Multi-Level Analog Resistive Switching Characteristics in Tri-Layer HfO2/Al2O3/HfO2 Based Memristor on ITO Electrode
Abstract
:1. Introduction
2. Materials and Methods
3. Results and Discussion
4. Conclusions
Author Contributions
Funding
Conflicts of Interest
References
- Shima, H.; Takano, F.; Akinaga, H.; Tamai, Y.; Inoue, I.H.; Takagi, H. Resistance switching in the metal deficient-type oxides: NiO and CoO. Appl. Phys. Lett. 2007, 91, 2005–2008. [Google Scholar] [CrossRef]
- Chandrasekaran, S.; Simanjuntak, F.M.; Saminathan, R.; Panda, D.; Tseng, T.Y. Improving linearity by introducing Al in HfO2 as a memristor synapse device. Nanotechnology 2019, 30, 445205. [Google Scholar] [CrossRef] [PubMed]
- Yan, X.; Xiao, Z.; Lu, C. Characteristic investigation of highly oriented Hf0.5Zr0.5O2 thin-film resistive memory devices. Appl. Phys. Lett. 2020, 116, 013506. [Google Scholar] [CrossRef]
- Chand, U.; Huang, K.-C.; Huang, C.-Y.; Tseng, T.-Y. Mechanism of Nonlinear Switching in HfO2-Based Crossbar RRAM With Inserting Large Bandgap Tunneling Barrier Layer. IEEE Trans. Electron Devices 2015, 62, 3665–3670. [Google Scholar] [CrossRef]
- Tan, T.; Du, Y.; Cao, A.; Sun, Y.; Zhang, H.; Zha, G. Resistive switching of the HfOX/HfO2 bilayer heterostructure and its transmission characteristics as a synapse. RSC Adv. 2018, 8, 41884–41891. [Google Scholar] [CrossRef] [Green Version]
- Waser, R.; Dittmann, R.; Staikov, C.; Szot, K. Redox-based resistive switching memories nanoionic mechanisms, prospects, and challenges. Adv. Mater. 2009, 21, 2632–2663. [Google Scholar] [CrossRef]
- Conti, D.; Laurenti, M.; Porro, S.; Giovinazzo, C.; Bianco, S.; Fra, V.; Chiolerio, A.; Pirri, C.F.; Milano, G.; Ricciardi, C. Resistive switching in sub-micrometric ZnO polycrystalline films. Nanotechnology 2019, 30, 065707. [Google Scholar] [CrossRef]
- Woo, J.; Moon, K.; Song, J.; Kwak, M.; Park, J.; Hwang, H. Optimized Programming Scheme Enabling Linear Potentiation in Filamentary HfO2 RRAM Synapse for Neuromorphic Systems. IEEE Trans. Electron Devices 2016, 63, 5064–5067. [Google Scholar] [CrossRef]
- Parreira, P.; Paterson, G.W.; McVitie, S.; MacLaren, D.A. Stability, bistability and instability of amorphous ZrO2 resistive memory devices. J. Phys. D Appl. Phys. 2016, 49, 095111. [Google Scholar] [CrossRef]
- Bousoulas, P.; Michelakaki, I.; Skotadis, E.; Tsigkourakos, M.; Tsoukalas, D. Low-Power Forming Free TiO2–x/HfO2–y/TiO2–x-Trilayer RRAM Devices Exhibiting Synaptic Property Characteristics. IEEE Trans. Electron Devices 2017, 64, 3151–3158. [Google Scholar] [CrossRef]
- Zhang, W.; Kong, J.-Z.; Cao, Z.-Y.; Li, A.-D.; Wang, L.-G.; Zhu, L.; Li, X.; Cao, Y.-Q.; Wu, D. Bipolar Resistive Switching Characteristics of HfO2/TiO2/HfO2 Trilayer-Structure RRAM Devices on Pt and TiN-Coated Substrates Fabricated by Atomic Layer Deposition. Nanoscale Res. Lett. 2017, 12, 393. [Google Scholar] [CrossRef] [PubMed]
- Chen, L.; Dai, Y.-W.; Sun, Q.-Q.; Guo, J.-J.; Zhou, P.; Zhang, D.W. Al2O3/HfO2 functional stack films based resistive switching memories with controlled SET and RESET voltages. Solid State Ionics 2015, 273, 66–69. [Google Scholar] [CrossRef]
