A Novel Crossbeam Structure with Graphene Sensing Element for N/MEMS Mechanical Sensors
Abstract
:1. Introduction
2. Materials and Methods
2.1. Fabrication of N/MEMS Crossbeam Structure
2.2. Schematic of Transfer Process of Graphene Layer
3. Results and Discussion
3.1. Physical and Electrical Characteristics of the N/MEMS Graphene Units
3.2. Mechanical and Electrical Characteristics of Displacement Sensor
3.3. Mechanical and Electrical Characteristics of Pressure Sensor
4. Conclusions
Author Contributions
Funding
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
- Lee, C.; Wei, X.; Kysar, J.W.; Hone, J. Measurement of the elastic properties and intrinsic strength of monolayer graphene. Science 2008, 321, 385–388. [Google Scholar] [CrossRef] [PubMed]
- Balandin, A.A.; Ghosh, S.; Bao, W.; Calizo, I.; Teweldebrhan, D.; Miao, F.; Lau, C.N. Superior Thermal Conductivity of Single-Layer Graphene. Nano Lett. 2008, 8, 902–907. [Google Scholar] [CrossRef] [PubMed]
- Nair, R.R.; Blake, P.; Grigorenko, A.N.; Novoselov, K.S.; Booth, T.J.; Stauber, T.; Peres, N.M.R.; Geim, A.K. Fine Structure Constant Defines Visual Transparency of Graphene. Science 2008, 320, 1308. [Google Scholar] [CrossRef] [PubMed] [Green Version]
- Du, X.; Skachko, I.; Barker, A.; Andrei, E.Y. Approaching ballistic transport in suspended graphene. Nat. Nanotechnol. 2008, 3, 491–495. [Google Scholar] [CrossRef] [Green Version]
- Ni, Z.; Yu, T.; Lu, Y.H.; Wang, Y.Y.; Feng, Y.P.; Shen, Z.X. Uniaxial Strain on Graphene: Raman Spectroscopy Study and Band-Gap Opening. ACS Nano 2008, 2, 2301–2305. [Google Scholar] [CrossRef]
- Koenig, S.; Boddeti, N.; Dunn, M.; Bunch, J.S. Ultrastrong adhesion of graphene membranes. Nat. Nanotechnol. 2011, 6, 543–546. [Google Scholar] [CrossRef]
- Davidovikj, D.; Scheepers, P.H.; Van Der Zant, H.S.J.; Steeneken, P.G.; Davidovikj, D.; Scheepers, P.H.; Van Der Zant, H.S.J.; Steeneken, P.G.; Davidovikj, D.; Scheepers, P.H.; et al. Static Capacitive Pressure Sensing Using a Single Graphene Drum. ACS Appl. Mater. Interfaces 2017, 9, 43205–43210. [Google Scholar] [CrossRef] [Green Version]
- Wang, Q.; Hong, W.; Dong, L. Graphene “microdrums” on a freestanding perforated thin membrane for high sensitivity MEMS pressure sensors. Nanoscale 2016, 8, 7663–7671. [Google Scholar] [CrossRef]
- Chen, H.; Lv, L.; Zhang, J.; Zhang, S.; Xu, P.; Li, C.; Zhang, Z.; Li, Y.; Xu, Y.; Wang, J. Enhanced Stretchable and Sensitive Strain Sensor via Controlled Strain Distribution. Nanomaterials 2020, 10, 218. [Google Scholar] [CrossRef] [Green Version]
- Fan, X.; Forsberg, F.; Smith, A.D.; Schröder, S.; Wagner, S.; Östling, M.; Lemme, M.C.; Niklaus, F. Suspended Graphene Membranes with Attached Silicon Proof Masses as Piezoresistive Nanoelectromechanical Systems Accelerometers. Nano Lett. 2019, 19, 6788–6799. [Google Scholar] [CrossRef] [Green Version]
- Wu, S.; Peng, S.; Han, Z.J.; Zhu, H.; Wang, C.H. Ultrasensitive and Stretchable Strain Sensors Based on Mazelike Vertical Graphene Network. ACS Appl. Mater. Interfaces 2018, 10, 36312–36322. [Google Scholar] [CrossRef] [PubMed]
- Bae, S.-H.; Lee, Y.; Sharma, B.K.; Lee, H.-J.; Kim, J.-H.; Ahn, J.-H. Graphene-based transparent strain sensor. Carbon 2013, 51, 236–242. [Google Scholar] [CrossRef]
