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Article

Design of an Ultra-Thick Film and Its Friction and Wear Performance under Different Working Conditions

School of Mechanical and Automotive Engineering, Qingdao University of Technology, Qingdao 266520, China
*
Author to whom correspondence should be addressed.
Coatings 2023, 13(7), 1173; https://doi.org/10.3390/coatings13071173
Submission received: 1 June 2023 / Revised: 24 June 2023 / Accepted: 27 June 2023 / Published: 29 June 2023

Abstract

:
Tantalum (Ta)/Ti/TiN/Ti/diamond-like carbon (DLC) (referred to as TTTD film) and Ta/Ti/TiN/TiCuN/Ti/DLC (referred to as ultra-thick film) films were designed in this study, and the factors affecting the friction and wear properties of DLC films in sodium bicarbonate and lactic acid solutions were analyzed. Moreover, a thin film with a thickness exceeding 50 microns was prepared. Morphology and tribological and mechanical properties were analyzed by scanning electron microscopy, friction and wear testing machine, and nanoindentation instrument, respectively. The results show that the presence of a TiCuN interlayer increases the defects in the DLC film and the roughness of surface, reaching a roughness of 0.19 µm. Compared with the TTTD film, the TiCuN interlayer reduces the hardness and increases the residual stress, which is 0.52 Gpa and −6.08 GPa, respectively. The TTTD film has a smooth and dense surface structure and high hardness, causing it to more easily form boundary lubrication. However, the ultra-thick film has lower hardness and rough surface, which cannot effectively form boundary lubrication. Therefore, the friction coefficient of the ultra-thick film is higher than that of the TTTD film under different working conditions. In sodium bicarbonate solution, a double-hydrolysis reaction is more likely to occur, resulting in a higher friction coefficient than in lactic acid solution. The friction coefficient of the TTTD film has a longer running-in period, which is attributed to the oxides generated by the double-hydrolysis reaction and the precipitated sodium bicarbonate crystals. Finally, it was concluded that the surface quality and the internal bond structure of DLC film have a significant impact on the friction and wear properties. This provides a theoretical basis for the design of multilayer structures.

1. Introduction

In recent years, artificial joint replacement has become a solution to the loss of joint function due to joint disease or accidental injury [1,2]. This requires joint materials that not only have good wear resistance but also meet the load-bearing capacity under different working conditions to improve service life in the human body. Usually, joint materials are subject to severe friction and wear [3]. Thus, joint materials require surface modification. Preparing thin films on the surface of joint materials is an effective way to reduce frictional wear. However, the thickness of the film is limited due to high stress.
With its strong corrosion resistance and good biocompatibility, tantalum has recently become a hot research topic. However, as a joint material, tantalum is subject to severe wear, and therefore, surface strengthening is required. In order to meet the activities under high-strength conditions, the thickness of the film needs to be increased to improve service life. However, ultra-thick films have not been well used, and further research is needed.
Studies have shown that a multilayer structural design can mitigate the differences of hardness and residual stress [4,5,6]. However, the thickness of the common films reported does not exceed 10 μm, and even fewer exceed 20 μm. Jia et al. prepared Cr-DLC composite coatings with three structures: no load-bearing transition layer, (Cr/CrN)x periodic load-bearing transition layer, and a CrN1... CrNx gradient load-bearing transition layer. They found that multi-layer design can increase wear resistance and load-bearing capacity, but the thickness of the film is about 15 microns, which still cannot meet the needs [7]. Wu et al. reviewed the preparation and improvement methods of ultra-thick films and discussed that the thickness of DLC multilayer films doped with elements can significantly improve the overall thickness of the film, reaching 28.3 µm [8]. The thickness of multilayer structures still does not meet the practical need. Therefore, there is great deal of space for research on the design of multilayer structures for ultra-thick film, and continued research is needed. It has been shown that the doping of the Cu element in titanium nitride can increase the thickness of the film, but the friction coefficient of this film is extremely high, between 0.7 and 0.9. This requires the search for a film that binds well to this film and can reduce frictional wear. Diamond-like carbon (DLC) films are known to have high hardness, a low coefficient of friction, and good chemical inertness [9,10,11,12,13] and have been a hot spot of research in thin films since it was discovered in the 1970s. Xu et al. prepared diamond-like carbon (DLC) multilayer films with alternating soft and hard phases on titanium alloy surfaces as well as DLC multilayer films composed of Ti and Ti/TiC transition layers and found that they can significantly reduce residual stress and reduce friction and wear [14]. Therefore, designing a DLC multilayer structure with alternating soft and hard layers can reduce residual stress, increase the thickness of the film, and improve friction and wear performance.
At present, the preparation of ultra-thick film is affected by internal stresses and a mismatch of the thermal expansion coefficient, which have not been well solved. The preparation of ultra-thick film needs continuation of study. There are few studies on DLC film to improve the frictional wear properties of titanium–copper–nitrogen film, which needs to be studied in depth. The physical properties of titanium and tantalum are similar, so titanium is used as the transition layer to achieve a good transition between the substrate and the film. Therefore, in this paper, Ta/Ti/TiN/Ti/DLC film (referred to as TTTD film) and Ta/Ti/TiN/TiCuN/Ti/DLC film (referred to as ultra-thick film) were prepared on a Ta substrate by magnetron sputtering technology, and the frictional wear properties of the film in sodium bicarbonate and lactic acid solutions were investigated. In addition, a preparation method for ultra-thick films was explored, and the factors affecting friction and wear were studied.