- Wang, R.; Shi, T.; Zhang, X.; Wang, W.; Wei, J.; Lu, J.; Zhao, X.; Wu, Z.; Cao, R.; Long, S.; et al. Bipolar Analog Memristors as artificial synapses for neuromorphic computing. Materials 2018, 11, 2102. [Google Scholar] [CrossRef] [PubMed] [Green Version]
- Huang, C.Y.; Huang, C.Y.; Tsai, T.L.; Lin, C.A.; Tseng, T.Y. Switching mechanism of double forming process phenomenon in ZrOx/HfOy bilayer resistive switching memory structure with large endurance. Appl. Phys. Lett. 2014, 104, 2–6. [Google Scholar] [CrossRef] [Green Version]
- Banerjee, W.; Zhang, X.; Luo, Q.; Lv, H.; Liu, Q.; Long, S.; Liu, M. Design of CMOS Compatible, High-Speed, Highly-Stable Complementary Switching with Multilevel Operation in 3D Vertically Stacked Novel HfO2/Al2O3/TiOx (HAT) RRAM. Adv. Electron. Mater. 2018, 4, 1700561. [Google Scholar] [CrossRef]
- Ismail, M.; Abbas, H.; Choi, C.; Kim, S. Stabilized and RESET-voltage controlled multi-level switching characteristics in ZrO2-based memristors by inserting a-ZTO interface layer. J. Alloys Compd. 2020, 835, 155256. [Google Scholar] [CrossRef]
- Ding, X.; Feng, Y.; Huang, P.; Liu, L.; Kang, J. Low-Power Resistive Switching Characteristic in HfO2/TiOx Bi-Layer Resistive Random-Access Memory. Nanoscale Res. Lett. 2019, 14, 157. [Google Scholar] [CrossRef] [Green Version]
- Song, W.; Wang, W.; Lee, H.K.; Li, M.; Zhuo, V.Y.-Q.; Chen, Z.; Chui, K.J.; Liu, J.-C.; Wang, I.-T.; Zhu, Y.; et al. Analog switching characteristics in TiW/Al2O3/Ta2O5/Ta RRAM devices. Appl. Phys. Lett. 2019, 115, 133501. [Google Scholar] [CrossRef]
- Jeon, H.; Park, J.; Jang, W.; Kim, H.; Ahn, S.; Jeon, K.J.; Seo, H.; Jeon, H. Detection of oxygen ion drift in Pt/Al2O3/TiO2/Pt RRAM using interface-free single-layer graphene electrodes. Carbon 2014, 75, 209–216. [Google Scholar] [CrossRef]
- Wang, L.G.; Qian, X.; Cao, Y.Q.; Cao, Z.Y.; Fang, G.Y.; Li, A.D.; Wu, D. Excellent resistive switching properties of atomic layer-deposited Al2O3/HfO2/Al2O3 trilayer structures for non-volatile memory applications. Nanoscale Res. Lett. 2015, 10, 1–8. [Google Scholar] [CrossRef] [Green Version]
- Liu, J.; Yang, H.; Ma, Z.; Chen, K.; Zhang, X.; Huang, X.; Oda, S. Characteristics of multilevel storage and switching dynamics in resistive switching cell of Al2O3/HfO2/Al2O3 sandwich structure. J. Phys. D Appl. Phys. 2018, 51, 025102. [Google Scholar] [CrossRef]
- Maestro-Izquierdo, M.; Gonzalez, M.B.; Jimenez-Molinos, F.; Moreno, E.; Roldan, J.B.; Campabadal, F. Unipolar resistive switching behavior in Al2O3/HfO2 multilayer dielectric stacks: Fabrication, characterization and simulation. Nanotechnology 2020, 31, 135202. [Google Scholar] [CrossRef]
- Cazorla, M.; Aldana, S.; Maestro, M.; González, M.B.; Campabadal, F.; Moreno, E.; Jiménez-Molinos, F.; Roldán, J.B. Thermal study of multilayer resistive random access memories based on HfO2 and Al2O3 oxides. J. Vac. Sci. Technol. B 2019, 37, 012204. [Google Scholar] [CrossRef]
