A Three-Dimensional Finite Element Analysis Model for SH-SAW Torque Sensors
Abstract
:1. Introduction
2. Theoretical Background
3. Simulation Methodology
4. Results and Discussion
4.1. Effect of Crystal Cuts
4.2. Effect of Wave-Guide Layers
4.3. Effect of External Applied Torque
5. Conclusions
Author Contributions
Funding
Acknowledgments
Conflicts of Interest
References
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Material Constant | Au | Pt | Ti | SiO2 |
---|---|---|---|---|
Young’s Modulus (GPa) | 78 | 170 | 110 | 74 |
Poisson ratio | 0.42 | 0.38 | 0.32 | 0.17 |
Density (×103 kg/m3) | 19.32 | 21.14 | 4.48 | 2.20 |
Shear velocity (m/s) | 1200 | 1730 | 3100 | 2850 |
Acoustic impedance (×106 kg/m2s) | 51.20 | 63.42 | 27.33 | 12.67 |
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Jiang, C.; Chen, Y.; Cho, C. A Three-Dimensional Finite Element Analysis Model for SH-SAW Torque Sensors. Sensors 2019, 19, 4290. https://doi.org/10.3390/s19194290
Jiang C, Chen Y, Cho C. A Three-Dimensional Finite Element Analysis Model for SH-SAW Torque Sensors. Sensors. 2019; 19(19):4290. https://doi.org/10.3390/s19194290
Chicago/Turabian StyleJiang, Chao, Yanqin Chen, and Chongdu Cho. 2019. "A Three-Dimensional Finite Element Analysis Model for SH-SAW Torque Sensors" Sensors 19, no. 19: 4290. https://doi.org/10.3390/s19194290