Recent Advances in MEMS Resonator-Based Magnetic Sensors

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".

Deadline for manuscript submissions: 31 July 2024 | Viewed by 262

Special Issue Editor

E-Mail Website
Guest Editor
Ultra-Wide Bandgap Semiconductors Group, National Institute for Materials Science (NIMS), Tsukuba, Ibaraki 305-0044, Japan
Interests: M/NEMS resonators; magnetic sensors; diamond; photodetectors

Special Issue Information

Dear Colleagues,

Nowadays, magnetic sensors have gained significant prominence in various fields such as biomedical sensors, automotive sensors, navigation systems, non-contact sensing, and nondestructive testing. Amongst the various types of magnetic sensors, MEMS resonator magnetic sensors have the advantages of small size, batch manufacturing, low-power consumption, high sensitivity and resolution, and facile integration with the CMOS technique.

This Special Issue centres around the advancements in MEMS resonator magnetic sensors and their recent progress, while also addressing the prospects for future research and development in this field. The Special Issue encompasses various subjects such as the design, manufacturing, analysis, packaging, and integration of magnetic sensors based on MEMS resonators.

  • Design and fabrication techniques for MEMS resonant magnetic sensors.
  • Characterization and modeling, stimulation of MEMS resonant magnetic sensors.
  • Novel materials and new device concepts for MEMS resonant magnetic sensors.
  • Physical sensing mechanisms and principles.
  • Integration of MEMS resonant magnetic sensors in practical applications.
  • MEMS resonant magnetic sensors for harsh environments.
  • Applications and markets evaluation for MEMS resonant magnetic sensor.

Dr. Zilong Zhang
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.


  • MEMS resonators
  • resonator magnetic sensors
  • lorentz force-based sensors
  • magnetostrictive effect sensors
  • torque force-based sensors

Published Papers

This special issue is now open for submission.
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