sensors-logo

Journal Browser

Journal Browser

Integrated Sensors

A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Physical Sensors".

Deadline for manuscript submissions: closed (30 September 2018) | Viewed by 66320

Special Issue Editors


E-Mail Website
Guest Editor
Department of Electrical Engineering and Information Technologies, Università degli Studi di Napoli Federico II, 80125 Napoli, Italy
Interests: silicon and wide bandgap semiconductor sensors; diode, BJT and MOSFET integrated sensors; photodetectors; RFID and microchip wireless sensors; integrated photonics and optical resonant cavity sensors

E-Mail Website
Guest Editor
IMEC, Kapeldreef 75, 3001 Leuven, Belgium
Interests: MEMS; Atomic Layer Deposition; MEMS/NEMS Fabrication technologies; Solid State Physic; Gas Sensors; resistance temperature detectors
Mediterranea University, DIIES, Via Graziella, 89122 Reggio Calabria, Italy
Interests: p-n and Shottky diode sensors; Silicon photonics; photonic integrated circuits; amorphous silicon; photodetectors

Special Issue Information

Dear Colleagues,

The monolithic integration of sensors within an electronic microchip is of paramount importance for a huge number of emerging applications, from automotive to medical, from consumer to industrial, from telecom to energy.

The common factor among all these fields of application is the interest for sensors that can be fabricated by means of, or are at least compatible with, the process steps that are fundamental for the VLSI technology, and in particular for CMOS.

The aim of this Special Issue is to gather original contributions or review papers from researchers that are actively engaged in developing new ideas in any of the innumerable sectors of development of physical or chemical sensors that are already, or promise to become, technologically compatible with microelectronic devices. The interest is, however, not strictly limited to silicon as a platform, and is certainly open to all emerging microelectronic technologies for special applications based, e.g., on compound semiconductors, such as SiC, GaN, InP, and so on.

Papers are solicited in, though not limited to, the following areas: Radiation sensing at any wavelength; magnetic signal sensing; force, pressure, acceleration, flow sensing; temperature sensing; chemical composition, concentration, and pH sensing.

Prof. Dr. Francesco Della Corte
Dr. Giuseppe Fiorentino
Dr. Sandro Rao
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Sensors is an international peer-reviewed open access semimonthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • Integrated sensors,
  • Smart sensor,
  • Solid state sensors,
  • CMOS,
  • Photodetectors,
  • Micromechanical sensors,
  • Physical sensors,
  • Chemical sensors,
  • Harsh environments

Published Papers (12 papers)

Order results
Result details
Select all
Export citation of selected articles as:

Research

Jump to: Review

15 pages, 4178 KiB  
Article
Integrated Optic Sensing Spectrometer: Concept and Design
by Gloria Micó, Bernardo Gargallo, Daniel Pastor and Pascual Muñoz
Sensors 2019, 19(5), 1018; https://doi.org/10.3390/s19051018 - 27 Feb 2019
Cited by 11 | Viewed by 3798
Abstract
In this paper the concept and design of an integrated optical device featuring evanescent field sensing and spectrometric analysis is presented. The device, termed integrated optics sensing spectrometer (IOSS), consists of a modified arrayed waveguide grating (AWG) which arms are engineered into two [...] Read more.
In this paper the concept and design of an integrated optical device featuring evanescent field sensing and spectrometric analysis is presented. The device, termed integrated optics sensing spectrometer (IOSS), consists of a modified arrayed waveguide grating (AWG) which arms are engineered into two sets having different focal points. Half of the arms are exposed to the outer media, while the other half are left isolated, thus the device can provide both sensing and reference spectra. Two reference designs are provided for the visible and near-infrared wavelengths, aimed at the determination of the concentration of known solutes through absorption spectroscopy. Full article
(This article belongs to the Special Issue Integrated Sensors)
Show Figures

Figure 1

11 pages, 2638 KiB  
Article
Integrable Near-Infrared Photodetectors Based on Hybrid Erbium/Silicon Junctions
by Mariano Gioffré, Giuseppe Coppola, Mario Iodice and Maurizio Casalino
Sensors 2018, 18(11), 3755; https://doi.org/10.3390/s18113755 - 03 Nov 2018
Cited by 1 | Viewed by 3064
Abstract
This paper presents the design, fabrication, and characterization of Schottky erbium/silicon photodetectors working at 1.55 µm. These erbium/silicon junctions are carefully characterized using both electric and optical measurements at room temperature. A Schottky barrier ΦB of ~673 meV is extrapolated; the photodetectors [...] Read more.
This paper presents the design, fabrication, and characterization of Schottky erbium/silicon photodetectors working at 1.55 µm. These erbium/silicon junctions are carefully characterized using both electric and optical measurements at room temperature. A Schottky barrier ΦB of ~673 meV is extrapolated; the photodetectors show external responsivity of 0.55 mA/W at room temperature under an applied reverse bias of 8 V. In addition, the device performance is discussed in terms of normalized noise and noise-equivalent power. The proposed devices will pave the way towards the development of Er-based photodetectors and light sources to be monolithically integrated in the same silicon substrate, and both operating at 1.55 µm. Full article
(This article belongs to the Special Issue Integrated Sensors)
Show Figures

