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Optical Measurement Based on Laser and Optical Sensor

A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Sensing and Imaging".

Deadline for manuscript submissions: closed (30 October 2023) | Viewed by 4679

Special Issue Editor


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Guest Editor
College of Optical Science and Engineering, Zhejiang University, Hangzhou, China
Interests: opto-electronics; optical sensor and signal process; optical gyro

Special Issue Information

Dear Colleagues,

Optical measurement methods are continually attracting interest in many research areas, and recent advances in laser and optical sensors have opened up new possibilities for measuring, sensing, and imaging with light. These have been successfully applied in many cases. Laser and optical sensors have been widely used to observe natural phenomena in the macroscopic or microscopic environment, and the importance of their roles has rapidly increased in science and industry. Significant improvements in the sensitivity, precision, accuracy, measurement speed, miniaturization of systems, and optical integration to optimize systems are also attracting growing interest.

This Special Issue, entitled “Optical Measurement Based on Laser and Optical Sensor” therefore aims to attract high-quality original research and review articles on recent advances, technologies, solutions, applications, and new challenges in these fields.

Potential topics include but are not limited to:

Optical measurement; opto-mechanical sensors; opto-electronic sensors; sensor design; precise measurement; optical sensor applications; fiber-optic sensors; spectroscopy; OCT; interferometry; microscopy; imaging; and other optical methods.

Dr. Diqing Ying
Guest Editor

Manuscript Submission Information

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Published Papers (3 papers)

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Research

13 pages, 2702 KiB  
Article
Designing Highly Precise Overlay Targets for Asymmetric Sidewall Structures Using Quasi-Periodic Line Widths and Finite-Difference Time-Domain Simulation
by Hung-Chih Hsieh, Meng-Rong Wu and Xiang-Ting Huang
Sensors 2023, 23(9), 4482; https://doi.org/10.3390/s23094482 - 04 May 2023
Viewed by 1346
Abstract
The present study introduces an optimized overlay target design to minimize the overlay error caused by asymmetric sidewall structures in semiconductor manufacturing. To achieve this goal, the overlay error formula was derived by separating the asymmetric bottom grating structure into symmetric and asymmetric [...] Read more.
The present study introduces an optimized overlay target design to minimize the overlay error caused by asymmetric sidewall structures in semiconductor manufacturing. To achieve this goal, the overlay error formula was derived by separating the asymmetric bottom grating structure into symmetric and asymmetric parts. Based on this formula, it was found that the overlay target design with the linewidth of the bottom grating closed to the grating period could effectively reduce the overlay error caused by the sidewall asymmetry structure. Simulation results demonstrate that the proposed design can effectively control the measurement error of different wavelengths within ±0.3 nm, even under varying sidewall angles and film thicknesses. Overall, the proposed overlay target design can significantly improve the overlay accuracy in semiconductor manufacturing processes. Full article
(This article belongs to the Special Issue Optical Measurement Based on Laser and Optical Sensor)
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11 pages, 2743 KiB  
Article
Simulation Analysis of a Wavefront Reconstruction of a Large Aperture Laser Beam
by Gangyu Wang, Zaihong Hou, Laian Qin, Xu Jing and Yi Wu
Sensors 2023, 23(2), 623; https://doi.org/10.3390/s23020623 - 05 Jan 2023
Cited by 3 | Viewed by 1225
Abstract
In order to solve the problem of atmospheric influence on the far-field measurement of the quality of a laser beam, we proposed a direct wavefront measurement system based on the Hartmann detection principle, which can measure large apertures and high-power laser beams. The [...] Read more.
In order to solve the problem of atmospheric influence on the far-field measurement of the quality of a laser beam, we proposed a direct wavefront measurement system based on the Hartmann detection principle, which can measure large apertures and high-power laser beams. The measuring system was composed of a lens array and a detector. The wavefront detection of a large aperture laser beam could be realized by controlling the distance between the lenses and the size of the lens. The influence of different duty cycle factors on the accuracy of the wavefront reconstruction under the same arrangement and different arrangement conditions was simulated and analyzed. The simulation results showed that when the sub-lenses of the system were not in close contact, the reconstruction accuracy of the duty factor of 0.8 was close to that of the case of the duty factor of 1. Within a certain detection range, the hexagonal arrangement of 19 lenses and the arrangement of 8 × 8 lens arrays had a high wavefront restoration accuracy; both were lower than 0.10 λ. The system proposed in this paper was suitable for measuring a large aperture laser beam, providing a new idea for measuring and analyzing the quality of large aperture laser beams. It also has an important significance for improving the measurement accuracy of the beam quality. Full article
(This article belongs to the Special Issue Optical Measurement Based on Laser and Optical Sensor)
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18 pages, 1677 KiB  
Article
Precision Magnetic Field Sensing with Dual Multi-Wave Atom Interferometer
by Wenhua Yan, Xudong Ren, Minkang Zhou and Zhongkun Hu
Sensors 2023, 23(1), 173; https://doi.org/10.3390/s23010173 - 24 Dec 2022
Cited by 3 | Viewed by 1551
Abstract
Precision magnetic field measurement is widely used for practical applications, fundamental research, and medical purposes, etc. We propose a novel quantum magnetometer based on atoms’ multi-wave (3-wave and 5-wave) Ramsey interference. Our design features high phase sensitivity and can be applied to in [...] Read more.
Precision magnetic field measurement is widely used for practical applications, fundamental research, and medical purposes, etc. We propose a novel quantum magnetometer based on atoms’ multi-wave (3-wave and 5-wave) Ramsey interference. Our design features high phase sensitivity and can be applied to in situ measurements of the magnetic field inside vacuum chambers. The final state detection is designed to be achieved by Raman’s two-photon transition. The analytical solution for applicable interference fringe is presented. Fringe contrast decay due to atom temperature and magnetic field gradient is simulated to estimate reasonable experimental conditions. Sensitivity functions for phase noise and magnetic field noise in a multi-wave system are derived to estimate the noise level required to reach the expected resolution. The validity of the model, dual-channel features on bias estimation, and the quasi-non-destructive detection feature are discussed. Full article
(This article belongs to the Special Issue Optical Measurement Based on Laser and Optical Sensor)
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