- Huang, R.; Yan, X.; Ye, S.; Kashtiban, R.; Beanland, R.; Morgan, K.A.; Charlton, M.D.B.; de Groot, C.H. Compliance-free ZrO2/ZrO2—x/ZrO2 resistive memory with controllable interfacial multistate switching behaviour. Nanoscale Res. Lett. 2017, 12, 384. [Google Scholar] [CrossRef] [PubMed] [Green Version]
- Moon, K.; Lim, S.; Park, J.; Sung, C.; Oh, S.; Woo, J.; Lee, J.; Hwang, H. RRAM-based synapse devices for neuromorphic systems. Faraday Discuss. 2019, 213, 421–451. [Google Scholar] [CrossRef] [PubMed]
- Zhang, R.; Huang, H.; Xia, Q.; Ye, C.; Wei, X.; Wang, J.; Zhang, L.; Zhu, L.Q. Role of Oxygen Vacancies at the TiO2/HfO2 Interface in Flexible Oxide-Based Resistive Switching Memory. Adv. Electron. Mater. 2019, 5, 1–7. [Google Scholar] [CrossRef]
- Shih, C.C.; Chang, K.C.; Chang, T.C.; Tsai, T.M.; Zhang, R.; Chen, J.H.; Chen, K.H.; Young, T.F.; Chen, H.L.; Lou, J.C.; et al. Resistive switching modification by ultraviolet illumination in transparent electrode resistive random access memory. IEEE Electron Device Lett. 2014, 35, 633–635. [Google Scholar] [CrossRef]
- Ye, C.; Wu, J.J.; Pan, C.H.; Tsai, T.M.; Chang, K.C.; Wu, H.; Deng, N.; Qian, H. Boosting the performance of resistive switching memory with a transparent ITO electrode using supercritical fluid nitridation. RSC Adv. 2017, 7, 11585–11590. [Google Scholar] [CrossRef] [Green Version]
- Kim, H.D.; Yun, M.J.; Kim, S. All ITO-based transparent resistive switching random access memory using oxygen doping method. J. Alloys Compd. 2015, 653, 534–538. [Google Scholar] [CrossRef]
- Lan, X.; Ou, X.; Lei, Y.; Gong, C.; Yin, Q.; Xu, B.; Xia, Y.; Yin, J.; Liu, Z. The interface inter-diffusion induced enhancement of the charge-trapping capability in HfO2/Al2O3 multilayered memory devices. Appl. Phys. Lett. 2013, 103, 192905. [Google Scholar] [CrossRef]
- Yu, S.; Gao, B.; Fang, Z.; Yu, H.; Kang, J.; Wong, H.-S.P. A Low Energy Oxide-Based Electronic Synaptic Device for Neuromorphic Visual Systems with Tolerance to Device Variation. Adv. Mater. 2013, 25, 1774–1779. [Google Scholar] [CrossRef] [PubMed]
- Tsai, T.L.; Chang, H.Y.; Lou, J.J.C.; Tseng, T.Y. A high performance transparent resistive switching memory made from ZrO2/AlON bilayer structure. Appl. Phys. Lett. 2016, 108, 2–6. [Google Scholar] [CrossRef]
- Akbari, M.; Kim, M.-K.; Kim, D.; Lee, J.-S. Reproducible and reliable resistive switching behaviors of AlOX/HfOX bilayer structures with Al electrode by atomic layer deposition. RSC Adv. 2017, 7, 16704–16708. [Google Scholar] [CrossRef] [Green Version]
- Huang, C.Y.; Jieng, J.H.; Jang, W.Y.; Lin, C.H.; Tseng, T.Y. Improved resistive switching characteristics by Al2O3 layers inclusion in HfO2-based RRAM devices. ECS Solid State Lett. 2013, 2, 2013–2015. [Google Scholar] [CrossRef]
- Deuermeier, J.; Kiazadeh, A.; Klein, A.; Martins, R.; Fortunato, E. Multi-Level Cell Properties of a Bilayer Cu2O/Al2O3 Resistive Switching Device. Nanomaterials 2019, 9, 289. [Google Scholar] [CrossRef] [Green Version]