- Smith, A.D.; Niklaus, F.; Paussa, A.; Vaziri, S.; Fischer, A.C.; Sterner, M.; Forsberg, F.; Delin, A.; Esseni, D.; Palestri, P.; et al. Electromechanical Piezoresistive Sensing in Suspended Graphene Membranes. Nano Lett. 2013, 13, 3237–3242. [Google Scholar] [CrossRef] [PubMed]
- Smith, A.; Vaziri, S.; Niklaus, F.; Fischer, A.; Sterner, M.; Delin, A.; Östling, M.; Lemme, M. Pressure sensors based on suspended graphene membranes. Solid-State Electron. 2013, 88, 89–94. [Google Scholar] [CrossRef]
- Zhu, S.-E.; Ghatkesar, M.K.; Zhang, C.; Janssen, G.C.A.M. Graphene based piezoresistive pressure sensor. Appl. Phys. Lett. 2013, 102, 161904. [Google Scholar] [CrossRef] [Green Version]
- Hurst, A.M.; Lee, S.; Cha, W.; Hone, J. A graphene accelerometer. In Proceedings of the 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Estoril, Portugal, 18–22 January 2015; pp. 865–868. [Google Scholar] [CrossRef]
- Fan, X.; Smith, A.D.; Forsberg, F.; Wagner, S.; Schröder, S.; Akbari, S.S.A.; Fischer, A.C.; Villanueva, L.G.; Östling, M.; Lemme, M.C.; et al. Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications. Microsyst. Nanoeng. 2020, 6, 17. [Google Scholar] [CrossRef] [Green Version]
- Park, W.-T.; Kotlanka, R.K.; Lou, L.; Hamidullah, M.; Lee, C. MEMS tri-axial force sensor with an integrated mechanical stopper for guidewire applications. Microsyst. Technol. 2012, 19, 1005–1015. [Google Scholar] [CrossRef]
- Chun, S.; Choi, Y.; Park, W. All-graphene strain sensor on soft substrate. Carbon 2017, 116, 753–759. [Google Scholar] [CrossRef]
- Zhang, Z.; Du, J.; Zhang, D.; Sun, H.; Yin, L.; Ma, L.; Chen, J.; Ma, D.; Cheng, H.-M.; Ren, W. Rosin-enabled ultraclean and damage-free transfer of graphene for large-area flexible organic light-emitting diodes. Nat. Commun. 2017, 8, 14560. [Google Scholar] [CrossRef]
- Liang, X.; Sperling, B.A.; Calizo, I.; Cheng, G.; Hacker, C.; Zhang, Q.; Obeng, Y.; Yan, K.; Peng, H.; Li, Q.; et al. Toward Clean and Crackless Transfer of Graphene. ACS Nano 2011, 5, 9144–9153. [Google Scholar] [CrossRef]
- Suk, J.W.; Lee, W.H.; Lee, J.; Chou, H.; Piner, R.D.; Hao, Y.; Akinwande, D.; Ruoff, R.S. Enhancement of the Electrical Properties of Graphene Grown by Chemical Vapor Deposition via Controlling the Effects of Polymer Residue. Nano Lett. 2013, 13, 1462–1467. [Google Scholar] [CrossRef] [PubMed]
- Ahn, Y.; Kim, H.; Kim, Y.-H.; Yi, Y.; Kim, S.-I. Procedure of removing polymer residues and its influences on electronic and structural characteristics of graphene. Appl. Phys. Lett. 2013, 102, 091602. [Google Scholar] [CrossRef]
- Piazza, A.; Giannazzo, F.; Buscarino, G.; Fisichella, G.; La Magna, A.; Roccaforte, F.; Cannas, M.; Gelardi, F.; Agnello, S. Graphene p-Type Doping and Stability by Thermal Treatments in Molecular Oxygen Controlled Atmosphere. J. Phys. Chem. C 2015, 119, 22718–22723. [Google Scholar] [CrossRef]
- Russo, S.; Craciun, M.; Yamamoto, M.; Morpurgo, A.; Tarucha, S. Contact resistance in graphene-based devices. Phys. E Low-Dimens. Syst. Nanostruct. 2009, 42, 677–679. [Google Scholar] [CrossRef] [Green Version]
- Li, M.; Wu, C.; Zhao, S.; Deng, T.; Wang, J.; Liu, Z.; Wang, L.; Wang, G. Pressure sensing element based on the BN–graphene–BN heterostructure. Appl. Phys. Lett. 2018, 112, 143502. [Google Scholar] [CrossRef]
- Al-Mumen, H.; Dong, L.; Li, W. SU-8 doped and encapsulated n-type graphene nanomesh with high air stability. Appl. Phys. Lett. 2013, 103, 232113. [Google Scholar] [CrossRef]