Figure 1

21 pages, 7040 KiB  
Article
An Optimal Radial Basis Function Neural Network Enhanced Adaptive Robust Kalman Filter for GNSS/INS Integrated Systems in Complex Urban Areas
by Yipeng Ning, Jian Wang, Houzeng Han, Xinglong Tan and Tianjun Liu
Sensors 2018, 18(9), 3091; https://doi.org/10.3390/s18093091 - 13 Sep 2018
Cited by 42 | Viewed by 4856
Abstract
Inertial Navigation System (INS) is often combined with Global Navigation Satellite System (GNSS) to increase the positioning accuracy and continuity. In complex urban environments, GNSS/INS integrated systems suffer not only from dynamical model errors but also GNSS observation gross errors. However, it is [...] Read more.
Inertial Navigation System (INS) is often combined with Global Navigation Satellite System (GNSS) to increase the positioning accuracy and continuity. In complex urban environments, GNSS/INS integrated systems suffer not only from dynamical model errors but also GNSS observation gross errors. However, it is hard to distinguish dynamical model errors from observation gross errors because the observation residuals are affected by both of them in a loosely-coupled integrated navigation system. In this research, an optimal Radial Basis Function (RBF) neural network-enhanced adaptive robust Kalman filter (KF) method is proposed to isolate and mitigate the influence of the two types of errors. In the proposed method, firstly a test statistic based on Mahalanobis distance is treated as judging index to achieve fault detection. Then, an optimal RBF neural network strategy is trained on-line by the optimality principle. The network’s output will bring benefits in recognizing the above two kinds of filtering fault and the system is able to choose a robust or adaptive Kalman filtering method autonomously. A field vehicle test in urban areas with a low-cost GNSS/INS integrated system indicates that two types of errors simulated in complex urban areas have been detected, distinguished and eliminated with the proposed scheme, success rate reached up to 92%. In particular, we also find that the novel neural network strategy can improve the overall position accuracy during GNSS signal short-term outages. Full article
(This article belongs to the Special Issue Integrated Sensors)
Show Figures

Figure 1

12 pages, 5830 KiB  
Article
A Novel Strain Sensor with Large Measurement Range Based on All Fiber Mach-Zehnder Interferometer
by Xinran Dong, Haifeng Du, Xiaoyan Sun, Zhi Luo and Ji’an Duan
Sensors 2018, 18(5), 1549; https://doi.org/10.3390/s18051549 - 14 May 2018
Cited by 49 | Viewed by 4254
Abstract
We have proposed a high sensitive photonic crystal fiber (PCF) strain sensor based on the Mach-Zehnder interferometer (MZI). The sensing head is formed by all-fiber in-line single mode-multimode-photonic-crystal-single mode fiber (SMPS) structure, using only the splicing method. Such a strain sensor exhibited a [...] Read more.
We have proposed a high sensitive photonic crystal fiber (PCF) strain sensor based on the Mach-Zehnder interferometer (MZI). The sensing head is formed by all-fiber in-line single mode-multimode-photonic-crystal-single mode fiber (SMPS) structure, using only the splicing method. Such a strain sensor exhibited a high sensitivity of −2.21 pm/με within a large measurement range of up to 5000 με and a large fringe visibility of up to 24 dB. Moreover, it was found that the strain sensitivity was weekly dependent of the length of PCF or MMF. In addition, the sensor exhibited the advantages of simplicity of fabrication, high sensitivity and larger fringe visibility. Full article
(This article belongs to the Special Issue Integrated Sensors)
Show Figures

