Advanced Technology in Micro and Nano Sensors: Fundamentals and Applications

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E:Engineering and Technology".

Deadline for manuscript submissions: closed (29 February 2024) | Viewed by 1317

Special Issue Editors


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Guest Editor
Institute of Sensor and Actuator Systems, TU Wien, 1040 Vienna, Austria
Interests: magnetic sensors; PiezoMEMS; electrochemical sensors; micro/nanoscale fabrications; signal processing; low- and high-frequency noise analysis for sensor signals

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Guest Editor
Department of Physics, Bar-Ilan University, Ramat-Gan 5290002, Israel
Interests: magnetic sensors; optical tweezers; sensor modeling; solid-state physics; interfacial phenomena in molecular systems; real-time confocal microscopy

Special Issue Information

Dear Colleagues,

Micro- and nanoscale sensors and electromechanical sensing systems (especially MEMS/NEMS) have potential applications in many dynamic fields, such as biological and chemical diagnostics, neuroscience, drug delivery, quantum communications, automobiles, storage devices, space technologies, acoustic transducers. In recent years, given the ever-increasing demand for advanced sensor technologies that enable Internet-of-Things (IoT) applications in homeland security, environmental monitoring, industrial process control, personal healthcare, etc., high-precision and sensitive sensors that could form smart sensor networks have been developed. The number of these devices is in the tens of billions, and the potential for breakthrough innovations is immense. The micro- and nanometer-scale and integrated novel designs of sensors and sensing systems will find new scientific and technical solutions to human and societal challenges in future engineering and technology. Innovative miniaturized platforms and associated fabrication techniques will evolve to interface and understand these engineered micro/nanosystems with various heterogeneous environments while achieving very high sensitivity, low noise, and/or high specificity. A combination of approaches from electrical engineering, chemistry, optics, and mechanical engineering with solid foundations from biology, materials science, applied physics, photonics, and analytical chemistry will advance the field of micro and nano engineering and technology. Therefore, the future development of nano–micro sensors and devices is particularly important. This Special Issue aims to discuss current issues related to emerging nano–micro sensors and devices and their prospective applications in various fields.

  • Novel micro- and nano-biosensing methods and technologies;
  • Electronic circuits/PCBs for MEMS and nanosensors;
  • Magnetic micro and nano sensors and actuators, including Hall-effect devices, magnetometers, magnetoimpedance sensors, magnetoresistance sensors, and magnetoelastic sensors;
  • Flexible and wearable sensors;
  • MEMS/nanogenerators for autonomous sensors and sensor nodes/networks.
  • Acoustic/electromagnetic/electrostatic interactions in sensor and actuator design;
  • Autonomous and embedded sensors: design, fabrication, assembly, and reliability;
  • Biosensors (electrical/optical and chemical) and their integration in MEMS, and microfluidic systems;
  • Sensor interconnects/interfaces and their testing;
  • Micro terahertz sensors;

Dr. Proloy Taran Das
Dr. Moty Schultz
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

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Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • micro and Nano magnetic sensors
  • micro/nano gas sensor
  • humidity sensors
  • flexible and wearable electronics
  • micro-/nano-electrochemical sensors
  • acoustic/electromagnetic/electrostatic interactions for self-powered sensors
  • biosensors
  • sensor integration to MEMS/microfluidic systems
  • electronic circuits/PCBs for N/MEMS
  • N/MEMS transducers based on graphene/graphene-like materials
  • N/MEMS sensors (electrostatic, electromagnetic, electrothermal, piezoelectric, etc.)
  • N/MEMS applications (optical communications, optical imaging, spectrometers, displays, space, etc.)
  • MEMS and nanogenerators for self-sustaining sensor nodes/networks
  • terahertz sensors

Published Papers (1 paper)

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Research

16 pages, 9628 KiB  
Article
Temperature Compensation of SAW Winding Tension Sensor Based on PSO-LSSVM Algorithm
by Yang Feng, Wenbo Liu, Haoda Yu, Keyong Hu, Shuifa Sun and Ben Wang
Micromachines 2023, 14(11), 2093; https://doi.org/10.3390/mi14112093 - 12 Nov 2023
Viewed by 841
Abstract
In this paper, a SAW winding tension sensor is designed and data fusion technology is used to improve its measurement accuracy. To design a high-measurement precision SAW winding tension sensor, the unbalanced split-electrode interdigital transducers (IDTs) were used to design the input IDTs [...] Read more.
In this paper, a SAW winding tension sensor is designed and data fusion technology is used to improve its measurement accuracy. To design a high-measurement precision SAW winding tension sensor, the unbalanced split-electrode interdigital transducers (IDTs) were used to design the input IDTs and output IDTs, and the electrode-overlap envelope was adopted to design the input IDT. To improve the measurement accuracy of the sensor, the particle swarm optimization-least squares support vector machine (PSO-LSSVM) algorithm was used to compensate for the temperature error. After temperature compensation, the sensitivity temperature coefficient αs of the SAW winding tension sensor was decreased by an order of magnitude, thus significantly improving its measurement accuracy. Finally, the error with actually applied tension was calculated, the same in the LSSVM and PSO-LSSVM. By multiple comparisons of the same sample data set overall, as well as the local accuracy of the forecasted results, which is 5.95%, it is easy to confirm that the output error predicted by the PSO-LSSVM model is 0.50%, much smaller relative to the LSSVM’s 1.42%. As a result, a new way for performing data analysis of the SAW winding tension sensor is provided. Full article
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