- Seo, H.-K.; Park, M.-H.; Kim, Y.-H.; Kwon, S.-J.; Jeong, S.-H.; Lee, T.-W. Laminated Graphene Films for Flexible Transparent Thin Film Encapsulation. ACS Appl. Mater. Interfaces 2016, 8, 14725–14731. [Google Scholar] [CrossRef]
- Jee, H.-G.; Han, J.-H.; Hwang, H.-N.; Kim, B.; Kim, H.-S.; Kim, Y.D.; Hwang, C.-C. Pentacene as protection layers of graphene on SiC surfaces. Appl. Phys. Lett. 2009, 95, 093107. [Google Scholar] [CrossRef]
- Alexandrou, K.; Petrone, N.; Hone, J.; Kymissis, I. Encapsulated graphene field-effect transistors for air stable operation. Appl. Phys. Lett. 2015, 106, 113104. [Google Scholar] [CrossRef]
- Wang, H.; Taychatanapat, T.; Hsu, A.; Watanabe, K.; Taniguchi, T.; Jarillo-Herrero, P.; Palacios, T. BN/Graphene/BN Transistors for RF Applications. IEEE Electron. Device Lett. 2011, 32, 1209–1211. [Google Scholar] [CrossRef] [Green Version]
- Jain, N.; Durcan, C.A.; Jacobs-Gedrim, R.; Xu, Y.; Yu, B. Graphene interconnects fully encapsulated in layered insulator hexagonal boron nitride. Nanotechnology 2013, 24, 355202. [Google Scholar] [CrossRef] [PubMed]
- Yang, M.; Zhang, C.; Wang, S.; Feng, Y. Ariando Graphene on β-Si3N4: An ideal system for graphene-based electronics. AIP Adv. 2011, 1, 032111. [Google Scholar] [CrossRef] [Green Version]
- Fan, Y.; Jiang, W.; Kawasaki, A. Highly Conductive Few-Layer Graphene/Al2O3Nanocomposites with Tunable Charge Carrier Type. Adv. Funct. Mater. 2012, 22, 3882–3889. [Google Scholar] [CrossRef]
- Lee, J.; Tao, L.; Parrish, K.N.; Hao, Y.; Ruoff, R.S.; Akinwande, D. Multi-finger flexible graphene field effect transistors with high bendability. Appl. Phys. Lett. 2012, 101, 252109. [Google Scholar] [CrossRef] [Green Version]
- Yap, R.C.C.; Li, H.; Chow, W.L.; Lu, C.X.; Tay, B.K.; Teo, H.T.E. Identifying the mechanisms of p-to-n conversion in unipolar graphene field-effect transistors. Nanotechnology 2013, 24, 195202. [Google Scholar] [CrossRef] [Green Version]
- Wang, Z.; Li, P.; Chen, Y.; Liu, J.; Qi, F.; Tian, H.; Zheng, B.; Zhou, J. Air-stable n-type doping of graphene from overlying Si3N4 film. Appl. Surf. Sci. 2014, 307, 712–715. [Google Scholar] [CrossRef]
- Geng, D.; Yang, S.; Zhang, Y.; Yang, J.; Liu, J.; Li, R.; Sham, T.-K.; Sun, X.; Ye, S.; Knights, S. Nitrogen doping effects on the structure of graphene. Appl. Surf. Sci. 2011, 257, 9193–9198. [Google Scholar] [CrossRef]
- Su, F.; Zhang, Z.; Li, S.; Li, P.; Deng, T. Long-term stability of photodetectors based on graphene field-effect transistors encapsulated with Si3N4 layers. Appl. Surf. Sci. 2018, 459, 164–170. [Google Scholar] [CrossRef]
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Wang, J.; Zhu, Z.; Qi, Y.; Li, M. A Novel Crossbeam Structure with Graphene Sensing Element for N/MEMS Mechanical Sensors. Nanomaterials 2022, 12, 2101. https://doi.org/10.3390/nano12122101
Wang J, Zhu Z, Qi Y, Li M. A Novel Crossbeam Structure with Graphene Sensing Element for N/MEMS Mechanical Sensors. Nanomaterials. 2022; 12(12):2101. https://doi.org/10.3390/nano12122101
Chicago/Turabian StyleWang, Junqiang, Zehua Zhu, Yue Qi, and Mengwei Li. 2022. "A Novel Crossbeam Structure with Graphene Sensing Element for N/MEMS Mechanical Sensors" Nanomaterials 12, no. 12: 2101. https://doi.org/10.3390/nano12122101