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Journal: Photonics, 2024
Volume: 11
Number: 253
Article:
State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications
Authors:
by
Shujie Liu, Philipp Kästner, Roland Donatiello, Anup Shrivastava, Marek Smolarczyk, Mustaqim Siddi Que Iskhandar, Md Kamrul Hasan, Giuseppe Caruso, Jiahao Chen, Basma Elsaka, Shilby Baby, Dennis Löber, Thomas Kusserow, Jost Adam and Hartmut Hillmer
Link:
https://www.mdpi.com/2304-6732/11/3/253
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