Figure 1

11 pages, 6108 KiB  
Article
Investigation of the Temperature Fluctuation of Single-Phase Fluid Based Microchannel Heat Sink
by Tao Wang, Jiejun Wang, Jian He, Chuangui Wu, Wenbo Luo, Yao Shuai, Wanli Zhang and Chengkuo Lee
Sensors 2018, 18(5), 1498; https://doi.org/10.3390/s18051498 - 10 May 2018
Cited by 7 | Viewed by 4501
Abstract
The temperature fluctuation in a single-phase microchannel heat sink (MCHS) is investigated using the integrated temperature sensors with deionized water as the coolant. Results show that the temperature fluctuation in single phase is not negligible. The causes of the temperature fluctuation are revealed [...] Read more.
The temperature fluctuation in a single-phase microchannel heat sink (MCHS) is investigated using the integrated temperature sensors with deionized water as the coolant. Results show that the temperature fluctuation in single phase is not negligible. The causes of the temperature fluctuation are revealed based on both simulation and experiment. It is found that the inlet temperature fluctuation and the gas bubbles separated out from coolant are the main causes. The effect of the inlet temperature fluctuation is global, where the temperatures at different locations change simultaneously. Meanwhile, the gas bubble effect is localized where the temperature changes at different locations are not synchronized. In addition, the relation between temperature fluctuation and temperature gradient is established. The temperature fluctuation increases with the temperature gradient accordingly. Full article
(This article belongs to the Special Issue Integrated Sensors)
Show Figures

Figure 1

22 pages, 2185 KiB  
Article
Multi-Sensor Optimal Data Fusion Based on the Adaptive Fading Unscented Kalman Filter
by Bingbing Gao, Gaoge Hu, Shesheng Gao, Yongmin Zhong and Chengfan Gu
Sensors 2018, 18(2), 488; https://doi.org/10.3390/s18020488 - 06 Feb 2018
Cited by 73 | Viewed by 5946
Abstract
This paper presents a new optimal data fusion methodology based on the adaptive fading unscented Kalman filter for multi-sensor nonlinear stochastic systems. This methodology has a two-level fusion structure: at the bottom level, an adaptive fading unscented Kalman filter based on the Mahalanobis [...] Read more.
This paper presents a new optimal data fusion methodology based on the adaptive fading unscented Kalman filter for multi-sensor nonlinear stochastic systems. This methodology has a two-level fusion structure: at the bottom level, an adaptive fading unscented Kalman filter based on the Mahalanobis distance is developed and serves as local filters to improve the adaptability and robustness of local state estimations against process-modeling error; at the top level, an unscented transformation-based multi-sensor optimal data fusion for the case of N local filters is established according to the principle of linear minimum variance to calculate globally optimal state estimation by fusion of local estimations. The proposed methodology effectively refrains from the influence of process-modeling error on the fusion solution, leading to improved adaptability and robustness of data fusion for multi-sensor nonlinear stochastic systems. It also achieves globally optimal fusion results based on the principle of linear minimum variance. Simulation and experimental results demonstrate the efficacy of the proposed methodology for INS/GNSS/CNS (inertial navigation system/global navigation satellite system/celestial navigation system) integrated navigation. Full article
(This article belongs to the Special Issue Integrated Sensors)
Show Figures

Figure 1

9 pages, 15850 KiB  
Article
A Comprehensive Study of a Micro-Channel Heat Sink Using Integrated Thin-Film Temperature Sensors
by Tao Wang, Jiejun Wang, Jian He, Chuangui Wu, Wenbo Luo, Yao Shuai, Wanli Zhang, Xiancai Chen, Jian Zhang and Jia Lin
Sensors 2018, 18(1), 299; https://doi.org/10.3390/s18010299 - 19 Jan 2018
Cited by 11 | Viewed by 7151
Abstract
A micro-channel heat sink is a promising cooling method for high power integrated circuits (IC). However, the understanding of such a micro-channel device is not sufficient, because the tools for studying it are very limited. The details inside the micro-channels are not readily [...] Read more.
A micro-channel heat sink is a promising cooling method for high power integrated circuits (IC). However, the understanding of such a micro-channel device is not sufficient, because the tools for studying it are very limited. The details inside the micro-channels are not readily available. In this letter, a micro-channel heat sink is comprehensively studied using the integrated temperature sensors. The highly sensitive thin film temperature sensors can accurately monitor the temperature change in the micro-channel in real time. The outstanding heat dissipation performance of the micro-channel heat sink is proven in terms of maximum temperature, cooling speed and heat resistance. The temperature profile along the micro-channel is extracted, and even small temperature perturbations can be detected. The heat source formed temperature peak shifts towards the flow direction with the increasing flow rate. However, the temperature non-uniformity is independent of flow rate, but solely dependent on the heating power. Specific designs for minimizing the temperature non-uniformity are necessary. In addition, the experimental results from the integrated temperature sensors match the simulation results well. This can be used to directly verify the modeling results, helping to build a convincing simulation model. The integrated sensor could be a powerful tool for studying the micro-channel based heat sink. Full article
(This article belongs to the Special Issue Integrated Sensors)
Show Figures

