Simplified Phenomenological Model for Ferroelectric Micro-Actuator †
Abstract
:1. Introduction
2. Background Theory
2.1. Notations
2.2. Basic Equations
2.3. Thermodynamic Consistency
3. Finite-Element Formulation
3.1. Return Mapping
Algorithm 1: Return mapping algorithm. |
3.2. Weak-Form and Solving Procedure
Algorithm 2: Finite element framework of ferroelectricty. |
4. Numerical Examples
4.1. Analytical Solutions
4.2. Ferroelectric Cube
4.3. Ferroelectric Actuator
5. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
Appendix A. Partial Derivatives
Appendix B. Matrix Forms
References
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b | ||||||||
---|---|---|---|---|---|---|---|---|
25.5802 | 1.001 | 0.053 |
Elastic moduli | Piezoelectric constants | |||||||
109 | 59 | 59 | 109 | 109 | −14.96 | 50.116 | 38.148 | |
Dielectric permittivity | Ferroelectric parameters | |||||||
b | ||||||||
0.25 | 0.00144 | 1.0001 |
PZT Layer | ||||||||
Elastic moduli | Piezoelectric constants | |||||||
127.2 | 80.2 | 84.7 | 117.4 | 23 | −16.0 | 11.7 | 17 | |
Dielectric permittivity | Ferroelectric parameters | |||||||
b | ||||||||
15.1 | 6.2 | 0.36 | 0 | 6.2 | 1/tan(0.3) | 1.1 | ||
Silicon direction | ||||||||
Elastic moduli | ||||||||
194.5 | 35.7 | 64.1 | 165.7 | 79.6 | 50.9 |
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Nguyen, B.H.; Torri, G.B.; Zunic, M.; Rochus, V. Simplified Phenomenological Model for Ferroelectric Micro-Actuator. Micromachines 2023, 14, 1355. https://doi.org/10.3390/mi14071355
Nguyen BH, Torri GB, Zunic M, Rochus V. Simplified Phenomenological Model for Ferroelectric Micro-Actuator. Micromachines. 2023; 14(7):1355. https://doi.org/10.3390/mi14071355
Chicago/Turabian StyleNguyen, Binh Huy, Guilherme Brondani Torri, Maja Zunic, and Véronique Rochus. 2023. "Simplified Phenomenological Model for Ferroelectric Micro-Actuator" Micromachines 14, no. 7: 1355. https://doi.org/10.3390/mi14071355