2. Preparation and Characterization

The films were prepared by magnetron sputtering on a Ta substrate (2 cm × 2 cm × 2 mm) and Si wafer (Si, 1 cm × 1 cm × 2 mm). Before plating, the Ta substrate and the Si wafer were washed together in deionized water and anhydrous ethanol for 20 min each and then blown dry with high-purity N2. The Ti and C targets were mounted on a DC target, and the Cu target was mounted on magnetron target. When the vacuum level of the vacuum chamber reached 5 × 10−3 Pa, negative bias glow cleaning at 800 V was used for 20 min [15]. To improve the bonding of the film to the substrate, a Ti transition layer was first deposited. The steps for the preparation of ultra-thick film were as follows: Firstly, N2 was passed and TiN film deposited (40 min) [16]. Next, the other parameters were kept constant, the Cu target was turned on, and TiCuN film was deposited (40 min). Finally, the Ti target, Cu target, and N2 were turned off; the graphite target was turned on; and the DLC film was deposited (3.5 h). For the preparation of TTTD film, the preparation time of the DLC film was 4 h. Sodium bicarbonate solution with pH = 7.4 and lactic acid solution with pH = 5.0 were prepared to simulate the weak alkali and acid environment in human body.
In order to analyze the carbon bond structure, Raman spectroscopy experiments were performed using a laser Raman spectrometer (LabRAM HR Evolution, HORIBA JobinYvon, Palaiseau, France). The laser wavelength used was 532 nm, and the size of the grating was 200 µm. Surface morphology and cross-sectional morphology were observed using a scanning electron microscope (SEM, Sigma 300, Oberkochen, Germany). Frictional wear experiments were performed at different frequencies (1 Hz, 2 Hz, 3 Hz, and 4 Hz) using a reciprocal friction and wear tester (CETR, UMT-3, Billerica, MA, USA). Regarding the frictional wear environment, the temperature was 22 °C, there was an atmospheric environment, the GCr15 grinding ball had a diameter of 10 mm, the wear distance was 6 mm, the load used was 5 N, and the friction time was 30 min [17]. Hardness and elastic modulus measurements were performed using a nano-indenter (Bruker TI Premier, Beijing Yake Chenxu Technology Co., Ltd., Beijing, China). The experimental conditions were as follows: the temperature was room temperature, maximum indentation depth was 3 µm, and the range of applied force was 1–10,000 µN. The indenter used was a conical diamond indenter with an angle of 120 °. Based on the thickness of the film, the final loading force was determined to be 2000 µN to prevent the influence of the Ta substrate on the measurement results. In order to characterize the degree of wear, the wear rate was calculated. The wear volume was measured using a three-dimensional surface profiler (Micro XAM 800, KLA Tencor, Milpitas, CA, USA). The objective lens had a magnification of 20× and a minimum resolution of 0.96 µm.

