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Micromachines
Special Issues
Nonlinear Dynamics of MEMS/NEMS: Fundamentals and Applications
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Nonlinear Dynamics of MEMS/NEMS: Fundamentals and Applications

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E：Engineering and Technology".

Deadline for manuscript submissions: closed (31 December 2023) | Viewed by 3120

Special Issue Editors

Dr. Laura Ruzziconi

E-Mail Website
Guest Editor
Faculty of Engineering, eCampus University, 22060 Novedrate, Italy
Interests: nonlinear dynamics; dynamical integrity; MEMS/NEMS
Dr. Amal Z. Hajjaj

E-Mail Website
Guest Editor
Wolfson School of Mechanical, Electrical and Manufacturing Engineering, Loughborough University, Loughborough LE11 3TU, UK
Interests: MEMS/NEMS; resonators; mode coupling; filter application; sensors; nonlinear dynamics
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

MEMS/NEMS have been successfully applied in recent decades in a variety of different fields, such as industry, communications, and bioengineering. Special attention is increasingly devoted to nonlinear phenomena arising in MEMS/NEMS. Driving the response deep into the nonlinear regime, MEMS/NEMS can experience various nonlinear features and exhibit complex bifurcation structures. Significant research has recently been conducted where the nonlinear phenomena observed in MEMS/NEMS are deeply explored, theoretically and experimentally, including softening and hardening behavior, internal resonances, multistability, and chaotic dynamics. The complexity induced by the nonlinearities offers outstanding capabilities for applications. Several recent studies investigate in-depth the possibility of deliberately operating MEMS/NEMS in the nonlinear regime, showing their potential to fabricate novel devices capable of satisfying more sophisticated requirements and achieving superior performances.

Accordingly, this Special Issue seeks to showcase research papers, communications, and review articles that focus on theoretical and experimental research studies in MEMS/NEMS investigating nonlinear dynamic phenomena and their potential implementation in emerging applications.

Dr. Laura Ruzziconi
Dr. Amal Z. Hajjaj
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • nonlinear dynamics of MEMS/NEMS
  • theoretical modeling of MEMS/NEMS
  • nonlinear damping in MEMS/NEMS
  • modal coupling in MEMS/NEMS
  • control of MEMS/NEMS
  • MEMS/NEMS applications
  • MEMS energy harvester
  • MEMS/NEMS sensors, actuators, and switches

Published Papers (3 papers)

