Optical MEMS: Design, Fabrication, Control, Modeling and Developments

A topical collection in Micromachines (ISSN 2072-666X).

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Collection Editor
School of Information and Electronics, Beijing Institute of Technology, Beijing 100081, China
Interests: MEMS; CMOS-MEMS sensors; micromirrors; microactuators; piezoelectric MEMS microspeakers; pMUTs; photoacoustic microscopy; optical endomicroscopy
Special Issues, Collections and Topics in MDPI journals

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Collection Editor
Aix Marseille Universite, CNRS, CNES, LAM, Laboratoire d’Astrophysique de Marseille, 38 Rue Frédéric Joliot Curie, 13388 Marseille CEDEX 13, France
Interests: MOEMS; micromirror arrays; MOEMS characterization; astronomical instrumentation; spectrographs; spectro-imagers; space optical instrumentation; universe observation; earth observation
Special Issues, Collections and Topics in MDPI journals

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Collection Editor
Department of System Design Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama, Japan
Interests: micro/nano-scale thermal engineering; optical MEMS (microelectromechanical systems); micro-opto-fluidics; micro optical sensor

Topical Collection Information

Dear Colleagues,

Optical microelectromechanical systems (MEMS), also known as microoptoelectromechanical systems (MOEMS) or optical microsystems, are devices or systems that interact with light via actuation or sensing at a micron or millimeter scale. Optical MEMS have had enormous commercial success, being utilized in projectors, displays, and fiberoptic communications. The best-known example is Texas Instruments’ digital micromirror devices (DMDs).

The development of optical MEMS was seriously impeded by the Telecom Bubble in 2000. Fortunately, DMDs grew their market size even in that economic downturn. Meanwhile, in the last one-and-a-half decades, the optical MEMS market has been slowly but steadily recovering. During this time span, there has been a major technological the shift from thin-film polysilicon microstructures to single-crystal silicon microstructures. In particular, the last few years have seen cloud data centers demand large-port optical cross connects (OXCs), autonomous driving require miniature LiDAR, and virtual reality/augmented reality (VR/AR) have need for tiny optical scanners. This is a new wave of opportunities for optical MEMS.

Furthermore, several research institutes around the world have been developing MOEMS devices for extreme applications (very fine tailoring of light beam in terms of phase, intensity, or wavelength) and/or extreme environments (vacuum, cryogenic temperatures) for many years. Accordingly, this Topical Collection seeks to showcase research papers, short communications, and review articles that focus on (1) novel design, fabrication, control, and modeling of optical MEMS devices based on all kinds of actuation/sensing mechanisms; and (2) new developments related to the application of optical MEMS devices of any kind in consumer electronics, optical communications, industry, biology, medicine, agriculture, physics, astronomy, space, or defense.

Prof. Dr. Huikai Xie
Prof. Dr. Frederic Zamkotsian
Prof. Dr. Yoshihiro Taguchi
Collection Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the collection website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.


  • micromirrors
  • microlenses
  • tunable lenses
  • metalenses
  • microgratings
  • microbolometers
  • endomicroscopy
  • microspectrometers
  • beam steering
  • optical phased arrays
  • optical switches
  • VOA
  • micro-LiDAR
  • OXC
  • DMD
  • optical MEMS sensors

Published Papers

This collection is now open for submission.
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