3. Results and Discussion

3.1. Surface Topography

Figure 1 shows the surface morphology and cross-sectional morphology of the ultra-thick film. From Figure 1a, it can be found that the film surface is dense and smooth, with only a few defects. After polishing the substrate, there were residual scratches, and the film grew vertically along the scratches to form the white line shown in the Figure 1a. White dots represent pollutants. The roughness of the TTTD film is higher than that reported in the relevant literature, which may be related to the surface structure and internal bond structure [18,19]. From the partially enlarged image in Figure 1b (the area represented by the red box), it can be seen that there are many surface grooves and large particles with a rough surface, reaching a roughness of 0.19 µm. It can be found by the partial enlargement of Figure 1b that the DLC film grew in a spherical manner and accumulated in irregular-sized spheres, resulting in uneven surface height, large voids, and a loose structure. The defects in the film can also be found in Figure 2. In addition, it can be seen that the transition between the film layers is good and tightly bonded. From Figure 2, it can be found that the TiCuN interlayer significantly increases the overall thickness of the film.

3.2. Raman Spectroscopy

In order to analyze the structure of the carbon bond, Raman spectroscopy experiments were performed, and the results are shown in Figure 3. From Figure 3, an asymmetric wide peak, which just conforms to the characteristics of DLC films, is evident [20]. A broad peak can be found between 1000 cm−1 and 1800 cm−1, which is fitted with a Gaussian fit to the D peak and the G peak. The D peak is caused by the respiration vibration of sp2 carbon atoms in the ring, while the G peak is attributed to the stretching vibration of sp2 carbon atoms in aromatic ring or chain [21,22,23]. The other parameters obtained from the Raman spectrograms are listed in Table 1. Comparing Figure 3a,b, it can be observed that the area of the G peak became larger, indicating a transition from the sp3 bond to the sp2 bond. The decrease in the half-peak width of the G-peak of the ultra-thick film indicates a decrease in the sp2 content of the film [22]. Therefore, the ultra-thick film has a higher sp2 bond. This is consistent with the trend of the D and G peaks. Usually, ID/IG is inversely proportional to the value of sp3/sp2 [22]. It can be concluded from the data in Table 1 that the structure of the ultra-thick film is more disordered.

3.3. Wear Behavior

Mechanical properties are important parameters for characterizing the frictional wear properties of thin film. Therefore, nanoindentation experiments were performed. The load-displacement curve of the ultra-thick film is shown in Figure 4. Observing Figure 4, it can be seen that the maximum indentation depth of the TTTD film is shallower than that of the ultra-thick film. This indicates that TTTD film has higher hardness. In addition, TTTD film has less residual depth, which indicates that TTTD film has better toughness. To further characterize the elasticity of the films, comparisons of the elastic recovery rate, H/E, and H3/E2 were performed. The elastic recovery value (We) was calculated as We = (hmax − hr)/hmax × 100% [23,24]. The elastic recovery rate (70%) of the TTTD film was found to be higher than that (64%) of the ultra-thick film by calculation. Through the load-displacement curve, it was found that a turning point occurs at an indentation depth of about 350 nm. This is caused by the internal stress of the ultra-thick film not being released in time. The hardness and elastic modulus of the ultra-thick film was calculated by the Oliver–Pharr method [25,26]. The changes in hardness and modulus of elasticity follow the same trend as the load-displacement curve. The decrease in hardness is due to the decrease in sp3 content. This result can be obtained by Raman analysis. H/E is generally used to characterize the elastic behavior, and H3/E2 is used to characterize the plastic-deformation behavior [27,28]. In order to evaluate the magnitude of residual stress within the film, calculation was performed using formula. The residual stress within the film was calculated as follows [29]: σr = −565.6(ω − ω0)/ω0, where σr is the residual stress in the film (GPa), ω is the G-peak position of the film (cm−1), and ω0 is the G-peak position of pure graphite. The values of residual stress, namely H/E and H3/E2, are displayed in Table 2. The data in Table 2 are the average values obtained from three measurements. Three loading and unloading experiments were conducted, all showing the same trend of change, and the turning points also appeared around 354 nm. With these data above, it can be found that the ultra-thick film has poor toughness and high residual stress.