Figure 1

15 pages, 3741 KiB  
Article
A Monolithic Multisensor Microchip with Complete On-Chip RF Front-End
by Massimo Merenda, Corrado Felini and Francesco G. Della Corte
Sensors 2018, 18(1), 110; https://doi.org/10.3390/s18010110 - 02 Jan 2018
Cited by 16 | Viewed by 4894
Abstract
In this paper, a new wireless sensor, designed for a 0.35 µm CMOS technology, is presented. The microchip was designed to be placed on an object for the continuous remote monitoring of its temperature and illumination state. The temperature sensor is based on [...] Read more.
In this paper, a new wireless sensor, designed for a 0.35 µm CMOS technology, is presented. The microchip was designed to be placed on an object for the continuous remote monitoring of its temperature and illumination state. The temperature sensor is based on the temperature dependence of the I-V characteristics of bipolar transistors available in CMOS technology, while the illumination sensor is an integrated p-n junction photodiode. An on-chip 2.5 GHz transmitter, coupled to a mm-sized dipole radiating element fabricated on the same microchip and made in the top metal layer of the same die, sends the collected data wirelessly to a radio receiver using an On-Off Keying (OOK) modulation pattern. Full article
(This article belongs to the Special Issue Integrated Sensors)
Show Figures

Figure 1

4298 KiB  
Article
Integrated Temperature and Hydrogen Sensors with MEMS Technology
by Hongchuan Jiang, Min Huang, Yibing Yu, Xiaoyu Tian, Xiaohui Zhao, Wanli Zhang, Jianfeng Zhang, Yifan Huang and Kun Yu
Sensors 2018, 18(1), 94; https://doi.org/10.3390/s18010094 - 31 Dec 2017
Cited by 55 | Viewed by 6368
Abstract
In this work, a PdNi thin film hydrogen gas sensor with integrated Pt thin film temperature sensor was designed and fabricated using the micro-electro-mechanical system (MEMS) process. The integrated sensors consist of two resistors: the former, based on Pt film, is used as [...] Read more.
In this work, a PdNi thin film hydrogen gas sensor with integrated Pt thin film temperature sensor was designed and fabricated using the micro-electro-mechanical system (MEMS) process. The integrated sensors consist of two resistors: the former, based on Pt film, is used as a temperature sensor, while the latter had the function of hydrogen sensing and is based on PdNi alloy film. The temperature coefficient of resistance (TCR) in both devices was measured and the output response of the PdNi film hydrogen sensor was calibrated based on the temperature acquired by the Pt temperature sensor. The SiN layer was deposited on top of Pt film to inhibit the hydrogen diffusion and reduce consequent disturbance on temperature measurement. The TCR of the PdNi film and the Pt film was about 0.00122/K and 0.00217/K, respectively. The performances of the PdNi film hydrogen sensor were investigated with hydrogen concentrations from 0.3% to 3% on different temperatures from 294.7 to 302.2 K. With the measured temperature of the Pt resistor and the TCR of the PdNi film, the impact of the temperature on the performances of the PdNi film hydrogen sensor was reduced. The output response, response time and recovery time of the PdNi film hydrogen sensors under the hydrogen concentration of 0.5%, 1.0%, 1.5% and 2.0% were measured at 313 K. The output response of the PdNi thin film hydrogen sensors increased with increasing hydrogen concentration while the response time and recovery time decreased. A cycling test between pure nitrogen and 3% hydrogen concentration was performed at 313 K and PdNi thin film hydrogen sensor demonstrated great repeatability in the cycling test. Full article
(This article belongs to the Special Issue Integrated Sensors)
Show Figures

Figure 1

4811 KiB  
Article
Differential CMOS Sub-Terahertz Detector with Subthreshold Amplifier
by Jong-Ryul Yang, Seong-Tae Han and Donghyun Baek
Sensors 2017, 17(9), 2069; https://doi.org/10.3390/s17092069 - 09 Sep 2017
Cited by 9 | Viewed by 5929
Abstract
We propose a differential-type complementary metal-oxide-semiconductor (CMOS) sub-terahertz (THz) detector with a subthreshold preamplifier. The proposed detector improves the voltage responsivity and effective signal-to-noise ratio (SNR) using the subthreshold preamplifier, which is located between the differential detector device and main amplifier. The overall [...] Read more.
We propose a differential-type complementary metal-oxide-semiconductor (CMOS) sub-terahertz (THz) detector with a subthreshold preamplifier. The proposed detector improves the voltage responsivity and effective signal-to-noise ratio (SNR) using the subthreshold preamplifier, which is located between the differential detector device and main amplifier. The overall noise of the detector for the THz imaging system is reduced by the preamplifier because it diminishes the noise contribution of the main amplifier. The subthreshold preamplifier is self-biased by the output DC voltage of the detector core and has a dummy structure that cancels the DC offsets generated by the preamplifier itself. The 200 GHz detector fabricated using 0.25 μm CMOS technology includes a low drop-out regulator, current reference blocks, and an integrated antenna. A voltage responsivity of 2020 kV/W and noise equivalent power of 76 pW/√Hz are achieved using the detector at a gate bias of 0.5 V, respectively. The effective SNR at a 103 Hz chopping frequency is 70.9 dB with a 0.7 W/m2 input signal power density. The dynamic range of the raster-scanned THz image is 44.59 dB. Full article
(This article belongs to the Special Issue Integrated Sensors)
Show Figures

