Development of CMOS-MEMS Sensors and Devices

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".

Deadline for manuscript submissions: 31 May 2024 | Viewed by 242

Special Issue Editors


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Guest Editor
School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China
Interests: CMOS-MEMS; MEMS sensors; actuators

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Guest Editor
College of Electronics and Information Engineering, Shenzhen University, Shenzhen, China
Interests: CMOS MEMS/MEMS sensors; flexible sensors for IoT

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Guest Editor
School of Information and Electronics, Beijing Institute of Technology, Beijing 100081, China
Interests: MEMS; CMOS-MEMS sensors; micromirrors; microactuators; piezoelectric MEMS microspeakers; pMUTs; photoacoustic microscopy; optical endomicroscopy
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Special Issue Information

Dear Colleagues,

CMOS-MEMS, which stands for Complementary Metal-Oxide Semiconductor Micro-Electromechanical Systems, represents a cutting-edge technology where monolithic or hybrid MEMS are seamlessly integrated with CMOS circuitry. This integration not only facilitates miniaturization of devices but also leads to significant improvements in their performance. CMOS-MEMS encompasses both the devices themselves and the microfabrication processes essential for their creation. Within this realm, MEMS transducers excel at sensing and controlling physical, optical, or chemical properties, while ICs (Integrated Circuits) play a pivotal role in managing the signals generated by these transducers. Their functions encompass analog-to-digital conversion, signal amplification, filtering, information processing, and communication between the MEMS transducer and the external environment. Furthermore, a notable trend involves the creation of multi-functional devices concurrently on the same CMOS chip, serving as versatile sensing nodes for specific applications. In light of these advancements, this Special Issue aims to collate research papers, short communications, and review articles that delve into three primary areas: (1) innovations in the design, fabrication, control, and modeling of CMOS-MEMS devices employing diverse mechanisms; (2) the integration of multi-functional CMOS-MEMS devices as efficient information collection nodes; (3) the latest developments in the application of CMOS-MEMS devices across various sectors, including consumer electronics, optical communications, industrial settings, healthcare, agriculture, aerospace, and defense.

Dr. Xiaoyi Wang
Dr. Wei Xu
Prof. Dr. Huikai Xie
Guest Editors

Manuscript Submission Information

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Keywords

  • modeling on CMOS-MEMS sensors and devices
  • CMOS-MEMS sensors: thermal sensors, optical sensors, magnetic sensors, inertial sensors, chemical sensors, etc.
  • CMOS-MEMS actuators: electrostatic actuators, thermal actuators, piezoelectric actuators, magnetic actuators, chemical actuators etc.
  • CMOS-MEMS monolithic integration
  • CMOS-MEMS multifunctional devices integration
  • CMOS-MEMS sensors and devices applications:
    • consumer electronics
    • aerospace and defense
    • automotive
    • industrial applications
    • medical devices
    • telecommunications
    • environmental monitoring
    • robotics
    • space exploration
    • energy sector

Published Papers

This special issue is now open for submission.
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