3.4. Friction Coefficient

In order to evaluate the superiority of the friction performance, friction and wear tests were conducted using a friction and wear tester. The friction coefficient curves of the ultra-thick film are shown in Figure 5 and Figure 6. In the weak alkali solution, the coefficient of friction of the ultra-thick film fluctuates widely and is high at different frequencies, ranging from 0.4 to 0.65. This is mainly caused by the oxide generated during the friction process. On the other hand, combined with the hardness and elastic modulus of the film, it can be concluded that the DLC film in the top layer is less hard and less tough, which causes the film to easily fall off. In addition, the film’s residual stress is large and not well released, which leads to the peeling of the DLC film. This result can be proven by the load-displacement curve. After a longer break-in period, the TTTD film enters a stable phase in terms of friction coefficient. The coefficient of friction is stable at about 0.2 at different frequencies. The friction coefficient of the TTTD film fluctuates greatly and is high during the break-in period, which may be due to the generated oxides. During the stabilization phase, the friction coefficient of the TTTD film is reduced to about 0.2, which is probably due to the high hardness of this film, and the oxide is carried to the edges of the abrasion marks, reducing the friction.
In the weak acid solution, the friction coefficient of the ultra-thick film at different frequencies fluctuates greatly in the early stage and stabilizes all around 0.15 in the later stage. From the locally enlarged image in Figure 6b, it can be observed that the friction coefficient fluctuates less at different frequencies. The friction coefficient fluctuates due to the combined effect of the abrasive chips and oxides generated by corrosion when the rough peaks are rubbed during the grinding stage [30]. The abrasive chips and oxides are brought to both sides of the wear marks by the solution; thus, the friction coefficient enters a stable state. The main reason for the significant decrease of the friction coefficient in the weak acid solution is probably the passivation of the free-hanging bonds on the surface of the DLC film [31]. The friction coefficient of the TTTD film in lactic acid solution is lower than that of the ultra-thick film, which may be due to the higher residual stress and more voids in the ultra-thick film, which reduces the bonding force of the film. The friction coefficient of the TTTD membrane in lactic acid solution is below 0.1 at different frequencies, which is lower than the friction coefficient corresponding to the roughness reported in the literature [18]. The average friction coefficient of the TTTD film and ultra-thick film is shown in Figure 7.
The wear rate of the film was calculated according to the formula [32]:
W = V⁄FS
where V is the wear volume (mm3), F is the load (N), and S is the total sliding distance (m). Through the wear rate, it was found that the wear degree of the super-thick film is similar to that of the TTTD film. According to Figure 8, it can be observed that the wear rate in the sodium bicarbonate solution at different frequencies is higher than that in the lactic acid solution. In the lactic acid solution, except at 4 Hz, the wear rate of the TTTD film at 1–3 Hz is lower than that of the ultra-thick film.