Figure 1

3016 KiB  
Article
Nanometric Integrated Temperature and Thermal Sensors in CMOS-SOI Technology
by Maria Malits and Yael Nemirovsky
Sensors 2017, 17(8), 1739; https://doi.org/10.3390/s17081739 - 29 Jul 2017
Cited by 8 | Viewed by 5856
Abstract
This paper reviews and compares the thermal and noise characterization of CMOS (complementary metal-oxide-semiconductor) SOI (Silicon on insulator) transistors and lateral diodes used as temperature and thermal sensors. DC analysis of the measured sensors and the experimental results in a broad (300 K [...] Read more.
This paper reviews and compares the thermal and noise characterization of CMOS (complementary metal-oxide-semiconductor) SOI (Silicon on insulator) transistors and lateral diodes used as temperature and thermal sensors. DC analysis of the measured sensors and the experimental results in a broad (300 K up to 550 K) temperature range are presented. It is shown that both sensors require small chip area, have low power consumption, and exhibit linearity and high sensitivity over the entire temperature range. However, the diode’s sensitivity to temperature variations in CMOS-SOI technology is highly dependent on the diode’s perimeter; hence, a careful calibration for each fabrication process is needed. In contrast, the short thermal time constant of the electrons in the transistor’s channel enables measuring the instantaneous heating of the channel and to determine the local true temperature of the transistor. This allows accurate “on-line” temperature sensing while no additional calibration is needed. In addition, the noise measurements indicate that the diode’s small area and perimeter causes a high 1/f noise in all measured bias currents. This is a severe drawback for the sensor accuracy when using the sensor as a thermal sensor; hence, CMOS-SOI transistors are a better choice for temperature sensing. Full article
(This article belongs to the Special Issue Integrated Sensors)
Show Figures

Figure 1

Review

Jump to: Research

20 pages, 9023 KiB  
Review
Integrated Giant Magnetoresistance Technology for Approachable Weak Biomagnetic Signal Detections
by Hui-Min Shen, Liang Hu and Xin Fu
Sensors 2018, 18(1), 148; https://doi.org/10.3390/s18010148 - 07 Jan 2018
Cited by 33 | Viewed by 8361
Abstract
With the extensive applications of biomagnetic signals derived from active biological tissue in both clinical diagnoses and human-computer-interaction, there is an increasing need for approachable weak biomagnetic sensing technology. The inherent merits of giant magnetoresistance (GMR) and its high integration with multiple technologies [...] Read more.
With the extensive applications of biomagnetic signals derived from active biological tissue in both clinical diagnoses and human-computer-interaction, there is an increasing need for approachable weak biomagnetic sensing technology. The inherent merits of giant magnetoresistance (GMR) and its high integration with multiple technologies makes it possible to detect weak biomagnetic signals with micron-sized, non-cooled and low-cost sensors, considering that the magnetic field intensity attenuates rapidly with distance. This paper focuses on the state-of-art in integrated GMR technology for approachable biomagnetic sensing from the perspective of discipline fusion between them. The progress in integrated GMR to overcome the challenges in weak biomagnetic signal detection towards high resolution portable applications is addressed. The various strategies for 1/f noise reduction and sensitivity enhancement in integrated GMR technology for sub-pT biomagnetic signal recording are discussed. In this paper, we review the developments of integrated GMR technology for in vivo/vitro biomagnetic source imaging and demonstrate how integrated GMR can be utilized for biomagnetic field detection. Since the field sensitivity of integrated GMR technology is being pushed to fT/Hz0.5 with the focused efforts, it is believed that the potential of integrated GMR technology will make it preferred choice in weak biomagnetic signal detection in the future. Full article
(This article belongs to the Special Issue Integrated Sensors)
Show Figures

Figure 1

Back to TopTop