MEMS Packaging Technologies and 3D Integration, 3rd Edition

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D:Materials and Processing".

Deadline for manuscript submissions: 31 December 2024 | Viewed by 58

Special Issue Editor

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Guest Editor
Center for Nanoscience and Nanotechnology (C2N), University-Paris-Saclay, F-91405 Orsay, France
Interests: packaging; MEMS; integration; bonding; polymer; adhesion
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Special Issue Information

Dear Colleagues,

MEMS packaging is essential technique to the successful commercialization of MEMS products, as MEMS has moving parts and an application-specific nature. The classic approach to MEMS packaging involves the bonding of silicon or glass cap wafers to MEMS wafers. Therefore, it is typically implemented under high-pressure and high-temperature conditions. Advanced approaches use the thin-film deposition technique, and then the cavity for MEMS is realized via sacrificial etch through access holes at the thin-film cap. The packaging cap transfer technique is a compromise between the two approaches, making it possible to bond and transfer the thin packaging cap to the released MEMS device. MEMS devices and IC are being integrated into 3D fashion to achieve better performance, but the implantable device requires special packaging techniques. Thus, this Special Issue seeks research papers, communications, and review articles that focus on MEMS packaging technologies and related integration methods.

Dr. Seonho Seok
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.


  • MEMS
  • packaging
  • bonding
  • integration
  • vacuum
  • implantable
  • biocompatibility
  • reliability

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Published Papers

This special issue is now open for submission.
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