3.5. Morphology

In order to study the friction and wear mechanism of the film, the abrasion scar morphology was observed. The shape of the abrasion marks is shown in Figure 9 and Figure 10. Figure 9a shows that a large amount of oxide is generated and adheres to the surface of the film. It was found that brittle cracks appear in the oxide due to its brittleness. However, in the lactic acid solution, it can be found that the generated oxides are significantly reduced, and the degree of wear becomes lighter. This is due to the fact that the counter-abrasive ball is prone to double-hydrolysis reactions in the sodium bicarbonate solution, which promotes the formation of oxides. In the lactic acid solution, since lactic acid is a non-oxidizing acid, the oxide production is significantly reduced, and the abrasion marks become shallow.
According to the previous nanoindentation analysis, the hardness of TTTD film is higher than that of ultra-thick film, and the residual stress is lower than that of ultra-thick film, thus reducing the possibility of adhesive wear and abrasion. Therefore, the internal bond structure of DLC film has a significant impact on the friction and wear properties.
Comparing Figure 11 and Figure 12, it can be observed that the wear marks of the ultra-thick film in lactic acid solution are deeper, and more oxides are generated on the surface than on that of the TTTD film. This is attributed to the high hardness, smooth and dense surface, boundary lubrication effect, and appropriate sp3 bond content of the TTTD film. From Figure 9, Figure 10, Figure 11 and Figure 12, it can be observed that the TTTD film is more prone to boundary lubrication due to its dense and smooth surface, while the rough surface of the ultra-thick film is not conducive to boundary lubrication formation [33], resulting in deeper wear marks than the TTTD film. The red area in Figure 12 is a partially enlarged image, and the EDS scanning area is this red area.

3.6. Friction and Wear Mechanism

Friction and wear mechanism diagrams are shown in Figure 13 and Figure 14. The frictional wear process can be roughly divided into three stages. Because the contact stress is larger, wear and tear are severe. However, with the rough peak of the flat grinding, the wear is reduced. Friction enters the second stage, and frictional chemical reaction occurs against the grinding ball, generating iron and chromium oxides. These oxides act as abrasives in the friction process, resulting in serious damage to the surface film. Friction then enters the third stage, and the abrasive chips begin to gather.
In the solution, due to the spherical growth of the ultra-thick film, resulting in more voids, the solution easily enters the interface to form corrosion and intensify the peeling of film. In addition, the poor toughness of the DLC film in the top layer makes it prone to cracking and peeling. This result can be verified by the results of nano-indentation experiments. In the sodium bicarbonate solution, the double-hydrolysis reaction between the counter-abrasive ball and the sodium bicarbonate solution produces iron hydroxide. The friction process generates high temperature and produces iron oxide. As a result, it leads to a large and high fluctuation of the friction coefficient. Finally, due to the combined effect of the frictional wear of oxides and residual stress, the ultra-thick film wears out and falls off. However, the TTTD film does not wear out and peel off due to its dense structure and low residual stress.
In the weak acid solution, oxides are also generated on the surface of the ultra-thick film, but the oxides are significantly reduced, and the film wears less. There are two main reasons for the reduction of frictional wear: first, H+ from lactic acid passivates the free hanging bonds on the DLC film surface, reducing the adhesive wear with the chemical bonds between the pair of grinding balls [34]; second, H+ adsorbed on the stainless steel ball surface forms an electrostatic repulsion with H+ on the DLC film surface, further reducing the frictional wear [34,35]. Therefore, the ultra-thick and TTTD films become less abrasive in the weak acid solution. The higher abrasion resistance and lower friction coefficient of the TTTD film is due to its high hardness and dense structure.