- Zahoor, F.; Azni Zulkifli, T.Z.; Khanday, F.A. Resistive Random Access Memory (RRAM): An Overview of Materials, Switching Mechanism, Performance, Multilevel Cell (mlc) Storage, Modeling, and Applications. Nanoscale Res. Lett. 2020, 15, 90. [Google Scholar] [CrossRef]
- Misha, S.H.; Tamanna, N.; Woo, J.; Lee, S.; Song, J.; Park, J.; Lim, S.; Park, J.; Hwang, H. Effect of Nitrogen Doping on Variability of TaOx -RRAM for Low-Power 3-Bit MLC Applications. ECS Solid State Lett. 2015, 4, P25–P28. [Google Scholar] [CrossRef] [Green Version]
- Wu, L.; Liu, H.; Li, J.; Wang, S.; Wang, X. A Multi-level Memristor Based on Al-Doped HfO2 Thin Film. Nanoscale Res. Lett. 2019, 14, 177. [Google Scholar] [CrossRef] [Green Version]
- Giovinazzo, C.; Sandrini, J.; Shahrabi, E.; Celik, O.T.; Leblebici, Y.; Ricciardi, C. Analog Control of Retainable Resistance Multistates in HfO2 Resistive-Switching Random Access Memories (ReRAMs). ACS Appl. Electron. Mater. 2019, 1, 900–909. [Google Scholar] [CrossRef]
- Lin, S.M.; Tseng, J.Y.; Su, T.Y.; Shih, Y.C.; Huang, J.S.; Huang, C.H.; Lin, S.J.; Chueh, Y.L. Tunable multilevel storage of complementary resistive switching on single-step formation of ZnO/ZnWOx bilayer structure via interfacial engineering. ACS Appl. Mater. Interfaces 2014, 6, 17686–17693. [Google Scholar] [CrossRef]
- Hu, S.G.; Liu, Y.; Chen, T.P.; Liu, Z.; Yu, Q.; Deng, L.J.; Yin, Y.; Hosaka, S. Emulating the paired-pulse facilitation of a biological synapse with a NiOx-based memristor. Appl. Phys. Lett. 2013, 102, 183510. [Google Scholar] [CrossRef]
- Majumdar, S.; Tan, H.; Qin, Q.H.; van Dijken, S. Energy-Efficient Organic Ferroelectric Tunnel Junction Memristors for Neuromorphic Computing. Adv. Electron. Mater. 2019, 5, 1800795. [Google Scholar] [CrossRef] [Green Version]
- Wang, T.; Meng, J.; He, Z.; Chen, L.; Zhu, H.; Sun, Q.; Ding, S.; Zhang, D.W. Atomic Layer Deposited Hf0.5Zr0.5O2-based Flexible Memristor with Short/Long-Term Synaptic Plasticity. Nanoscale Res. Lett. 2019, 14, 102. [Google Scholar] [CrossRef] [PubMed] [Green Version]
- Liu, D.; Jing, Q.; Cheng, H. Synaptic-functional and fully water-soluble transient memristor made from materials compatible with semiconductor technology. Jpn. J. Appl. Phys. 2019, 58, 60903. [Google Scholar] [CrossRef]
- Li, H.K.; Chen, T.P.; Liu, P.; Hu, S.G.; Liu, Y.; Zhang, Q.; Lee, P.S. A light-stimulated synaptic transistor with synaptic plasticity and memory functions based on InGaZnOx-Al2O3 thin film structure. J. Appl. Phys. 2016, 119, 244505. [Google Scholar] [CrossRef]
- Mahata, C.; Lee, C.; An, Y.; Kim, M.-H.; Bang, S.; Kim, C.S.; Ryu, J.-H.; Kim, S.; Kim, H.; Park, B.-G. Resistive switching and synaptic behaviors of an HfO2/Al2O3 stack on ITO for neuromorphic systems. J. Alloys Compd. 2020, 826, 154434. [Google Scholar] [CrossRef]
- Zhao, L.; Xu, J.; Shang, X.; Li, X.; Li, Q.; Li, S. Synaptic memory devices from CoO/Nb:SrTiO3 junction. R. Soc. Open Sci. 2019, 6, 181098. [Google Scholar] [CrossRef] [Green Version]
