Study on the Surface Morphology of Thermochromic Rf-Sputtered VO2 Films Using Temperature-Dependent Atomic Force Microscopy
Abstract
:1. Introduction
2. Materials and Methods
3. Results
4. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
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Sample No. | Substrate | %O2 in Plasma | Thickness (nm) | Direction of VO2 Planes | D (nm) | RMS Roughness @RT (nm) | Eg (eV) |
---|---|---|---|---|---|---|---|
1 | Silicon | 3 | 40 | 4.4 | 2.7 | - | |
2 | K-Glass | 3 | 100 | 11.3 | 15.9 | 1.69 | |
3 | Fused silica | 1 | 100 | (011) | 6.9 | 5.0 | 1.48 |
4 | Flexible glass | 1 | 100 | (011) | 10.4 | 3.7 | 1.74 |
T (°C) | ||||
---|---|---|---|---|
Substrate | (a) RT | (b) 60 | (c) 80 | (d) 100 |
Silicon | ||||
K-glass | ||||
fused silica glass | ||||
flexible glass |
Substrate | T1 (°C) | T2 (°C) | TC (°C) | ΔTC (°C) | ΔTrIR (2000 nm) (%) | ΔTrsol (%) | Trlum (25 °C) (%) | (FWHM)h (°C) | (FWHM)h (°C) |
---|---|---|---|---|---|---|---|---|---|
Si | 49 | 44 | 46.5 | 5 | 6 | 1.5 | - | 29 | 19 |
K-glass | 59 | 50 | 54.5 | 9 | 20 | 6 | 38 | 11 | 9 |
fused silica | 41 | 34 | 37.5 | 7 | 28 | 4 | 38 | 20 | 17 |
flexible glass | 56 | 45 | 50.5 | 11 | 36 | 5 | 34 | 39 | 32 |
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Gagaoudakis, E.; Verveniotis, E.; Okawa, Y.; Michail, G.; Aperathitis, E.; Mantsiou, E.; Kiriakidis, G.; Binas, V. Study on the Surface Morphology of Thermochromic Rf-Sputtered VO2 Films Using Temperature-Dependent Atomic Force Microscopy. Appl. Sci. 2023, 13, 7662. https://doi.org/10.3390/app13137662
Gagaoudakis E, Verveniotis E, Okawa Y, Michail G, Aperathitis E, Mantsiou E, Kiriakidis G, Binas V. Study on the Surface Morphology of Thermochromic Rf-Sputtered VO2 Films Using Temperature-Dependent Atomic Force Microscopy. Applied Sciences. 2023; 13(13):7662. https://doi.org/10.3390/app13137662
Chicago/Turabian StyleGagaoudakis, Emmanouil, Elisseos Verveniotis, Yuji Okawa, Giannis Michail, Elias Aperathitis, Eleni Mantsiou, George Kiriakidis, and Vassilios Binas. 2023. "Study on the Surface Morphology of Thermochromic Rf-Sputtered VO2 Films Using Temperature-Dependent Atomic Force Microscopy" Applied Sciences 13, no. 13: 7662. https://doi.org/10.3390/app13137662