4. Conclusions

In this paper, Ta/Ti/TiN/Ti/DLC and Ta/Ti/TiN/TiCuN/Ti/DLC films were prepared by magnetron sputtering technique. The mechanical properties of the films were characterized using scanning electron microscopy, nano-indentation, Raman spectroscopy, and friction wear experimental machine. The following conclusions were obtained:
(1)
The hardness of TTTD film is nearly 15 times that of ultra-thick film, and the residual stress is also nearly twice smaller. Therefore, the TTTD film is less prone to detachment;
(2)
The friction coefficient of the TTTD film is lower than that of the ultra-thick film under different working conditions, mainly due to the appropriate sp3 bond content inside, the smooth and dense structure more easily forming boundary lubrication, and high hardness;
(3)
The friction coefficient of the TTTD film in lactic acid solution is lower than 0.1 at different frequencies, while the friction coefficient of the ultra-thick film is lower than 0.2 under the same operating conditions. This is because there are fewer oxides formed by non-oxidizing lactic acid, and hydrogen ions passivate the free-hanging bonds on the surface of DLC film;
(4)
The TiCuN interlayer can significantly increase the overall thickness of the film; the structure of the TiCuN interlayer affects the growth mode of the top DLC film, causing it to grow in spheres and resulting in more defects in the DLC film;
(5)
The TiCuN interlayer affects the internal structure of the DLC film, causing a shift from sp3 to sp2 bonds in the film, thus making the film less tough and causing higher residual stress.
In short, the internal bond structure of DLC has a significant impact on the friction and wear properties.
In the future, the influence of TiCuN mid-layer structure on the top DLC film and the optimization of the multilayer structure need continued study to improve the frictional wear performance. It needs to overcome problems such as high residual stress and the influence of its own structure on other film structures. The effects of TiCuN interlayer thickness and Cu content on the morphology and frictional wear properties of the top DLC films need to be further elucidated.

Author Contributions

Conceptualization, S.Z. and D.G.; methodology, D.G.; software, D.G.; validation, D.G., S.W. and T.H.; formal analysis, D.G.; investigation, D.G.; resources, S.Z.; data curation, D.G.; writing—original draft preparation, D.G.; writing—review and editing, S.Z.; visualization, D.G.; supervision, X.M. and F.G.; project administration, S.Z.; funding acquisition, S.Z. All authors have read and agreed to the published version of the manuscript.

Funding

This research was funded by National Natural Science Foundation of China, grant number 51861031.

Institutional Review Board Statement

Exclude this statement.

Informed Consent Statement

Not applicable.

Data Availability Statement

Not applicable.

Acknowledgments

Thanks to the National Natural Science Foundation of China (51861031) for financial support. All authors also thank Shandong High Precision Inspection Technology Co., Ltd. for providing Raman spectroscopy detection.

Conflicts of Interest

The authors declare that they have no known competing financial interests or personal relationships that could have appeared to influence the work reported in this paper.