- Wang, Q.; Niu, G.; Roy, S.; Wang, Y.; Zhang, Y.; Wu, H.; Zhai, S.; Bai, W.; Shi, P.; Song, S.; et al. Interface-engineered reliable HfO2-based RRAM for synaptic simulation. J. Mater. Chem. C 2019, 7, 12682–12687. [Google Scholar] [CrossRef]
- Li, Y.; Zhong, Y.; Zhang, J.; Xu, L.; Wang, Q.; Sun, H.; Tong, H.; Cheng, X.; Miao, X. Activity-dependent synaptic plasticity of a chalcogenide electronic synapse for neuromorphic systems. Sci. Rep. 2014, 4, 4906. [Google Scholar] [CrossRef] [Green Version]
- Kim, J.; Cho, S.; Kim, T.; Pak, J.J. Mimicking Synaptic Behaviors with Cross-Point Structured TiOx/TiOy-Based Filamentary RRAM for Neuromorphic Applications. J. Electr. Eng. Technol. 2019, 14, 869–875. [Google Scholar] [CrossRef]
- Zhao, J.; Zhou, Z.; Zhang, Y.; Wang, J.; Zhang, L.; Li, X.; Zhao, M.; Wang, H.; Pei, Y.; Zhao, Q.; et al. An electronic synapse memristor device with conductance linearity using quantized conduction for neuroinspired computing. J. Mater. Chem. C 2019, 7, 1298–1306. [Google Scholar] [CrossRef]
RRAM Structure | Operation Mode | Forming Voltage (V) | HRS/LRS Ratio | Endurance (Cycles) | Retention (s) | Icc (A) | Vset (V) | Vreset (V) | Ref. |
---|---|---|---|---|---|---|---|---|---|
AlOX/HfOX | Bipolar | NA | 102 | 400 | 104 | 10−3 | 0.8 | −1.0 | [33] |
ZrO2/HfO2 | Bipolar | −4 | 102 | 107 | 104 | 10−3 | 1.0 | −1.0 | [14] |
Al2O3/HfO2 | Bipolar | NA | >10 | 500 | NA | 10−3 | 0.9 | −0.8 | [12] |
HfxAlyO | Bipolar | 2.7 | 102 | 104 | 104 | 10−3 | 0.6 | −0.5 | [34] |
HfO2/Al2O3 | Bipolar | 5.2 | 102 | 104 | 104 | 10−5 | 1.8 | −1.5 | [4] |
Cu2O/Al2O3 | Bipolar | −3.0 | 102 | NA | NA | 10−4 | −1.7 | 1.0 | [35] |
HfO2/TiOx | Bipolar | 3.7 | 102 | 104 | NA | 10−6 | 1.5 | −1.1 | [17] |
TiO2−x/HfO2−y/TiO2−x | Bipolar | NA | 102 | 107 | 105 | free | 5.0 | −5.0 | [10] |
Al2O3/HfO2/Al2O3 | Bipolar | NA | 102 | 105 | 105 | free | −1.0 | 1.5 | [21] |
HfO2/TiO2/HfO2 | Bipolar | −3.7 | 102 | 200 | 104 | 10−3 | −1.0 | 1.5 | [11] |
ZrO2/ZrO2−x/ZrO2 | Bipolar | NA | >10 | 100 | NA | free | −5.0 | 6.0 | [24] |
Al2O3/HfO2/Al2O3 | Bipolar | −2.0 | >10 | 103 | 104 | 10−2 | −1.0 | 1.25 | [20] |
HfO2/Al2O3/HfO2 | Bipolar | −9.0 | >10 | >103 | 104 | 10−3 | −0.3 | 0.8 | This work |
Publisher’s Note: MDPI stays neutral with regard to jurisdictional claims in published maps and institutional affiliations. |
© 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
Share and Cite
Mahata, C.; Kang, M.; Kim, S. Multi-Level Analog Resistive Switching Characteristics in Tri-Layer HfO2/Al2O3/HfO2 Based Memristor on ITO Electrode. Nanomaterials 2020, 10, 2069. https://doi.org/10.3390/nano10102069
Mahata C, Kang M, Kim S. Multi-Level Analog Resistive Switching Characteristics in Tri-Layer HfO2/Al2O3/HfO2 Based Memristor on ITO Electrode. Nanomaterials. 2020; 10(10):2069. https://doi.org/10.3390/nano10102069
Chicago/Turabian StyleMahata, Chandreswar, Myounggon Kang, and Sungjun Kim. 2020. "Multi-Level Analog Resistive Switching Characteristics in Tri-Layer HfO2/Al2O3/HfO2 Based Memristor on ITO Electrode" Nanomaterials 10, no. 10: 2069. https://doi.org/10.3390/nano10102069