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Research

16 pages, 956 KiB  
Article
Parametric Amplification of Acoustically Actuated Micro Beams Using Fringing Electrostatic Fields
by Stella Lulinsky, Ben Torteman, Bojan R. Ilic and Slava Krylov
Micromachines 2024, 15(2), 257; https://doi.org/10.3390/mi15020257 - 09 Feb 2024
Viewed by 629
Abstract
We report on theoretical and experimental investigation of parametric amplification of acoustically excited vibrations in micromachined single-crystal silicon cantilevers electrostatically actuated by fringing fields. The device dynamics are analyzed using the Mathieu–Duffing equation, obtained using the Galerkin order reduction technique. Our experimental results [...] Read more.
We report on theoretical and experimental investigation of parametric amplification of acoustically excited vibrations in micromachined single-crystal silicon cantilevers electrostatically actuated by fringing fields. The device dynamics are analyzed using the Mathieu–Duffing equation, obtained using the Galerkin order reduction technique. Our experimental results show that omnidirectional acoustic pressure used as a noncontact source for linear harmonic driving is a convenient and versatile tool for the mechanical dynamic characterization of unpackaged, nonintegrated microstructures. The fringing field’s electrostatic actuation allows for efficient parametric amplification of an acoustic signal. The suggested amplification approach may have applications in a wide variety of micromechanical devices, including resonant sensors, microphones and microphone arrays, and hearing aids. It can be used also for upward frequency tuning. Full article
(This article belongs to the Special Issue Nonlinear Dynamics of MEMS/NEMS: Fundamentals and Applications)
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18 pages, 5414 KiB  
Article
Unsteady Pressure-Driven Electrokinetic Slip Flow and Heat Transfer of Power-Law Fluid through a Microannulus
by Shuyan Deng, Ruiqing Bian and Jiacheng Liang
Micromachines 2023, 14(2), 371; https://doi.org/10.3390/mi14020371 - 01 Feb 2023
Cited by 1 | Viewed by 868
Abstract
To guarantee the transporting efficiency of microdevices associated with fluid transportation, mixing, or separation and to promote the heat transfer performance of heat exchangers in microelectronics, the hydrodynamic behaviors at unsteady and steady states, as well as the thermal characteristics at the steady [...] Read more.
To guarantee the transporting efficiency of microdevices associated with fluid transportation, mixing, or separation and to promote the heat transfer performance of heat exchangers in microelectronics, the hydrodynamic behaviors at unsteady and steady states, as well as the thermal characteristics at the steady state in a pressure-driven electrokinetic slip flow of power-law fluid in a microannulus are studied. To present a more reliable prediction, the slip phenomenon at walls and nonlinear rheology of liquid are incorporated. The modified Cauchy momentum equation applicable to all time scales and energy equations, are analytically solved in the limiting case of a Newtonian fluid and numerically solved for power-law fluids. The transient velocity profile, time evolution of flow rate, temperature profile, and heat transfer rate are computed at different flow behavior indices, electrokinetic width, slip lengths, and Brinkman numbers, thereby, the coupling effect of nonlinear rheology, slip hydrodynamics, and annular geometry on flow and thermal behaviors is explored. The unsteady flow takes a longer time to achieve the steady state for shear thinning fluids or greater slip lengths. The flow behavior index and slip length play a significant role in the flow rate and heat transfer performance. The relevant discussion can serve as a theoretical guide for the operation and thermal management of annular geometry-related flow actuation systems. Full article
(This article belongs to the Special Issue Nonlinear Dynamics of MEMS/NEMS: Fundamentals and Applications)
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16 pages, 2291 KiB  
Article
Internal Resonance of the Coupling Electromechanical Systems Based on Josephson Junction Effects
by Canchang Liu, Lijun Li and Yirui Zhang
Micromachines 2022, 13(11), 1958; https://doi.org/10.3390/mi13111958 - 11 Nov 2022
Viewed by 1052
Abstract
The internal resonances of the coupling vibration among electro-dynamic modes of an NEMS are studied for the coupling resonators connected on a Josephson junction. The methodology adopted involves coupling a resonator connected on a Josephson junction. The mathematical model of the coupled system [...] Read more.
The internal resonances of the coupling vibration among electro-dynamic modes of an NEMS are studied for the coupling resonators connected on a Josephson junction. The methodology adopted involves coupling a resonator connected on a Josephson junction. The mathematical model of the coupled system is then obtained by considering the regulatory nonlinear effect of the phase difference of that Josephson junction. The resulting dynamic differential equation is deduced by considering the nonlinear terms of the Josephson junction and the nanobeam. The multi-scale method is then used to obtain the 1:1:1 resonant amplitude–frequency response equation of the coupled electromechanical system. The influence of the phase difference of the Josephson junction, magnetic field, external excitation and other factors are analyzed based on the internal resonant amplitude of the coupled system. The simulation results illustrate that the changes in the values of the magnetic field, excitation amplitude and divided resistances can lead to a remarkable change in the values of the nanobeam frequency and amplitude. The internal resonance principle is used to generate a mutual conversion and amplification among electrical signals and mechanical signals. This research provides a theoretical framework and a numerical approach for improving the sensitivity of magnetic quality detection. Full article
(This article belongs to the Special Issue Nonlinear Dynamics of MEMS/NEMS: Fundamentals and Applications)
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