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Figure 1. Surface morphology: (a) TTTD film; (b) ultra-thick film.
Figure 1. Surface morphology: (a) TTTD film; (b) ultra-thick film.
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Figure 2. Cross-sectional morphology: (a) TTTD film; (b) ultra-thick film.
Figure 2. Cross-sectional morphology: (a) TTTD film; (b) ultra-thick film.
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Figure 3. Raman spectroscopy: (a) TTTD film, (b) ultra-thick film.
Figure 3. Raman spectroscopy: (a) TTTD film, (b) ultra-thick film.
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Figure 4. Load-displacement curve of TTTD film and ultra-thick film.
Figure 4. Load-displacement curve of TTTD film and ultra-thick film.
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Figure 5. Friction coefficient of ultra-thick film: (a) dry friction; (b) weak alkali solution; (c) weak acid solution.
Figure 5. Friction coefficient of ultra-thick film: (a) dry friction; (b) weak alkali solution; (c) weak acid solution.
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Figure 6. Friction coefficient of TTTD film: (a) dry friction; (b) weak alkali solution; (c) weak acid solution.
Figure 6. Friction coefficient of TTTD film: (a) dry friction; (b) weak alkali solution; (c) weak acid solution.
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Figure 7. The average friction coefficient under different operating conditions: (a) TTTD film; (b) ultra-thick film.
Figure 7. The average friction coefficient under different operating conditions: (a) TTTD film; (b) ultra-thick film.
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Figure 8. Wear rates of two types of thin films under different working conditions: (a) sodium bicarbonate solution; (b) lactic acid solution.
Figure 8. Wear rates of two types of thin films under different working conditions: (a) sodium bicarbonate solution; (b) lactic acid solution.
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Figure 9. Abrasion morphology of ultra-thick film in sodium bicarbonate solution at different frequencies: (a) 1 Hz; (b) 2 Hz; (c) 3 Hz; (d) 4 Hz.
Figure 9. Abrasion morphology of ultra-thick film in sodium bicarbonate solution at different frequencies: (a) 1 Hz; (b) 2 Hz; (c) 3 Hz; (d) 4 Hz.
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Figure 10. Abrasion morphology of TTTD film in sodium bicarbonate solution at different frequencies: (a) 1 Hz; (b) 2 Hz; (c) 3 Hz; (d) 4 Hz.
Figure 10. Abrasion morphology of TTTD film in sodium bicarbonate solution at different frequencies: (a) 1 Hz; (b) 2 Hz; (c) 3 Hz; (d) 4 Hz.
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Figure 11. Abrasion morphology of ultra-thick film in lactic acid solution at different frequencies: (a) 1 Hz; (b) 2 Hz; (c) 3 Hz; (d) 4 Hz.
Figure 11. Abrasion morphology of ultra-thick film in lactic acid solution at different frequencies: (a) 1 Hz; (b) 2 Hz; (c) 3 Hz; (d) 4 Hz.
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Figure 12. Abrasion morphology of TTTD film in lactic acid solution at different frequencies: (a,e) 1 Hz; (b,f) 2 Hz; (c,g) 3 Hz; (d,h) 4 Hz.
Figure 12. Abrasion morphology of TTTD film in lactic acid solution at different frequencies: (a,e) 1 Hz; (b,f) 2 Hz; (c,g) 3 Hz; (d,h) 4 Hz.
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Figure 13. Friction and wear mechanism of ultra-thick film in sodium bicarbonate solution.
Figure 13. Friction and wear mechanism of ultra-thick film in sodium bicarbonate solution.
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Figure 14. Friction and wear mechanism of ultra-thick film in lactic acid solution.
Figure 14. Friction and wear mechanism of ultra-thick film in lactic acid solution.
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Table 1. D-peak, G-peak, ID/IG ratio, and G-peak half-peak width values of ultra-thick film.
Table 1. D-peak, G-peak, ID/IG ratio, and G-peak half-peak width values of ultra-thick film.
SampleD Peak (cm−1)G Peak (cm)ID/IGG-Peak Half-Peak width (cm−1)
Ultra-thick film136515631.17124
TTTD film137615691.18227
Table 2. Mechanical property parameters of ultra-thick film.
Table 2. Mechanical property parameters of ultra-thick film.
SampleH (GPa)E (GPa)H/EH3/E2 (GPa)Residual Stress (GPa)
Ultra-thick film0.5226.10.0190.0002−6.08
TTTD film7.65133.60.0570.025−3.94
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MDPI and ACS Style

Guo, D.; Zhang, S.; Wu, S.; Huang, T.; Ma, X.; Guo, F. Design of an Ultra-Thick Film and Its Friction and Wear Performance under Different Working Conditions. Coatings 2023, 13, 1173. https://doi.org/10.3390/coatings13071173

AMA Style

Guo D, Zhang S, Wu S, Huang T, Ma X, Guo F. Design of an Ultra-Thick Film and Its Friction and Wear Performance under Different Working Conditions. Coatings. 2023; 13(7):1173. https://doi.org/10.3390/coatings13071173

Chicago/Turabian Style

Guo, Dong, Shuling Zhang, Shuaizheng Wu, Tenglong Huang, Xinghua Ma, and Feng Guo. 2023. "Design of an Ultra-Thick Film and Its Friction and Wear Performance under Different Working Conditions" Coatings 13, no. 7: 1173. https://doi.org/10.3390/coatings13071173

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