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Journal: Materials, 2022
Volume: 15
Number: 6202

Article: Growth Mechanism of Semipolar AlN Layers by HVPE on Hybrid SiC/Si(110) Substrates
Authors: by Alexander A. Koryakin, Sergey A. Kukushkin, Andrey V. Osipov, Shukrillo Sh. Sharofidinov and Mikhail P. Shcheglov
Link: https://www.mdpi.com/1996-1944/15/18/6202

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