical and electrical stimulation. From the volumetric images, it was found that the voltage indicators mainly resided in the cytosol instead of the membrane, which cannot be distinguished using conventional microscopy. Neuronal volumetric images were sheet scanned along the axial direction and recorded at a laser exposure of 6 ms, which covered an area up to 4800 μm2, with an image pixel size of 0.102 μm. When we analyzed the time-lapse volumetric images, we could quantify the voltage responses in different neurites in 3D extensions. Full article
(This article belongs to the Special Issue Organs-on-chips)
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11 pages, 3934 KiB  
Article
A Gas Mixture Prediction Model Based on the Dynamic Response of a Metal-Oxide Sensor
by Wei-Chih Wen, Ting-I Chou and Kea-Tiong Tang
Micromachines 2019, 10(9), 598; https://doi.org/10.3390/mi10090598 - 11 Sep 2019
Cited by 11 | Viewed by 2679
Abstract
Metal-oxide (MOX) gas sensors are widely used for gas concentration estimation and gas identification due to their low cost, high sensitivity, and stability. However, MOX sensors have low selectivity to different gases, which leads to the problem of classification for mixtures and pure [...] Read more.
Metal-oxide (MOX) gas sensors are widely used for gas concentration estimation and gas identification due to their low cost, high sensitivity, and stability. However, MOX sensors have low selectivity to different gases, which leads to the problem of classification for mixtures and pure gases. In this study, a square wave was applied as the heater waveform to generate a dynamic response on the sensor. The information of the dynamic response, which includes different characteristics for different gases due to temperature changes, enhanced the selectivity of the MOX sensor. Moreover, a polynomial interaction term mixture model with a dynamic response is proposed to predict the concentration of the binary mixtures and pure gases. The proposed method improved the classification accuracy to 100%. Moreover, the relative error of quantification decreased to 1.4% for pure gases and 13.0% for mixtures. Full article
(This article belongs to the Special Issue Advanced MEMS/NEMS Technology, Volume II)
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19 pages, 3380 KiB  
Article
Trajectory Definition with High Relative Accuracy (HRA) by Parametric Representation of Curves in Nano-Positioning Systems
by Lucía Díaz Pérez, Beatriz Rubio Serrano, José A. Albajez García, José A. Yagüe Fabra, Esmeralda Mainar Maza and Marta Torralba Gracia
Micromachines 2019, 10(9), 597; https://doi.org/10.3390/mi10090597 - 10 Sep 2019
Cited by 1 | Viewed by 2955
Abstract
Nanotechnology applications demand high accuracy positioning systems. Therefore, in order to achieve sub-micrometer accuracy, positioning uncertainty contributions must be minimized by implementing precision positioning control strategies. The positioning control system accuracy must be analyzed and optimized, especially when the system is required to [...] Read more.
Nanotechnology applications demand high accuracy positioning systems. Therefore, in order to achieve sub-micrometer accuracy, positioning uncertainty contributions must be minimized by implementing precision positioning control strategies. The positioning control system accuracy must be analyzed and optimized, especially when the system is required to follow a predefined trajectory. In this line of research, this work studies the contribution of the trajectory definition errors to the final positioning uncertainty of a large-range 2D nanopositioning stage. The curve trajectory is defined by curve fitting using two methods: traditional CAD/CAM systems and novel algorithms for accurate curve fitting. This novel method has an interest in computer-aided geometric design and approximation theory, and allows high relative accuracy (HRA) in the computation of the representations of parametric curves while minimizing the numerical errors. It is verified that the HRA method offers better positioning accuracy than commonly used CAD/CAM methods when defining a trajectory by curve fitting: When fitting a curve by interpolation with the HRA method, fewer data points are required to achieve the precision requirements. Similarly, when fitting a curve by a least-squares approximation, for the same set of given data points, the HRA method is capable of obtaining an accurate approximation curve with fewer control points. Full article
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